DK1016028T3 - Fremgangsmåde og system til at afbilde et objekt eller mønster - Google Patents

Fremgangsmåde og system til at afbilde et objekt eller mønster

Info

Publication number
DK1016028T3
DK1016028T3 DK97946611T DK97946611T DK1016028T3 DK 1016028 T3 DK1016028 T3 DK 1016028T3 DK 97946611 T DK97946611 T DK 97946611T DK 97946611 T DK97946611 T DK 97946611T DK 1016028 T3 DK1016028 T3 DK 1016028T3
Authority
DK
Denmark
Prior art keywords
images
subpictures
image
simultaneously obtained
mapping
Prior art date
Application number
DK97946611T
Other languages
English (en)
Inventor
Howard Stern
Fereydoun Maali
Original Assignee
Robotic Vision Systems
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robotic Vision Systems filed Critical Robotic Vision Systems
Application granted granted Critical
Publication of DK1016028T3 publication Critical patent/DK1016028T3/da

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/50—Image enhancement or restoration using two or more images, e.g. averaging or subtraction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T1/00—General purpose image data processing
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T1/00—General purpose image data processing
    • G06T1/0007—Image acquisition
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8822—Dark field detection
    • G01N2021/8825—Separate detection of dark field and bright field
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
    • G01N2021/95646—Soldering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365—Control or image processing arrangements for digital or video microscopes
    • G02B21/367—Control or image processing arrangements for digital or video microscopes providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2200/00—Indexing scheme for image data processing or generation, in general
    • G06T2200/32—Indexing scheme for image data processing or generation, in general involving image mosaicing
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30152—Solder

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Quality & Reliability (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Image Processing (AREA)
  • Image Input (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Holo Graphy (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Financial Or Insurance-Related Operations Such As Payment And Settlement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Thermal Transfer Or Thermal Recording In General (AREA)
DK97946611T 1996-11-12 1997-11-07 Fremgangsmåde og system til at afbilde et objekt eller mønster DK1016028T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/748,040 US6075883A (en) 1996-11-12 1996-11-12 Method and system for imaging an object or pattern
PCT/US1997/020432 WO1998021687A1 (en) 1996-11-12 1997-11-07 Method and system for imaging an object or pattern

Publications (1)

Publication Number Publication Date
DK1016028T3 true DK1016028T3 (da) 2004-01-26

Family

ID=25007738

Family Applications (1)

Application Number Title Priority Date Filing Date
DK97946611T DK1016028T3 (da) 1996-11-12 1997-11-07 Fremgangsmåde og system til at afbilde et objekt eller mønster

Country Status (10)

Country Link
US (3) US6075883A (da)
EP (2) EP1016028B1 (da)
AT (2) ATE250249T1 (da)
AU (1) AU5174798A (da)
CA (1) CA2271492C (da)
DE (2) DE69736818D1 (da)
DK (1) DK1016028T3 (da)
ES (1) ES2207754T3 (da)
PT (1) PT1016028E (da)
WO (1) WO1998021687A1 (da)

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ATE342549T1 (de) 2006-11-15
ES2207754T3 (es) 2004-06-01
DE69736818D1 (de) 2006-11-23
ATE250249T1 (de) 2003-10-15
WO1998021687A1 (en) 1998-05-22
US6075883A (en) 2000-06-13
US20030215127A1 (en) 2003-11-20
CA2271492A1 (en) 1998-05-22
DE69725021T2 (de) 2004-04-22
DE69725021D1 (de) 2003-10-23
CA2271492C (en) 2007-05-29
EP1016028A1 (en) 2000-07-05
EP1359534B1 (en) 2006-10-11
EP1016028B1 (en) 2003-09-17
AU5174798A (en) 1998-06-03
PT1016028E (pt) 2004-02-27
US6603874B1 (en) 2003-08-05
EP1359534A1 (en) 2003-11-05
EP1016028A4 (en) 2001-11-21

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