EP0314819A1 - Pompe à vide à deux arbres avec au moins un passage de liaison entre les chambres des paliers - Google Patents

Pompe à vide à deux arbres avec au moins un passage de liaison entre les chambres des paliers Download PDF

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Publication number
EP0314819A1
EP0314819A1 EP87116069A EP87116069A EP0314819A1 EP 0314819 A1 EP0314819 A1 EP 0314819A1 EP 87116069 A EP87116069 A EP 87116069A EP 87116069 A EP87116069 A EP 87116069A EP 0314819 A1 EP0314819 A1 EP 0314819A1
Authority
EP
European Patent Office
Prior art keywords
bearing
pump
chamber
outside
disks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP87116069A
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German (de)
English (en)
Other versions
EP0314819B1 (fr
Inventor
Heinz Frings
Hans-Peter Dr. Kabelitz
Ralf Steffens
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to DE8787116069T priority Critical patent/DE3774711D1/de
Priority to EP19870116069 priority patent/EP0314819B1/fr
Publication of EP0314819A1 publication Critical patent/EP0314819A1/fr
Application granted granted Critical
Publication of EP0314819B1 publication Critical patent/EP0314819B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0021—Systems for the equilibration of forces acting on the pump
    • F04C29/0028—Internal leakage control

Definitions

  • the invention relates to a twin-shaft vacuum pump with a suction chamber housing ring, with two bearing disks attached to it laterally, each with a suction chamber sealing ring between the end faces of the housing ring and the bearing disks, with bearing chamber housings flanged to the bearing disks from the outside and with at least one penetrating the bearing disks , line connecting the storage chambers.
  • This line has the task of avoiding pressure differences in the oil-containing storage chambers. It is expedient to provide two connecting lines, one of which is arranged above and the other below the oil level in the bearing chambers. Pressure and oil level compensation are then ensured.
  • a two-shaft vacuum pump of this type is known from DE-PS 19 39 717.
  • two channels are provided, one of which is designed as a bore in the housing ring and the other as a gas and oil-tight tube guided through the Roots work chamber.
  • the oil escaping from the leaks gets into the scooping chamber and contaminates the pumped medium.
  • twin-shaft vacuum pumps, especially Roots pumps are preferably used where oil-free pumping is absolutely required. In the event of a leak in the area of the connecting lines passing through the bearing washers between the lateral bearing chambers, the pump loses its ability to deliver oil-free.
  • the object of the present invention is to ensure that the scooping chamber is free of oil even in the event of a leak in the area of the passage lines of the connecting lines through the bearing washers.
  • this object is achieved in that the point of passage of the connecting line through the bearing washers lies outside of the suction chamber sealing rings. If leaks occur in a twin-shaft vacuum pump designed in this way in the area of the passage point of the connecting lines, the pumping chamber sealing rings nevertheless prevent oil from escaping into the pumping chamber. The leak oil occurs to the outside, which has the advantage that the leak can be recognized early. With the twin-shaft vacuum pump according to the state of the art, it was only possible to detect a leak from the contamination of the pumped medium.
  • passage points of the connecting line are expediently also outside of the sealing rings which seal the bearing chamber housings from the bearing disks. This measure and also the arrangement of the passage points of the connecting line in one of the corners of the cross section of the pump enable a compact construction. "Corners” are to be understood to mean those areas which lie between the oval cross-sectional area and the circumscribed rectangle.
  • connecting lines between the storage chambers, the passage points of which are each arranged in corners arranged diagonally to one another.
  • one of the connecting channels is always below and the second connecting channel above the oil level. This ensures pressure and oil level compensation.
  • the connecting lines are not - as in the prior art - on the main axes of the scoop oval, but in the corners, so that even with two connecting lines a more compact design is possible.
  • the arrangement of one or both connecting lines in the corners of the pump also has the advantage that a pipe forming the connecting lines does not have to be led through the inlet connection of the pump, as in the prior art.
