DK0993358T3 - Indretning og fremgangsmåde til adskillelse af et formet substrat fra et prægeværktøj - Google Patents

Indretning og fremgangsmåde til adskillelse af et formet substrat fra et prægeværktøj

Info

Publication number
DK0993358T3
DK0993358T3 DK99922117T DK99922117T DK0993358T3 DK 0993358 T3 DK0993358 T3 DK 0993358T3 DK 99922117 T DK99922117 T DK 99922117T DK 99922117 T DK99922117 T DK 99922117T DK 0993358 T3 DK0993358 T3 DK 0993358T3
Authority
DK
Denmark
Prior art keywords
substrate
chamber
separating
shaped substrate
stamping tool
Prior art date
Application number
DK99922117T
Other languages
English (en)
Inventor
Alf Springer
Frank Reuther
Lutz Mueller
Original Assignee
Jenoptik Jena Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Jena Gmbh filed Critical Jenoptik Jena Gmbh
Application granted granted Critical
Publication of DK0993358T3 publication Critical patent/DK0993358T3/da

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/44—Moulds or cores; Details thereof or accessories therefor with means for, or specially constructed to facilitate, the removal of articles, e.g. of undercut articles
    • B29C33/46—Moulds or cores; Details thereof or accessories therefor with means for, or specially constructed to facilitate, the removal of articles, e.g. of undercut articles using fluid pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C37/0003—Discharging moulded articles from the mould
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2017/00—Carriers for sound or information
    • B29L2017/001—Carriers of records containing fine grooves or impressions, e.g. disc records for needle playback, cylinder records
    • B29L2017/003—Records or discs
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49815—Disassembling

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Blow-Moulding Or Thermoforming Of Plastics Or The Like (AREA)
  • Press Drives And Press Lines (AREA)
DK99922117T 1998-05-04 1999-04-21 Indretning og fremgangsmåde til adskillelse af et formet substrat fra et prægeværktøj DK0993358T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19819761A DE19819761C2 (de) 1998-05-04 1998-05-04 Einrichtung zur Trennung eines geformten Substrates von einem Prägewerkzeug
PCT/EP1999/002676 WO1999056928A1 (de) 1998-05-04 1999-04-21 Einrichtung und verfahren zur trennung eines geformten substrates von einem prägewerkzeug

Publications (1)

Publication Number Publication Date
DK0993358T3 true DK0993358T3 (da) 2002-11-04

Family

ID=7866567

Family Applications (1)

Application Number Title Priority Date Filing Date
DK99922117T DK0993358T3 (da) 1998-05-04 1999-04-21 Indretning og fremgangsmåde til adskillelse af et formet substrat fra et prægeværktøj

Country Status (11)

Country Link
US (1) US6416311B1 (da)
EP (1) EP0993358B1 (da)
JP (1) JP4356118B2 (da)
KR (1) KR100340917B1 (da)
CN (1) CN1105003C (da)
AT (1) ATE220604T1 (da)
DE (2) DE19819761C2 (da)
DK (1) DK0993358T3 (da)
ES (1) ES2180301T3 (da)
TW (1) TW458882B (da)
WO (1) WO1999056928A1 (da)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6873087B1 (en) * 1999-10-29 2005-03-29 Board Of Regents, The University Of Texas System High precision orientation alignment and gap control stages for imprint lithography processes
US7019819B2 (en) * 2002-11-13 2006-03-28 Molecular Imprints, Inc. Chucking system for modulating shapes of substrates
DE10233462B4 (de) * 2002-07-24 2009-01-22 Forschungszentrum Karlsruhe Gmbh Vorrichtung zum Prägen und zur Entformung von Strukturkörpern
US7641840B2 (en) * 2002-11-13 2010-01-05 Molecular Imprints, Inc. Method for expelling gas positioned between a substrate and a mold
US7090716B2 (en) * 2003-10-02 2006-08-15 Molecular Imprints, Inc. Single phase fluid imprint lithography method
US7128559B1 (en) * 2004-01-13 2006-10-31 Sandia National Laboratories Programmable imprint lithography template
CN100405085C (zh) * 2004-06-28 2008-07-23 鸿富锦精密工业（深圳）有限公司 光学组件的制造方法及装置
US7676088B2 (en) 2004-12-23 2010-03-09 Asml Netherlands B.V. Imprint lithography
JP4700996B2 (ja) * 2005-04-19 2011-06-15 東芝機械株式会社 転写装置
US7648354B2 (en) * 2005-04-28 2010-01-19 Toshiba Kikai Kabushiki Kaisha Transfer apparatus having gimbal mechanism and transfer method using the transfer apparatus
JP4729338B2 (ja) * 2005-05-10 2011-07-20 東芝機械株式会社 転写装置
JP4701008B2 (ja) * 2005-05-25 2011-06-15 東芝機械株式会社 ジンバル機構を備えた転写装置
EP1731960A1 (en) * 2005-06-07 2006-12-13 Obducat AB Apparatus and method for separating a composite
DE102005041505B3 (de) * 2005-09-01 2007-04-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Abformen von Strukturen
US7316554B2 (en) * 2005-09-21 2008-01-08 Molecular Imprints, Inc. System to control an atmosphere between a body and a substrate
TWI283631B (en) * 2005-10-25 2007-07-11 Ind Tech Res Inst Method and device for demolding
US7517211B2 (en) 2005-12-21 2009-04-14 Asml Netherlands B.V. Imprint lithography
EP2001602B1 (en) * 2006-04-03 2011-06-22 Molecular Imprints, Inc. Lithography imprinting system
US8215946B2 (en) 2006-05-18 2012-07-10 Molecular Imprints, Inc. Imprint lithography system and method
EP2116350A4 (en) * 2007-02-07 2011-06-22 Asahi Glass Co Ltd IMPRESSION MOLD AND METHOD FOR PRODUCING THE SAME
US7641467B2 (en) * 2007-05-02 2010-01-05 Asml Netherlands B.V. Imprint lithography
US20100096764A1 (en) * 2008-10-20 2010-04-22 Molecular Imprints, Inc. Gas Environment for Imprint Lithography
TWI384287B (zh) * 2008-12-15 2013-02-01 Taiwan Name Plate Co Ltd Hot pressing light guide plate device
JP4799630B2 (ja) * 2009-02-25 2011-10-26 株式会社日本製鋼所 剥離治具、微細構造転写成形装置及び被成形体の剥離方法
WO2012096076A1 (ja) * 2011-01-10 2012-07-19 Ｓｃｉｖａｘ株式会社 離型装置、離型方法およびこれらを用いたインプリント装置
EP2829383A4 (en) * 2012-03-22 2016-04-20 Toyo Seikan Group Holdings Ltd METHOD FOR MOLDING THERMOPLASTIC RESIN ARTICLE AND MOLDING APPARATUS THEREOF
WO2014000024A1 (en) * 2012-06-26 2014-01-03 University Of South Australia Apparatus for fabricating microstructured devices
CN105034345A (zh) * 2015-06-12 2015-11-11 天津大学 一种双振动超声微纳压印成形装置
CN109955420B (zh) * 2017-12-14 2021-05-18 奇景光电股份有限公司 模具分离装置及其分离方法
DE102021210271A1 (de) 2021-09-16 2023-03-16 Magna Exteriors Gmbh Verfahren zum Herstellen von Kunststoffbauteilen
CN115284665B (zh) * 2022-08-17 2023-11-28 南通冠优达磁业股份有限公司 一种锰锌铁氧体磁芯的成型模具

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3719200A1 (de) * 1987-06-09 1988-12-29 Ibm Deutschland Optische speicherplatte und verfahren zu ihrer herstellung
JPH036366A (ja) * 1989-06-02 1991-01-11 Nippon Steel Corp 反応蒸着装置用基板ホルダー固定台
ES2102215T3 (es) 1993-03-08 1997-07-16 Philip Duffy Construccion de bisagra.
JP3411326B2 (ja) 1993-04-08 2003-05-26 芝浦メカトロニクス株式会社 スパッタリング装置
FR2715335B1 (fr) * 1994-01-21 1996-04-05 Lorraine Laminage Dispositif d'emboutissage d'un flan de tôle.
JPH0825434A (ja) * 1994-07-20 1996-01-30 Mitsubishi Chem Corp ディスク用基板の成形方法
DE19509452A1 (de) * 1995-03-22 1996-09-26 Inst Mikrotechnik Mainz Gmbh Werkzeug mit Entformvorrichtung zur Abformung mikrostrukturierter Bauteile
DE19648844C1 (de) * 1996-11-26 1997-09-18 Jenoptik Jena Gmbh Einrichtung und Verfahren zur Abformung mikrosystemtechnischer Strukturen

Also Published As

Publication number Publication date
KR20010014171A (ko) 2001-02-26
CN1266394A (zh) 2000-09-13
JP4356118B2 (ja) 2009-11-04
CN1105003C (zh) 2003-04-09
JP2002509499A (ja) 2002-03-26
EP0993358B1 (de) 2002-07-17
ES2180301T3 (es) 2003-02-01
US6416311B1 (en) 2002-07-09
DE59902022D1 (de) 2002-08-22
EP0993358A1 (de) 2000-04-19
DE19819761C2 (de) 2000-05-31
KR100340917B1 (ko) 2002-06-20
TW458882B (en) 2001-10-11
ATE220604T1 (de) 2002-08-15
DE19819761A1 (de) 1999-11-18
WO1999056928A1 (de) 1999-11-11

Similar Documents

Publication Publication Date Title
DK0993358T3 (da) Indretning og fremgangsmåde til adskillelse af et formet substrat fra et prægeværktøj
TW200707815A (en) Stress release mechanism in MEMS device and method of making same
TW200711545A (en) A method of manufacturing a MEMS element
TW200617369A (en) Method to inspect a wafer
ATE387863T1 (de) Mechanismus zum elektrischen anschluss einer elektronischen vorrichtung an ein kleidungsstück
SG145633A1 (en) Substrate support assembly
NO20075032L (no) Fremgangsmate for fremstilling av silisium med hoy renhet
TW200632591A (en) Exposure method, manufacturing method of electronic device, exposure device, and illuminating optical device
DK1736031T3 (da) Komponent til et höreapparat og et höreapparat
DE60303017D1 (en) Thermometer
DE502004007323D1 (de) Strahlungssensor, wafer, sensormodul und verfahren
BR0318669A (pt) método para a regeneração de algodão por meio de embriogênese somática
NO20043928L (no) Komponentholder og radioisotopgenerator med en eller flere komponentholdere
BRPI0411507A (pt) aparelho para produção de tampas
DE60038684D1 (de) Armbanduhr mit verschiebbaren Abdeckungen
WO2003043751A8 (en) An apparatus and method for cleaning glass substrates using a cool hydrogen flame
ATE449503T1 (de) Elektromechanisches funktionsmodul sowie aufnahme-und gerätehalter
DE69810776D1 (de) Elektrochrome vorrichtung
DK1299559T3 (da) Fremgangsmåde til identificering af inhibitorer for det anafase-promoverende kompleks
ATE360177T1 (de) Vorrichtung zum festklemmen von filterzellenrahmen an einem rastersystem
TW200726325A (en) Apparatus for removing static charge from substrate and base thereof
ATE281261T1 (de) Spannvorrichtung
DK1491093T3 (da) Multipotente voksne stamceller, kilder dertil, fremgangsmåder til fremskaffelse og vedligeholdelse af samme, fremgangsmåder til differentiering deraf, fremgangsmåder til anvendelse deraf samt celler afledt deraf
MY122841A (en) Die bonder and/or wire bonder with a device for holding down a substrate
TW200644053A (en) Tape applier