EP0205819B1 - Système pour sécher sans taches des objets à surfaces humectées par un liquide - Google Patents

Système pour sécher sans taches des objets à surfaces humectées par un liquide Download PDF

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Publication number
EP0205819B1
EP0205819B1 EP19860105655 EP86105655A EP0205819B1 EP 0205819 B1 EP0205819 B1 EP 0205819B1 EP 19860105655 EP19860105655 EP 19860105655 EP 86105655 A EP86105655 A EP 86105655A EP 0205819 B1 EP0205819 B1 EP 0205819B1
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EP
European Patent Office
Prior art keywords
objects
blowing
container
treatment liquid
order
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP19860105655
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German (de)
English (en)
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EP0205819A1 (fr
Inventor
Hans René Suter
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Roag AG
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Roag AG
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/005—Drying solid materials or objects by processes not involving the application of heat by dipping them into or mixing them with a chemical liquid, e.g. organic; chemical, e.g. organic, dewatering aids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B9/00—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards

Definitions

  • the present invention relates to a method and a device for spot-free drying of objects with a smooth surface.
  • the drying in question here is the last stage of a cleaning process for objects whose surfaces have a high degree of purity at the end of the cleaning process.
  • This high degree of purity is a surface quality such as is required for a coating or sputtering.
  • Deionized water is generally used for rinsing.
  • the drying is also carried out using chlorinated or fluorinated hydrocarbons, the object drying completely after being left in steam from chlorinated or fluorinated hydrocarbon when it is pulled out.
  • dewatering must take place before the actual drying.
  • the object is dewatered either with isopropanol, dewatering fluid or with solvents containing additives before drying. Drying is carried out using the drying processes known per se with chlorinated or fluorinated hydrocarbons. After pulling out of the steam zone at the end of the process, the item is completely dry.
  • the drying based on evaporation i.e. by means of an infrared oven or with a heated medium, cannot be applied to an object with surfaces that need to be cleaned to a high degree because the remaining dry stains and residual dirt on the surface cannot be excluded, or is the rule.
  • the reasons for this are the contaminated ambient air, the qualitatively inadequate degree of purity of the aqueous treatment medium and the drying medium, and the long treatment time required for the drying process.
  • the substrate surface is blown on. This blowing can take place, for example, with purified nitrogen or purified air.
  • a drying process is used that combines displacement and evaporation.
  • the silicon wafers are cleaned in a solvent made of water, hydrogen peroxide and ammonium hydroxide solution, which is subjected to sound energy in the megahertz range, then rinsed with deionized water and finally in a spatially separated, separate drying station in a first phase with filtered room air for one minute is blown at a high flow rate exclusively from above in order to blow off most of the wetted water and then in a second phase for two to three minutes with a filtered room air heated to 100 ° C to completely dry the silicon wafers.
  • a solvent made of water, hydrogen peroxide and ammonium hydroxide solution, which is subjected to sound energy in the megahertz range, then rinsed with deionized water and finally in a spatially separated, separate drying station in a first phase with filtered room air for one minute is blown at a high flow rate exclusively from above in order to blow off most of the wetted water and then in a second phase for two to three minutes with a filtered room air heated to 100 °
  • the water film thickness is reduced by centrifugation.
  • the centrifugal effect removes the water from the surfaces of the object to be dried.
  • This method also known as dry spin, has the disadvantage that only flat and disc-shaped objects, e.g. Semiconductor substrates can be dried perfectly.
  • the invention has for its object to provide a method for spot-free drying of objects in which, while avoiding the disadvantages mentioned, the object to be dried is kept in a defined purity by rapid and direct transition from a liquid to a gaseous treatment medium and by displacement the liquid treatment medium is dried by blowing with the gaseous treatment medium.
  • a device for spot-free drying of objects is characterized according to the invention by the features of claim 11.
  • pure nitrogen, ultra-pure nitrogen, noble gas, pure air or ultra-pure air is used as the gaseous treatment medium. This has the advantage that contamination of the object during the drying process can be completely ruled out.