  • a tube of this type In the inlet port of the pump, a tube of this type must be designed so that it can withstand the often aggressive fluids. This requirement does not exist in the pump according to the invention, since the connecting pipes do not penetrate the scoop space or inlet or outlet connection.
  • the two-shaft pump 1 (Roots pump) shown in the figures essentially comprises the following components: pump chamber housing ring 2, bearing disks 3 and 4 and rotors 5 and 6 (FIG. 2), which are rotatably supported with their shaft ends 7 and 8 in the bearing disks 3 and 4 are.
  • pump chamber housing ring 2 In the scooping chamber 9 there are two rotors each with a two-shaft vacuum pump, which are approximately 8-shaped (Roots pump), claw-shaped (Northey pump). can be helical (screw pump) or similar. Overall, there is an essentially oval cross section. In the bearing disks 3 and 4, two stub shafts 7 and 8 are supported.
  • bearing chambers 11 and 12 are formed by bearing chamber housings 13 and 14, respectively, from the outside are attached to the bearing flange 3 or 4.
  • the bearing chambers 11 and 12 are partially filled with oil and, in addition to the bearings 15 and 16, contain synchronization wheels 17, spray disks 18, 19 etc.
  • one of the stub shafts 8 is connected to the drive shaft 21.
  • Screws 22, of which a total of twelve are arranged distributed over the circumference, are used to produce the connections between the pump chamber housing ring 2 and the bearing disks 3, 4 on the one hand and between the bearing disks 3, 4 and the bearing chamber housings 13, 14 on the other hand.
  • the pump chamber seals 23, 24 Between the end faces of the pump chamber housing 2 and the bearing disks 3, 4 are the pump chamber seals 23, 24.
  • the seals 25, 26 are arranged between the bearing disks 3, 4 and the bearing chamber housings 13, 14.
  • the storage chambers 11, 12 are connected to one another via the line generally designated 31.
  • This line 31 comprises a pipe 32 which is guided outside the scoop housing ring 2 and whose end faces end in the region of the sealing surfaces between the bearing chamber housings 13 and 14 and the bearing disks 3 and 4, respectively.
  • the flanges of the bearing chamber housings 13, 14 are provided with bores 33 and 34 concentrically with the pipe 32.
  • the sealing rings 35 and 36 serve to seal the end faces of the tube 32 to the outside.
  • the passage points of the tube 32 through the bearing disks 3 and 4 are outside the scoop seals 23 and 24. This ensures that in the event of a leak in the connecting line 31, for. B. in the area of the seals 35, 36, emerging oil can not get into the scooping chamber 9. Furthermore, the Passage points of the tube 32 through the bearing disks 3, 4 also outside of the seals 25 and 26 between the bearing disks 3, 4 and the bearing chamber housings 13, 14.
  • FIG. 2 shows a section at the line II-II in FIG. 1. It lies in one of the lower corners of the essentially oval cross section.
  • the bearing chamber housing 13 is provided with a corresponding shape in this area.
  • FIG. 2 shows yet another connecting line 37, specifically in the corner diagonal to the corner with the connecting line 31.
  • Fig. 1 can be viewed as a longitudinal section through the Roots pump 1 along the lines I-I in Fig. 2.
  • the connecting line 37 is therefore not visible in FIG. 1.
  • the arrangement of the connecting lines 31, 37 in corners arranged diagonally to one another has the effect that the connecting line 31 lies below the oil level in the bearing chambers 11, 12, while the connecting line 37 is located above the oil level.
  • the connection flanges 38, 39 shown in FIG. 2 show that the Roots pump 2 shown has a vertical direction of passage. If the Roots pump is rotated by 90 ° about its longitudinal axis in order to achieve a horizontal passage position, then one of the two connecting lines 31, 37 is also arranged below and the other above the oil level in the bearing chambers 11, 12.
  • the invention is applicable to all twin-shaft pumps - regardless of the working principle - in which pressure and / or oil compensation between the side chambers is desired.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP19870116069 1987-10-31 1987-10-31 Pompe à vide à deux arbres avec au moins un passage de liaison entre les chambres des paliers Expired - Lifetime EP0314819B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE8787116069T DE3774711D1 (de) 1987-10-31 1987-10-31 Zweiwellenvakuumpumpe mit mindestens einer verbindungsleitung zwischen den lagerkammern.
EP19870116069 EP0314819B1 (fr) 1987-10-31 1987-10-31 Pompe à vide à deux arbres avec au moins un passage de liaison entre les chambres des paliers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19870116069 EP0314819B1 (fr) 1987-10-31 1987-10-31 Pompe à vide à deux arbres avec au moins un passage de liaison entre les chambres des paliers

