DE68900380D1 - TURBOMOLECULAR PUMP. - Google Patents

TURBOMOLECULAR PUMP.

Info

Publication number
DE68900380D1
DE68900380D1 DE8989111755T DE68900380T DE68900380D1 DE 68900380 D1 DE68900380 D1 DE 68900380D1 DE 8989111755 T DE8989111755 T DE 8989111755T DE 68900380 T DE68900380 T DE 68900380T DE 68900380 D1 DE68900380 D1 DE 68900380D1
Authority
DE
Germany
Prior art keywords
rotor
piston
bore
stator
chambers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8989111755T
Other languages
German (de)
Inventor
Jacques Long
Denis Perrillat-Amede
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Application granted granted Critical
Publication of DE68900380D1 publication Critical patent/DE68900380D1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Steroid Compounds (AREA)

Abstract

Turbomolecular pump comprising a rotor (40) and a stator (1, 42), the rotor being supported in the stator by bearings (3, 4), the stator (1, 42), in its part carrying the said bearings being pierced with a bore (6) equipped with a piston (13) delimiting with the said bore chambers (16, 17) forming grease reserves, at least one radial channel (9, 10) extending from each of these chambers, the said piston (13) possessing towards its outer end, means (14) for allowing it to penetrate into the said bore (6), characterised in that each channel (9, 10) terminates opposite a threaded cylindrical bearing surface (31, 32) integral with the rotor (40) and immediately adjacent to a supporting bearing (3, 4) of the rotor, bringing the grease axially to the said bearing along a circular ring, the said piston (13) being equipped with a gasket (25) located between the chambers (16, 17) and its outer end (26), the said means making it possible for the piston to penetrate into the bore comprising a drive means (20) activated periodically. <IMAGE>
DE8989111755T 1988-06-29 1989-06-28 TURBOMOLECULAR PUMP. Expired - Fee Related DE68900380D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8808738A FR2633675B1 (en) 1988-06-29 1988-06-29 TURBOMOLECULAR PUMP

Publications (1)

Publication Number Publication Date
DE68900380D1 true DE68900380D1 (en) 1991-12-05

Family

ID=9367850

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8989111755T Expired - Fee Related DE68900380D1 (en) 1988-06-29 1989-06-28 TURBOMOLECULAR PUMP.

Country Status (6)

Country Link
EP (1) EP0348931B1 (en)
JP (1) JPH0278798A (en)
AT (1) ATE69088T1 (en)
DE (1) DE68900380D1 (en)
FI (1) FI893103A (en)
FR (1) FR2633675B1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0508013D0 (en) * 2005-04-20 2005-05-25 Boc Group Plc Vacuum pump
JP6079052B2 (en) * 2012-08-24 2017-02-15 株式会社島津製作所 Vacuum pump
DE102012220040A1 (en) * 2012-11-02 2014-05-08 Pfeiffer Vacuum Gmbh vacuum pump
US10022531B2 (en) 2016-01-21 2018-07-17 Teva Medical Ltd. Luer lock adaptor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2954845A (en) * 1957-06-11 1960-10-04 Salvador A Minera Temperature actuated lubricating device
GB1487268A (en) * 1976-02-25 1977-09-28 Telehoist Ltd Methods of lubricating
DE2853742A1 (en) * 1978-12-13 1980-10-02 Leybold Heraeus Gmbh & Co Kg Turbo-molecular vacuum pump with two=part rotor spindle - has solid lubricant ejected from spindle interior towards top and bottom bearings
NL8601666A (en) * 1986-06-25 1988-01-18 Skf Ind Trading & Dev LUBRICATION DEVICE.

Also Published As

Publication number Publication date
FI893103A0 (en) 1989-06-26
JPH0278798A (en) 1990-03-19
ATE69088T1 (en) 1991-11-15
EP0348931B1 (en) 1991-10-30
FR2633675B1 (en) 1991-02-15
EP0348931A1 (en) 1990-01-03
FI893103A (en) 1989-12-30
FR2633675A1 (en) 1990-01-05

Similar Documents

Publication Publication Date Title
ES449387A1 (en) Rotary pump assembly
ES2074071T3 (en) ROTATION DEVICE THAT SUPPORTS A POLYGONAL MIRROR.
ES2060165T3 (en) RETENTION SYSTEM AND LUBRICATION OF THE BEARINGS OF A TURBOS-FEEDER.
DE3763795D1 (en) BEARING DEVICE WITH AN ACTIVE LUBRICATION SPACE, WHICH IS ADJUSTED BETWEEN TWO AXIAL DIFFERENTIAL HYDRODYNAMIC BEARINGS.
IT1135171B (en) SUPPORT OF A SHAFT OF A MACHINE ELEMENT
DE3864730D1 (en) DRIVE AND BEARING ARRANGEMENT FOR THE CUTTING HEAD OF A CIRCULAR CUTTING MACHINE.
SE8406258L (en) STORAGE LUBRICATION DEVICE
ATE69088T1 (en) TURBOMOLECULAR PUMP.
EP0844408A3 (en) Fluid bearing apparatus
JPS57151093A (en) Hydraulic machine
GB1461934A (en) Dynamoelectric machines end frame assemblies therefor and method of manufacturing such assemblies
EP0165689A3 (en) An automatic lubricating device for machine shafts
SU1672029A1 (en) Hydrodynamic drive with rolling rotor
JPS57212384A (en) Compressor device
IE842433L (en) Bearing assembly
GB1533355A (en) Bearing assembly
SU1413262A1 (en) Guide bearing of hydraulic machine
SU907278A1 (en) Turbomachine sliding-contact support bearings
FR2355161B3 (en)
SU1618654A1 (en) Knife roller support
ATE7070T1 (en) RADIAL BEARING.
SU1620715A1 (en) Bearing assembly
SU452688A1 (en) Hydrostatic bearing
RU1789513C (en) Two-rotor aerator
SU616445A1 (en) Sliding bearing

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee