EP0047250B1 - Appareil de mesure de dimensions - Google Patents

Appareil de mesure de dimensions Download PDF

Info

Publication number
EP0047250B1
EP0047250B1 EP81900361A EP81900361A EP0047250B1 EP 0047250 B1 EP0047250 B1 EP 0047250B1 EP 81900361 A EP81900361 A EP 81900361A EP 81900361 A EP81900361 A EP 81900361A EP 0047250 B1 EP0047250 B1 EP 0047250B1
Authority
EP
European Patent Office
Prior art keywords
signals
signal
reflected light
light
accordance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP81900361A
Other languages
German (de)
English (en)
Other versions
EP0047250A1 (fr
EP0047250A4 (fr
Inventor
Karl-Erik Morander
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SELECTIVE ELECTRONIC Inc
Original Assignee
SELECTIVE ELECTRONIC Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=22443384&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0047250(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by SELECTIVE ELECTRONIC Inc filed Critical SELECTIVE ELECTRONIC Inc
Publication of EP0047250A1 publication Critical patent/EP0047250A1/fr
Publication of EP0047250A4 publication Critical patent/EP0047250A4/fr
Application granted granted Critical
Publication of EP0047250B1 publication Critical patent/EP0047250B1/fr
Expired legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object

Definitions

  • This invention relates to remote measuring in general, and to the measurement of a dimension of a distant object, without contacting the subject, in particular.
  • Precise measurement data is needed for many applications where the gauging or detection apparatus simply cannot be located proximate to the object to be measured. Whether the object is a roadbed, machine part, or the contour of an irregularly-shaped article, the dimension of interest is often the distance between the inaccessible object and a fixed measuring point where the detecting apparatus is located.
  • US-A-3 671 726 discloses apparatus for measuring the thickness of an object having reflective surfaces and the apparatus comprises a source of controllable light directed at each of the surfaces at a first predetermined angle to generate corresponding reflected light signals. Detection means receive and measure the reflected light signals at a second predetermined angle. The output sigals of the detection means are utilised to generate an output signal corresponding to the thickness of the objects. No means are provided to eliminate non-linear errors attributable to the lack of perpendicularity between the first and second predetermined angles.
  • apparatus for measuring a dimension which represents the distance between a predetermined point and a reflective surface of an object comprising a source of controllable light directed at the surface at a first predetermined angle relative to the reflective surface to generate a corresponding reflected light signal, detection means for receiving and measuring said reflected light signal at a second predetermined angle relative to the reflective surface, means for developing a transmittable signal based on said reflected light signal for readout of said dimension, and output means for processing said transmittable signal to generate an output display signal corresponding to said dimension, characterized by correction means for adjusting said transmittable signal to eliminate non-linear errors attributable to the lack of perpendicularity between said first and second predetermined angles, and in that said correction means includes pre-calibrated control means for developing a group of linearizing signals to adjust said transmittable signal in accordance with a comparison of said transmittable signal and a selected one of said linearizing signals and a programmable memory unit for receiving periodically generated correction signals during a separate calibration cycle.
  • apparatus for measuring the thickness of an object having first and second substantially parallel reflective surfaces comprising first and second source of controllable light directed at the respective said surfaces at a first predetermined angle relative to the first and second substantially parallel reflective surfaces to generate corresponding respective reflected light signals, respective detection means for receiving and measuring said reflected light signals at a second predetermined angle relative to the first and second substantially parallel reflective surfaces, means for developing transmittable signals based on said reflected light signals for readout of said thickness, and output means for processing said transmittable signals to generate an output display signal corresponding to said thickness of said object, characterized by correction means for adjusting said transmittable signals to eliminate non-linear errors attributable to the lack of perpendicularity between said first and second predetermined angles, and in that said correction means includes pre-calibrated control means for developing a group of linearizing signals to adjust said transmittable signal in accordance with a comparison of said transmittable signal and a selected one of said linearizing signals and a programmable memory unit for receiving periodically generated correction signals during a separate calibration
  • US-3 819 940 discloses an optical instrument which has a correction device to correct for an error resulting in impingement of the beam on a sensor at an angle to the optical axis of the sensor. This document in no way discloses correction of signals by electronic means based on pre-calibration and a programmable memory.
  • a remote dimension of an object is to be measured.
  • the thickness measuring mode will be generally described.
  • an object whose thickness is to be determined is placed at a work location between two measurement or gauging heads.
  • the work area can either be in a movable or stationary mode of operation, depending upon the application involved.
  • Each of the optical heads is provided with a source of controlled light, such as a laser beam.
  • each head is a photodetector which is adapted to receive reflected or scattered light signals based upon the impingement of the input light beam on one surface of the object whose thickness is to be determined.
  • the head also includes suitable electronic circuitry in order to assess the detected light signals and to generate information therefrom which is a measurable parameter with respect to the thickness of the object involved.
  • Each of the system's heads which conveniently include the light source, detecting and processing circuits in one overall housing, is arrayed on opposite sides of the object whose thickness is to be measured.
  • the light beams emanating from the heads are aligned with each other so as to impinge on the object's surface at corresponding opposite points, thereby eliminating any inaccuracy which might be introduced by an offset relationship between the impinging points.
  • the light beams are caused to be incident on the surface of the object and, depending upon the nature of the object, its contour and its light absorption properties, different amounts of light will be reflected from the incident surface.
  • the principal component of reflected light will be directed away from the surface in a primary reflected light beam, which is to be detected by the photosensitive surface of the system's photodetector.
  • the photosensitive surface of the photodetector is initially aligned with respect to a reference plane at or in the object to be measured, such that an idealized light beam reflecting from that plane to the photosensitive surface will strike the surface at a 45° angle with respect to the reference plane. This type of alignment is arranged for each of the optical heads with respect to the same reference plane.
  • the photodetector of this system utilizes a photosensitive surface which permits the generation of bifurcated current signals which can be processed by the electronics of the system to develop a dimensional measurement of the deviation from the central reflecting point referred to above.
  • the photosensitive surface comprises a plurality of photosensitive elements, each of said elements generating a component of said current signals in response to exposure to said reflected light signal.
  • Such deviation is generated by processing the separate current signals from the detector head and mathematically dealing with them in the electronics of the system.
