ATE4749T1 - Verfahren und apparat zur abstandsmessung durch laserinterferometrie mit zwei wellenlaengen. - Google Patents

Verfahren und apparat zur abstandsmessung durch laserinterferometrie mit zwei wellenlaengen.

Info

Publication number
ATE4749T1
ATE4749T1 AT80401476T AT80401476T ATE4749T1 AT E4749 T1 ATE4749 T1 AT E4749T1 AT 80401476 T AT80401476 T AT 80401476T AT 80401476 T AT80401476 T AT 80401476T AT E4749 T1 ATE4749 T1 AT E4749T1
Authority
AT
Austria
Prior art keywords
distance
dual
distance measurement
wavelength laser
rough estimate
Prior art date
Application number
AT80401476T
Other languages
English (en)
Inventor
Gilbert Louis Jacques Bourdet
Michel Alain Fernand Franco
Original Assignee
Anvar Agence Nationale De Valorisation De La Recherche
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anvar Agence Nationale De Valorisation De La Recherche filed Critical Anvar Agence Nationale De Valorisation De La Recherche
Application granted granted Critical
Publication of ATE4749T1 publication Critical patent/ATE4749T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02048—Rough and fine measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
AT80401476T 1979-10-17 1980-10-16 Verfahren und apparat zur abstandsmessung durch laserinterferometrie mit zwei wellenlaengen. ATE4749T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR7925771A FR2468099A1 (fr) 1979-10-17 1979-10-17 Procede et appareil d'interferometrie laser a deux longueurs d'ondes
EP80401476A EP0027763B1 (de) 1979-10-17 1980-10-16 Verfahren und Apparat zur Abstandsmessung durch Laserinterferometrie mit zwei Wellenlängen

Publications (1)

Publication Number Publication Date
ATE4749T1 true ATE4749T1 (de) 1983-10-15

Family

ID=9230752

Family Applications (1)

Application Number Title Priority Date Filing Date
AT80401476T ATE4749T1 (de) 1979-10-17 1980-10-16 Verfahren und apparat zur abstandsmessung durch laserinterferometrie mit zwei wellenlaengen.

Country Status (5)

Country Link
US (1) US4492464A (de)
EP (1) EP0027763B1 (de)
AT (1) ATE4749T1 (de)
DE (1) DE3064960D1 (de)
FR (1) FR2468099A1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4611915A (en) * 1983-06-07 1986-09-16 The United States Of America As Represented By The Secretary Of The Air Force Absolute distance sensor
US4830486A (en) * 1984-03-16 1989-05-16 Goodwin Frank E Frequency modulated lasar radar
US4593368A (en) * 1984-06-04 1986-06-03 Kollmorgen Technologies Corporation Technique for measuring very small spacings
FR2592950B1 (fr) * 1986-01-14 1988-01-29 Sopelem Dispositif optique de mesure de petits angles
DE3736772A1 (de) * 1987-08-05 1989-05-11 Bundesrep Deutschland Laser-doppler-anemometer
JPH0198902A (ja) * 1987-10-12 1989-04-17 Res Dev Corp Of Japan 光波干渉測長装置
JPH0749923B2 (ja) * 1989-05-31 1995-05-31 大日本スクリーン製造株式会社 レーザ測長器のための単位変換装置
US4995697A (en) * 1989-09-07 1991-02-26 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Fiber optic sensing system
FR2664603B1 (fr) * 1990-07-10 1994-04-29 Roquette Freres Procede de permutation ionique d'amidons ionises et amidons ionises ainsi obtenus.
DE4033253A1 (de) * 1990-10-19 1992-04-23 Hommelwerke Gmbh Optisches interferometer
US5371587A (en) * 1992-05-06 1994-12-06 The Boeing Company Chirped synthetic wavelength laser radar
US5430537A (en) * 1993-09-03 1995-07-04 Dynamics Research Corporation Light beam distance encoder
WO2000043083A2 (en) 1999-01-20 2000-07-27 Schmidt Karl B Apparatus for providing feedback to a user in connection with performing a movement task
DE19902455A1 (de) * 1999-01-22 2000-08-10 Bosch Gmbh Robert Abstandsmeßverfahren und -vorrichtung
US7557929B2 (en) 2001-12-18 2009-07-07 Massachusetts Institute Of Technology Systems and methods for phase measurements
US6934035B2 (en) * 2001-12-18 2005-08-23 Massachusetts Institute Of Technology System and method for measuring optical distance
US7215413B2 (en) * 2005-06-24 2007-05-08 The Boeing Company Chirped synthetic wave laser radar apparatus and methods
EP2182387A1 (de) 2008-10-30 2010-05-05 EADS Construcciones Aeronauticas, S.A. Anzeigesystem und Verfahren für Auftankvorgänge
EP2806246B1 (de) * 2013-05-24 2019-11-20 Attocube Systems AG Doppellaserinterferometer
CN106092514B (zh) * 2015-04-28 2018-10-02 南京理工大学 基于双波长斐索干涉仪的光学非均匀性测量装置及方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6904621A (de) * 1969-03-25 1970-09-29
FR2051899A5 (de) * 1969-07-01 1971-04-09 Sud Aviation
US3661464A (en) * 1970-03-16 1972-05-09 Jorway Corp Optical interferometer
FR2245932A1 (en) * 1973-06-15 1975-04-25 Orszag Alain Distance measuring interferometric instrument - has molecular laser for measuring distances of several hundred metres
US3970389A (en) * 1974-02-14 1976-07-20 Mendrin Michael J Variable frequency interferometer

Also Published As

Publication number Publication date
EP0027763A1 (de) 1981-04-29
EP0027763B1 (de) 1983-09-21
FR2468099A1 (fr) 1981-04-30
DE3064960D1 (en) 1983-10-27
FR2468099B1 (de) 1983-09-30
US4492464A (en) 1985-01-08

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee