FR2352279A1 - Procede de mesure interferometrique des intervalles, epaisseurs ou planeites - Google Patents

Procede de mesure interferometrique des intervalles, epaisseurs ou planeites

Info

Publication number
FR2352279A1
FR2352279A1 FR7712636A FR7712636A FR2352279A1 FR 2352279 A1 FR2352279 A1 FR 2352279A1 FR 7712636 A FR7712636 A FR 7712636A FR 7712636 A FR7712636 A FR 7712636A FR 2352279 A1 FR2352279 A1 FR 2352279A1
Authority
FR
France
Prior art keywords
measurement system
operates
constant
time period
object area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7712636A
Other languages
English (en)
Other versions
FR2352279B1 (fr
Inventor
Walter Jaerisch
Gventer Makosch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2352279A1 publication Critical patent/FR2352279A1/fr
Application granted granted Critical
Publication of FR2352279B1 publication Critical patent/FR2352279B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
FR7712636A 1976-05-21 1977-04-19 Procede de mesure interferometrique des intervalles, epaisseurs ou planeites Granted FR2352279A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762622787 DE2622787C2 (de) 1976-05-21 1976-05-21 Verfahren zur interferometrischen Abstands-, Dicken- oder Ebenheitsmessung

Publications (2)

Publication Number Publication Date
FR2352279A1 true FR2352279A1 (fr) 1977-12-16
FR2352279B1 FR2352279B1 (fr) 1979-03-09

Family

ID=5978663

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7712636A Granted FR2352279A1 (fr) 1976-05-21 1977-04-19 Procede de mesure interferometrique des intervalles, epaisseurs ou planeites

Country Status (3)

Country Link
JP (1) JPS52143052A (fr)
DE (1) DE2622787C2 (fr)
FR (1) FR2352279A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2851750B1 (de) * 1978-11-30 1980-03-06 Ibm Deutschland Verfahren und Vorrichtung zur Messung der Ebenheit der Rauhigkeit oder des Kruemmungsradius einer Messflaeche
EP0066030B1 (fr) * 1981-05-29 1986-08-27 Ibm Deutschland Gmbh Dispositif et procédé pour la mesure interférométrique de planéité
US4560280A (en) * 1982-08-31 1985-12-24 Tokyo Shibaura Denki Kabushiki Kaisha Apparatus for optically measuring the distance between two grating-like structures and the size of periodic pattern elements forming one of the grating-like structures
JPS6121391A (ja) * 1984-06-30 1986-01-30 日産車体株式会社 真空給液装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5533001B2 (fr) * 1972-09-20 1980-08-28

Also Published As

Publication number Publication date
DE2622787B1 (de) 1977-09-22
JPS6151241B2 (fr) 1986-11-07
JPS52143052A (en) 1977-11-29
DE2622787C2 (de) 1978-05-18
FR2352279B1 (fr) 1979-03-09

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Legal Events

Date Code Title Description
ST Notification of lapse