  • the separate current components are amplified and filtered down to appropriate and finite signal levels.
  • the currents are both added and subtracted and their difference is mathematically divided by their sum to generate a reference signal which is proportional to the deviation of the light impinging signal from the central hypothetical reference point.
  • the linearization of the signal is accomplished, after which the output signal from each of the surfaces of the object to be measured is added to generate the actual thickness of the object involved.
  • a final digital display presents the ultimate readout.
  • the linearization circuitry in this invention affects the signal for corrective purposes when it has become a digital readout.
  • the linearization signals themselves are programmed into the gauging head by a manufacturing calibration step so that when the system is completed and delivered to a customer, the entire linearization circuit is present in the electronics. Thereafter, regardless of the object to be measured and dependent only on the measurement range to be selected, for which different heads may be used, an extremely accurate and linear readout signal will always be obtained.
  • the linearization is achieved by a calibration technique utilizing a reflective surface mounted on the motor-driven fixture which runs on a track having optically detectable and discrete lengths of measurement.
  • the material for the reflective surface varies with the ultimate application and the head measurement range, and can be, for example, paper, metal, or other suitable light reflecting material.
  • the underlying metal track on which the motor-driven fixture or "sled" runs contains an embedded rod which has highly accurate length gradations engraved onto its surface.
  • the sled in turn, has a light sensitive diode or similar unit which picks up light signals from the lines on the glass rod to determine the position along the underlying track.
  • the regular system head projects its input light beam towards the reflective surface on the sled.
  • the surface operating in accordance with the basic principles of the invention as described earlier, reflects the light beam towards the photosensitive surface of the head which is also mounted at the end of the track.
  • the readings generated on an incremental basis will include measurable non-linearities.
  • the non-linearity will in most cases, initially increase so that the measurement taken by the head and processed by a conventional computer in the calibration equipment detects and measures the non-linearities in the measurement cycle.
  • a correction signal is generated by the computer. This correction is to compensate precisely for the corresponding incremental errors introduced by the non-linear measuring technique inherent in the geometry of the system. Then, either on an incremental basis or, preferably, at the conclusion of the traverse of the entire measurement range by the movable sled, the full complement of correction signals is fed into one or more memory units of the system, which generally can be included in the head itself when programmable read only memories are utilized. As a result of these successive inputs, each measurement signal, corresponding to each minute dimension within the measurement range, will have a corresponding compensating parameter associated with it.
  • the system also includes means to distinguish the coherent light source utilized therein from other ambient light or extraneous light sources.
  • the light source itself is sampled at a predetermined high frequency which will not in any sense interfere with the impinging of a virtually continuous coherent light beam on the object's surface, and yet will permit subsequent discrimination of this signal from other undesirable light sources.
  • the signals are amplified and filtered and are then presented to a demodulating circuit. Not only does the demodulator provide suitable discrimination from other light signals, but the demodulated signal is used in a unique fashion to control and vary the level of the original light source.
  • the system then utilizes the bifurcated current signals to generate mathematical parameters which permit isolated comparision of the intensity of the light source with a predetermined setting. Should it be found during the course of operation of a particular cycle that the intensity of the light beam has dropped to an unacceptably low level, the circuit will increase the supply voltage to an acceptable level for maintenance of continued readings; similarly, should the beams' intensity be too great, perhaps because of a change in the nature of the surface to be measured, then the intensity will be suitably reduced.
  • the same modulated signals can also be used to advise the output circuitry that the level of the light source is so unacceptably high or low as to draw into question the accuracy of the output signals and thereby inhibit the output display until the light source can be properly corrected.
  • Fig. 1 is a generalized presentation of the invention in which an object 10 is shown at a remote location with respect to detecting head 12.
  • head 12 includes a light source 12A which directs a light beam 12B toward surface 10A, against which it impinges at point 10D.
  • This light reflects along primary axis 12C and passes through lens system L of detecting portion 12E, arriving on photodetector surface 12F.
  • the output signal representing the desired dimensional information is provided along conductor 16 to processing unit 20. It should be appreciated that the arrangement of Fig.
  • a single dimension measuring system e.g., the distance between object 10 and head 12.
  • two such heads as shown for example in Fig. 2
  • relationships between such dimensions, including an object's thickness, can thereby be determined.
  • FIG. 2 there is also shwon an object 10, but in this illustration, it is shown as having a thickness D to be determined.
  • Two separate optical heads 12 and 14 in accordance with this invention are arrayed on opposite sides of the object 10, with head 12 projecting light beam 12B from coherent light source 12A to surface 10A of the object, and head 14 projecting light beam 14B from coherent light source 14A toward surface 10B of the object.
  • the illustration of Fig. 2 is an idealized presentation of the location and orientation of the object relative to the components of the invention; nevertheless, it can be appreciated that the object 10 can be in motion in either left-to-right or up-and-down directions because of assembly line action or possible vibration. Niether of these types of motion will substantially affect the accuracy of the operation of this system.
  • light sources 12A and 14A of respective heads 12 and 14 cause light beams 12B and 14B to be incident on the corresponding surfaces of article 10. In so doing, the beams impact at respective contact points 10D and 10E of the object, resulting in scattered or reflected light beams 12C and 14C.
  • the extent to which such reflection and scattering takes place will vary dependent upon the object to be measured and the surfaces' irregularities, contours and light absorption properties.
  • the reflection characteristics of surfaces 10A and 10B are not particularly material to this invention, provided that light beams 12B and 14B are axially aligned with each other and that there are no substantial differences between surfaces 10A and 10B of the same article 10.
  • the reflected light beams 12C and 14C travel towards detector portions 12E and 14E, passing through lens system L, and impinge on photosensitive surfaces 12F and 14F respectively.
  • measurements are made of the offset dimension between the reference center of the photosensitive surfaces and the actual contact point of beams 12C and 14C.
  • These reference points have been previously determined by calibration measurements in accordance with hypothetical reflections from reference plane 10C within article 10-the angle between the hypothetical reflected beams 12D and 14D and their corresponding input beams is 45° and those hypothetical beams impinge at the center of corresponding photosensitive surfaces 12F and 14F.
  • processing unit 20 can contain conventional readout, display and actuating equipment for utilization of the thickness measurement parameters generated by the system.
