DE68900380D1 - Turbomolekularpumpe. - Google Patents

Turbomolekularpumpe.

Info

Publication number
DE68900380D1
DE68900380D1 DE8989111755T DE68900380T DE68900380D1 DE 68900380 D1 DE68900380 D1 DE 68900380D1 DE 8989111755 T DE8989111755 T DE 8989111755T DE 68900380 T DE68900380 T DE 68900380T DE 68900380 D1 DE68900380 D1 DE 68900380D1
Authority
DE
Germany
Prior art keywords
rotor
piston
bore
stator
chambers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8989111755T
Other languages
German (de)
English (en)
Inventor
Jacques Long
Denis Perrillat-Amede
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Application granted granted Critical
Publication of DE68900380D1 publication Critical patent/DE68900380D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Steroid Compounds (AREA)
DE8989111755T 1988-06-29 1989-06-28 Turbomolekularpumpe. Expired - Fee Related DE68900380D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8808738A FR2633675B1 (fr) 1988-06-29 1988-06-29 Pompe turbomoleculaire

Publications (1)

Publication Number Publication Date
DE68900380D1 true DE68900380D1 (de) 1991-12-05

Family

ID=9367850

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8989111755T Expired - Fee Related DE68900380D1 (de) 1988-06-29 1989-06-28 Turbomolekularpumpe.

Country Status (6)

Country Link
EP (1) EP0348931B1 (fi)
JP (1) JPH0278798A (fi)
AT (1) ATE69088T1 (fi)
DE (1) DE68900380D1 (fi)
FI (1) FI893103A (fi)
FR (1) FR2633675B1 (fi)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0508013D0 (en) * 2005-04-20 2005-05-25 Boc Group Plc Vacuum pump
JP6079052B2 (ja) * 2012-08-24 2017-02-15 株式会社島津製作所 真空ポンプ
DE102012220040A1 (de) * 2012-11-02 2014-05-08 Pfeiffer Vacuum Gmbh Vakuumpumpe
US10022531B2 (en) 2016-01-21 2018-07-17 Teva Medical Ltd. Luer lock adaptor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2954845A (en) * 1957-06-11 1960-10-04 Salvador A Minera Temperature actuated lubricating device
GB1487268A (en) * 1976-02-25 1977-09-28 Telehoist Ltd Methods of lubricating
DE2853742A1 (de) * 1978-12-13 1980-10-02 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe
NL8601666A (nl) * 1986-06-25 1988-01-18 Skf Ind Trading & Dev Smeerinrichting.

Also Published As

Publication number Publication date
ATE69088T1 (de) 1991-11-15
FR2633675B1 (fr) 1991-02-15
JPH0278798A (ja) 1990-03-19
FI893103A (fi) 1989-12-30
FI893103A0 (fi) 1989-06-26
FR2633675A1 (fr) 1990-01-05
EP0348931A1 (fr) 1990-01-03
EP0348931B1 (fr) 1991-10-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee