DE8913756U1 - Kapazitiver Beschleunigungswandler - Google Patents
Kapazitiver BeschleunigungswandlerInfo
- Publication number
- DE8913756U1 DE8913756U1 DE8913756U DE8913756U DE8913756U1 DE 8913756 U1 DE8913756 U1 DE 8913756U1 DE 8913756 U DE8913756 U DE 8913756U DE 8913756 U DE8913756 U DE 8913756U DE 8913756 U1 DE8913756 U1 DE 8913756U1
- Authority
- DE
- Germany
- Prior art keywords
- converter according
- sheet
- plate part
- capacitor
- acceleration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000001133 acceleration Effects 0.000 title claims description 19
- 239000002184 metal Substances 0.000 claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 239000003990 capacitor Substances 0.000 claims description 10
- 239000012777 electrically insulating material Substances 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 2
- 230000000694 effects Effects 0.000 claims 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- JUWSSMXCCAMYGX-UHFFFAOYSA-N gold platinum Chemical compound [Pt].[Au] JUWSSMXCCAMYGX-UHFFFAOYSA-N 0.000 description 1
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT68046/88A IT1223933B (it) | 1988-11-23 | 1988-11-23 | Trasduttore di accelerazione ad effetto capacitivo |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE8913756U1 true DE8913756U1 (de) | 1990-01-11 |
Family
ID=11307438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE8913756U Expired - Lifetime DE8913756U1 (de) | 1988-11-23 | 1989-11-21 | Kapazitiver Beschleunigungswandler |
Country Status (5)
| Country | Link |
|---|---|
| DE (1) | DE8913756U1 (it) |
| ES (1) | ES1012120Y (it) |
| FR (1) | FR2639435B3 (it) |
| GB (1) | GB2225433B (it) |
| IT (1) | IT1223933B (it) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0491506A1 (en) * | 1990-12-17 | 1992-06-24 | Texas Instruments Incorporated | Accelerometer and method of making |
| FR2700013A1 (fr) * | 1992-12-30 | 1994-07-01 | Akebono Brake Ind | Procédé et appareil de détection d'accélération suivant trois dimensions. |
| EP0652440A1 (en) * | 1993-11-04 | 1995-05-10 | Texas Instruments Incorporated | Improved acceleration sensor apparatus and method for making same |
| DE10053309A1 (de) * | 2000-10-27 | 2002-05-16 | Eads Deutschland Gmbh | Mikromechanischer Beschleunigungssensor |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR940006950B1 (ko) * | 1989-05-02 | 1994-07-30 | 후지꾸라 가부시끼가이샤 | 압전형 가속도센서 및 압전형 가속도센서장치 |
| DE69211269T2 (de) * | 1991-09-24 | 1997-01-23 | Murata Manufacturing Co | Beschleunigungsmessaufnehmer |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3789672A (en) * | 1970-11-12 | 1974-02-05 | Singer General Precision | Accelerometer |
| US4736629A (en) * | 1985-12-20 | 1988-04-12 | Silicon Designs, Inc. | Micro-miniature accelerometer |
| FR2599833B1 (fr) * | 1986-06-10 | 1992-02-14 | Metravib Sa | Capteur de grandeurs mecaniques integre sur silicium et procede de fabrication |
| US4951510A (en) * | 1988-07-14 | 1990-08-28 | University Of Hawaii | Multidimensional force sensor |
-
1988
- 1988-11-23 IT IT68046/88A patent/IT1223933B/it active
-
1989
- 1989-11-21 DE DE8913756U patent/DE8913756U1/de not_active Expired - Lifetime
- 1989-11-22 FR FR898915324A patent/FR2639435B3/fr not_active Expired - Lifetime
- 1989-11-22 GB GB8926379A patent/GB2225433B/en not_active Expired - Fee Related
- 1989-11-22 ES ES19898903507U patent/ES1012120Y/es not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0491506A1 (en) * | 1990-12-17 | 1992-06-24 | Texas Instruments Incorporated | Accelerometer and method of making |
| FR2700013A1 (fr) * | 1992-12-30 | 1994-07-01 | Akebono Brake Ind | Procédé et appareil de détection d'accélération suivant trois dimensions. |
| EP0652440A1 (en) * | 1993-11-04 | 1995-05-10 | Texas Instruments Incorporated | Improved acceleration sensor apparatus and method for making same |
| US5628100A (en) * | 1993-11-04 | 1997-05-13 | Texas Instruments Incorporated | Method of making an acceleration sensor |
| DE10053309A1 (de) * | 2000-10-27 | 2002-05-16 | Eads Deutschland Gmbh | Mikromechanischer Beschleunigungssensor |
| DE10053309B4 (de) * | 2000-10-27 | 2005-02-24 | Eads Deutschland Gmbh | Mikromechanischer Beschleunigungssensor |
Also Published As
| Publication number | Publication date |
|---|---|
| ES1012120Y (es) | 1991-01-01 |
| ES1012120U (es) | 1990-07-01 |
| FR2639435B3 (fr) | 1990-10-12 |
| GB2225433B (en) | 1993-01-27 |
| GB2225433A (en) | 1990-05-30 |
| GB8926379D0 (en) | 1990-01-10 |
| FR2639435A3 (fr) | 1990-05-25 |
| IT1223933B (it) | 1990-09-29 |
| IT8868046A0 (it) | 1988-11-23 |
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