  • FIG. 3 A system block diagram is presented in Fig. 3 with only one set of blocks corresponding to one of the two gauging heads (12) being illustrated. Such blocks are suitable for measuring either a distance dimension or a component of the thickness D-in the latter case, it is to be understood that another head 14 will be used, in which a corresponding series of comparable blocks is included to generate a comparable measurement parameter which will be utilized together with the parameters generated from head 12 to result in a total thickness measurement.
  • a light source 12A is included in head 12, which may take the form of a laser diode or an infra-red LED device. Such a diode is manufactured by ITT (England) and is designated under number LB1-02.
  • Timing control circuit 32 provides a number of control signals as will be explained hereinafter; one such signal is over conductor 34 to control the switching on and off of the light source 12A in order to sample surface 10A at the appropriate rate for subsequent discrimination purposes; a typical sampling rate which can be used is 16 kHz.
  • the overall purpose of the system as illustrated in the block diagram of Fig. 3 is to process the measured parameter signals from the photodetector 12E and after suitable processing, filtering and identification of these signals, to mathematically arrange for a position-sensitive reading which will then be utilized to obtain one of the two component thickness measurements required to ascertain parameter D of article 10.
  • a position-sensitive reading which will then be utilized to obtain one of the two component thickness measurements required to ascertain parameter D of article 10.
  • the photosensitive surface 12F in photodetector 12E of head 12 is capable of generating highly precise subdivided current signals which are a function of the particular impinging or contact point of reflected light beam 12C on surface 12F.
  • the two current signals X1 and X2 can be utilized to generate mathematical representations of the particular point on photosensitive surface 12F where beam 12C makes contact. This, in turn, by suitable trigonometric and mathematical principles, can be the basis for the sub-component of the thickness measurement which will lead to determination of dimension D.
  • These two current signals X1 and X2 are passed on respective conductors 36 and 38 to preamplifier 40.
  • This circuit is largely conventional and serves to correspondingly amplify the two position current signals x 1 and x 2 .
  • An auxiliary function can be served by the preamplifier in blocking any photocurrent which might have been generated by the photodetector surface 12E and its photosensitive 12F in response to the presence of ambient light. Such light is generally in nature and will be represented on the photosenitive surface by a direct current output signal. While the first stage of the preamplifier can be DC-coupled circuit, the second stage will be coupled to the first stage by AC-coupling, thus barring the transfer of any random and non-sampled light signals. While this is not the final and definitive discriminating step, this also serves to enhance the accuracy of the system.
  • the signals which emerge from preamplifier 40 are fed to a bandpass filter 42, which selects the appropriate modulated signal from extraneous noise and disturbances. For example, if a 16 kHz signal has been utilized from timing control 32 with respect to light source 12A, then bandpass filter 42 is designed to filter out only a 16 kHz modulated signal.
  • the resultant filtered signal still in separate X1 and X2 components, is then supplied to demodulator 44.
  • the demodulator 44 fulfills a number of important functions in this system. Initially, the x 1 and X2 signals are demodulated by means of conventional full-wave rectification within demodulator 44.
  • demodulator 44 Built into demodulator 44 is a low pass filter which is designed to produce an output DC signal which illustratively can be of a 2 kHz band width (i.e., between zero and 2 kHz). Such filtering action can be provided when the overall demodulator 44 occupies portions of integrated circuit chips, and extra or spare portions of these same chips can be utilized for the low pass filtering function.
  • the demodulated signals, corresponding to X1 and X2 DC outputs, are provided to a sample and holding circuit 50.
  • the signal on conductor 44A can represent the sum of signals x 1 and x 2 , further representing the total generated signal from a particular light impact. It is known in advance that x 1 and X2 should aggregate to a particular level in order to represent an appropriate light signal. If this sum is compared to a reference voltage and it is not at the appropriate level, regulator circuit 46 will adjust the light output by controlling the voltage at the diode or infra-red light source 12A. Similarly, if too great a reading results from the summing of x 1 and x 2 , an appropriate reduction in the light source will be obtained.
  • One technique of achieving this result is to control the power input to the light source itself-if the power is withdrawn from the light source in accordance with x 1 +x 2 readings on conductor 44A, an appropriate reduction in light output will be attained. A comparable increase in voltage signal will increase the intensity of the light source where necessary.
  • detector circuit 48 provides appropriate output signals along conductor 48A to the output shift register and driver circuit 56 to disable the latter circuit from providing output information to digital display unit 58.
  • one disabling signal can be generated by circuit 48 when the light level is too low and a separate disabling signal can be generated along the same conductor when the light level is too high.
  • this disabling action will only be of transient duration, since the light intensity will be promptly corrected by the foregoing circuitry and any "down time" will only last for perhaps a few milliseconds.
  • the demodulated information signals X1 and X2 When the demodulated information signals X1 and X2 are supplied to the sample and hold circuit 50, these circuits operate to both add the input signals and to subtract them as well with appropriate and well-known circuitry, for example integrated circuit chips. Thus, one output from sample and hold circuit 50 will be the difference ( X1 - X2 ), while the other, as illustrated in Fig. 3, will be (x i + Xz ). The output information signals are then ready for processing and ultimate correction and utilization. The difference and sum signals are furnished to a,dividing analog-to-digital converter 52, which serves primarily to establish the reference signal As will be demonstrated hereinafter, that fraction acts as the position reference signal and assists in the generation of one of two subcomponents of the overall thickness D to be measured with respect to article 10.
  • converter circuit 52 can be utilized for various bit levels.
  • One particular accuracy level which may be considered optimum is a 12 bit converter which will provide a very high degree of accuracy.
  • the output of converter 52 is a serial 12 bit pulse which acts as the input to the linearization circuit 54.
  • the correction to be applied by the linearizing circuit 54 occurs with respect to the digital from of the position signal emanating from converter 52.
  • the serial data from converter 52 is shifted into the linearization circuit 54, all under the control of timing control 32, the actually measured and inevitably non-linear signal represened by the 12 bit input word is presented in the form of a curve over a predetermined number of distance segments.
  • this curve representing deviations from the normal and desired linear levels, can be divided into sixteen parts, with four parts of the curve to be corrected by each memory unit in the linearization circuit.
  • These memory units for example "EPROMS" (eraseable programmable read only memory units), will have been pre-programmed in accordance with the linearization and calibration steps to be described in greater detail below.
  • the EPROMS in linearizer 54 will operate on the segmented portions of the actual non-linear signal represented by the 12 bit input word and will correct each segment of the curve on a bit-by-bit basis. (in this regard, the linearization and calibration steps will be described with respect to Fig. 6 and the correction curves referred to here are illustrated in that drawing). In any event, the individualized and linearized signals based upon the operation of the EPROMS with respect to the input and non-linear signal, will be accurate to within of the measuring range.
  • the resolution of the system is established within 8 millimeters divided by 4096, i.e., approximately 2 microns. Similar high accuracy readings can be obtained with this system where other ranges are involved, such as a resolution of 4 microns for a range of 16 millimeters and a resolution of 8 microns for a range of 32 millimeters.
  • the programmable read only memories within linearization circuit 54 also indicate to the out of range detector 60 when the signal from the converter 52 is so far out of the indicated measurement range of that particular application as to warrant disabling the system and either changing the head to accommodate the new range or at least not relying on the output information. To the extent that the range is not appropriate for the particular reading, a signal or disabling bit can be supplied from out of range detector 60 to output shift register 56 to prevent the further operation of the output portion of the system.
  • the thickness measurement capable of being attained with this invention are based upon the existence of controllable and workable mathematical and trigonometric relationships. These relationships serve to permit the determination of an appropriate measurement range by the use of optical focal length calculations and also are utilizable for determination of the thickness components of the dimension D referred to hereinabove.
  • Fig. 4 for an exposition of the relationships which permit both measurement range and thickness to be ascertained by the present invention.
  • FIG. 3 illustrates the relationship between head 12 and the upper surface 10A of article 10, indicating the manner in which a position-sensitive signal can be generated on the basis of bifurcated currents x, and x 2 .
  • Fig. 3 illustrates the generation of these current signals from only the upper surface 10A of article 10, Fig.
  • a thickness subcomponent D is generated in mathematical form and this relates to the distance between the upper surface 10A of article 10 and reference plane 10C hypothetically within article 10 (see Fig. 1).
  • a sub- component which may be termed D 2 is generated on the basis of incident and reflected light beams with respect to lower surface 10B and head 14, and in the electronics to be described, the subcomponents 0, and D 2 are added in order to generate the overall thickness parameter D. (If only the one-side distance is the dimension sought, then the addition step need not be performed; however, the basic detection, measurement and correction functions are substantially the same).
  • a lens system L which is only generally designated in Figs. 1, 2, 3, and 4 in the form of a generally convex lens; it will be appreciated by those skilled in the art that the focusing optics in representative lens system L can be arranged to focus the reflected beam on photosensitive surface 12F-the calculation of the focal length for system L will also be described below.
  • Reference plane 10C is indicated as the X-axis in Fig. 4 and the point of incidence of the actual light beam on surface 10A is indicated at 10D along the Y-axis in Fig. 4.
  • the hypothetical intersection of light beam 12B with reference plane 10C is indicated at point 10C, in Figs. 2 and 4.
  • Angle "K" between hypothetical reflected beam 12D and either the X or Y axes is 45° and after passing through lens system L, beams 12D arrives on photosensitive surface 12F at substantially the geometical midpoint thereof. This divides the photosensitive surface into two halves, each of which has been designated "h", with the overall length of the photosensitive surface 12F being designated S.
  • the reflected beam 10C emerges at a particular angle dependent upon the nature of the article whose thickness is to be measured, including its surface characteristics and contour. Regardless of those parameters, the principal component of the light beam is reflected at 12C and passes through lens system L and focuses at a point on photosensitive surface 12F which if offset from the center by the dimension "d".
  • the angle between the perfect axial reflection of hypothetical beam 12D and that of actual beam 12C is designated "p".
  • the angle defined on the other side of lens system L and opposite p is, of course, also p, and the distance between actual contact point 10D and hypothetical contact point 10C, is the subcomponent D, which it is desired to isolate mathematically.
  • This latter component is noted to the hypotenuse of an isoceles triangle whose legs been designated "r". Below the reference plane 10C, another isoceles triangle is present with equal legs "t”.
  • Distances "a" and "b” have been labelled to indicate, respectively, the distance between reference plane 10C and lens system L and from lens system L to photosensitive surface 12F, both dimensions being measured axially along beam line 12D and in a direction perpendicular to photosensitive surface 12F.
  • the final parameter shown in Fig. 4 is the overan measurement range for a particular measurement cycle, defined as M, which is equivalent to y,+ y 2 .
  • the measurement range M it is noted that once y 1 and Y2 have been determined (formulas (4) and (6)), they are merely added to obtain the measurement range M. This defines what is essentially the maximum excursion permitted between the upper surface 10A and the bottom surface 10B of article 10 which photosensitive surface 12F is capable of accepting. If the thickness measurement D exceeds measurement range M, accuracy of the system will either be lost or markedly reduced.
  • distance b is fixed and known. This is the distance between the location of lens system L and photosensitive surface 12F. As illustrated in Fig. 2, for example, this dimension is contained within photodetector portion 12E of head 12; accordingly, while the lens system L may change depending upon the measurement range desired, the distance b between lens system L and photosensitive surface 12F can be kept constant. It is therefore significant to determine the measurement range M by calculating component y, in terms of the variable distance a and the generally fixed distance b. At the same time, Y2 can be expressed in terms of y, and the measurement range M and the y parameter can thereby be eliminated from the calculation.
  • head 12 performs the detection and calculations to generate dimension D i
  • head 14 performs comparable measurements and calculations to obtain the other component D 2 (not shown); the addition of components D 1 and D 2 results in D, the thickness of article 10 as shown in Figs. 1 and 2.
  • a photosensitive member 12F which has photosensitive elements between upper surface 12F, and lower surface 12F 2 in Fig. 5. The presence of these elements permits the generation of photocurrents x 1 and x 2 , which are dependent upon the relative spacing of the contact point of reflected beam 12C and the side electrodes 12H, and 12H 2 (Fig. 5).
  • This photosensitive member is of the type described in the article "Position Sensitive Light Detectors With High Linearity" by Goran P. Petersson and Lars-Erik Lindholm, IEEE Journal of Solid-State Circuits, Volume SC-13, No. 3, June, 1978, pages 392-399. Utilization of this type of position-sensitive light detector permits nearly distortion free detection and the generation of suitably proportionate current parameters utilizable to define the contact dimension of a reflected light beam.
  • the appropriate bias voltage is applied form source V b at electrode 12G and when light 12C is reflected from surface 10A and passes through lens system L and arrives at photosensitive surface 12f, its "tail" is designated at 12C in Fig. 5.
  • the overall length of photosensitive surface 12F is S
  • the dimension between the contact point of beam 12C and electrode 12H is d i
  • the other dimension between the contact point and electrode 12H 2 being designated d 2 .
  • a first current x 1 passes between the contact point of beam 12C and electrode 12H i
  • a second current X2 passes from the contact point to electrode 12H 2 .
  • the total current x 1 +x 2 is a fixed amount, generally in the range of 5 microamperes, which can be controlled by the setting of the bias voltage V b and by knowing the characteristics of photosensitive surface 12F. This total current divides as indicated immediately above and passes over resistive portions of the photosensitive surface 12F.
  • the resistive portion traversed from the contact point to electrode 12H 1 is defined as kd i
  • the counterpart portion for current x 2 is kd 2 .
  • the dimension is a position reference signal, dependent upon the particular d 1 and d 2 measurements in each measurement cycle.
  • the electronic parameter which equals this position reference signal was signal provided to the linearizing circuit 54.
  • the significance of this reference signal is that it can be utilized to assist in the computation of the dimension d in Fig. 4 by means at photosensitive surface 12F in Fig. 5. This in turn permits the calculation of thickness subcomponent D 1 as indicated heretofore.
  • the dimension T is established electronically as the result of the bifurcated currents x 1 and x 2 and the development of the position sensitive signal the dimension d can be calculated as just indicated at (14).
  • the dimension D is established in terms of dimensions a and b and electronically computed dimension d.
  • the signals generated from photosensitive surface 12F while representative of the desired dimension d and utilized to calculate component D 1 , are still not precisely linear because of the differential angles between incident beams 12B and the reflected beam 12C and its associated photosensitive surface 12F.
  • a linearizing circuit 54 has been described heretofore.
  • the linearization step is a predetermined calibration procedure achieved through the means indicated in Fig. 6.
  • a base support member 60 which can be constructed in a laboratory or suitable manufacturing location.
  • the device includes a support member 62 and a finely machined track 64, embedded within which is a precision glass rod 66 having discrete and optically detectable distance segments engraved or otherwise marked thereon.
  • a precision glass rod 66 having discrete and optically detectable distance segments engraved or otherwise marked thereon.
  • a rod can be of the type manufactured by J. Heidenhain Company of Taunreut, West Germany and designated as the LS 701).
  • Mounted on track 64 for movement with respect thereto is a "sled" 68 which can be motor driven by suitably conventional means (not shown).
  • the sled 68 has an upper reflective carrying member 70 which is illustrated as having mounted thereon reflective surface 70A.
  • This surface is one which may vary in accordance with the ultimate application of the invention, but which take the form of light reflecting surfaces, including paper, metal, rubber and plastic.
  • the object of the calibration system indicated in Fig. 6 is to generate light signals in the usual manner done in Fig. 2, and to measure the actual reflected light beam values again in the usual manner as if in a measurement cycle. Then, the actual measurement departures from a linear signal are determined and appropriate compensating signals are developed to cancel out the non-linearities and to develop a predetermined linear signal.
  • head 12 is mounted in a convenient orientation, with light source 12A focused on member 70 and reflective surface 70A thereof, such that light beam 12B reflects off surface 70A and, in the form of scattered signal 12C, arrives at photodetector portion 12E.
  • This projection and reflection arrangement occurs with respect to an entire sequence of positions for sled 68 within a particular measurement range desired for the unit. For example, where an eight millimeter measurement range is involved, rod 66 may have discretely detectable intervals each two microns along its length; accordingly, this would require approximately 4,000 separate measurements in order to correct for each of the measurements taken at each two micron distance within an eight millimeter range.
  • head 12 focuses its light beam 12D from coherent source 12A on reflective surface 70A at a first point in the movement of sled 68 on track 64-the position of this movement is determined by a particular marking on rod 66, which is detected by a light sensitive means (not shown) within sled 68-the signal is detected and microprocessor 72 causes sled 68 to move a particular distance until the next marking point for measurement purposes is reached.
  • head 12 is activated to generate light beam 12B and thus scattered light signal 12C, which is detected at detector portion 12E. This signal appears on representative conductors 76 and the gradual development of the entire path of such signals is shown in representative graph 78.
  • curve 78A initially begins to go positive as measurements are taken through the measurement range. The measurements then reach a peak and begin to decrease, crossing the horizontal axis and actually becoming negative in the latter portion of the range. As each of these measurements is detected and made, they are fed to microprocessor 72 which stores them in a memory unit. A corresponding set of compensating parameters is then developed periodically by the microprocessor. These dimensions are indicated in representative graph 72A, in which curve 72B is illustrated. It will be noted that as actual curve 78A begins to go positive and reach a positive peak, curve 72B immediately begins to go negative and approaches a corresponding negative peak.
  • curve 72B is the precise negative of curve 78A.
  • curve 72B has developed a corresponding correction figure which, in effect, cancels out the non-linear portion of curve 78A.
  • the microprocessor 72 activates actuating circuit 80 over conductor 72C, and appropriate correction signals, based upon curve 72B, are written into the programmable memory units in head 12.
  • These signals constituting the 12 bit correction word discussed earlier, result in an ultimate linear signal to be provided for display purposes to unit 20 (Fig. 2) and to unit 58 (Fig. 3).
  • the linearity of the measurement signal with respect to every dimension in the measurement range is indicated by graph 84 and in particular, by flat and horizontal axis line 84A.
  • head 12 itself has been provided with "portable" correction signals which are keyed to a particular measurement range for which head 12 is designed.
  • the memory units within head 12 have, in their memories, corresponding compensating and correcting values generated by microprocessor 72 and now by virtue of actuating circuit 80, placed into memory units over conductor 82.
  • the non-linear curve 78A which would normally be measured is replaced by the substantially linear line 84A.
  • the system of this invention has provided not only for the linearization of a potentially incorrect measurement signal, but has also arranged to control and properly select the appropriate light source signal for correction and intensity maintenance purposes as previously described.
  • EP-A1-150408 European Application No. 84115531.0 published as EP-A1-150408 which is an application which was divided out of this application.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Dispositif de mesure precise de dimensions associees a un objet eloigne sans etre en contact avec l'objet lui-meme. Un rayon de lumiere (12B) est dirige sur une surface de l'objet (8) et une partie reflechie du rayon est detectee par un element de photodetecteur (12E). La dimension particuliere de l'objet est determinee mathematiquement en mesurant la distance (d) de decalage du signal lumineux reflechi par rapport a un point predetermine sur le photo-detecteur qui est aligne avec un plan de reference (10c) de l'objet. En utilisant deux tetes et des rayons lumineux et des photo-detecteurs respectifs, l'epaisseur d'un objet eloigne peut egalement etre mesuree. De maniere a compenser la relation angulaire entre la surface de l'objet et celle du photo-detecteur, un circuit de calibrage de linearisation (54) permet d'enregistrer des corrections pre-etablies dans des unites de memoire programmables. Les valeurs de calibrage sont determinees au cours de la fabrication et sont correctes pour chaque lecture normalement non lineaire pour des distances croissantes dans une plage de mesure predeterminee. On augmente encore la precision du systeme en utilisant un circuit d'echantillonnage a haute frequence (30, 32) pour moduler la source lumineuse, avec un circuit de demodulation (44) servant a faire la distinction entre le rayon lumineux d'entree et des signaux lumineux ambiants etrangers.

