DK4282A - Fremgangmaade til hydrering af siliciumtetrachlorid - Google Patents

Fremgangmaade til hydrering af siliciumtetrachlorid Download PDF

Info

Publication number
DK4282A
DK4282A DK4282A DK4282A DK4282A DK 4282 A DK4282 A DK 4282A DK 4282 A DK4282 A DK 4282A DK 4282 A DK4282 A DK 4282A DK 4282 A DK4282 A DK 4282A
Authority
DK
Denmark
Prior art keywords
hydrating
procedure
silicone tetrachloride
tetrachloride
silicone
Prior art date
Application number
DK4282A
Other languages
English (en)
Inventor
M J Rice
K R Sarma
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of DK4282A publication Critical patent/DK4282A/da

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J12/00—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor
    • B01J12/002—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor carried out in the plasma state
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894—Processes carried out in the presence of a plasma
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S423/00—Chemistry of inorganic compounds
    • Y10S423/09—Reaction techniques
    • Y10S423/10—Plasma energized

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Silicon Compounds (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
DK4282A 1980-05-09 1982-01-08 Fremgangmaade til hydrering af siliciumtetrachlorid DK4282A (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/148,094 US4309259A (en) 1980-05-09 1980-05-09 High pressure plasma hydrogenation of silicon tetrachloride
PCT/US1981/000462 WO1981003168A1 (en) 1980-05-09 1981-04-06 High pressure plasma hydrogenation of silicon tetrachloride

Publications (1)

Publication Number Publication Date
DK4282A true DK4282A (da) 1982-01-08

Family

ID=22524246

Family Applications (1)

Application Number Title Priority Date Filing Date
DK4282A DK4282A (da) 1980-05-09 1982-01-08 Fremgangmaade til hydrering af siliciumtetrachlorid

Country Status (7)

Country Link
US (1) US4309259A (da)
EP (1) EP0052615B1 (da)
JP (1) JPS6117765B2 (da)
DK (1) DK4282A (da)
IT (1) IT1170944B (da)
NO (1) NO813769L (da)
WO (1) WO1981003168A1 (da)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2530638A1 (fr) * 1982-07-26 1984-01-27 Rhone Poulenc Spec Chim Procede de preparation d'un melange a base de trichlorosilane utilisable pour la preparation de silicium de haute purete
US4542004A (en) * 1984-03-28 1985-09-17 Solavolt International Process for the hydrogenation of silicon tetrachloride
DE3843313A1 (de) * 1988-12-22 1990-06-28 Wacker Chemitronic Verfahren zur entfernung von gasfoermigen kontaminierenden, insbesondere dotierstoffverbindungen aus halogensilanverbindungen enthaltenden traegergasen
JP2978746B2 (ja) * 1995-10-31 1999-11-15 日本電気株式会社 半導体装置の製造方法
DE102005024041A1 (de) 2005-05-25 2006-11-30 City Solar Ag Verfahren zur Herstellung von Silicium aus Halogensilanen
DE102006034061A1 (de) * 2006-07-20 2008-01-24 REV Renewable Energy Ventures, Inc., Aloha Polysilanverarbeitung und Verwendung
DE102006043929B4 (de) * 2006-09-14 2016-10-06 Spawnt Private S.À.R.L. Verfahren zur Herstellung von festen Polysilanmischungen
DE102006050329B3 (de) * 2006-10-25 2007-12-13 Wacker Chemie Ag Verfahren zur Herstellung von Trichlorsilan
DE102007013219A1 (de) * 2007-03-15 2008-09-18 Rev Renewable Energy Ventures, Inc. Plasmagestützte Synthese
JP4714196B2 (ja) * 2007-09-05 2011-06-29 信越化学工業株式会社 トリクロロシランの製造方法および多結晶シリコンの製造方法
CN101254921B (zh) * 2008-03-19 2010-10-06 四川金谷多晶硅有限公司 一种转化四氯化硅制取三氯氢硅和多晶硅的方法
DE102008025260B4 (de) 2008-05-27 2010-03-18 Rev Renewable Energy Ventures, Inc. Halogeniertes Polysilan und thermisches Verfahren zu dessen Herstellung
DE102008025261B4 (de) 2008-05-27 2010-03-18 Rev Renewable Energy Ventures, Inc. Halogeniertes Polysilan und plasmachemisches Verfahren zu dessen Herstellung
US8834684B2 (en) 2009-04-14 2014-09-16 Rf Thummin Technologies, Inc. Method and apparatus for excitation of resonances in molecules
CN102439421A (zh) * 2009-05-22 2012-05-02 陶氏康宁公司 使用拉曼光谱法定量测量气相工艺中间体
DE102009056437B4 (de) 2009-12-02 2013-06-27 Spawnt Private S.À.R.L. Verfahren und Vorrichtung zur Herstellung von kurzkettigen halogenierten Polysilanen
DE102009056731A1 (de) 2009-12-04 2011-06-09 Rev Renewable Energy Ventures, Inc. Halogenierte Polysilane und Polygermane
WO2011116187A1 (en) 2010-03-17 2011-09-22 Rf Thummim Technologies, Inc. Method and apparatus for electromagnetically producing a disturbance in a medium with simultaneous resonance of acoustic waves created by the disturbance
US8029756B1 (en) 2010-03-30 2011-10-04 Peak Sun Sillcon Corporation Closed-loop silicon production
DE102010025948A1 (de) 2010-07-02 2012-01-05 Spawnt Private S.À.R.L. Polysilane mittlerer Kettenlänge und Verfahren zu deren Herstellung
JP5980308B2 (ja) * 2011-03-25 2016-08-31 エボニック デグサ ゲーエムベーハーＥｖｏｎｉｋ Ｄｅｇｕｓｓａ ＧｍｂＨ フランジ端部又は縁曲げ端部を有する炭化ケイ素管の使用
KR101329750B1 (ko) * 2011-05-18 2013-11-14 (주)그린사이언스 플라즈마 수소화 반응 장치
CN104261413B (zh) * 2014-09-19 2016-03-23 天津大学 低温等离子体还原四氯化硅生产三氯氢硅方法及其装置
CN106495165B (zh) * 2016-11-23 2018-02-16 亚洲硅业（青海）有限公司 一种以四氯化硅制备三氯氢硅的装置及方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB838378A (en) * 1956-10-01 1960-06-22 Saint Gobain An improved process for the production of metals and other chemical elements of metallic character in a state of high purity
US3933985A (en) * 1971-09-24 1976-01-20 Motorola, Inc. Process for production of polycrystalline silicon
US3840750A (en) * 1972-11-06 1974-10-08 Plasmachem Plasma apparatus for carrying out high temperature chemical reactions
US4102985A (en) * 1977-01-06 1978-07-25 Westinghouse Electric Corp. Arc heater production of silicon involving a hydrogen reduction

Also Published As

Publication number Publication date
IT1170944B (it) 1987-06-03
IT8148392A0 (it) 1981-05-04
EP0052615B1 (en) 1985-01-16
EP0052615A4 (en) 1982-09-03
JPS57500559A (da) 1982-04-01
NO813769L (no) 1981-11-12
EP0052615A1 (en) 1982-06-02
WO1981003168A1 (en) 1981-11-12
JPS6117765B2 (da) 1986-05-09
US4309259A (en) 1982-01-05

Similar Documents

Publication Publication Date Title
DK4282A (da) Fremgangmaade til hydrering af siliciumtetrachlorid
DK376381A (da) Fremgangsmaade til mikroindkapsling
FI811072L (fi) Anordning foer genomstickning av hud
DK246583D0 (da) Fremgangsmade til doping af tinoxid
DK133585A (da) Fremgangsmaade til fremstilling af siliciumtetrafluorid
DK354281A (da) Fremgangsmaade til geninkorporering af kakaoaroma
DK281581A (da) Fremgangsmaade til kontinuerlig fremstilling af lavere alkoholer
SE8005475L (sv) Projektionsoptik
AT384682B (de) Objektiv
AT383427B (de) Mehrstaerken-brillenlinse
DK364481A (da) Fremgangsmaade til fremstilling af caprylolactamer
DK553582A (da) Fremgangsmaade til fremstilling af naphthoxyalkylaminer
DK579181A (da) Fremgangsmaade til fremstilling af diarylthiophener
ATA177082A (de) Uebersichtsobjektiv
DK153841C (da) Fremgangsmaade til fremstilling af ranitidin
DK12581A (da) Fremgangsmaade til fremstilling af kijanimicin
SE7908559L (sv) Stabiliserad optisk anordning
DK127179A (da) Fremgangsmaade til fremstilling af monokaryoner
DK62181A (da) Praeparat til fjernelse af maling
DK411881A (da) Fremgangsmaade til fremstilling af 1-oxa-beta-lactamantibiotika
DK380981A (da) Fremgangsmaade til fremstilling af benzoquinoliziner
DK236681A (da) Fremgangsmaade til fremstilling af tinforbindelser
DK362381A (da) Fremgangsmaade til fremstilling af polyazaheterocycliske fordelser
DK190981A (da) Fremgangmaade til fremstilling af cyclopentenoloner
BR8108931A (pt) Conjunto otico de ampliacao multipla

Legal Events

Date Code Title Description
AHB Application shelved due to non-payment