EP0080820A3 - Entladungslampe - Google Patents

Entladungslampe Download PDF

Info

Publication number
EP0080820A3
EP0080820A3 EP82306041A EP82306041A EP0080820A3 EP 0080820 A3 EP0080820 A3 EP 0080820A3 EP 82306041 A EP82306041 A EP 82306041A EP 82306041 A EP82306041 A EP 82306041A EP 0080820 A3 EP0080820 A3 EP 0080820A3
Authority
EP
European Patent Office
Prior art keywords
lamp
dose
discharge lamps
high pressure
wick
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP82306041A
Other languages
English (en)
French (fr)
Other versions
EP0080820A2 (de
Inventor
Frank Lawrence Whittaker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thorn EMI PLC
Original Assignee
Thorn EMI PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thorn EMI PLC filed Critical Thorn EMI PLC
Publication of EP0080820A2 publication Critical patent/EP0080820A2/de
Publication of EP0080820A3 publication Critical patent/EP0080820A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/24—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J61/28—Means for producing, introducing, or replenishing gas or vapour during operation of the lamp
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/34—Double-wall vessels or containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/82—Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr
EP82306041A 1981-11-27 1982-11-12 Entladungslampe Withdrawn EP0080820A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB8135910 1981-11-27
GB8135910 1981-11-27

Publications (2)

Publication Number Publication Date
EP0080820A2 EP0080820A2 (de) 1983-06-08
EP0080820A3 true EP0080820A3 (de) 1983-12-14

Family

ID=10526224

Family Applications (1)

Application Number Title Priority Date Filing Date
EP82306041A Withdrawn EP0080820A3 (de) 1981-11-27 1982-11-12 Entladungslampe

Country Status (2)

Country Link
EP (1) EP0080820A3 (de)
JP (1) JPS5897251A (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6120326A (ja) * 1984-07-07 1986-01-29 Ushio Inc 水銀灯による半導体ウエハ−材料の露光方法
GB8725912D0 (en) * 1987-11-05 1987-12-09 Emi Plc Thorn Discharge arc lamp
JP3507179B2 (ja) * 1995-01-13 2004-03-15 日本碍子株式会社 高圧放電灯
US6963158B2 (en) * 2003-08-15 2005-11-08 Osram Sylvania Inc. Mount assembly for discharge lamps

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1463568A (fr) * 1966-01-13 1966-06-03 Lampes Sa Dispositif applicable aux lampes à décharge électrique contenant des iodures métalliques en vapeur saturante notamment de l'iodure de sodium
US3604972A (en) * 1970-02-25 1971-09-14 Us Army Metal vapor lamp with alkali metal reservoir means
FR2255703A1 (de) * 1973-12-19 1975-07-18 Philips Nv
FR2363187A1 (fr) * 1976-08-26 1978-03-24 Gen Electric Lampe a vapeur metallique haute pression perfectionnee

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1463568A (fr) * 1966-01-13 1966-06-03 Lampes Sa Dispositif applicable aux lampes à décharge électrique contenant des iodures métalliques en vapeur saturante notamment de l'iodure de sodium
US3604972A (en) * 1970-02-25 1971-09-14 Us Army Metal vapor lamp with alkali metal reservoir means
FR2255703A1 (de) * 1973-12-19 1975-07-18 Philips Nv
FR2363187A1 (fr) * 1976-08-26 1978-03-24 Gen Electric Lampe a vapeur metallique haute pression perfectionnee

Also Published As

Publication number Publication date
EP0080820A2 (de) 1983-06-08
JPS5897251A (ja) 1983-06-09

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Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Designated state(s): DE FR GB NL

PUAL Search report despatched

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AK Designated contracting states

Designated state(s): DE FR GB NL

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN

18W Application withdrawn

Withdrawal date: 19831208

RIN1 Information on inventor provided before grant (corrected)

Inventor name: WHITTAKER, FRANK LAWRENCE