Claims (13)

1. Appareil de mesure d'une dimension qui représente la distance entre un point prédéterminé (10C,) et une surface réflectrice (10A) d'un objet (10) comprenant und source (12A) de lumière contrôlable dirigée vers la surface (10A) selon un premier angle prédéterminé par rapport à la surface réflectrice (10A) pour produire un signal lumineux réfléchi correspondant (12C), un moyen de détection (12E) pour recevoir et mesurer le signal lumineux réfléchi (12C) selon un second angle prédéterminé par rapport à la surface réflectrice (10A), un moyen (12F) pour fournir un signal transmissible basé sur le signal lumineux réfléchi (12C) pour une lecture de ladite dimension, et un moyen de sortie (20) pour traiter le signal transmissible pour produire un signal d'affichage de sortie correspondant à ladite dimension, caractérisé par un moyen de correction (54) pour régler le signal transmissible pour éliminer des erreurs non linéaires attribuables au manque d'orthogonalité entre les premier et second angles prédéterminés, et en ce que le moyen de correction (54) comprend des moyens de commande pré-étalonnés (72) pour fournir un groupe de signaux de linéarisation (72B) pour régler le signal transmissible en accord avec une comparaison dudit signal transmissible et de l'un choisi des signaux de linéarisation, et une mémoire programmable pour recevoir les signaux de correction produits périodiquement pendant un cycle d'étalonnage séparé.
2. Appareil de mesure de l'épaisseur d'u objet (10) comprenant des première et seconde surfaces réflectrices sensiblement parallèles (10A, 10B) comprenant des première et seconde sources (12A, 14A) de lumière contrôlable (12B, 14B) dirigées sur lesdites surfaces respectives (10A, 10B) selon un premier angle prédéterminé par rapport aux première et seconde surfaces réflectrices sensiblement parallèles pour produire des signaux lumineux réfléchis respectifs correspondants (12C, 14C), un moyen de détection respectif (12E, 14E) pour recevoir et mesurer les signaux lumineux réfléchis selon un second angle prédéterminé par rapport aux première et seconde surfaces réflectrices sensiblement parallèles, un moyen (12F, 14F) pour fournir des signaux transmissibles sur la base des signaux lumineux réfléchis (12C, 14C) pour une lecture de ladite épaisseur, et un moyen de sortie (20) pour traiter les signaux transmissibles pour produire un signal d'affichage de sortie correspondant à ladite épaisseur de l'objet (10), caractérisé par un moyen de correction (54) pour régler les signaux transmissibles pour éliminer les erreurs non linéaires attribuables au manque d'orthogonalité entre les premier et second angles prédéterminés et en ce que le moyen de correction (54) comprend des moyens de commande pré-étalonnés (72) pour fournir un groupe de signaux de linéarisation (72B) pour régler le signal transmissible en accord avec une comparaision de ce signal transmissible et de l'un choisi des signaux de linéarisation et une mémoire programmable pour recevoir les signaux de correction produits périodiquement pendant un cycle d'étalonnage séparé.
3. Appareil selon l'une des revendications 1 ou 2, caractérisé en ce que le, ou chaque, moyen de détection (12E, 14E) comprend un moyen photosensible (12F, 14F).
4. Appareil selon la revendication 3, caractérisé en ce que le ou chaque moyen photosensible (12F, 14F) comprend une surface photosensible pour recevoir le signal lumineux réfléchi en un point aléatoire et pour produire des premier et second signaux de courant (X" X2) proportionnels à l'écart entre au moins une extrémité de borne de la surface photosensible et le point aléatoire.
5. Appareil selon la revendication 4, caractérisé en ce que la ou chaque surface photosensible comprend une pluralité d'éléments photosensibles, chacun de ces éléments produisant une composante desdits signaux de courant en réponse à une exposition au signal lumineux réfléchi.
6. Appareil selon l'une quelconque des revendications 1 à 5, caractérisé en ce que le moyen de correction comprend en outre un moyen de guidage (60) pour fournir un trajet de déplacement fixe, un moyen (68) mobile le long du moyen de guidage pour disposer une surface de détection contrôlable en position (70A), un moyen (12, 12E) monté sur le moyen de guidage pour produire des signaux d'étalonnage comparables au signal de source lumineuse contrôlable et au signal lumineux réfléchi, un moyen (72) pour déterminer le départ non linéaire (78A) des signaux d'étalonnage correspondants au signal lumineux réfléchi, un moyen (72B) pour annuler effectivement le départ non linéaire dans les signaux d'étalonnage correspondants au signal lumineux réfléchi et pour fournir les signaux de correction (82) à la mémoire, et un moyen de commande (66, 72) pour surveiller le déplacement de la surface de détection en des positions discrètes détectables le long du trajet de déplacement et pour amener les signaux de correction à être produits et communiqués à l'unité de mémoire pour chacune des positions détectables discrètes sur le moyen de guidage.
7. Appareil selon la revendication 6, caractérisé en ce que les extrémités de borne des positions détectables discrètes définissent une gamme de mesure prédéterminée pour chacun d'un groupe d'objets éloignés ayant ladite dimension tonbant dans ladite gamme.
8. Appareil selon la revendication 7, caractérisé en ce que le moyen de détection comprend un système d'objectif (4) de distance focale correspondant à la gamme de mesure.
9. Appareil selon la revendication 6, caractérisé en ce que le moyen de guidage comprend un élément de rail (64) pour définir le trajet de déplacement et un élément optique (66) pour définir lesdites positions discrètes détectables le long de sa longueur, le moyen mobile comprend un chariot (68) muni d'un élément photosensible pour déterminer chacune des positions détectables le long du moyen de guidage, le moyen monté sur le moyen de guidage comprenant une tête de commande (12) pour produire un signal à partir de la ou de chaqué source lumineuse (12B) et pour détecter les signaux lumineux réfléchis (12C) à chacune desdites positions détectables, le moyen de détermination comprenant un organe de traitement électronique (72) pour comparer le signal lumineux réfléchi à une norme de mesure idéale dans ce but, un moyen d'activation (80) couplé au moyen de détermination pour produire des signaux (82) pour régler le signal lumineux réfléchi en fonction de la norme de mesure idéale pour chacune des positions détectables discrètes, et en ce que le moyen de commande comprend ladite mémoire programmable pour mémoriser des signaux en provenance des moyens d'activation pour une utilisation ultérieure dans le moyen de correction de l'appareil.
10. Appareil selon l'une quelconque des revendications 1 à 9, caractérisé par des moyens de régulation (46) pour surveiller l'intensité de la lumière contrôlable et pour augmenter cette intensité si le niveau lumineux sur la ou sur chaque surface réflectrice (10A, 10B) tombe en dessous d'une valeur prédéterminée et pour réduire l'intensité si le niveau lumineux au niveau de la ou de chaque surface réflectrice (10A, 10B) dépasse la valeur prédeterminée.
11. Appareil selon la revendication 10, caractérisé en ce que le ou chaque signal transmissible comprend au moins une composante proportionnelle à l'intensité du ou de chaque signal lumineux réfléchi.
12. Appareil selon la revendication 11, caractérisé par un moyen de détection de niveau (48) couplé au moyen de sortie (20) pour empêcher la génération du signal d'affichage de sortie si la lumière contrôlable dépasse la valeur prédéterminée ou tombe en dessous de cette valeur.
13. Appareil selon l'une quelconque des revendications 1 à 12, caractérisée par des moyens (30, 32) pour fournir des signaux en provenance de la ou de chaque source de lumière contrôlable vers lesdites surfaces à une cadence de synchronisation prédéterminée, et en ce que le, ou chaque, moyen pour fournir un signal transmissible comprend un moyen de démodulation (44) pour choisir des composantes des signaux lumineux réfléchis correspondant à la cadence de synchronisation prédéterminée.
EP81900361A 1980-03-13 1980-11-07 Appareil de mesure de dimensions Expired EP0047250B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US130171 1980-03-13
US06/130,171 US4375921A (en) 1980-03-13 1980-03-13 Dimension measuring apparatus