  • the object is blown at a pressure in the range of 1-8 bar.
  • the bath level can be done by draining the treatment liquid or by moving the container containing the treatment liquid. This can prevent splashes from treatment liquid being generated by the onset of the blowing. It is advantageous if the bathing level is lowered within a period of approx. 0.1-5 seconds.
  • objects of a similar, but not the same, geometric configuration such as e.g. Eyeglass lenses from prescription production can be dried quickly because the liquid forced to the edge by the blowing in one direction is blown off the edge by the blowing in the other direction.
  • the blowing device has a first blowing element, which is fixed with respect to the objects to be dried, and a second blowing element, which can be moved back and forth with respect to the objects to be dried, in order to selectively blow the objects to be dried from two directions, being the rays from the first and the second blowing element intersect at a certain angle.
  • the first and second blowing elements can be arranged so as to be movable or offset in time with respect to the object to be dried, so that the jets from the blowing elements sweep over the objects in order to selectively blow the objects from two directions. This drying from two directions advantageously reduces the drying time.
  • the blowing member is an elongated hollow body, the outlet opening or outlet openings extending over most of the length of the hollow body. This configuration advantageously allows a plurality of objects arranged side by side to be dried simultaneously.
  • the bath has a container which is arranged in a tub, the upper part of the container consists of two members which are pivotably arranged on the lower part in order to close the container and the third device is with the lower part of the container connected to move the container up and down, the trough being provided with stops which are each movable in engagement with the organs in order to open the container during the upward movement and to close it during the downward movement.
  • This configuration allows items to be dried in batches, the treatment liquid being able to be used for a number of drying processes.
  • the device for moving the objects to be dried has a driving means which is mounted on the holding device, a driven means on which the objects to be dried are arranged and which is movably mounted in the holding device, and a transmission means connecting the driving means and the driven means.
  • FIGS. 1 and 2 essentially serve to dry flat objects, in particular spectacle lenses, and differ in the design of the blowing device.
  • the device contains a container 1 with an upper part 2 and a lower part 3, which have an essentially circular cross section and different inside diameters.
  • the container 1 is mounted upright on a frame 4.
  • the container 1 is open at the top and closed at the bottom by a shut-off device 5.
  • An overflow opening 6 is provided on the upper section of the lower part 3 in order to keep the liquid level of a treatment liquid filled into the lower part at a constant level.
  • In the lower part 3 of the container 1 there is also a nozzle 7 for filling the treatment liquid, which opens into the lower part 3 at a level below the liquid level.
  • the treatment liquid is located in a storage container 8, which is connected to the nozzle 7 via a pipeline 9.
  • a shut-off valve 10 is installed in this pipeline 9.
  • the lower container part 1 is formed from the cylindrical section 20 and a conical section 21, which tapers towards the outlet opening 22 of the container 1 and determines the outlet opening 22.
  • the section 21 is designed such that the cross-sectional area of the outlet opening 22 is substantially equal to the cross-sectional area of the section 20. It is pointed out that the lower container part '3 can also consist of a single cylindrical section.
  • the shut-off device 5 already mentioned is a conventional gate valve 23 which is mounted on the one hand on a flange 24 on the lower part 3 and on the other hand on a flange 25 of the pipeline 12.
  • the gate valve 23 is provided with a drive member 26.
  • a nozzle 27 is provided in order to generate an atmosphere above the liquid level, which consists of a gaseous treatment medium.
  • This nozzle 27 is movably arranged on a holding device 28 such that the height of the nozzle can be adjusted with respect to the liquid level.
  • the holding device 28 is fastened to the inside of the upper container part 2 by means of holders 29.
  • a carriage 30 is mounted on the frame 4 and can be moved in the directions indicated by the arrow A.
  • a frame 31 is mounted on the carriage 30 in a self-supporting manner so that it lies above the opening of the container 1.
  • a holding device 32 for the objects to be dried is attached or fastened to the frame.
  • the design of the holding device depends on the geometric shape of the object to be dried and is intended for spectacle lenses in the present case.
