DK2411163T3 - Waferbundet cmut-array med ledende kontakthuller - Google Patents
Waferbundet cmut-array med ledende kontakthullerInfo
- Publication number
- DK2411163T3 DK2411163T3 DK10714943.7T DK10714943T DK2411163T3 DK 2411163 T3 DK2411163 T3 DK 2411163T3 DK 10714943 T DK10714943 T DK 10714943T DK 2411163 T3 DK2411163 T3 DK 2411163T3
- Authority
- DK
- Denmark
- Prior art keywords
- array
- contact holes
- wafer bonded
- leading contact
- cmut
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76898—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics formed through a semiconductor substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/481—Internal lead connections, e.g. via connections, feedthrough structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Bipolar Transistors (AREA)
- Pressure Sensors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB0905256A GB0905256D0 (en) | 2009-03-26 | 2009-03-26 | Ultrasound transducer backing layer |
| GB0905255A GB0905255D0 (en) | 2009-03-26 | 2009-03-26 | Cmut array |
| GB0909296A GB0909296D0 (en) | 2009-05-28 | 2009-05-28 | Ultrasound transsducer damping layer |
| PCT/GB2010/000583 WO2010109205A2 (en) | 2009-03-26 | 2010-03-26 | Cmut array |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DK2411163T3 true DK2411163T3 (da) | 2013-06-10 |
Family
ID=42308937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK10714943.7T DK2411163T3 (da) | 2009-03-26 | 2010-03-26 | Waferbundet cmut-array med ledende kontakthuller |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20120074509A1 (enExample) |
| EP (4) | EP2662153A1 (enExample) |
| JP (1) | JP5744002B2 (enExample) |
| CN (1) | CN102427890A (enExample) |
| DK (1) | DK2411163T3 (enExample) |
| ES (1) | ES2416182T3 (enExample) |
| WO (1) | WO2010109205A2 (enExample) |
Families Citing this family (47)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008136198A1 (ja) * | 2007-04-27 | 2008-11-13 | Hitachi, Ltd. | 超音波トランスデューサ及び超音波撮像装置 |
| FI124354B (fi) * | 2011-04-04 | 2014-07-15 | Okmetic Oyj | Menetelmä yhden tai useamman polykiteisen piikerroksen pinnoittamiseksi substraatille |
| US8852103B2 (en) | 2011-10-17 | 2014-10-07 | Butterfly Network, Inc. | Transmissive imaging and related apparatus and methods |
| US9220415B2 (en) * | 2011-10-25 | 2015-12-29 | Andreas Mandelis | Systems and methods for frequency-domain photoacoustic phased array imaging |
| WO2013089648A1 (en) * | 2011-12-16 | 2013-06-20 | Agency For Science, Technology And Research | Capacitive micromachined ultrasonic transducer arrangement and method of fabricating the same |
| JP2013226389A (ja) * | 2012-03-31 | 2013-11-07 | Canon Inc | 探触子及びその製造方法、及びそれを用いた被検体情報取得装置 |
| CN104379268B (zh) * | 2012-05-31 | 2017-02-22 | 皇家飞利浦有限公司 | 晶片及其制造方法 |
| US9012324B2 (en) * | 2012-08-24 | 2015-04-21 | United Microelectronics Corp. | Through silicon via process |
| KR101851569B1 (ko) | 2012-11-28 | 2018-04-24 | 삼성전자주식회사 | 초음파 변환기 및 그 제조방법 |
| SG11201505616YA (en) | 2013-01-18 | 2015-09-29 | Univ Yale | Superconducting device with at least one enclosure |
| EP2946414B1 (en) * | 2013-01-18 | 2024-10-30 | Yale University | Methods for making a superconducting device with at least one enclosure |
| US9499392B2 (en) | 2013-02-05 | 2016-11-22 | Butterfly Network, Inc. | CMOS ultrasonic transducers and related apparatus and methods |
| TWI623081B (zh) | 2013-03-15 | 2018-05-01 | 蝴蝶網路公司 | 互補式金屬氧化物半導體(cmos)超音波換能器以及用於形成其之方法 |
| CA2903479C (en) | 2013-03-15 | 2023-10-10 | Butterfly Network, Inc. | Monolithic ultrasonic imaging devices, systems and methods |
| US9667889B2 (en) | 2013-04-03 | 2017-05-30 | Butterfly Network, Inc. | Portable electronic devices with integrated imaging capabilities |
| EP3024594A2 (en) | 2013-07-23 | 2016-06-01 | Butterfly Network Inc. | Interconnectable ultrasound transducer probes and related methods and apparatus |
| WO2015057839A1 (en) | 2013-10-15 | 2015-04-23 | Yale University | Low-noise josephson junction-based directional amplifier |