Related Child Applications (2)

Application Number Title Priority Date Filing Date
EP84115531A Division EP0150408A3 (fr) 1980-03-13 1980-11-07 Appareil de mesure de dimensions
EP84115531.0 Division-Into 1984-12-15

Publications (3)

Publication Number Publication Date
EP0047250A1 EP0047250A1 (fr) 1982-03-17
EP0047250A4 EP0047250A4 (fr) 1982-07-13
EP0047250B1 true EP0047250B1 (fr) 1987-02-25

Family

ID=22443384

Family Applications (2)

Application Number Title Priority Date Filing Date
EP81900361A Expired EP0047250B1 (fr) 1980-03-13 1980-11-07 Appareil de mesure de dimensions
EP84115531A Withdrawn EP0150408A3 (fr) 1980-03-13 1980-11-07 Appareil de mesure de dimensions

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP84115531A Withdrawn EP0150408A3 (fr) 1980-03-13 1980-11-07 Appareil de mesure de dimensions

Country Status (5)

Country Link
US (1) US4375921A (fr)
EP (2) EP0047250B1 (fr)
JP (1) JPS57500441A (fr)
DE (1) DE3071910D1 (fr)
WO (1) WO1981002628A1 (fr)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4473750A (en) * 1980-07-25 1984-09-25 Hitachi, Ltd. Three-dimensional shape measuring device
FR2522408A1 (fr) * 1982-02-26 1983-09-02 Delmas Jeannine Dispositif optoelectronique de mesure dimensionnelle de haute precision sans contact avec la piece a controler
US4501961A (en) * 1982-09-01 1985-02-26 Honeywell Inc. Vision illumination system for range finder
US4589082A (en) * 1983-01-17 1986-05-13 Westinghouse Electric Corp. Nuclear fuel rod straightness measuring system and method
US4688184A (en) * 1984-03-29 1987-08-18 Mitsubishi Denki Kabushiki Kaisha System for measuring three-dimensional coordinates
US4593967A (en) * 1984-11-01 1986-06-10 Honeywell Inc. 3-D active vision sensor
US4936676A (en) * 1984-11-28 1990-06-26 Honeywell Inc. Surface position sensor
US4682894A (en) * 1985-03-21 1987-07-28 Robotic Vision Systems, Inc. Calibration of three-dimensional space
US4825394A (en) * 1985-05-07 1989-04-25 General Dynamics Corporation Vision metrology system
AU589651B2 (en) * 1985-06-14 1989-10-19 Broken Hill Proprietary Company Limited, The Surface profile determination
DE3688519D1 (de) * 1985-06-26 1993-07-08 Hegenscheidt Gmbh Wilhelm Verfahren und messanlage zur durchmesserbestimmung der raeder von radsaetzen.
US4796997A (en) * 1986-05-27 1989-01-10 Synthetic Vision Systems, Inc. Method and system for high-speed, 3-D imaging of an object at a vision station
DE3624959A1 (de) * 1986-07-23 1988-01-28 Mannesmann Ag Automatisches verfahren zur beruehrungslosen dreidimensionalen vermessung von objekten grosser ausdehnung
US4710808A (en) * 1986-08-05 1987-12-01 Mechanical Technology Incorporated Machine vision differential measurement system
US4724886A (en) * 1986-11-25 1988-02-16 Selective Electronic, Inc. Mold cavity misalignment detection system
US4724894A (en) * 1986-11-25 1988-02-16 Selective Electronic, Inc. Molten metal pour control system
US4913551A (en) * 1987-07-28 1990-04-03 Davis Richard B Log measuring method and apparatus
IT212380Z2 (it) * 1987-10-26 1989-07-04 Advanced Data Processing Macchina per il rilevamento e la matematizzazione della superficie di modelli tridimensionali partico larmente per la costruzione di stampi con macchine utensili a controllo numerico
DE3743363A1 (de) * 1987-12-21 1989-07-06 Zeiss Carl Fa Verfahren und einrichtung zur regelung der emissionslichtmenge in einem optischen tastkopf
JPH0674968B2 (ja) * 1988-03-15 1994-09-21 三菱電機株式会社 光学式測定装置
US4925308A (en) * 1988-08-09 1990-05-15 Robotic Vision System, Inc. Calibration of three-dimensional space
US4942814A (en) * 1989-08-10 1990-07-24 Shinohara Machinery Co., Ltd. Operation stand for measuring sheet size for sheet-fed press
DE4008600A1 (de) * 1990-03-17 1991-09-19 Koenig & Bauer Ag Laser-mehrfachbogenkontrolle
US5351126A (en) * 1991-10-31 1994-09-27 Matsushita Electric Works, Ltd. Optical measurement system for determination of an object's profile or thickness
US5337149A (en) * 1992-11-12 1994-08-09 Kozah Ghassan F Computerized three dimensional data acquisition apparatus and method
WO1996003616A1 (fr) * 1994-07-21 1996-02-08 Wangner Systems Corporation Dispositif et procede servant a effectuer la mesure sans contact de l'epaisseur d'une toile de fabrication de papier
US5587051A (en) * 1994-07-29 1996-12-24 Ostermayer; Volker Simplified laser apparatus and method for measuring stock thickness on papermaking machines
US5530548A (en) * 1994-11-07 1996-06-25 Automotive Systems Laboratory, Inc. Calibratable optical distance sensing system and method
CH691312A5 (de) * 1995-08-08 2001-06-29 Rieter Ingolstadt Spinnerei Verfahren zum Messen der Faserband-Dicke oder -Masse und Messeinrichtung zur Durchführung des Verfahrens.
US5663795A (en) * 1995-09-07 1997-09-02 Virtek Vision Corp. Method of calibrating laser positions relative to workpieces
FR2774757B1 (fr) * 1998-02-06 2001-03-16 Premium Instr Sa Procede et dispositif de mesure de la forme et/ou de la position d'un profil d'une surface d'un produit en defilement
US7612870B2 (en) * 1998-02-25 2009-11-03 California Institute Of Technology Single-lens aperture-coded camera for three dimensional imaging in small volumes
US7006132B2 (en) * 1998-02-25 2006-02-28 California Institute Of Technology Aperture coded camera for three dimensional imaging
US6252623B1 (en) 1998-05-15 2001-06-26 3Dmetrics, Incorporated Three dimensional imaging system
US6381026B1 (en) 1999-03-15 2002-04-30 Lifecell Corp. Method of measuring the contour of a biological surface
US7295186B2 (en) * 2003-01-14 2007-11-13 Avago Technologies Ecbuip (Singapore) Pte Ltd Apparatus for controlling a screen pointer that distinguishes between ambient light and light from its light source
US7417738B2 (en) * 2004-01-27 2008-08-26 Tradewind Scientific Ltd. Determining surface properties of a roadway or runway from a moving vehicle
JP5684991B2 (ja) * 2010-02-17 2015-03-18 株式会社キーエンス 測定システム及びその校正方法
DE102010015689B4 (de) * 2010-04-21 2019-05-23 Aktiebolaget Skf Verfahren und Vorrichtung zur Vermessung eines Lagerbauteils
US8134717B2 (en) 2010-05-21 2012-03-13 LTS Scale Company Dimensional detection system and associated method
CA2788399A1 (fr) 2011-08-31 2013-02-28 Woodtech Measurement Solutions Systeme et methode de detection variable d'objets groupes
RU2521220C2 (ru) * 2012-07-17 2014-06-27 Закрытое акционерное общество "Научно-проектный инстиут "Исследование мостов и других инженерных сооружений" Способ измерения линейных перемещений объекта
DE102012217175A1 (de) * 2012-09-24 2014-03-27 Evonik Litarion Gmbh Verfahren zur Ausrichtung zweier Lasersensoren zueinander
US20150226573A1 (en) * 2014-02-11 2015-08-13 Qualcomm Incorporated Pedometer integrated pedestrian positioning
RU2596557C1 (ru) * 2015-05-05 2016-09-10 Публичное акционерное общество "Северский трубный завод" Способ стабилизации положения металлической полосы в зоне измерения
PL3508315T3 (pl) * 2018-01-03 2021-10-04 Upm Plywood Oy Sposób i układ wytwarzania sklejki