  • the holding device 32 contains two rods 33 which can be attached to the frame 31 at one end and two plates 34 which are fastened to the other ends of the rods 33.
  • the plates 34 are U-shaped.
  • two struts 35 are fastened parallel to one another, which serve as a support for the lenses 36 to be dried and keep the two plates 34 at a distance.
  • the holder of the lenses 36 can be designed in accordance with that described in US Pat. No. 4,432,380.
  • the device is also provided with a device for blowing on the objects to be dried.
  • a device for blowing on the objects to be dried An embodiment of such a device is shown in Figures 1 and 2.
  • This device contains two fixed blowing elements 40, 41, which are mounted parallel to each other in the upper container part 2, so that they are always above the liquid level and two movable blowing elements 42, 43, which are at a certain distance above the fixed blowing elements 40, 41 in the upper container part - And are arranged movable.
  • the movable blowing elements 42, 43 are each mounted on two identically designed holding devices, which have a guide 44 mounted on the frame 4, a push rod 45 arranged displaceably in the guide 44, a drive device with two wheels 46, 47 and has a support rod 48 which is attached to the push rod at one end and has a holder 49 at the other end for attaching the movable blowing element 42, 43.
  • the blowing device further comprises a storage container 50 for the gaseous treatment medium.
  • This storage container 50 is via a line 51 in which a valve 52 is installed, with the nozzle 27, via a line 52 in which a valve 53 is installed, with the fixed blowing elements 40, 41 and via a line 54 into which a Valve 55 is installed, connected to the movable blowing members 42, 43.
  • a blowing member can also be used which has two outlet openings which are essentially arranged opposite one another.
  • the blower is attached at both ends to a feed rod which is led out of the upper part 2 of the container. These push rods are connected to a drive to move the blowing member in the upper container part 2 into a rest position or working position.
  • FIG. 3 shows a further exemplary embodiment of the device for blowing on the objects, which is mounted in a housing which corresponds in its basic structure to the housing 1 shown in FIG. 1.
  • a bearing block 51 is attached to the inside of the upper container part 2.
  • An upper holding device 52 and a lower holding device 53 are pivotably arranged on this bearing block 51, which are pivoted individually or together by a drive device 54.
  • the drive device 54 is fastened to the bearing block 51 or upper housing part 2 by suitable means.
  • the upper holding device 52 contains a one-armed lever 55 which is articulated at one end on the bearing block 51.
  • two holding members 56 are pivotally attached.
  • the holding members 56 are designed in the present case as a one-armed lever and articulated at one end to the one-armed lever 55.
  • a blowing member 57 is attached to the other end of the holding member 56.
  • This blowing element 57 is an elongated hollow body which has a plurality of holes formed in a line or a slot which extends over most of its length. The holes and the slot form the outlet openings for the gaseous treatment medium.
  • the other holding device 53 consists of a one-armed lever 58 which is articulated at one end on the bearing block 51. At the other end of the one-armed lever 58, a blowing member 59 is attached.
  • the blowing member 59 on the lower holding device 53 is designed as a two-jet nozzle, in which the outlet openings are formed on the opposite sides of the hollow body.
  • Figures 4a and 4b show two versions of such blowing elements in cross section.
  • Treatment liquid is poured from the storage container 8 through the pipeline 9 and the valve 10 into the lower container part 3 until the liquid level determined by the overflow opening 6 is reached. This liquid level is maintained by the system of overflow tank 11 and pump 16 if necessary.
  • the spectacle lenses 36 inserted in two rows and side by side in the holding device are inserted into the device from the device 30, 31 from above Container 1 retracted until the lenses 36 are completely immersed in the treatment liquid bath.
  • a gaseous treatment medium is then introduced from the storage container 50 through the nozzle 27 into the space above the liquid level. The air present in the space above the liquid level is displaced by the gaseous treatment medium flowing out of the nozzle 27 and an atmosphere consisting of gaseous treatment medium is thus generated.
  • the blowing members 42, 43 are displaced relative to one another, as a result of which the spectacle lenses are blown from above by the downward jet of gaseous treatment medium.
