DK1171232T3 - Fluidhåndteringsindretning med formatkonvertering - Google Patents

Fluidhåndteringsindretning med formatkonvertering

Info

Publication number
DK1171232T3
DK1171232T3 DK00920538T DK00920538T DK1171232T3 DK 1171232 T3 DK1171232 T3 DK 1171232T3 DK 00920538 T DK00920538 T DK 00920538T DK 00920538 T DK00920538 T DK 00920538T DK 1171232 T3 DK1171232 T3 DK 1171232T3
Authority
DK
Denmark
Prior art keywords
fluid
substrate
pattern
inlets
outlets
Prior art date
Application number
DK00920538T
Other languages
Danish (da)
English (en)
Inventor
Roland Zengerle
Nicolaus Hey
Holger Gruhler
Michael Freygang
Martin Mueller
Original Assignee
Hahn Schickard Ges
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hahn Schickard Ges filed Critical Hahn Schickard Ges
Application granted granted Critical
Publication of DK1171232T3 publication Critical patent/DK1171232T3/da

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02Burettes; Pipettes
    • B01L3/0241Drop counters; Drop formers
    • B01L3/0268Drop counters; Drop formers using pulse dispensing or spraying, eg. inkjet type, piezo actuated ejection of droplets from capillaries
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0046Sequential or parallel reactions, e.g. for the synthesis of polypeptides or polynucleotides; Apparatus and devices for combinatorial chemistry or for making molecular arrays
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006Micropumps
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/10Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
    • G01N35/1065Multiple transfer devices
    • G01N35/1067Multiple transfer devices for transfer to or from containers having different spacing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277Apparatus
    • B01J2219/00351Means for dispensing and evacuation of reagents
    • B01J2219/00378Piezoelectric or ink jet dispensers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277Apparatus
    • B01J2219/00497Features relating to the solid phase supports
    • B01J2219/00527Sheets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583Features relative to the processes being carried out
    • B01J2219/00603Making arrays on substantially continuous surfaces
    • B01J2219/00605Making arrays on substantially continuous surfaces the compounds being directly bound or immobilised to solid supports
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583Features relative to the processes being carried out
    • B01J2219/00603Making arrays on substantially continuous surfaces
    • B01J2219/00659Two-dimensional arrays
    • CCHEMISTRY; METALLURGY
    • C40COMBINATORIAL TECHNOLOGY
    • C40BCOMBINATORIAL CHEMISTRY; LIBRARIES, e.g. CHEMICAL LIBRARIES
    • C40B60/00Apparatus specially adapted for use in combinatorial chemistry or with libraries
    • C40B60/14Apparatus specially adapted for use in combinatorial chemistry or with libraries for creating libraries
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/10Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
    • G01N2035/1027General features of the devices
    • G01N2035/1034Transferring microquantities of liquid
    • G01N2035/1041Ink-jet like dispensers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/10Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
    • G01N35/1065Multiple transfer devices
    • G01N35/1067Multiple transfer devices for transfer to or from containers having different spacing
    • G01N2035/1069Multiple transfer devices for transfer to or from containers having different spacing by adjusting the spacing between multiple probes of a single transferring head
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00Chemistry: analytical and immunological testing
    • Y10T436/25Chemistry: analytical and immunological testing including sample preparation
    • Y10T436/2575Volumetric liquid transfer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Pathology (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Mechanical Engineering (AREA)
  • Clinical Laboratory Science (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • External Artificial Organs (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Infusion, Injection, And Reservoir Apparatuses (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
DK00920538T 1999-03-23 2000-03-22 Fluidhåndteringsindretning med formatkonvertering DK1171232T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19913076A DE19913076A1 (de) 1999-03-23 1999-03-23 Vorrichtung und Verfahren zum Aufbringen von Mikrotröpfchen auf ein Substrat
PCT/EP2000/002542 WO2000056442A1 (fr) 1999-03-23 2000-03-22 Dispositif de manipulation de fluide a conversion de format

Publications (1)

Publication Number Publication Date
DK1171232T3 true DK1171232T3 (da) 2003-03-03

Family

ID=7902084

Family Applications (1)

Application Number Title Priority Date Filing Date
DK00920538T DK1171232T3 (da) 1999-03-23 2000-03-22 Fluidhåndteringsindretning med formatkonvertering

Country Status (11)

Country Link
US (2) US6399395B1 (fr)
EP (2) EP1171232B1 (fr)
JP (1) JP3598066B2 (fr)
AT (2) ATE228031T1 (fr)
AU (2) AU751808B2 (fr)
CA (1) CA2367847C (fr)
DE (3) DE19913076A1 (fr)
DK (1) DK1171232T3 (fr)
ES (1) ES2184711T3 (fr)
PT (1) PT1171232E (fr)
WO (2) WO2000056442A1 (fr)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19941871A1 (de) 1999-09-02 2001-04-19 Hahn Schickard Ges Vorrichtung und Verfahren zum Aufbringen einer Mehrzahl von Mikrotröpfchen auf ein Substrat
DE10010208C2 (de) * 2000-02-25 2002-02-07 Inst Physikalische Hochtech Ev Mikrodosiervorrichtung zur definierten Abgabe kleiner in sich geschlossener Flüssigkeitsvolumina
US20050160011A1 (en) * 2004-01-20 2005-07-21 Molecular Imprints, Inc. Method for concurrently employing differing materials to form a layer on a substrate
WO2002006902A2 (fr) * 2000-07-17 2002-01-24 Board Of Regents, The University Of Texas System Procede et systeme pour distribuer de maniere automatique un fluide utilise dans des procedes de lithographie de type « imprint »
DE10041536A1 (de) 2000-08-24 2002-03-07 Roland Zengerle Vorrichtung und Verfahren zum berührungslosen Aufbringen von Mikrotröpfchen auf ein Substrat
US20060005657A1 (en) * 2004-06-01 2006-01-12 Molecular Imprints, Inc. Method and system to control movement of a body for nano-scale manufacturing
DE10102152C1 (de) * 2001-01-18 2002-06-20 Roland Zengerle Vorrichtung und Verfahren zum Dosieren kleiner Flüssigkeitsmengen
US7297501B2 (en) 2001-02-02 2007-11-20 University Of Pennsylvania Method and devices for running reactions on a target plate for MALDI mass spectrometry
US7332286B2 (en) * 2001-02-02 2008-02-19 University Of Pennsylvania Peptide or protein microassay method and apparatus
WO2002064255A1 (fr) * 2001-02-15 2002-08-22 Scientific Generics Limited Jeu de biopuces
JP4681749B2 (ja) * 2001-03-28 2011-05-11 キヤノン株式会社 プローブ担体の管理方法、プローブ担体製造装置及びプローブ担体管理装置
DE10210469A1 (de) * 2002-03-11 2003-09-25 Axaron Bioscience Ag Aufbringen eines Stoffs auf ein Substrat
US20040018635A1 (en) * 2002-07-26 2004-01-29 Peck Bill J. Fabricating arrays with drop velocity control
DE10261158A1 (de) * 2002-12-20 2004-07-15 Biochip Technologies Gmbh Vorrichtung zum Aufbringen von Mikrotröpfchen auf ein Trägersubstrat
EP1715954A1 (fr) 2004-02-18 2006-11-02 Applera Corporation Essais biologiques a etapes multiples sur des plates-formes d'applications micro-fluidiques modulaires
JP4792028B2 (ja) * 2004-06-03 2011-10-12 モレキュラー・インプリンツ・インコーポレーテッド ナノスケール製造技術における流体の分配およびドロップ・オン・デマンド分配技術
US20070228593A1 (en) * 2006-04-03 2007-10-04 Molecular Imprints, Inc. Residual Layer Thickness Measurement and Correction
US7281919B2 (en) * 2004-12-07 2007-10-16 Molecular Imprints, Inc. System for controlling a volume of material on a mold
DE102005002525A1 (de) 2005-01-19 2006-07-27 Zengerle, Roland, Prof. Dr. Pipettenspitze, Pipetiervorrichtung, Pipettenspitzen-Betätigungsvorrichtung und Verfahren zum Pipetieren im nL-Bereich
US8142850B2 (en) * 2006-04-03 2012-03-27 Molecular Imprints, Inc. Patterning a plurality of fields on a substrate to compensate for differing evaporation times
US20080261326A1 (en) * 2007-04-23 2008-10-23 Christie Dudenhoefer Drop-on-demand manufacturing of diagnostic test strips
US7810609B2 (en) * 2007-09-26 2010-10-12 Chrysler Group Llc Muffler
US11285082B2 (en) * 2016-04-05 2022-03-29 Jan Franck Device and method for the dosing of active substances for the preparation of medicaments
CN106423319B (zh) * 2016-11-07 2018-11-13 北京博奥晶典生物技术有限公司 一种试样分析芯片及其使用方法
CN110064451B (zh) * 2018-01-24 2023-08-15 思纳福(苏州)生命科技有限公司 流体驱动机构及流体驱动方法
EP4019131A1 (fr) 2020-12-22 2022-06-29 Albert-Ludwigs-Universität Freiburg Dispositif microfluidique et procédé pour isoler des objets

Family Cites Families (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3004555A1 (de) * 1980-02-07 1981-08-13 Siemens AG, 1000 Berlin und 8000 München Mehrkanaliges, schreibendes messgeraet
US4380018A (en) 1980-06-20 1983-04-12 Sanyo Denki Kabushiki Kaisha Ink droplet projecting device and an ink jet printer
CA1292176C (fr) 1985-09-18 1991-11-19 Joel M. Blatt Dispositif volumetrique a orifice capillaire pour la deposition d'un echantillon liquide sur une surface reactive
US5200051A (en) * 1988-11-14 1993-04-06 I-Stat Corporation Wholly microfabricated biosensors and process for the manufacture and use thereof
US5100627A (en) * 1989-11-30 1992-03-31 The Regents Of The University Of California Chamber for the optical manipulation of microscopic particles
JP2748657B2 (ja) 1990-06-20 1998-05-13 富士通株式会社 半導体装置
JPH04251750A (ja) * 1991-01-28 1992-09-08 Fuji Electric Co Ltd インクジェット記録ヘッド
US5763170A (en) * 1991-04-16 1998-06-09 Amersham International Plc Method for forming an array of biological particles
ATE241426T1 (de) 1991-11-22 2003-06-15 Affymetrix Inc A Delaware Corp Verfahren zur herstellung von polymerarrays
JP2832117B2 (ja) * 1991-11-29 1998-12-02 キヤノン株式会社 サンプル測定デバイス及びサンプル測定システム
US5518179A (en) * 1991-12-04 1996-05-21 The Technology Partnership Limited Fluid droplets production apparatus and method
US5508200A (en) 1992-10-19 1996-04-16 Tiffany; Thomas Method and apparatus for conducting multiple chemical assays
JP3168780B2 (ja) * 1993-08-30 2001-05-21 セイコーエプソン株式会社 インクジェットヘッドの製造方法
JP3527998B2 (ja) 1993-10-22 2004-05-17 耕司 戸田 超音波成膜装置
ES2176308T3 (es) 1993-10-28 2002-12-01 Houston Advanced Res Ct Dispositivo de microestructura porosa que permite un flujo.
US6015880A (en) 1994-03-16 2000-01-18 California Institute Of Technology Method and substrate for performing multiple sequential reactions on a matrix
JPH08114601A (ja) * 1994-10-18 1996-05-07 Hitachi Ltd 液体検体の多項目検査分析装置
US5593290A (en) * 1994-12-22 1997-01-14 Eastman Kodak Company Micro dispensing positive displacement pump
JPH08233710A (ja) * 1995-02-24 1996-09-13 Hitachi Ltd 試料調製装置
US5551487A (en) 1995-03-10 1996-09-03 Hewlett-Packard Company Micro-dispenser for preparing assay plates
US5796416A (en) * 1995-04-12 1998-08-18 Eastman Kodak Company Nozzle placement in monolithic drop-on-demand print heads
WO1997001393A1 (fr) * 1995-06-27 1997-01-16 Philips Electronics N.V. Procede et dispositif d'application d'un fluide sur une surface
US5872010A (en) * 1995-07-21 1999-02-16 Northeastern University Microscale fluid handling system
US5658802A (en) * 1995-09-07 1997-08-19 Microfab Technologies, Inc. Method and apparatus for making miniaturized diagnostic arrays
TW317643B (fr) * 1996-02-23 1997-10-11 Handotai Energy Kenkyusho Kk
US5958342A (en) * 1996-05-17 1999-09-28 Incyte Pharmaceuticals, Inc. Jet droplet device
WO1997045730A1 (fr) 1996-05-30 1997-12-04 Biodx Procedes et appareil a groupement miniaturise de cellules pour le criblage sur la base de cellules
EP0956449B1 (fr) 1996-12-11 2002-05-29 Gesim Gesellschaft für Silizium-Mikrosysteme mbH Pompe a microejection
US5877580A (en) * 1996-12-23 1999-03-02 Regents Of The University Of California Micromachined chemical jet dispenser
DE19802367C1 (de) * 1997-02-19 1999-09-23 Hahn Schickard Ges Mikrodosiervorrichtungsarray und Verfahren zum Betreiben desselben
US6154226A (en) 1997-05-13 2000-11-28 Sarnoff Corporation Parallel print array
US6055004A (en) * 1997-07-31 2000-04-25 Eastman Kodak Company Microfluidic printing array valve
US6022482A (en) * 1997-08-04 2000-02-08 Xerox Corporation Monolithic ink jet printhead
JP2001520380A (ja) * 1997-10-10 2001-10-30 ビーピー ケミカルズ リミテッド 触媒評価のための触媒ライブラリの照射活性化およびスクリーニング並びにそのための反応器
JP3543604B2 (ja) * 1998-03-04 2004-07-14 株式会社日立製作所 送液装置および自動分析装置
DE69835342T2 (de) 1998-04-27 2007-08-23 Corning Inc. Verfahren zur Ablage von biologischen Proben mit Hilfe eines nachgezogenen Kapillarspeichers
US6232072B1 (en) * 1999-10-15 2001-05-15 Agilent Technologies, Inc. Biopolymer array inspection
JP2003337189A (ja) 2002-05-20 2003-11-28 Sanyuu Engineering Kk 真空容器内コイルの保護装置

Also Published As

Publication number Publication date
CA2367847A1 (fr) 2000-09-28
ATE228031T1 (de) 2002-12-15
DE19913076A1 (de) 2000-10-19
CA2367847C (fr) 2004-05-25
EP1171232A1 (fr) 2002-01-16
EP1171233A1 (fr) 2002-01-16
EP1171233B1 (fr) 2003-05-02
ES2184711T3 (es) 2003-04-16
WO2000056443A1 (fr) 2000-09-28
AU751808B2 (en) 2002-08-29
WO2000056442A1 (fr) 2000-09-28
PT1171232E (pt) 2003-04-30
US6855293B1 (en) 2005-02-15
AU4107800A (en) 2000-10-09
EP1171232B1 (fr) 2002-11-20
US6399395B1 (en) 2002-06-04
JP2002540386A (ja) 2002-11-26
DE50000795D1 (de) 2003-01-02
AU4107900A (en) 2000-10-09
ATE238837T1 (de) 2003-05-15
JP3598066B2 (ja) 2004-12-08
DE50001977D1 (de) 2003-06-05

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