Publications (2)

Publication Number Publication Date
EP0314819A1 true EP0314819A1 (fr) 1989-05-10
EP0314819B1 EP0314819B1 (fr) 1991-11-21

Family

ID=8197411

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19870116069 Expired - Lifetime EP0314819B1 (fr) 1987-10-31 1987-10-31 Pompe à vide à deux arbres avec au moins un passage de liaison entre les chambres des paliers

Country Status (2)

Country Link
EP (1) EP0314819B1 (fr)
DE (1) DE3774711D1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1054185C (zh) * 1994-02-10 2000-07-05 株式会社东芝 密闭形压缩机
US6414874B2 (en) 1992-12-03 2002-07-02 Fujitsu Limited Nonvolatile semiconductor memory device having electrically and collectively erasable characteristics
DE102010045880A1 (de) * 2010-09-17 2012-03-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE112008001237B4 (de) * 2007-05-18 2015-09-24 Edwards Ltd. Vakuumpumpe

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2014932A (en) * 1933-03-17 1935-09-17 Gen Motors Corp Roots blower
DE1939717B2 (de) * 1969-08-05 1978-03-23 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Waelzkolbenpumpe
EP0030275A1 (fr) * 1979-12-05 1981-06-17 Karl Prof. Dr.-Ing. Bammert Compresseur, en particulier compresseur à vis avec circuit de lubrification
GB1599413A (en) * 1978-04-14 1981-09-30 Carveth D Oil-injected rotary compressors
GB2115876A (en) * 1982-03-02 1983-09-14 Dunham Bush Inc Lubrication in a meshing-screw gas-compressor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2014932A (en) * 1933-03-17 1935-09-17 Gen Motors Corp Roots blower
DE1939717B2 (de) * 1969-08-05 1978-03-23 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Waelzkolbenpumpe
GB1599413A (en) * 1978-04-14 1981-09-30 Carveth D Oil-injected rotary compressors
EP0030275A1 (fr) * 1979-12-05 1981-06-17 Karl Prof. Dr.-Ing. Bammert Compresseur, en particulier compresseur à vis avec circuit de lubrification
GB2115876A (en) * 1982-03-02 1983-09-14 Dunham Bush Inc Lubrication in a meshing-screw gas-compressor

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6414874B2 (en) 1992-12-03 2002-07-02 Fujitsu Limited Nonvolatile semiconductor memory device having electrically and collectively erasable characteristics
US6563738B2 (en) 1992-12-03 2003-05-13 Fujitsu Limited Nonvolatile semiconductor memory device having electrically and collectively erasable characteristics
US6611464B2 (en) * 1992-12-03 2003-08-26 Fujitsu Limited Nonvolatile semiconductor memory device having electrically and collectively erasable characteristics
US6618288B2 (en) 1992-12-03 2003-09-09 Fujitsu Limited Nonvolatile semiconductor memory device having electrically and collectively erasable characteristics
US6646920B2 (en) 1992-12-03 2003-11-11 Fujitsu Limited Nonvolatile semiconductor memory device having electrically and collectively erasable characteristics
CN1054185C (zh) * 1994-02-10 2000-07-05 株式会社东芝 密闭形压缩机
DE112008001237B4 (de) * 2007-05-18 2015-09-24 Edwards Ltd. Vakuumpumpe
DE102010045880A1 (de) * 2010-09-17 2012-03-22 Pfeiffer Vacuum Gmbh Vakuumpumpe

Also Published As

Publication number Publication date
EP0314819B1 (fr) 1991-11-21
DE3774711D1 (de) 1992-01-02

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