DK1359593T3 - SPM-sensor og fremgangsmåde til dens fremstilling - Google Patents

SPM-sensor og fremgangsmåde til dens fremstilling

Info

Publication number
DK1359593T3
DK1359593T3 DK02006227T DK02006227T DK1359593T3 DK 1359593 T3 DK1359593 T3 DK 1359593T3 DK 02006227 T DK02006227 T DK 02006227T DK 02006227 T DK02006227 T DK 02006227T DK 1359593 T3 DK1359593 T3 DK 1359593T3
Authority
DK
Denmark
Prior art keywords
manufacture
spm sensor
spm
sensor
Prior art date
Application number
DK02006227T
Other languages
English (en)
Inventor
Stefan Lutter
Original Assignee
Nanoworld Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanoworld Ag filed Critical Nanoworld Ag
Application granted granted Critical
Publication of DK1359593T3 publication Critical patent/DK1359593T3/da

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/16—Probe manufacture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper
DK02006227T 2002-03-20 2002-03-20 SPM-sensor og fremgangsmåde til dens fremstilling DK1359593T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP02006227A EP1359593B1 (de) 2002-03-20 2002-03-20 SPM-Sensor und Verfahren zur Herstellung desselben

Publications (1)

Publication Number Publication Date
DK1359593T3 true DK1359593T3 (da) 2004-08-09

Family

ID=28799633

Family Applications (1)

Application Number Title Priority Date Filing Date
DK02006227T DK1359593T3 (da) 2002-03-20 2002-03-20 SPM-sensor og fremgangsmåde til dens fremstilling

Country Status (5)

Country Link
US (1) US6958124B2 (da)
EP (1) EP1359593B1 (da)
JP (1) JP3813591B2 (da)
DE (1) DE50200467D1 (da)
DK (1) DK1359593T3 (da)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE50201770D1 (de) * 2002-03-20 2005-01-20 Nanoworld Ag Neuchatel Verfahren zur Herstellung eines SPM-Sensors
KR100624434B1 (ko) * 2004-09-07 2006-09-19 삼성전자주식회사 저항성 팁을 구비한 반도체 탐침 및 그 제조방법
TWI264542B (en) * 2005-03-22 2006-10-21 Nat Applied Res Laboratories Front-wing probe cantilever of electrical scanning probe microscopy
US7571638B1 (en) 2005-05-10 2009-08-11 Kley Victor B Tool tips with scanning probe microscopy and/or atomic force microscopy applications
US9423693B1 (en) 2005-05-10 2016-08-23 Victor B. Kley In-plane scanning probe microscopy tips and tools for wafers and substrates with diverse designs on one wafer or substrate
DE602005009285D1 (de) * 2005-06-14 2008-10-09 Nat Applied Res Laboratories Biegebalken mit vorderen Flügeln für die leitfähige Sonde eines elektrischen Rastersondenmikroskops.
US7784107B2 (en) 2006-06-02 2010-08-24 Victor B. Kley High speed measurement, analysis and imaging systems and methods for length scales from meter to sub-nanometer
CN101501785A (zh) * 2006-06-02 2009-08-05 维克托·B·克利 针对米到亚纳米长度范围内的高速测量、分析和成像的系统及方法
US8062535B2 (en) * 2007-01-31 2011-11-22 Chung Hoon Lee Video rate-enabling probes for atomic force microscopy
EP2104111A1 (de) 2008-03-20 2009-09-23 Nanoworld AG SPM-Sonde mit verkürztem Federbalken
US8828243B2 (en) 2010-09-02 2014-09-09 Applied Nanostructures, Inc. Scanning probe having integrated silicon tip with cantilever
US8307461B2 (en) 2011-01-20 2012-11-06 Primenano, Inc. Fabrication of a microcantilever microwave probe
EP2502876B1 (de) * 2011-03-24 2014-11-19 NanoWorld AG Mikromechanisches Bauelement mit Federbalken und integriertem elektrischen Funktionselement
US9778572B1 (en) 2013-03-15 2017-10-03 Victor B. Kley In-plane scanning probe microscopy tips and tools for wafers and substrates with diverse designs on one wafer or substrate

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE68903951T2 (de) * 1989-08-16 1993-07-08 Ibm Verfahren fuer die herstellung mikromechanischer messfuehler fuer afm/stm-profilometrie und mikromechanischer messfuehlerkopf.
US5580827A (en) * 1989-10-10 1996-12-03 The Board Of Trustees Of The Leland Stanford Junior University Casting sharpened microminiature tips
DE69012555T2 (de) 1990-07-25 1995-04-06 Ibm Methode zur Herstellung von mikromechanischen Sensoren für AFM/STM/MFM-Profilometrie und mikromechanischer AFM/STM/MFM-Sensorkopf.
US5923033A (en) * 1994-09-14 1999-07-13 Olympus Optical Co., Ltd. Integrated SPM sensor having a photodetector mounted on a probe on a free end of a supported cantilever
US5466948A (en) * 1994-10-11 1995-11-14 John M. Baker Monolithic silicon opto-coupler using enhanced silicon based LEDS
US5948972A (en) * 1994-12-22 1999-09-07 Kla-Tencor Corporation Dual stage instrument for scanning a specimen
EP0726444B1 (en) * 1995-02-10 2001-10-31 Bruker Analytik Gmbh Magnetic resonance method and apparatus for detecting an atomic structure of a sample along a surface thereof
JPH08262040A (ja) 1995-03-17 1996-10-11 Olympus Optical Co Ltd Ａｆｍカンチレバー
JPH08313541A (ja) * 1995-05-16 1996-11-29 Olympus Optical Co Ltd 走査型プローブ顕微鏡用カンチレバー及びその製造方法
US6000280A (en) * 1995-07-20 1999-12-14 Cornell Research Foundation, Inc. Drive electrodes for microfabricated torsional cantilevers
JPH09105755A (ja) * 1995-10-11 1997-04-22 Olympus Optical Co Ltd Ａｆｍカンチレバー及びその製造方法
US5744799A (en) 1996-05-20 1998-04-28 Ohara; Tetsuo Apparatus for and method of real-time nanometer-scale position measurement of the sensor of a scanning tunneling microscope or other sensor scanning atomic or other undulating surfaces
JP3883699B2 (ja) * 1997-11-20 2007-02-21 エスアイアイ・ナノテクノロジー株式会社 自己検知型ｓｐｍプローブ及びｓｐｍ装置
US6666075B2 (en) * 1999-02-05 2003-12-23 Xidex Corporation System and method of multi-dimensional force sensing for scanning probe microscopy
EP1197726A1 (en) * 2000-10-04 2002-04-17 Eidgenössische Technische Hochschule Zürich Multipurpose Sensor and cantilever for it
US6888135B2 (en) * 2000-10-18 2005-05-03 Nec Corporation Scanning probe microscope with probe formed by single conductive material
DE50201770D1 (de) * 2002-03-20 2005-01-20 Nanoworld Ag Neuchatel Verfahren zur Herstellung eines SPM-Sensors
DE50201728D1 (de) * 2002-05-03 2005-01-13 Nanoworld Ag Neuchatel SPM-Sensor und Verfahren zu dessen Herstellung

Also Published As

Publication number Publication date
EP1359593B1 (de) 2004-05-19
US6958124B2 (en) 2005-10-25
DE50200467D1 (de) 2004-06-24
EP1359593A1 (de) 2003-11-05
JP2003302328A (ja) 2003-10-24
US20040046119A1 (en) 2004-03-11
JP3813591B2 (ja) 2006-08-23

Similar Documents

Publication Publication Date Title
NO20032220D0 (no) Löfteverktöy II og fremgangsmåte for anvendelse av samme
DE602004010273D1 (de) Amplifikationsmethode
DK1664746T3 (da) Antioxidantsensor og fremgangsmåde
BRPI0313238A2 (pt) método
DK1691196T3 (da) Chip med mikrobrøndsarray og fremgangsmåde til fremstilling heraf
DK1354224T3 (da) Sensorindretning, fremgangsmåde til dens fremstilling og anvendelse
DK1628749T3 (da) Anordninger og fremgangsmåder til biomateriel produktion
DK1620551T3 (da) Phospholipase og fremgangsmåde til fremstilling deraf
NO20052266D0 (no) Dunleks rustfritt stal og fremstillingsmetode derav
IS7335A (is) Tæki og aðferð til að búa til kristallaðar agnir
DK1359593T3 (da) SPM-sensor og fremgangsmåde til dens fremstilling
ATE502118T1 (de) Amplifizierungsverfahren
DK1568280T3 (da) Fremgangsmåde til fremstilling af fermenteret mælk og fermenteret mælk
IS7572A (is) Aðferð og efni til lækninga
NO20043505L (no) Rorelement, samt anordning og fremgangsmate for tilvirkning
DK1578738T3 (da) Escitalopram-hydrobromid og fremgangsmåde til fremstilling deraf
EP1598876A4 (en) SEMICONDUCTOR DETECTOR AND METHOD FOR PRODUCING SAME
DK1662867T3 (da) Insekticid-forbindelser og fremgangsmåder til valg deraf
DK1639107T3 (da) Forbedrede proteaser og fremgangsmåder til fremstilling deraf
DE60333210D1 (de) Desinfektionsmethode
NO20035626D0 (no) Metode
FI20022260A0 (fi) Koodausmenetelmä ja -järjestely kuville
NO20035401D0 (no) Metode
NO20023358D0 (no) Metode
FI20022033A (fi) Kaukokartoitusmenetelmä