  • the treatment liquid adhering to the surface of the spectacle lenses 36 is displaced downward and the surface regions freed from treatment liquid are dried at the same time.
  • the treatment liquid displaced downward by the blowing through the blowing members 42, 43 collects in the lower edge region of the spectacle lenses 36.
  • the treatment liquid accumulated in the edge region of the spectacle glasses 36 is displaced by the two blowing members 40, 41 and by short, intermittent blowing at high pressure blown off outside. With this measure, the drying time is significantly reduced.
  • a new drying cycle can then be carried out.
  • the method runs in the same way, in which case the movable blowing elements 57 are pivoted and not shifted.
  • Figures 5 and 6 show another embodiment of the inventive device for drying objects with a complicated geometric shape.
  • the device has a container 60 with a cylindrical upper part 61, a trough-shaped section 62 with a semicircular cross section which is butt welded to the upper part 61 with one leg 62a, and a conical lower part 63 which is welded to the outside of the other leg 62b and tapers towards the outlet.
  • the container 60 is open at the top and closed at the bottom by a shut-off device 64.
  • the inner legs 62b form an overflow edge 65, so that the level of the liquid level of a treatment liquid filled into the lower part 63 is determined.
  • a nozzle 66 is provided for filling the treatment liquid, which opens into the lower part 63 at a level below the liquid level.
  • the treatment liquid is located in a storage container 67, which is connected to the nozzle 66 via a pipe 68.
  • a valve 69 is installed in this pipeline 68.
  • the trough-shaped section 62 serves as a collecting container and has two outlets 70.
  • the outlet of the container 60 is connected to a feed pump 72 via a pipeline 71.
  • the outlets 70 of the section 62 are each connected to the pipeline 71 via a pipeline 73, 74.
  • the feed pump 72 is connected to the pipeline 68 via a pipeline 75 in which a shut-off valve 76 is installed. This creates a system for maintaining the liquid level, wherein the losses of treatment liquid from the storage container 67 can be covered if necessary.
  • the outlet opening of the container 60 is determined by the lower part 63 tapering towards the outlet.
  • the lower part 63 is designed such that the cross-sectional area of the outlet opening is substantially equal to the cross-sectional area of the section with the smallest inside diameter of the lower part 63.
  • the shut-off device 64 already mentioned is a conventional gate valve 74 which is mounted on the one hand on a flange 78 on the lower part 63 and on the other hand on a flange 79 of the pipeline 71.
  • the gate valve 74 is provided with a drive member 80.
  • the device also has a frame 81 on which a carriage 82 is mounted, which can be moved in the direction indicated by the arrow A.
  • a frame 83 is mounted on the carriage 82 in a self-supporting manner so that it lies over the opening of the container 60.
  • a holding device 84 for the object to be dried is detachably attached to the frame.
  • the design of the holding device depends on the geometric shape of the object to be dried and is intended for a ring laser gyro in the present case.
  • the holding device 84 contains a first strut 85, which is detachably fastened to the frame 83 at one end and has a bushing 86 at the other end, and a second strut 87, which is likewise attached to the frame 83 at one end is releasably attached and has a fork-shaped section 88 at the other end.
  • a rod 89 can be provided in the fork-shaped section 88 and the sleeve 86.
  • a shaft 90 is rotatably mounted, on which, for example, a ring laser gyro 91 is arranged in a certain position in a stable position.
  • a bevel gear 92 is arranged on the shaft 90 and lies within the fork opening. This gear 92 is driven by a shaft 93.
  • the shaft 93 is driven by another bevel gear 94a, which is drive-connected to a drive device 94, which is fastened to the strut 87.
  • This drive device 94 can be an electric motor, for example.
  • the device also contains a device for blowing the object with a gaseous treatment medium.
  • This device comprises six nozzles 95, which are arranged in two rows of three nozzles opposite each other in the container upper part 61 in such a way that the outlet openings of two nozzles 95 lie on the same line.
