FR2639435B3 - Transducteur de detection d'acceleration a effet capacitif - Google Patents
Transducteur de detection d'acceleration a effet capacitifInfo
- Publication number
- FR2639435B3 FR2639435B3 FR898915324A FR8915324A FR2639435B3 FR 2639435 B3 FR2639435 B3 FR 2639435B3 FR 898915324 A FR898915324 A FR 898915324A FR 8915324 A FR8915324 A FR 8915324A FR 2639435 B3 FR2639435 B3 FR 2639435B3
- Authority
- FR
- France
- Prior art keywords
- capacitive
- acceleration detection
- detection transducer
- effecting acceleration
- effecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000001133 acceleration Effects 0.000 title 1
- 238000001514 detection method Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT68046/88A IT1223933B (it) | 1988-11-23 | 1988-11-23 | Trasduttore di accelerazione ad effetto capacitivo |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2639435A3 FR2639435A3 (fr) | 1990-05-25 |
FR2639435B3 true FR2639435B3 (fr) | 1990-10-12 |
Family
ID=11307438
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR898915324A Expired - Lifetime FR2639435B3 (fr) | 1988-11-23 | 1989-11-22 | Transducteur de detection d'acceleration a effet capacitif |
Country Status (5)
Country | Link |
---|---|
DE (1) | DE8913756U1 (fr) |
ES (1) | ES1012120Y (fr) |
FR (1) | FR2639435B3 (fr) |
GB (1) | GB2225433B (fr) |
IT (1) | IT1223933B (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR940006950B1 (ko) * | 1989-05-02 | 1994-07-30 | 후지꾸라 가부시끼가이샤 | 압전형 가속도센서 및 압전형 가속도센서장치 |
US5239871A (en) * | 1990-12-17 | 1993-08-31 | Texas Instruments Incorporated | Capacitive accelerometer |
DE69211269T2 (de) * | 1991-09-24 | 1997-01-23 | Murata Manufacturing Co | Beschleunigungsmessaufnehmer |
FR2700013B1 (fr) * | 1992-12-30 | 1995-03-17 | Akebono Brake Ind | Procédé et appareil de détection d'accélération suivant trois dimensions. |
US5555766A (en) * | 1993-11-04 | 1996-09-17 | Texas Instruments Incorporated | Acceleration sensor apparatus and method for making same |
DE10053309B4 (de) * | 2000-10-27 | 2005-02-24 | Eads Deutschland Gmbh | Mikromechanischer Beschleunigungssensor |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3789672A (en) * | 1970-11-12 | 1974-02-05 | Singer General Precision | Accelerometer |
US4736629A (en) * | 1985-12-20 | 1988-04-12 | Silicon Designs, Inc. | Micro-miniature accelerometer |
FR2599833B1 (fr) * | 1986-06-10 | 1992-02-14 | Metravib Sa | Capteur de grandeurs mecaniques integre sur silicium et procede de fabrication |
US4951510A (en) * | 1988-07-14 | 1990-08-28 | University Of Hawaii | Multidimensional force sensor |
-
1988
- 1988-11-23 IT IT68046/88A patent/IT1223933B/it active
-
1989
- 1989-11-21 DE DE8913756U patent/DE8913756U1/de not_active Expired - Lifetime
- 1989-11-22 GB GB8926379A patent/GB2225433B/en not_active Expired - Fee Related
- 1989-11-22 ES ES19898903507U patent/ES1012120Y/es not_active Expired - Lifetime
- 1989-11-22 FR FR898915324A patent/FR2639435B3/fr not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
GB8926379D0 (en) | 1990-01-10 |
ES1012120U (es) | 1990-07-01 |
IT1223933B (it) | 1990-09-29 |
GB2225433A (en) | 1990-05-30 |
IT8868046A0 (it) | 1988-11-23 |
DE8913756U1 (de) | 1990-01-11 |
GB2225433B (en) | 1993-01-27 |
ES1012120Y (es) | 1991-01-01 |
FR2639435A3 (fr) | 1990-05-25 |
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