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3612890A (en) * 1969-10-13 1971-10-12 Trw Inc Radiation sensitive optical gaging system
US3671726A (en) * 1969-05-23 1972-06-20 Morvue Inc Electro-optical apparatus for precise on-line measurement of the thickness of moving strip material
DE2602865A1 (de) * 1975-01-29 1976-08-05 Centre Rech Metallurgique Verfahren und vorrichtung zum messen der dicke eines produktes

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3289298A (en) * 1964-06-01 1966-12-06 Collins Microflat Company Inc Calibration apparatus for surface plates
US3393600A (en) * 1965-09-10 1968-07-23 Atomic Energy Commission Usa Optical ranging apparatus
US3565531A (en) * 1969-03-12 1971-02-23 Sanders Associates Inc Electro-optical thickness measurement apparatus
US3646331A (en) * 1970-09-03 1972-02-29 Kollmorgen Corp Automatic 100{11 line adjustment of spectrophotometers
GB1439322A (en) * 1972-06-08 1976-06-16 Hawker Siddeley Dynamics Ltd Optical instruments
SU449235A1 (ru) * 1973-07-13 1974-11-05 Государствееный Научно-Исследовательский Институт Машиноведения Оптический измеритель перемещений
CH572201A5 (fr) * 1973-08-31 1976-01-30 Alcyon
US4040738A (en) * 1975-03-20 1977-08-09 Gulton Industries, Inc. Railroad track profile spacing and alignment apparatus
US4103177A (en) * 1975-12-01 1978-07-25 Phillips Petroleum Company Surface quality analysis
DE2703932A1 (de) * 1976-02-02 1977-09-01 Perkin Elmer Corp Verfahren und vorrichtung zur fehlerkorrektur
SE406643B (sv) * 1977-02-16 1979-02-19 Aga Ab Elektronisk korrigeringsanordning for en lengd- eller vinkelmetare
FR2393295A1 (fr) * 1977-05-31 1978-12-29 Snecma Appareil de mesure du pouvoir transmissif de l'atmosphere

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3671726A (en) * 1969-05-23 1972-06-20 Morvue Inc Electro-optical apparatus for precise on-line measurement of the thickness of moving strip material
US3671726B1 (fr) * 1969-05-23 1984-02-21
US3612890A (en) * 1969-10-13 1971-10-12 Trw Inc Radiation sensitive optical gaging system
DE2602865A1 (de) * 1975-01-29 1976-08-05 Centre Rech Metallurgique Verfahren und vorrichtung zum messen der dicke eines produktes

Also Published As

Publication number Publication date
EP0047250A1 (fr) 1982-03-17
JPS57500441A (fr) 1982-03-11
US4375921A (en) 1983-03-08
EP0150408A3 (fr) 1987-04-22
EP0150408A2 (fr) 1985-08-07
EP0047250A4 (fr) 1982-07-13
WO1981002628A1 (fr) 1981-09-17
DE3071910D1 (en) 1987-04-02

Similar Documents

Publication Publication Date Title
EP0047250B1 (fr) Appareil de mesure de dimensions
CN201803699U (zh) 测量镜面反射表面的相对位置的装置
US3565531A (en) Electro-optical thickness measurement apparatus
US5291271A (en) Measurement of transparent container wall thickness
EP0279347B1 (fr) Capteur de déplacement sur l'axe optique
JPS6127682B2 (fr)
CN111721235B (zh) 一种光电式边缘检测系统及其检测方法
EP0075159B1 (fr) Système de mesure électro-optique
US4920273A (en) Z-axis measurement system
US4484069A (en) Apparatus and method for sensing distance
EP0614068B1 (fr) Méthode pour mesurer la largeur du plan d'orientation d'un lingot monocristallin
JPH06281418A (ja) 凹凸を有する板状透明体の光学的厚さ測定方法
JP3526724B2 (ja) 形状測定装置における誤差補正方法
JPH0560532A (ja) 光学式形状計
JPH0438049B2 (fr)
JPH0781841B2 (ja) 厚み測定装置
JPH07113547B2 (ja) 試料面位置測定装置
JPH051904A (ja) 光学式形状計
Harding Application of an on-machine gage for diameter measurements
KR100380133B1 (ko) 광센서에서 피측정물의 반사광 강도에 따른 오차 보상방법
JPH0240505A (ja) 距離測定装置
Harding et al. Design of an on-machine gauge for diameter measurements
JPH03195915A (ja) 光走査型変位センサ
JPS5832103A (ja) 非接触測定装置
JPH03251708A (ja) パラボラアンテナ面形状測定装置

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 19811029

AK Designated contracting states

Designated state(s): DE FR GB SE

RBV Designated contracting states (corrected)

Designated state(s): DE FR GB SE

17Q First examination report despatched

Effective date: 19860414

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): DE FR GB SE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19870225

REF Corresponds to:

Ref document number: 3071910

Country of ref document: DE

Date of ref document: 19870402

EN Fr: translation not filed
PLBI Opposition filed

Free format text: ORIGINAL CODE: 0009260

26 Opposition filed

Opponent name: FIRMA CARL ZEISS

Effective date: 19870918

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 19891031

Year of fee payment: 10

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 19891229

Year of fee payment: 10

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: SE

Payment date: 19901004

Year of fee payment: 11

RDAG Patent revoked

Free format text: ORIGINAL CODE: 0009271

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: PATENT REVOKED

27W Patent revoked

Effective date: 19901124

GBPR Gb: patent revoked under art. 102 of the ep convention designating the uk as contracting state
EUG Se: european patent has lapsed

Ref document number: 81900361.7

Effective date: 19910417