  • the nozzles 95 are adjustably mounted on holding devices 96 in order to be able to adjust their position with respect to the liquid level.
  • the holding devices 96 are fastened to the inside of the upper container part 61 by means of brackets 97.
  • two opposing nozzles 95 are connected in parallel via a pipeline 98 to a storage container 99 for the gaseous treatment medium.
  • a valve 100 is installed in each of these pipelines 98.
  • Treatment liquid is filled from the storage container 67 through the pipeline 68 and the valve 69 into the lower container part 63 until the liquid level determined by the overflow edge 65 is reached. This level of liquid is maintained by the gutter 62 and pump 72 system if necessary.
  • the ring laser gyro 91 arranged in the holding device is inserted into the container 60 from above by the device 82, 83 until the ring laser gyro 91 is completely immersed in the bath of treatment liquid.
  • a gaseous treatment medium is then introduced from the storage container through the lowermost nozzles 95 into the space above the liquid level.
  • the treatment liquid is then drained by opening the gate valve 77. This draining takes place very quickly because the outlet opening of the lower container part has a cross section which is essentially equal to the cross section of the lower container part 63.
  • This draining of the treatment liquid can be accelerated by the treatment liquid being sucked off by means of the feed pump 72.
  • the space released by draining the treatment liquid above the liquid level is filled by the gaseous treatment medium which flows in through the lowermost nozzles 95.
  • the device 82, 83 raises the holding device and thus the ring laser gyro 92 into a blowing position shown in dashed lines in FIG. 6.
  • the ring laser gyro In this position, the ring laser gyro is blown on both sides by two nozzles 95 with gaseous treatment medium at a high flow rate.
  • the ring laser gyro 91 is rotated by the device 92, 93.95 in order to blow off or blow off the liquid adhering to the surfaces and located in blind holes and to dry the ring laser gyro.
  • FIGS. 1-10 Another exemplary embodiment of the device for spot-free drying of objects is shown in FIGS.
  • the device contains a container 101 which is arranged so that it can be moved up and down within a tub 100.
  • the tub 101 is mounted in a frame, not shown, so that it is accessible from above.
  • the container 101 consists essentially of a lower part 102 with a curved bottom and two flat side walls and two lid segments 103, 104 with a curved ceiling and two flat side walls, which are pivotably mounted at 105 on the side walls of the lower part 102.
  • a holding and connecting block 106 is fastened to a side wall of the lower part 102 (FIG. 9).
  • the outlet opening 197 of the container 101 is led out via this connection block 106.
  • an inlet opening 108 and an opening 109 are also provided for the overflow.
  • the outlet opening, inlet opening and overflow opening can be connected to a storage container and collecting container in order to supply the container 101 with treatment liquid.
  • the container 101 is connected to a device 110 via the connection block 106 in order to move the container 101 up and down within the tub 100.
  • a device 110 such devices are known.
  • the container 101 is moved up and down by a carriage 112 which can be displaced by means of a drive worm 111 and which is guided on two guides 113.
  • the carriage 111 and the connection block 106 are connected to one another by a fastening bracket 114. Since the device 110 is arranged outside the tub 100, the corresponding side wall of the tub 100 has a recess 115.
  • the tub 100 encloses one for the through management of the process required treatment room, which is essentially filled by the gaseous treatment medium.
  • the tub 100 is provided with a fan 116 which is arranged in a compartment 117 which is shielded from the treatment room.
  • the fan 116 is connected to the treatment room via an inlet opening 118 and to the room surrounding the device via an outlet opening 119.
  • a baffle 120 is provided on the side of the tub opposite compartment 117.
  • the compartment 117 and the guide plate 120 are designed and arranged in such a way that there is essentially the same distance between them and the container.
  • the device also has a holding device 121 for the objects 122 to be dried. Since the design of the holding device 121 depends on the design of the object to be dried, an exemplary embodiment for holding eyeglass lenses 122 is shown schematically in FIGS. 7 and 8. Thereafter, this holding device 121 consists of two plates 123 which are connected opposite one another by struts 124, the struts 124 simultaneously serving as support members for the spectacle lenses 122. Rods 125 are welded to the plates 123 at one end. At the other end, the rods 125 are designed such that they can be suspended in a device (not shown) for moving the holding device 121 up and down. The device can be similar to the embodiment shown in FIG.