| KR20150046637A (ko) * | 2013-10-22 | 2015-04-30 | 삼성전자주식회사 | 광음향 이미지와 초음파 이미지를 위한 광대역 초음파 프로브 |
| EP3071935A4 (en) * | 2013-11-22 | 2017-06-28 | Sunnybrook Health Sciences Centre | Ultrasonic transducer with backing having spatially segmented surface |
| KR20150065067A (ko) * | 2013-12-04 | 2015-06-12 | 삼성전자주식회사 | 정전용량 미세가공 초음파 변환기 및 그 제조방법 |
| US9948254B2 (en) | 2014-02-21 | 2018-04-17 | Yale University | Wireless Josephson bifurcation amplifier |
| CN106659464B (zh) | 2014-04-18 | 2020-03-20 | 蝴蝶网络有限公司 | 互补金属氧化物半导体(cmos)晶片中的超声换能器及相关装置和方法 |
| TWI671059B (zh) | 2014-04-18 | 2019-09-11 | 美商蝴蝶網路公司 | 超音波成像壓縮方法和設備 |
| CN106461767B (zh) | 2014-04-18 | 2019-05-28 | 蝴蝶网络有限公司 | 单衬底超声成像装置的架构、相关设备和方法 |
| US9067779B1 (en) | 2014-07-14 | 2015-06-30 | Butterfly Network, Inc. | Microfabricated ultrasonic transducers and related apparatus and methods |
| EP3233311B1 (en) * | 2014-12-21 | 2021-12-08 | Chirp Microsystems, Inc. | Piezoelectric micromachined ultrasonic transducers with low stress sensitivity and methods of fabrication |
| CA2977968C (en) | 2015-02-27 | 2023-10-17 | Yale University | Techniques for producing quantum amplifiers and related systems and methods |
| EP3262573B1 (en) | 2015-02-27 | 2024-04-03 | Yale University | Techniques for coupling planar qubits to non-planar resonators and related systems and methods |
| KR102493109B1 (ko) | 2015-02-27 | 2023-01-30 | 예일 유니버시티 | 조셉슨 접합-기반 서큘레이터 및 관련 시스템 및 방법 |
| SG11201708202TA (en) | 2015-04-17 | 2017-11-29 | Univ Yale | Wireless josephson parametric converter |
| US10427188B2 (en) | 2015-07-30 | 2019-10-01 | North Carolina State University | Anodically bonded vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) |
| US9987661B2 (en) | 2015-12-02 | 2018-06-05 | Butterfly Network, Inc. | Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods |
| US11184006B2 (en) | 2016-01-15 | 2021-11-23 | Yale University | Techniques for manipulation of two-qubit quantum states and related systems and methods |
| CN106998522B (zh) * | 2016-01-25 | 2023-07-28 | 中国科学院苏州纳米技术与纳米仿生研究所 | 微电容超声传感器 |
| FR3060844B1 (fr) | 2016-12-15 | 2018-12-14 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Dispositif microelectronique acoustique |
| US10196261B2 (en) | 2017-03-08 | 2019-02-05 | Butterfly Network, Inc. | Microfabricated ultrasonic transducers and related apparatus and methods |
| US10512936B2 (en) | 2017-06-21 | 2019-12-24 | Butterfly Network, Inc. | Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections |
| WO2019099013A1 (en) | 2017-11-16 | 2019-05-23 | Chirp Microsystems, Inc. | Piezoelectric micromachined ultrasonic transducer with a patterned membrane structure |
| US11737376B2 (en) | 2017-12-11 | 2023-08-22 | Yale University | Superconducting nonlinear asymmetric inductive element and related systems and methods |
| JP2021522734A (ja) * | 2018-05-03 | 2021-08-30 | バタフライ ネットワーク,インコーポレイテッド | Cmosセンサ上の超音波トランスデューサ用の圧力ポート |
| US11223355B2 (en) | 2018-12-12 | 2022-01-11 | Yale University | Inductively-shunted transmon qubit for superconducting circuits |
| WO2020150348A1 (en) | 2019-01-17 | 2020-07-23 | Yale University | Josephson nonlinear circuit |
| EP4176978B1 (en) * | 2019-03-14 | 2023-11-22 | Imec VZW | Flexible ultrasound array |
| EP3909692A1 (en) * | 2020-05-14 | 2021-11-17 | Koninklijke Philips N.V. | An ultrasound transducer and a tiled array of ultrasound transducers |
| FR3114255B1 (fr) * | 2020-09-18 | 2023-05-05 | Moduleus | Transducteur CMUT |
| US20220409170A1 (en) * | 2021-06-23 | 2022-12-29 | Boston Scientific Scimed, Inc. | Ultrasound transducer |
| FR3135858B1 (fr) * | 2022-05-23 | 2025-04-18 | Vermon | Transducteur CMUT et procédé de fabrication d’un transducteur CMUT |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01312485A (ja) * | 1988-06-13 | 1989-12-18 | Agency Of Ind Science & Technol | 静電容量型超音波トランスデューサ |
| US5267221A (en) * | 1992-02-13 | 1993-11-30 | Hewlett-Packard Company | Backing for acoustic transducer array |
