DK1356496T3 - Apparat til fordampning af materialer til coating af genstande - Google Patents

Apparat til fordampning af materialer til coating af genstande

Info

Publication number
DK1356496T3
DK1356496T3 DK01271645T DK01271645T DK1356496T3 DK 1356496 T3 DK1356496 T3 DK 1356496T3 DK 01271645 T DK01271645 T DK 01271645T DK 01271645 T DK01271645 T DK 01271645T DK 1356496 T3 DK1356496 T3 DK 1356496T3
Authority
DK
Denmark
Prior art keywords
evaporating materials
coating objects
coating
cathode
source
Prior art date
Application number
DK01271645T
Other languages
Danish (da)
English (en)
Inventor
Pavel Holubar
Mojmir Jilek
Original Assignee
Shm S R O
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shm S R O filed Critical Shm S R O
Application granted granted Critical
Publication of DK1356496T3 publication Critical patent/DK1356496T3/da

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/36—Gas-filled discharge tubes for cleaning surfaces while plating with ions of materials introduced into the discharge, e.g. introduced by evaporation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
DK01271645T 2000-12-18 2001-12-14 Apparat til fordampning af materialer til coating af genstande DK1356496T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CZ20004747A CZ296094B6 (cs) 2000-12-18 2000-12-18 Zarízení pro odparování materiálu k povlakování predmetu
PCT/CZ2001/000075 WO2002050864A1 (en) 2000-12-18 2001-12-14 Apparatus for evaporation of materials for coating of objects

Publications (1)

Publication Number Publication Date
DK1356496T3 true DK1356496T3 (da) 2009-02-02

Family

ID=5472850

Family Applications (1)

Application Number Title Priority Date Filing Date
DK01271645T DK1356496T3 (da) 2000-12-18 2001-12-14 Apparat til fordampning af materialer til coating af genstande

Country Status (13)

Country Link
US (1) US20040069233A1 (cs)
EP (1) EP1356496B1 (cs)
KR (1) KR20020087056A (cs)
CN (1) CN1404620A (cs)
AT (1) ATE408890T1 (cs)
AU (2) AU2002220482A1 (cs)
CZ (1) CZ296094B6 (cs)
DE (1) DE60135875D1 (cs)
DK (1) DK1356496T3 (cs)
ES (1) ES2311497T3 (cs)
PT (1) PT1356496E (cs)
SI (1) SI1356496T1 (cs)
WO (2) WO2002050864A1 (cs)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1524329A1 (de) * 2003-10-17 2005-04-20 Platit AG Modulare Vorrichtung zur Beschichtung von Oberflächen
SG118232A1 (en) * 2004-02-27 2006-06-27 Superiorcoat Private Ltd Cathodic arc coating apparatus
CA2562402C (en) 2004-04-19 2011-10-11 Pivot A.S. A hard, wear-resistant aluminum nitride based coating
DE102004019060B4 (de) * 2004-04-20 2009-01-08 Peter Lazarov Vorrichtung zum Einbringen einer Lichtbogenquelle in eine Beschichtungsanlage für große Substrate oder Bänder
KR100701267B1 (ko) * 2005-11-18 2007-03-29 한국생산기술연구원 저전류 구동형 펄스 아크 발생장치
US7879203B2 (en) * 2006-12-11 2011-02-01 General Electric Company Method and apparatus for cathodic arc ion plasma deposition
ES2774167T3 (es) * 2008-09-02 2020-07-17 Oerlikon Surface Solutions Ag Pfaeffikon Dispositivo de revestimiento para el revestimiento de un sustrato, así como un procedimiento para el revestimiento de un sustrato
EP2163661B1 (de) 2008-09-05 2012-08-01 LMT Fette Werkzeugtechnik GmbH & Co. KG Wälzfräswerkzeug mit einer Beschichtung und Verfahren zur Neubeschichtung eines Wälzfräswerkzeuges
CZ305038B6 (cs) 2009-07-28 2015-04-08 Shm, S. R. O. Způsob vytváření ochranných a funkčních vrstev metodou PVD z katody se sníženou povrchovou elektrickou vodivostí
CZ304905B6 (cs) * 2009-11-23 2015-01-14 Shm, S.R.O. Způsob vytváření PVD vrstev s pomocí rotační cylindrické katody a zařízení k provádění tohoto způsobu
EP2428994A1 (en) * 2010-09-10 2012-03-14 Applied Materials, Inc. Method and system for depositing a thin-film transistor
US20120193226A1 (en) * 2011-02-02 2012-08-02 Beers Russell A Physical vapor deposition system
EP2521159A1 (en) 2011-05-06 2012-11-07 Pivot a.s. Glow discharge apparatus and method with lateral rotating arc cathodes
CH705029A1 (de) 2011-05-27 2012-11-30 Bloesch W Ag Beschichtetes Holzbearbeitungswerkzeug.
CZ201660A3 (cs) 2016-02-05 2017-03-22 Platit A.S. Způsob nanášení otěruvzdorné DLC vrstvy
CN108374154B (zh) * 2018-02-26 2023-06-13 温州职业技术学院 带有复合磁场的类金刚石涂层制备装置及其应用

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD123952A1 (cs) * 1975-12-22 1977-01-26
AT376460B (de) * 1982-09-17 1984-11-26 Kljuchko Gennady V Plasmalichtbogeneinrichtung zum auftragen von ueberzuegen
WO1985003954A1 (en) * 1984-03-02 1985-09-12 Regents Of The University Of Minnesota Controlled vacuum arc material deposition, method and apparatus
EP0285745B1 (de) * 1987-03-06 1993-05-26 Balzers Aktiengesellschaft Verfahren und Vorrichtungen zum Vakuumbeschichten mittels einer elektrischen Bogenentladung
NL8700620A (nl) * 1987-03-16 1988-10-17 Hauzer Holding Kathode boogverdampingsinrichting alsmede werkwijze voor het bedrijven daarvan.
JPH0772338B2 (ja) * 1990-12-25 1995-08-02 株式会社神戸製鋼所 真空アーク蒸着装置
EP0822996B1 (en) * 1995-04-25 2003-07-02 VON ARDENNE ANLAGENTECHNIK GmbH Sputtering system using cylindrical rotating magnetron electrically powered using alternating current
DE69824356T2 (de) * 1997-08-30 2005-02-17 United Technologies Corp. (N.D.Ges.D. Staates Delaware), Hartford Kathodisches Bogen-Beschichtungsgerät mit einer Vorrichtung zur Bogenführung
SE511139C2 (sv) * 1997-11-20 1999-08-09 Hana Barankova Plasmabearbetningsapparat med vridbara magneter

Also Published As

Publication number Publication date
KR20020087056A (ko) 2002-11-21
DE60135875D1 (de) 2008-10-30
CZ20004747A3 (cs) 2002-08-14
US20040069233A1 (en) 2004-04-15
WO2002050865A1 (en) 2002-06-27
CN1404620A (zh) 2003-03-19
PT1356496E (pt) 2008-12-03
ATE408890T1 (de) 2008-10-15
EP1356496B1 (en) 2008-09-17
SI1356496T1 (sl) 2009-02-28
AU2002226377A1 (en) 2002-07-01
WO2002050864A1 (en) 2002-06-27
AU2002220482A1 (en) 2002-07-01
EP1356496A1 (en) 2003-10-29
CZ296094B6 (cs) 2006-01-11
ES2311497T3 (es) 2009-02-16

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