  • two nozzles 130 are provided. These nozzles 130 are arranged in the area of the tub floor.
  • the device also includes a blowing device 132, which is divided into two functional units. As can be seen from FIG. 8, one functional unit contains two blowing elements 133, 134 and the other functional unit contains a number of nozzles 135 and 136 arranged one behind the other in each row with an adjustable nozzle head 137, 138, so that the direction of the emerging jet with respect to the object to be dried is adjustable. These functional units also differ in their function in that the blowing members 133, 134 can be moved back and forth as well as up and down and the nozzles 135, 136 can only be moved up and down. In order to move the blowing elements and nozzles 133 to 136, the blowing device contains means, not shown, which e.g.
  • a support is arranged on a spindle arranged next to the tub 100.
  • the blowing elements 133, 134 are mounted on a right and left hand winch spindle, which is mounted on the support and is driven by a motor.
  • the nozzles 135, 136 are mounted on a spindle with a right-hand thread, which is also mounted on the support and is driven by another motor.
  • the blowing device 132 similar to that shown in FIG. 1, comprises a storage container for the gaseous treatment medium, which is connected to the blowing members 132, 134 and to the nozzles 135, 136 as well as to the nozzles 130 arranged inside the tub 100.
  • the container 101 is filled with treatment liquid up to the line 140, which represents the bath level.
  • This filling is monitored, e.g. with a level control loop. The filling can take place when the container 101 occupies the upper position in the tub 100.
  • the spectacle lenses 122 inserted in the holding device 121 in two rows and side by side are inserted into the container 101 from above until the spectacle lenses 122 are completely immersed in the treatment liquid.
  • a gaseous treatment medium can be introduced into the space above the bath level 140 either through the two nozzles 130 inside the tub 100 or through the blowing device 132. The preconditions for spotless drying of the spectacle lenses 122 are thus fulfilled.
  • the container 101 is lowered by the device 110.
  • the container With the lowering of the container 101, the container is closed at the same time and moved into a lower position within the trough 100 (FIG. 8). This process takes place very quickly, within about 1 second.
  • the space above the closed container 101 is filled by the gaseous treatment medium.
  • the actual drying is then carried out by the blowing device 132.
  • the blowing members 133, 134 and the nozzles 135, 136 are moved into a blowing position which corresponds to that shown in FIG. 2.
  • the blowing of the spectacle lenses 122 takes place analogously to that described in connection with FIG. 2.
  • the fan 116 runs during the actual drying, but can already be put into operation if the atmosphere is to be generated from the treatment medium above the bath level 140 by the blowing device 132 in order to produce a uniform laminar suction flow within the space determined by the tub 100.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
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  • Molecular Biology (AREA)
  • Drying Of Solid Materials (AREA)

Claims (22)

1. Procédé pour sécher sans taches des objets à surface lisse nettoyés dans un liquide de traitement à un degré de propreté préalloué, les objets étant plongés dans le liquide de traitement selon sensiblement la même orientation pour atteindre une humec- tation de la surface des objets, les étapes de procédé suivantes étant effectuées pour le séchage :
a) on établit au-dessus du liquide de traitement une atmosphère protectrice avec un milieu de traitement gazeux à degré de propreté préalloué,
b) après l'humectation, on sépare le liquide de traitement d'avec les objets, un déplacement de séparation rapide se produisant par descente du liquide ou du bain de telle manière que le volume libéré autour des objets soit rempli sans retard de temps par le milieu de traitement gazeux afin d'empêcher un contact avec d'autres milieux gazeux,
c) en même temps que, ou immédiatement après la séparation du liquide de traitement et des objets on dirige un milieu de traitement gazeux sur chaque objet, sensiblement coplanairement à la surface du corps des objets et vers le bas, afin d'éliminer par soufflage le liquide adhérant.
