DE7339254U - Vorrichtung zur hohlkehlenfoermigen anschraegung der mantelflaeche eines halbleiterkoerpers - Google Patents

Vorrichtung zur hohlkehlenfoermigen anschraegung der mantelflaeche eines halbleiterkoerpers

Info

Publication number
DE7339254U
DE7339254U DE19737339254U DE7339254U DE7339254U DE 7339254 U DE7339254 U DE 7339254U DE 19737339254 U DE19737339254 U DE 19737339254U DE 7339254 U DE7339254 U DE 7339254U DE 7339254 U DE7339254 U DE 7339254U
Authority
DE
Germany
Prior art keywords
semiconductor body
semiconductor
nozzle
sandblasting
face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19737339254U
Other languages
German (de)
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BBC Brown Boveri AG Switzerland
Original Assignee
BBC Brown Boveri AG Switzerland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BBC Brown Boveri AG Switzerland filed Critical BBC Brown Boveri AG Switzerland
Publication of DE7339254U publication Critical patent/DE7339254U/de
Expired legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24CABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/08Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
    • B24C1/083Deburring
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24CABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24CABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C3/00Abrasive blasting machines or devices; Plants
    • B24C3/32Abrasive blasting machines or devices; Plants designed for abrasive blasting of particular work, e.g. the internal surfaces of cylinder blocks
    • B24C3/322Abrasive blasting machines or devices; Plants designed for abrasive blasting of particular work, e.g. the internal surfaces of cylinder blocks for electrical components
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304Mechanical treatment, e.g. grinding, polishing, cutting
    • H01L21/3046Mechanical treatment, e.g. grinding, polishing, cutting using blasting, e.g. sand-blasting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67092Apparatus for mechanical treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/102Constructional design considerations for preventing surface leakage or controlling electric field concentration
    • H10D62/103Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
    • H10D62/104Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices having particular shapes of the bodies at or near reverse-biased junctions, e.g. having bevels or moats

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Thyristors (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Pressure Sensors (AREA)
DE19737339254U 1973-10-11 1973-11-02 Vorrichtung zur hohlkehlenfoermigen anschraegung der mantelflaeche eines halbleiterkoerpers Expired DE7339254U (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1450973A CH566643A5 (en, 2012) 1973-10-11 1973-10-11

Publications (1)

Publication Number Publication Date
DE7339254U true DE7339254U (de) 1976-01-08

Family

ID=4401415

Family Applications (2)

Application Number Title Priority Date Filing Date
DE2354854A Expired DE2354854C2 (de) 1973-10-11 1973-11-02 Verfahren und Vorrichtung zur Herstellung eines scheibenförmigen Halbleiterkörpers
DE19737339254U Expired DE7339254U (de) 1973-10-11 1973-11-02 Vorrichtung zur hohlkehlenfoermigen anschraegung der mantelflaeche eines halbleiterkoerpers

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE2354854A Expired DE2354854C2 (de) 1973-10-11 1973-11-02 Verfahren und Vorrichtung zur Herstellung eines scheibenförmigen Halbleiterkörpers

Country Status (5)

Country Link
US (1) US3953941A (en, 2012)
JP (1) JPS5611225B2 (en, 2012)
CH (1) CH566643A5 (en, 2012)
DE (2) DE2354854C2 (en, 2012)
GB (1) GB1460645A (en, 2012)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4031667A (en) * 1976-03-29 1977-06-28 Macronetics, Inc. Apparatus for contouring edge of semiconductor wafers
DE2656070C2 (de) * 1976-12-10 1983-12-08 Kraftwerk Union AG, 4330 Mülheim Vorrichtung zum Einarbeiten von Ringnuten um eine mit Dehnungsmeßstreifen versehene Meßstelle
US4247579A (en) * 1979-11-30 1981-01-27 General Electric Company Method for metallizing a semiconductor element
DE3124947C2 (de) * 1981-06-25 1985-12-05 Brown, Boveri & Cie Ag, 6800 Mannheim Verfahren und Vorrichtung zum Herstellen einer Hohlkehle in der Mantelfläche des Aktivteils eines Leistungshalbleiterbauelements
JPS61108170A (ja) * 1984-10-31 1986-05-26 ゼネラル・エレクトリツク・カンパニイ 電力半導体装置に2重正ベベル溝を形成する方法
EP0264700B1 (de) * 1986-10-22 1991-05-08 BBC Brown Boveri AG Verfahren zum Anbringen einer umlaufenden Hohlkehle am Rand einer Halbleiterscheibe eines Leistungshalbleiter-Bauelements
US5010694A (en) * 1989-08-01 1991-04-30 Advanced Technology Systems, Inc. Fluid cutting machine
JPH04277625A (ja) * 1991-03-05 1992-10-02 Murata Mfg Co Ltd チップ型電子部品の加工方法
GB2264659B (en) * 1992-02-29 1995-05-24 Rolls Royce Plc Abrasive fluid jet machining
US5704824A (en) * 1993-10-12 1998-01-06 Hashish; Mohamad Method and apparatus for abrasive water jet millins
FR2789224B1 (fr) * 1999-01-28 2003-10-03 St Microelectronics Sa Dressage de bord d'une plaquette semiconductrice
US6705925B1 (en) * 2000-10-20 2004-03-16 Lightwave Microsystems Apparatus and method to dice integrated circuits from a wafer using a pressurized jet
JP5793014B2 (ja) * 2011-07-21 2015-10-14 株式会社不二製作所 硬質脆性材料基板の側部研磨方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2886026A (en) * 1957-08-20 1959-05-12 Texas Instruments Inc Method of and apparatus for cutting a semiconductor crystal
BE628619A (en, 2012) * 1962-02-20
US3262234A (en) * 1963-10-04 1966-07-26 Int Rectifier Corp Method of forming a semiconductor rim by sandblasting
GB1057214A (en) * 1965-05-11 1967-02-01 Standard Telephones Cables Ltd Improvements in or relating to semiconductor devices
US3589081A (en) * 1967-08-21 1971-06-29 Pennwalt Corp Abrading method
GB1226880A (en, 2012) * 1968-03-21 1971-03-31
CH504783A (de) * 1969-06-20 1971-03-15 Siemens Ag Verfahren zum Abtrennen eines Körpers von einem scheibenförmigen Kristall und Vorrichtung zur Durchführung dieses Verfahrens
SE358838B (en, 2012) * 1971-12-01 1973-08-13 Ingenjoers Fa Hebe Ab

Also Published As

Publication number Publication date
JPS5611225B2 (en, 2012) 1981-03-12
CH566643A5 (en, 2012) 1975-09-15
JPS5067592A (en, 2012) 1975-06-06
US3953941A (en) 1976-05-04
DE2354854A1 (de) 1975-04-30
GB1460645A (en) 1977-01-06
DE2354854C2 (de) 1985-10-24

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