GB1057214A - Improvements in or relating to semiconductor devices - Google Patents
Improvements in or relating to semiconductor devicesInfo
- Publication number
- GB1057214A GB1057214A GB1980665A GB1980665A GB1057214A GB 1057214 A GB1057214 A GB 1057214A GB 1980665 A GB1980665 A GB 1980665A GB 1980665 A GB1980665 A GB 1980665A GB 1057214 A GB1057214 A GB 1057214A
- Authority
- GB
- United Kingdom
- Prior art keywords
- diffusion
- region
- semi
- layer
- conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title abstract 4
- 238000009792 diffusion process Methods 0.000 abstract 4
- 208000035874 Excoriation Diseases 0.000 abstract 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 2
- 238000005299 abrasion Methods 0.000 abstract 2
- 238000007747 plating Methods 0.000 abstract 2
- 229910052710 silicon Inorganic materials 0.000 abstract 2
- 239000010703 silicon Substances 0.000 abstract 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 abstract 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 230000001154 acute effect Effects 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910052796 boron Inorganic materials 0.000 abstract 1
- 229910052733 gallium Inorganic materials 0.000 abstract 1
- 230000002068 genetic effect Effects 0.000 abstract 1
- 229910052732 germanium Inorganic materials 0.000 abstract 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 239000010931 gold Substances 0.000 abstract 1
- 230000000873 masking effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 229910052759 nickel Inorganic materials 0.000 abstract 1
- 239000002245 particle Substances 0.000 abstract 1
- 229910052698 phosphorus Inorganic materials 0.000 abstract 1
- 239000011574 phosphorus Substances 0.000 abstract 1
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0657—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
- H01L29/0661—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body specially adapted for altering the breakdown voltage by removing semiconductor material at, or in the neighbourhood of, a reverse biased junction, e.g. by bevelling, moat etching, depletion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
- H01L21/3046—Mechanical treatment, e.g. grinding, polishing, cutting using blasting, e.g. sand-blasting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Electrodes Of Semiconductors (AREA)
- Thyristors (AREA)
- Die Bonding (AREA)
Abstract
1,057,214. Semi-conductor devices. STANDARD TELEPHONES & CABLES Ltd. May 11, 1965, No. 19806/65. Heading H1K. Semi-conductor devices are made in which at a PN junction between a layer of one conductivity type and a layer of the opposite conductivity type which is of relatively high resistivity the surface of the latter layer and the emergent PN junction include an acute angle. Although applicable to diodes and transistors the invention is mainly described with respect to a silicon controlled-rectifier. (Germanium is also a suitable semi-conductor for such devices). The thyristor shown has a main body in the form of a circular disc of 20-40 ohm cm. N-type silicon. The gate region 6 and main part 3 of the anode region are formed by gallium diffusion and the enhanced conductivity part 2 of the anode region is formed by boron diffusion. Phosphorus diffusion is used to form the annular cathode region 8. Genetic silicon oxide masking is used during these diffusion stages. The three electrodes are applied by electroless nickel plating followed by plating with gold. An abrasion treatment, for example using alumina particles in a stream of compressed air, is now used to shape the surface of the high resistivity region 4 at the junctions 9 and 10, the device being rotated rapidly during the process. The abrasion nozzle may be formed as a rectangular slot having a main dimension lying in a plane parallel to the major faces of the device. The angles α and # produced are preferably about 30 degrees but they need not be made equal.
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1980665A GB1057214A (en) | 1965-05-11 | 1965-05-11 | Improvements in or relating to semiconductor devices |
DE1966I0030760 DE1564146A1 (en) | 1965-05-11 | 1966-05-06 | Semiconductor device and method of manufacturing |
NL6606326A NL6606326A (en) | 1965-05-11 | 1966-05-10 | |
FR61145A FR1479716A (en) | 1965-05-11 | 1966-05-11 | Improvements to semiconductor devices, such as, for example, power thyristors |
ES0326615A ES326615A1 (en) | 1965-05-11 | 1966-05-11 | A semiconductor device. (Machine-translation by Google Translate, not legally binding) |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1980665A GB1057214A (en) | 1965-05-11 | 1965-05-11 | Improvements in or relating to semiconductor devices |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1057214A true GB1057214A (en) | 1967-02-01 |
Family
ID=10135540
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1980665A Expired GB1057214A (en) | 1965-05-11 | 1965-05-11 | Improvements in or relating to semiconductor devices |
Country Status (4)
Country | Link |
---|---|
DE (1) | DE1564146A1 (en) |
ES (1) | ES326615A1 (en) |
GB (1) | GB1057214A (en) |
NL (1) | NL6606326A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3925807A (en) * | 1973-11-27 | 1975-12-09 | Licentia Gmbh | High voltage thyristor |
US3987479A (en) * | 1973-07-06 | 1976-10-19 | Bbc Brown Boveri & Company Limited | Semiconductor power component |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH566643A5 (en) * | 1973-10-11 | 1975-09-15 | Bbc Brown Boveri & Cie | |
DE3137695A1 (en) * | 1981-09-22 | 1983-04-21 | Siemens AG, 1000 Berlin und 8000 München | THYRISTOR WITH A MULTILAYER SEMICONDUCTOR BODY WITH PNPN LAYER SEQUENCE AND METHOD FOR THE PRODUCTION THEREOF |
-
1965
- 1965-05-11 GB GB1980665A patent/GB1057214A/en not_active Expired
-
1966
- 1966-05-06 DE DE1966I0030760 patent/DE1564146A1/en active Pending
- 1966-05-10 NL NL6606326A patent/NL6606326A/xx unknown
- 1966-05-11 ES ES0326615A patent/ES326615A1/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3987479A (en) * | 1973-07-06 | 1976-10-19 | Bbc Brown Boveri & Company Limited | Semiconductor power component |
US3925807A (en) * | 1973-11-27 | 1975-12-09 | Licentia Gmbh | High voltage thyristor |
Also Published As
Publication number | Publication date |
---|---|
NL6606326A (en) | 1966-11-14 |
DE1564146A1 (en) | 1970-02-26 |
ES326615A1 (en) | 1967-03-01 |
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