| JP3512500B2 (ja) * | 1994-12-26 | 2004-03-29 | 株式会社東芝 | 超音波トランスジューサとその製造方法 |
| US5648941A (en) * | 1995-09-29 | 1997-07-15 | Hewlett-Packard Company | Transducer backing material |
| US6266857B1 (en) * | 1998-02-17 | 2001-07-31 | Microsound Systems, Inc. | Method of producing a backing structure for an ultrasound transceiver |
| US6430109B1 (en) * | 1999-09-30 | 2002-08-06 | The Board Of Trustees Of The Leland Stanford Junior University | Array of capacitive micromachined ultrasonic transducer elements with through wafer via connections |
| US6467138B1 (en) * | 2000-05-24 | 2002-10-22 | Vermon | Integrated connector backings for matrix array transducers, matrix array transducers employing such backings and methods of making the same |
| WO2003100846A2 (de) * | 2002-05-23 | 2003-12-04 | Schott Ag | Glasmaterial für hochfrequenzanwendungen |
| US6958255B2 (en) * | 2002-08-08 | 2005-10-25 | The Board Of Trustees Of The Leland Stanford Junior University | Micromachined ultrasonic transducers and method of fabrication |
| US7321181B2 (en) * | 2004-04-07 | 2008-01-22 | The Board Of Trustees Of The Leland Stanford Junior University | Capacitive membrane ultrasonic transducers with reduced bulk wave generation and method |
| US7545075B2 (en) * | 2004-06-04 | 2009-06-09 | The Board Of Trustees Of The Leland Stanford Junior University | Capacitive micromachined ultrasonic transducer array with through-substrate electrical connection and method of fabricating same |
| JP5275565B2 (ja) * | 2004-06-07 | 2013-08-28 | オリンパス株式会社 | 静電容量型超音波トランスデューサ |
| KR100618287B1 (ko) * | 2004-08-24 | 2006-08-31 | 삼신이노텍 주식회사 | 블루투스를 이용한 펜타입의 휴대용 무선통신 단말기 |
| ITRM20050093A1 (it) * | 2005-03-04 | 2006-09-05 | Consiglio Nazionale Ricerche | Procedimento micromeccanico superficiale di fabbricazione di trasduttori ultracustici capacitivi microlavorati e relativo trasduttore ultracustico capacitivo microlavorato. |
| KR20080021635A (ko) * | 2005-06-07 | 2008-03-07 | 코닌클리케 필립스 일렉트로닉스 엔.브이. | 초음파 감지기 조립체를 위한 다수성분 받침 블록 |
| US20070180916A1 (en) * | 2006-02-09 | 2007-08-09 | General Electric Company | Capacitive micromachined ultrasound transducer and methods of making the same |
| JP4804961B2 (ja) * | 2006-03-03 | 2011-11-02 | オリンパスメディカルシステムズ株式会社 | 超音波振動子及びそれを搭載した体腔内超音波診断装置 |
| US7741686B2 (en) * | 2006-07-20 | 2010-06-22 | The Board Of Trustees Of The Leland Stanford Junior University | Trench isolated capacitive micromachined ultrasonic transducer arrays with a supporting frame |
| US7843022B2 (en) * | 2007-10-18 | 2010-11-30 | The Board Of Trustees Of The Leland Stanford Junior University | High-temperature electrostatic transducers and fabrication method |
| WO2009154091A1 (ja) * | 2008-06-17 | 2009-12-23 | 株式会社日立製作所 | 半導体装置の製造方法 |
-
2010
- 2010-03-26 WO PCT/GB2010/000583 patent/WO2010109205A2/en not_active Ceased
- 2010-03-26 DK DK10714943.7T patent/DK2411163T3/da active
- 2010-03-26 US US13/259,809 patent/US20120074509A1/en not_active Abandoned
- 2010-03-26 EP EP20130167734 patent/EP2662153A1/en not_active Withdrawn
- 2010-03-26 CN CN2010800225984A patent/CN102427890A/zh active Pending
- 2010-03-26 ES ES10714943T patent/ES2416182T3/es active Active
- 2010-03-26 EP EP10714943.7A patent/EP2411163B1/en not_active Not-in-force
- 2010-03-26 JP JP2012501381A patent/JP5744002B2/ja not_active Expired - Fee Related
- 2010-03-26 EP EP20130167735 patent/EP2659987A1/en not_active Withdrawn
- 2010-03-26 EP EP13167736.1A patent/EP2669019A1/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| ES2416182T3 (es) | 2013-07-30 |
| EP2662153A1 (en) | 2013-11-13 |
| JP5744002B2 (ja) | 2015-07-01 |
| WO2010109205A3 (en) | 2011-03-03 |
| WO2010109205A2 (en) | 2010-09-30 |
| EP2411163A2 (en) | 2012-02-01 |
| CN102427890A (zh) | 2012-04-25 |
| EP2411163B1 (en) | 2013-05-15 |
| EP2659987A1 (en) | 2013-11-06 |
| JP2012521704A (ja) | 2012-09-13 |
| US20120074509A1 (en) | 2012-03-29 |
| EP2669019A1 (en) | 2013-12-04 |
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