DE3774711D1 - Zweiwellenvakuumpumpe mit mindestens einer verbindungsleitung zwischen den lagerkammern. - Google Patents

Zweiwellenvakuumpumpe mit mindestens einer verbindungsleitung zwischen den lagerkammern.

Info

Publication number
DE3774711D1
DE3774711D1 DE8787116069T DE3774711T DE3774711D1 DE 3774711 D1 DE3774711 D1 DE 3774711D1 DE 8787116069 T DE8787116069 T DE 8787116069T DE 3774711 T DE3774711 T DE 3774711T DE 3774711 D1 DE3774711 D1 DE 3774711D1
Authority
DE
Germany
Prior art keywords
vacuum pump
bearing
bearing chambers
connection line
shaft vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787116069T
Other languages
English (en)
Inventor
Heinz Frings
Hans-Peter Kabelitz
Ralf Steffens
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Application granted granted Critical
Publication of DE3774711D1 publication Critical patent/DE3774711D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0021—Systems for the equilibration of forces acting on the pump
    • F04C29/0028—Internal leakage control
DE8787116069T 1987-10-31 1987-10-31 Zweiwellenvakuumpumpe mit mindestens einer verbindungsleitung zwischen den lagerkammern. Expired - Fee Related DE3774711D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19870116069 EP0314819B1 (de) 1987-10-31 1987-10-31 Zweiwellenvakuumpumpe mit mindestens einer Verbindungsleitung zwischen den Lagerkammern

Publications (1)

Publication Number Publication Date
DE3774711D1 true DE3774711D1 (de) 1992-01-02

Family

ID=8197411

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787116069T Expired - Fee Related DE3774711D1 (de) 1987-10-31 1987-10-31 Zweiwellenvakuumpumpe mit mindestens einer verbindungsleitung zwischen den lagerkammern.

Country Status (2)

Country Link
EP (1) EP0314819B1 (de)
DE (1) DE3774711D1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5452251A (en) * 1992-12-03 1995-09-19 Fujitsu Limited Semiconductor memory device for selecting and deselecting blocks of word lines
JP3408309B2 (ja) * 1994-02-10 2003-05-19 株式会社東芝 密閉形コンプレッサならびにこのコンプレッサを用いた冷凍装置
GB0709529D0 (en) * 2007-05-18 2007-06-27 Boc Group Plc Vacuum pump
DE102010045880A1 (de) * 2010-09-17 2012-03-22 Pfeiffer Vacuum Gmbh Vakuumpumpe

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2014932A (en) * 1933-03-17 1935-09-17 Gen Motors Corp Roots blower
DE1939717B2 (de) * 1969-08-05 1978-03-23 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Waelzkolbenpumpe
GB1599413A (en) * 1978-04-14 1981-09-30 Carveth D Oil-injected rotary compressors
DE2948993A1 (de) * 1979-12-05 1981-06-11 Karl Prof.Dr.-Ing. 3000 Hannover Bammert Verdichter, insbesondere schraubenverdichter, mit schmiermittelkreislauf
US4439121A (en) * 1982-03-02 1984-03-27 Dunham-Bush, Inc. Self-cleaning single loop mist type lubrication system for screw compressors

Also Published As

Publication number Publication date
EP0314819B1 (de) 1991-11-21
EP0314819A1 (de) 1989-05-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee