DK1149268T3 - Fremgangsmåde til forbedring af målinger med laserinterferometer - Google Patents

Fremgangsmåde til forbedring af målinger med laserinterferometer

Info

Publication number
DK1149268T3
DK1149268T3 DK99958214T DK99958214T DK1149268T3 DK 1149268 T3 DK1149268 T3 DK 1149268T3 DK 99958214 T DK99958214 T DK 99958214T DK 99958214 T DK99958214 T DK 99958214T DK 1149268 T3 DK1149268 T3 DK 1149268T3
Authority
DK
Denmark
Prior art keywords
laser interferometer
measurements
improving laser
interferometer measurements
air temperature
Prior art date
Application number
DK99958214T
Other languages
Danish (da)
English (en)
Inventor
Leonid Mihaljov
Original Assignee
Leonid Mihaljov
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leonid Mihaljov filed Critical Leonid Mihaljov
Application granted granted Critical
Publication of DK1149268T3 publication Critical patent/DK1149268T3/da

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/08Systems determining position data of a target for measuring distance only
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02055Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/497Means for monitoring or calibrating

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Lasers (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Laser Surgery Devices (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
DK99958214T 1998-12-02 1999-11-26 Fremgangsmåde til forbedring af målinger med laserinterferometer DK1149268T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI982603A FI982603A (fi) 1998-12-02 1998-12-02 Laser-mittauksen epätarkkuutta pienentävä mittausmenetelmä

Publications (1)

Publication Number Publication Date
DK1149268T3 true DK1149268T3 (da) 2006-08-14

Family

ID=8553022

Family Applications (1)

Application Number Title Priority Date Filing Date
DK99958214T DK1149268T3 (da) 1998-12-02 1999-11-26 Fremgangsmåde til forbedring af målinger med laserinterferometer

Country Status (19)

Country Link
US (1) US6501550B1 (ja)
EP (1) EP1149268B1 (ja)
JP (1) JP2002531816A (ja)
KR (1) KR100729491B1 (ja)
CN (1) CN1170117C (ja)
AT (1) ATE323879T1 (ja)
AU (1) AU768410B2 (ja)
BR (1) BR9916875A (ja)
CA (1) CA2350736C (ja)
CZ (1) CZ299040B6 (ja)
DE (1) DE69930966T2 (ja)
DK (1) DK1149268T3 (ja)
ES (1) ES2263292T3 (ja)
FI (1) FI982603A (ja)
IL (2) IL143453A0 (ja)
MX (1) MXPA01005609A (ja)
PT (1) PT1149268E (ja)
RU (1) RU2243500C2 (ja)
WO (1) WO2000033021A1 (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI110209B (fi) * 1999-06-23 2002-12-13 Leonid Mihaljov Menetelmä laserinterferometrillä tehtävien mittauksien tarkkuuden parantamiseksi
DE10329043B4 (de) * 2003-06-27 2007-07-26 Leuze Electronic Gmbh & Co Kg Verfahren zur Bestimmung von Distanzen
GB0523455D0 (en) 2005-11-18 2005-12-28 Renishaw Plc Dynamic air turbulence compensation
ES2335427T3 (es) * 2006-07-04 2010-03-26 Pepperl + Fuchs Gmbh Procedimiento y dispositivo para la medicion optoelectronica de distancia sin contacto conforme al principio de tiempo de transito.
DE102007055665A1 (de) * 2007-11-21 2009-05-28 Dr. Johannes Heidenhain Gmbh Interferometeranordnung und Verfahren zu deren Betrieb
US10203268B2 (en) 2008-12-04 2019-02-12 Laura P. Solliday Methods for measuring and modeling the process of prestressing concrete during tensioning/detensioning based on electronic distance measurements
US9354043B2 (en) 2008-12-04 2016-05-31 Laura P. Solliday Methods for measuring and modeling the structural health of pressure vessels based on electronic distance measurements
US8209134B2 (en) * 2008-12-04 2012-06-26 Laura P. Solliday Methods for modeling the structural health of a civil structure based on electronic distance measurements
JP5602538B2 (ja) * 2010-03-03 2014-10-08 キヤノン株式会社 光波干渉計測装置
CN103229071B (zh) * 2010-11-16 2015-09-23 高通股份有限公司 用于基于超声反射信号的对象位置估计的系统和方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4372150A (en) * 1980-06-05 1983-02-08 Beckman Instruments, Inc. Flow monitoring method and apparatus
GB2170907B (en) * 1985-02-06 1988-08-24 Sonic Tape Plc Improvements relating to distance measuring devices
JPS6222091A (ja) * 1985-07-22 1987-01-30 Nippon Kooteingu Kk 距離測定方法
GB8920448D0 (en) * 1989-09-09 1989-10-25 Renishaw Plc Apparatus for adjusting the alignment of a light beam
US5182863A (en) * 1990-10-22 1993-02-02 Spectra-Physics Laserplane, Inc. Automatic plumb and level tool with acoustic measuring capability
US5624188A (en) * 1994-10-20 1997-04-29 West; David A. Acoustic thermometer
GB2313193B (en) * 1996-05-14 2000-06-14 Guide Dogs For The Blind Ass T Method and apparatus for distance measurement

Also Published As

Publication number Publication date
BR9916875A (pt) 2001-11-13
CA2350736A1 (en) 2000-06-08
DE69930966T2 (de) 2006-12-28
FI982603A (fi) 2000-06-03
DE69930966D1 (de) 2006-05-24
JP2002531816A (ja) 2002-09-24
RU2243500C2 (ru) 2004-12-27
CN1329711A (zh) 2002-01-02
WO2000033021A1 (en) 2000-06-08
AU768410B2 (en) 2003-12-11
CA2350736C (en) 2007-05-15
EP1149268B1 (en) 2006-04-19
ATE323879T1 (de) 2006-05-15
ES2263292T3 (es) 2006-12-01
WO2000033021A8 (en) 2001-01-11
KR100729491B1 (ko) 2007-06-15
EP1149268A1 (en) 2001-10-31
MXPA01005609A (es) 2003-07-14
AU1563100A (en) 2000-06-19
IL143453A (en) 2007-06-17
IL143453A0 (en) 2002-04-21
CN1170117C (zh) 2004-10-06
CZ20011929A3 (cs) 2001-10-17
FI982603A0 (fi) 1998-12-02
PT1149268E (pt) 2006-07-31
US6501550B1 (en) 2002-12-31
KR20010099817A (ko) 2001-11-09
CZ299040B6 (cs) 2008-04-09

Similar Documents

Publication Publication Date Title
CA2356337A1 (en) Web caliper measuring system
ATE92640T1 (de) Frequenzmoduliertes laser-radar.
DK1149268T3 (da) Fremgangsmåde til forbedring af målinger med laserinterferometer
DE59405974D1 (de) Interferometrisches Messverfahren für Absolutmessungen sowie dafür geeignete Laserinterferometeranordnung
ATE4749T1 (de) Verfahren und apparat zur abstandsmessung durch laserinterferometrie mit zwei wellenlaengen.
UST102104I4 (en) Scanning optical system adapted for linewidth measurement in semiconductor devices
JPH0634318A (ja) 干渉計測装置
PT82544A (pt) Aperfeicoamentos em, e relativos a, instrumentos de medida
RU2001114831A (ru) Способ повышения точности измерений лазерного интерферометра
JPH03142305A (ja) 表面粗度測定装置
FI110209B (fi) Menetelmä laserinterferometrillä tehtävien mittauksien tarkkuuden parantamiseksi
FR2352279A1 (fr) Procede de mesure interferometrique des intervalles, epaisseurs ou planeites
JPH02145933A (ja) 光ファイバ線状温度分布測定装置
SU1522034A1 (ru) Радиоизотопный толщиномер
JPS6370131A (ja) 光フアイバ形温度分布計測装置
SU1124686A1 (ru) Способ измерени коэффициентов рассе ни лазерного излучени подвижным рассеивающим объектом в заданном телесном угле
JPH06331311A (ja) 移動体の変位測定方法
JPS63101702A (ja) 光測長計
JPS599514A (ja) ジヤイロスコ−プ
BR9804578A (pt) Dispositivo para a medição do comprimento de cigarros e processo para a determinação de comprimentos de cigarros
JPH05296727A (ja) 強度変調レーザー測長装置
SE8002077L (sv) Metanordning for bestemning av jord-refraktion
JPS62126378A (ja) レ−ザドツプラ速度計