2. Procédé selon la revendication 1, caractérisé en ce que le milieu de traitement gazeux est choisi dans le groupe constitué par l'azote pur, l'azote extra-pur, les gaz rares, l'air pur ou l'air extra-pur.
3. Procédé selon la revendication 1, caractérisé en ce qu'on fait descendre le liquide de traitement à travers une sortie de récipient ayant une grande section transversale.
4. Procédé selon la revendication 1, caractérisé en ce qu'on fait descendre le niveau de bain par déplacement du récipient comportant le liquide de traitement.
5. Procédé selon la revendication 1, caractérisé en ce qu'on fait descendre le niveau de bain en un temps d'environ 0,1 à 5 secondes.
6. Procédé selon la revendication 1, caractérisé en ce qu'on aspire le liquide de traitement.
7. Procédé selon la revendication 1, caractérisé en ce qu'on souffle sur les objets en visant dans deux directions simultanément ou séquentiellement.
8. Procédé selon la revendication 1, caractérisé en ce qu'on souffle sur les objets directement dans deux directions qui forment un angle déterminé.
9. Procédé selon la revendication 7 ou 8, caractérisé en ce qu'on souffle sur les objets en visant dans une direction qui est modifiable par rapport aux objets et dans une autre direction qui est réglée de manière fixe par rapport aux objets.
10. Procédé selon la revendication 1, caractérisé en ce qu'on effectue le soufflage sur l'objet avec une pression dans la zone de 1-8 bar.
11. Dispositif pour la mise en oeuvre du procédé selon la revendication 1, avec un dispositif de support (32 ; 84 ; 121) pour les objets avec sensiblement la même orientation (36 ; 91 ; 122), un bain (1 ; 60; 101) avec du liquide de traitement, un dispositif d'immersion (30, 31 ; 81-83) qui est relié au dispositif de support (32 ; 84 ; 121) pour amener le dispositif de support et le déplacer vers le haut et vers le bas en continu ou pas-à-pas et pour immerger les objets (36 ; 91 ; 122) dans le bain, un dispositif séparateur (5 ; 64 ; 110) pour séparer le liquide de traitement d'avec les objets par descente du liquide de traitement ou du bain, un dispositif (27-29 ; 40-49 ; 95-99; 131-135) qui est relié à une source externe (50;
99) de milieu de traitement gazeux pour créer au-dessus du niveau de liquide une atmosphère protectrice constituée du milieu de traitement gazeux, pour le maintenir et remplir sans retard de temps avec le milieu de traitement gazeux le volume libéré autour des objets après séparation du liquide de traitement et des objets, et avec un dispositif de soufflage pour, en même temps que ou immédiatement après la séparation du liquide de traitement et des objets, diriger un milieu de traitement gazeux sur chaque objet sensiblement coplanairement à la surface du corps des objets et vers le bas, afin d'éliminer par soufflage le liquide adhérant.
12. Dispositif selon la revendication 11, caractérisé en ce que le dispositif de soufflage présente un premier organe de soufflage (40, 41 ; 59 ; 95) qui est fixe par rapport aux objets (36) à sécher et un second organe de soufflage (42, 43 ; 57) qui peut être déplacé en va-et-vient par rapport aux objets à sécher, pour souffler sur les objets (36) à sécher en visant dans deux directions, les jets des premier et second organes de soufflage se croisant selon un angle déterminé.
13. Dispositif selon la revendication 11, caractérisé en ce que le dispositif de soufflage présente un premier organe de soufflage (59 ; 133 ; 134) et un second organe de soufflage (57 ; 133; 134) qui sont mobiles en étant décalés simultanément ou dans le temps par rapport aux objets (36, 122) à sécher, de telle sorte que les jets des organes de soufflage balayent les objets pour souffler sur les objets en visant dans deux directions.
14. Dispositif selon l'une des revendications 12 ou 13, caractérisé en ce que l'organe de soufflage est un corps creux oblong, l'ouverture de sortie ou les ouvertures de sortie s'étendant sur une ligne sur la plus grande partie de la longueur du corps creux.
