JPS52143052A - Method of measuring gap* thickness* and flatness by interference - Google Patents
Method of measuring gap* thickness* and flatness by interferenceInfo
- Publication number
- JPS52143052A JPS52143052A JP5274677A JP5274677A JPS52143052A JP S52143052 A JPS52143052 A JP S52143052A JP 5274677 A JP5274677 A JP 5274677A JP 5274677 A JP5274677 A JP 5274677A JP S52143052 A JPS52143052 A JP S52143052A
- Authority
- JP
- Japan
- Prior art keywords
- flatness
- interference
- thickness
- measuring gap
- gap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19762622787 DE2622787C2 (en) | 1976-05-21 | 1976-05-21 | Method for interferometric distance, thickness or flatness measurement |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52143052A true JPS52143052A (en) | 1977-11-29 |
JPS6151241B2 JPS6151241B2 (en) | 1986-11-07 |
Family
ID=5978663
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5274677A Granted JPS52143052A (en) | 1976-05-21 | 1977-05-10 | Method of measuring gap* thickness* and flatness by interference |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPS52143052A (en) |
DE (1) | DE2622787C2 (en) |
FR (1) | FR2352279A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6121391A (en) * | 1984-06-30 | 1986-01-30 | 日産車体株式会社 | Vacuum liquid feeder |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2851750B1 (en) * | 1978-11-30 | 1980-03-06 | Ibm Deutschland | Method and device for measuring the flatness of the roughness or the radius of curvature of a measuring surface |
EP0066030B1 (en) * | 1981-05-29 | 1986-08-27 | Ibm Deutschland Gmbh | Process and device for interferometric evenness measurement |
US4560280A (en) * | 1982-08-31 | 1985-12-24 | Tokyo Shibaura Denki Kabushiki Kaisha | Apparatus for optically measuring the distance between two grating-like structures and the size of periodic pattern elements forming one of the grating-like structures |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4953067A (en) * | 1972-09-20 | 1974-05-23 |
-
1976
- 1976-05-21 DE DE19762622787 patent/DE2622787C2/en not_active Expired
-
1977
- 1977-04-19 FR FR7712636A patent/FR2352279A1/en active Granted
- 1977-05-10 JP JP5274677A patent/JPS52143052A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4953067A (en) * | 1972-09-20 | 1974-05-23 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6121391A (en) * | 1984-06-30 | 1986-01-30 | 日産車体株式会社 | Vacuum liquid feeder |
JPH0159191B2 (en) * | 1984-06-30 | 1989-12-15 | Nissan Shatai Co |
Also Published As
Publication number | Publication date |
---|---|
DE2622787B1 (en) | 1977-09-22 |
FR2352279A1 (en) | 1977-12-16 |
JPS6151241B2 (en) | 1986-11-07 |
DE2622787C2 (en) | 1978-05-18 |
FR2352279B1 (en) | 1979-03-09 |
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