DE69930966D1 - Verfahren zur verbesserung von messungen mittels laserinterferometer - Google Patents

Verfahren zur verbesserung von messungen mittels laserinterferometer

Info

Publication number
DE69930966D1
DE69930966D1 DE69930966T DE69930966T DE69930966D1 DE 69930966 D1 DE69930966 D1 DE 69930966D1 DE 69930966 T DE69930966 T DE 69930966T DE 69930966 T DE69930966 T DE 69930966T DE 69930966 D1 DE69930966 D1 DE 69930966D1
Authority
DE
Germany
Prior art keywords
laser interferometer
measurements
air temperature
improving measurements
improving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69930966T
Other languages
English (en)
Other versions
DE69930966T2 (de
Inventor
Leonid Mihaljov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of DE69930966D1 publication Critical patent/DE69930966D1/de
Publication of DE69930966T2 publication Critical patent/DE69930966T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/497—Means for monitoring or calibrating

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Lasers (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Laser Surgery Devices (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
DE69930966T 1998-12-02 1999-11-26 Verfahren zur verbesserung von messungen mittels laserinterferometer Expired - Lifetime DE69930966T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FI982603A FI982603A (fi) 1998-12-02 1998-12-02 Laser-mittauksen epätarkkuutta pienentävä mittausmenetelmä
FI982603 1998-12-02
PCT/FI1999/000978 WO2000033021A1 (en) 1998-12-02 1999-11-26 Method for improving measurements by laser interferometer

Publications (2)

Publication Number Publication Date
DE69930966D1 true DE69930966D1 (de) 2006-05-24
DE69930966T2 DE69930966T2 (de) 2006-12-28

Family

ID=8553022

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69930966T Expired - Lifetime DE69930966T2 (de) 1998-12-02 1999-11-26 Verfahren zur verbesserung von messungen mittels laserinterferometer

Country Status (19)

Country Link
US (1) US6501550B1 (de)
EP (1) EP1149268B1 (de)
JP (1) JP2002531816A (de)
KR (1) KR100729491B1 (de)
CN (1) CN1170117C (de)
AT (1) ATE323879T1 (de)
AU (1) AU768410B2 (de)
BR (1) BR9916875A (de)
CA (1) CA2350736C (de)
CZ (1) CZ299040B6 (de)
DE (1) DE69930966T2 (de)
DK (1) DK1149268T3 (de)
ES (1) ES2263292T3 (de)
FI (1) FI982603A (de)
IL (2) IL143453A0 (de)
MX (1) MXPA01005609A (de)
PT (1) PT1149268E (de)
RU (1) RU2243500C2 (de)
WO (1) WO2000033021A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI110209B (fi) * 1999-06-23 2002-12-13 Leonid Mihaljov Menetelmä laserinterferometrillä tehtävien mittauksien tarkkuuden parantamiseksi
DE10329043B4 (de) * 2003-06-27 2007-07-26 Leuze Electronic Gmbh & Co Kg Verfahren zur Bestimmung von Distanzen
GB0523455D0 (en) * 2005-11-18 2005-12-28 Renishaw Plc Dynamic air turbulence compensation
DE502006005461D1 (de) * 2006-07-04 2010-01-07 Pepperl & Fuchs Verfahren und Vorrichtung zur optoelektronischen berührungslosen Distanzmessung nach dem Laufzeitprinzip
DE102007055665A1 (de) * 2007-11-21 2009-05-28 Dr. Johannes Heidenhain Gmbh Interferometeranordnung und Verfahren zu deren Betrieb
US9354043B2 (en) 2008-12-04 2016-05-31 Laura P. Solliday Methods for measuring and modeling the structural health of pressure vessels based on electronic distance measurements
US8209134B2 (en) * 2008-12-04 2012-06-26 Laura P. Solliday Methods for modeling the structural health of a civil structure based on electronic distance measurements
US10203268B2 (en) 2008-12-04 2019-02-12 Laura P. Solliday Methods for measuring and modeling the process of prestressing concrete during tensioning/detensioning based on electronic distance measurements
JP5602538B2 (ja) * 2010-03-03 2014-10-08 キヤノン株式会社 光波干渉計測装置
CN105242258A (zh) 2010-11-16 2016-01-13 高通股份有限公司 用于基于超声反射信号的对象位置估计的系统和方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4372150A (en) * 1980-06-05 1983-02-08 Beckman Instruments, Inc. Flow monitoring method and apparatus
GB2170907B (en) * 1985-02-06 1988-08-24 Sonic Tape Plc Improvements relating to distance measuring devices
JPS6222091A (ja) * 1985-07-22 1987-01-30 Nippon Kooteingu Kk 距離測定方法
GB8920448D0 (en) * 1989-09-09 1989-10-25 Renishaw Plc Apparatus for adjusting the alignment of a light beam
US5182863A (en) * 1990-10-22 1993-02-02 Spectra-Physics Laserplane, Inc. Automatic plumb and level tool with acoustic measuring capability
US5624188A (en) * 1994-10-20 1997-04-29 West; David A. Acoustic thermometer
GB2313193B (en) * 1996-05-14 2000-06-14 Guide Dogs For The Blind Ass T Method and apparatus for distance measurement

Also Published As

Publication number Publication date
PT1149268E (pt) 2006-07-31
US6501550B1 (en) 2002-12-31
WO2000033021A8 (en) 2001-01-11
FI982603A0 (fi) 1998-12-02
KR100729491B1 (ko) 2007-06-15
CN1329711A (zh) 2002-01-02
IL143453A0 (en) 2002-04-21
DE69930966T2 (de) 2006-12-28
CA2350736C (en) 2007-05-15
KR20010099817A (ko) 2001-11-09
EP1149268A1 (de) 2001-10-31
ES2263292T3 (es) 2006-12-01
CN1170117C (zh) 2004-10-06
AU768410B2 (en) 2003-12-11
AU1563100A (en) 2000-06-19
FI982603A (fi) 2000-06-03
WO2000033021A1 (en) 2000-06-08
CZ20011929A3 (cs) 2001-10-17
ATE323879T1 (de) 2006-05-15
CZ299040B6 (cs) 2008-04-09
JP2002531816A (ja) 2002-09-24
CA2350736A1 (en) 2000-06-08
RU2243500C2 (ru) 2004-12-27
BR9916875A (pt) 2001-11-13
EP1149268B1 (de) 2006-04-19
IL143453A (en) 2007-06-17
DK1149268T3 (da) 2006-08-14
MXPA01005609A (es) 2003-07-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: STROHSCHAENK UND KOLLEGEN, 85521 OTTOBRUNN