15. Dispositif selon la revendication 14, caractérisé en ce que le corps creux est un tube avec une pluralité de trous qui sont formés répartis sur la longueur du tube et forment les ouvertures de sortie.
16. Dispositif selon la revendication 14, caractérisé en ce que le corps creux est un canal avec une zone de sortie qui détermine une fente pour former et guider le jet de sortie de manière à créer un jet concentré.
17. Dispositif selon l'une des revendications 12 ou 13, caractérisé en ce que l'organe de soufflage est une buse (95).
18. Dispositif selon la revendication 11, caractérisé en ce que le dispositif de support (84) présente un dispositif (90, 92, 93, 94, 94a) pour déplacer les objets (91) à sécher.
19. Dispositif selon la revendication 18, caractérisé en ce que le dispositif pour déplacer les objets à sécher présente un moyen d'entraînement (94) qui est monté sur le dispositif de support (84), un moyen entraîné (90) sur lequel sont disposés les objets (91) à sécher et qui est monté mobile dans le dispositif de support (84), et un moyen de transmission (92, 93, 94a) qui relie le moyen d'entraînement et le moyen entraîné.
20. Dispositif selon la revendication 11, caractérisé en ce que le bain présente un récipient (101) qui est disposé dans une cuve (100), la partie supérieure du récipient (101) est constituée de deux organes (103, 104) qui sont disposés pivotants sur la partie inférieure (102) pour fermer le récipient, et un troisième dispositif (110) est relié à la partie inférieure (102) du récipient (101) pour déplacer le récipient vers le haut et vers le bas, la cuve (100) étant munie de butées qui peuvent être amenées en prise avec les organes respectivement pour ouvrir le récipient pendant le déplacement vers le haut et le fermer pendant le déplacement vers le bas.
21. Dispositif selon la revendication 20, caractérisé en ce qu'un ventilateur (116) est disposé dans la cuve pour créer un courant d'aspiration guidé à l'intérieur de la cuve qui assiste le soufflage.
EP19860105655 1985-06-27 1986-04-24 Système pour sécher sans taches des objets à surfaces humectées par un liquide Expired - Lifetime EP0205819B1 (fr)

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EP0205819B1 true EP0205819B1 (fr) 1990-10-31

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CN104075559A (zh) * 2014-07-16 2014-10-01 江苏双仪光学器材有限公司 一种镜片无尘烘干设备

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ATE109553T1 (de) * 1990-11-19 1994-08-15 Ernst Eichholzer Vorrichtung zum abblasen einer flüssigkeit von einem gegenstand.
GB9304159D0 (en) * 1992-04-30 1993-04-21 Ici Plc An enclosure for painting and a method of enforcing evaporation from a coating on a panel surface
US5271874A (en) * 1992-11-04 1993-12-21 Wesley-Jessen Corporation Method for molding a hydrophilic contact lens
CN112264378A (zh) * 2020-09-29 2021-01-26 中国航发动力股份有限公司 一种铝合金零件防锈方法

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GB1548245A (en) * 1976-11-04 1979-07-11 Isc Chemicals Ltd Drying of articles
DE2724579C3 (de) * 1977-05-31 1981-01-29 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Reinigen der Oberflache einer Mehrzahl von Substraten für Halbleiterbauelemente und Vorrichtung zur Durchführung dieses Verfahrens
CH651484A5 (de) * 1981-06-24 1985-09-30 Roag Ag Verfahren und vorrichtung zum trennen von optikteilen von tragkoerpern.
JPS6064436A (ja) * 1983-09-19 1985-04-13 Fujitsu Ltd スピンドライヤ
US4577650A (en) * 1984-05-21 1986-03-25 Mcconnell Christopher F Vessel and system for treating wafers with fluids

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Publication number Priority date Publication date Assignee Title
CN104075559A (zh) * 2014-07-16 2014-10-01 江苏双仪光学器材有限公司 一种镜片无尘烘干设备

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EP0205819A1 (fr) 1986-12-30

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