DE7339254U - Vorrichtung zur hohlkehlenfoermigen anschraegung der mantelflaeche eines halbleiterkoerpers - Google Patents
Vorrichtung zur hohlkehlenfoermigen anschraegung der mantelflaeche eines halbleiterkoerpersInfo
- Publication number
- DE7339254U DE7339254U DE19737339254U DE7339254U DE7339254U DE 7339254 U DE7339254 U DE 7339254U DE 19737339254 U DE19737339254 U DE 19737339254U DE 7339254 U DE7339254 U DE 7339254U DE 7339254 U DE7339254 U DE 7339254U
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor body
- semiconductor
- nozzle
- sandblasting
- face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title claims description 39
- 238000005488 sandblasting Methods 0.000 claims description 12
- 230000007704 transition Effects 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 7
- 230000000903 blocking effect Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
- B24C1/083—Deburring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C3/00—Abrasive blasting machines or devices; Plants
- B24C3/32—Abrasive blasting machines or devices; Plants designed for abrasive blasting of particular work, e.g. the internal surfaces of cylinder blocks
- B24C3/322—Abrasive blasting machines or devices; Plants designed for abrasive blasting of particular work, e.g. the internal surfaces of cylinder blocks for electrical components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
- H01L21/3046—Mechanical treatment, e.g. grinding, polishing, cutting using blasting, e.g. sand-blasting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
- H10D62/103—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
- H10D62/104—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices having particular shapes of the bodies at or near reverse-biased junctions, e.g. having bevels or moats
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Thyristors (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH1450973A CH566643A5 (en, 2012) | 1973-10-11 | 1973-10-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE7339254U true DE7339254U (de) | 1976-01-08 |
Family
ID=4401415
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE2354854A Expired DE2354854C2 (de) | 1973-10-11 | 1973-11-02 | Verfahren und Vorrichtung zur Herstellung eines scheibenförmigen Halbleiterkörpers |
DE19737339254U Expired DE7339254U (de) | 1973-10-11 | 1973-11-02 | Vorrichtung zur hohlkehlenfoermigen anschraegung der mantelflaeche eines halbleiterkoerpers |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE2354854A Expired DE2354854C2 (de) | 1973-10-11 | 1973-11-02 | Verfahren und Vorrichtung zur Herstellung eines scheibenförmigen Halbleiterkörpers |
Country Status (5)
Country | Link |
---|---|
US (1) | US3953941A (en, 2012) |
JP (1) | JPS5611225B2 (en, 2012) |
CH (1) | CH566643A5 (en, 2012) |
DE (2) | DE2354854C2 (en, 2012) |
GB (1) | GB1460645A (en, 2012) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4031667A (en) * | 1976-03-29 | 1977-06-28 | Macronetics, Inc. | Apparatus for contouring edge of semiconductor wafers |
DE2656070C2 (de) * | 1976-12-10 | 1983-12-08 | Kraftwerk Union AG, 4330 Mülheim | Vorrichtung zum Einarbeiten von Ringnuten um eine mit Dehnungsmeßstreifen versehene Meßstelle |
US4247579A (en) * | 1979-11-30 | 1981-01-27 | General Electric Company | Method for metallizing a semiconductor element |
DE3124947C2 (de) * | 1981-06-25 | 1985-12-05 | Brown, Boveri & Cie Ag, 6800 Mannheim | Verfahren und Vorrichtung zum Herstellen einer Hohlkehle in der Mantelfläche des Aktivteils eines Leistungshalbleiterbauelements |
JPS61108170A (ja) * | 1984-10-31 | 1986-05-26 | ゼネラル・エレクトリツク・カンパニイ | 電力半導体装置に2重正ベベル溝を形成する方法 |
EP0264700B1 (de) * | 1986-10-22 | 1991-05-08 | BBC Brown Boveri AG | Verfahren zum Anbringen einer umlaufenden Hohlkehle am Rand einer Halbleiterscheibe eines Leistungshalbleiter-Bauelements |
US5010694A (en) * | 1989-08-01 | 1991-04-30 | Advanced Technology Systems, Inc. | Fluid cutting machine |
JPH04277625A (ja) * | 1991-03-05 | 1992-10-02 | Murata Mfg Co Ltd | チップ型電子部品の加工方法 |
GB2264659B (en) * | 1992-02-29 | 1995-05-24 | Rolls Royce Plc | Abrasive fluid jet machining |
US5704824A (en) * | 1993-10-12 | 1998-01-06 | Hashish; Mohamad | Method and apparatus for abrasive water jet millins |
FR2789224B1 (fr) * | 1999-01-28 | 2003-10-03 | St Microelectronics Sa | Dressage de bord d'une plaquette semiconductrice |
US6705925B1 (en) * | 2000-10-20 | 2004-03-16 | Lightwave Microsystems | Apparatus and method to dice integrated circuits from a wafer using a pressurized jet |
JP5793014B2 (ja) * | 2011-07-21 | 2015-10-14 | 株式会社不二製作所 | 硬質脆性材料基板の側部研磨方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2886026A (en) * | 1957-08-20 | 1959-05-12 | Texas Instruments Inc | Method of and apparatus for cutting a semiconductor crystal |
BE628619A (en, 2012) * | 1962-02-20 | |||
US3262234A (en) * | 1963-10-04 | 1966-07-26 | Int Rectifier Corp | Method of forming a semiconductor rim by sandblasting |
GB1057214A (en) * | 1965-05-11 | 1967-02-01 | Standard Telephones Cables Ltd | Improvements in or relating to semiconductor devices |
US3589081A (en) * | 1967-08-21 | 1971-06-29 | Pennwalt Corp | Abrading method |
GB1226880A (en, 2012) * | 1968-03-21 | 1971-03-31 | ||
CH504783A (de) * | 1969-06-20 | 1971-03-15 | Siemens Ag | Verfahren zum Abtrennen eines Körpers von einem scheibenförmigen Kristall und Vorrichtung zur Durchführung dieses Verfahrens |
SE358838B (en, 2012) * | 1971-12-01 | 1973-08-13 | Ingenjoers Fa Hebe Ab |
-
1973
- 1973-10-11 CH CH1450973A patent/CH566643A5/xx not_active IP Right Cessation
- 1973-11-02 DE DE2354854A patent/DE2354854C2/de not_active Expired
- 1973-11-02 DE DE19737339254U patent/DE7339254U/de not_active Expired
-
1974
- 1974-10-07 JP JP11544074A patent/JPS5611225B2/ja not_active Expired
- 1974-10-09 GB GB4368574A patent/GB1460645A/en not_active Expired
- 1974-10-11 US US05/514,251 patent/US3953941A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS5611225B2 (en, 2012) | 1981-03-12 |
CH566643A5 (en, 2012) | 1975-09-15 |
JPS5067592A (en, 2012) | 1975-06-06 |
US3953941A (en) | 1976-05-04 |
DE2354854A1 (de) | 1975-04-30 |
GB1460645A (en) | 1977-01-06 |
DE2354854C2 (de) | 1985-10-24 |
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