DE69939298D1 - Flipchip-Verbindung von Halbleiterchips - Google Patents
Flipchip-Verbindung von HalbleiterchipsInfo
- Publication number
- DE69939298D1 DE69939298D1 DE69939298T DE69939298T DE69939298D1 DE 69939298 D1 DE69939298 D1 DE 69939298D1 DE 69939298 T DE69939298 T DE 69939298T DE 69939298 T DE69939298 T DE 69939298T DE 69939298 D1 DE69939298 D1 DE 69939298D1
- Authority
- DE
- Germany
- Prior art keywords
- flip
- semiconductor chips
- chip connection
- chip
- connection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
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- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Wire Bonding (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US8444098P | 1998-05-06 | 1998-05-06 |
Publications (1)
Publication Number | Publication Date |
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DE69939298D1 true DE69939298D1 (de) | 2008-09-25 |
Family
ID=22184988
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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DE69939298T Expired - Lifetime DE69939298D1 (de) | 1998-05-06 | 1999-05-01 | Flipchip-Verbindung von Halbleiterchips |
Country Status (6)
Country | Link |
---|---|
US (1) | US6228680B1 (de) |
EP (1) | EP0977253B1 (de) |
JP (1) | JPH11345836A (de) |
KR (1) | KR100643105B1 (de) |
DE (1) | DE69939298D1 (de) |
TW (1) | TW415048B (de) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6794743B1 (en) | 1999-08-06 | 2004-09-21 | Texas Instruments Incorporated | Structure and method of high performance two layer ball grid array substrate |
JP3489113B2 (ja) * | 1999-12-20 | 2004-01-19 | 関西日本電気株式会社 | 半導体装置 |
US7058065B2 (en) * | 2000-02-08 | 2006-06-06 | Mips Tech Inc | Method and apparatus for preventing undesirable packet download with pending read/write operations in data packet processing |
US7042887B2 (en) * | 2000-02-08 | 2006-05-09 | Mips Technologies, Inc. | Method and apparatus for non-speculative pre-fetch operation in data packet processing |
US6507082B2 (en) * | 2000-02-22 | 2003-01-14 | Texas Instruments Incorporated | Flip-chip assembly of protected micromechanical devices |
US6656768B2 (en) | 2001-02-08 | 2003-12-02 | Texas Instruments Incorporated | Flip-chip assembly of protected micromechanical devices |
KR100398716B1 (ko) * | 2000-06-12 | 2003-09-19 | 가부시키가이샤 히타치세이사쿠쇼 | 반도체 모듈 및 반도체 장치를 접속한 회로 기판 |
JP3591458B2 (ja) * | 2000-12-15 | 2004-11-17 | 松下電器産業株式会社 | 半導体装置の実装構造および半導体装置 |
US6869831B2 (en) * | 2001-09-14 | 2005-03-22 | Texas Instruments Incorporated | Adhesion by plasma conditioning of semiconductor chip surfaces |
US20030116845A1 (en) * | 2001-12-21 | 2003-06-26 | Bojkov Christo P. | Waferlevel method for direct bumping on copper pads in integrated circuits |
US6696757B2 (en) * | 2002-06-24 | 2004-02-24 | Texas Instruments Incorporated | Contact structure for reliable metallic interconnection |
US20040007779A1 (en) * | 2002-07-15 | 2004-01-15 | Diane Arbuthnot | Wafer-level method for fine-pitch, high aspect ratio chip interconnect |
US6696644B1 (en) * | 2002-08-08 | 2004-02-24 | Texas Instruments Incorporated | Polymer-embedded solder bumps for reliable plastic package attachment |
US6677522B1 (en) | 2002-09-26 | 2004-01-13 | International Business Machines Corporation | Package for electronic component |
JP3918098B2 (ja) * | 2002-11-14 | 2007-05-23 | 株式会社村田製作所 | 回路モジュールの製造方法 |
JP2004281491A (ja) * | 2003-03-13 | 2004-10-07 | Toshiba Corp | 半導体装置及びその製造方法 |
US7238538B2 (en) * | 2003-09-19 | 2007-07-03 | Freitag Helmut E | Chromatographic assay device and methods |
US6977429B2 (en) * | 2003-12-05 | 2005-12-20 | Texas Instruments Incorporated | Manufacturing system and apparatus for balanced product flow with application to low-stress underfilling of flip-chip electronic devices |
US7298235B2 (en) * | 2004-01-13 | 2007-11-20 | Raytheon Company | Circuit board assembly and method of attaching a chip to a circuit board with a fillet bond not covering RF traces |
JP3981089B2 (ja) | 2004-02-18 | 2007-09-26 | 株式会社東芝 | 半導体装置とその製造方法 |
TWI237370B (en) * | 2004-07-30 | 2005-08-01 | Advanced Semiconductor Eng | Chip package structure and process for fabricating the same |
US7033864B2 (en) * | 2004-09-03 | 2006-04-25 | Texas Instruments Incorporated | Grooved substrates for uniform underfilling solder ball assembled electronic devices |
DE102006001600B3 (de) * | 2006-01-11 | 2007-08-02 | Infineon Technologies Ag | Halbleiterbauelement mit Flipchipkontakten und Verfahren zur Herstellung desselben |
US7585693B2 (en) * | 2006-03-31 | 2009-09-08 | Intel Corporation | Method of forming a microelectronic package using control of die and substrate differential expansions and microelectronic package formed according to the method |
US7790509B2 (en) * | 2008-06-27 | 2010-09-07 | Texas Instruments Incorporated | Method for fine-pitch, low stress flip-chip interconnect |
DE102010003562B4 (de) * | 2010-03-31 | 2021-11-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Verfahren und Wiederaufschmelzsystem zum Verbinden eines Halbleiterchips mit einem Gehäusesubstrat |
DE102011079835B4 (de) | 2011-07-26 | 2018-03-22 | Globalfoundries Inc. | Verfahren zur Verringerung der mechanischen Verspannung in komplexen Halbleiterbauelementen während des Chip-Substrat-Verbindens mittels eines mehrstufigen Abkühlschemas |
CN115081388B (zh) * | 2022-06-01 | 2024-03-22 | 华南理工大学 | 一种电子元件发热强度分配优化方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58191441A (ja) * | 1982-04-19 | 1983-11-08 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | ハンダ付けされた部品の応力軽減方法 |
US4604644A (en) * | 1985-01-28 | 1986-08-05 | International Business Machines Corporation | Solder interconnection structure for joining semiconductor devices to substrates that have improved fatigue life, and process for making |
US5121190A (en) * | 1990-03-14 | 1992-06-09 | International Business Machines Corp. | Solder interconnection structure on organic substrates |
US5656862A (en) * | 1990-03-14 | 1997-08-12 | International Business Machines Corporation | Solder interconnection structure |
US5371328A (en) * | 1993-08-20 | 1994-12-06 | International Business Machines Corporation | Component rework |
US5607773A (en) * | 1994-12-20 | 1997-03-04 | Texas Instruments Incorporated | Method of forming a multilevel dielectric |
US5659203A (en) * | 1995-06-07 | 1997-08-19 | International Business Machines Corporation | Reworkable polymer chip encapsulant |
US7041771B1 (en) * | 1995-08-11 | 2006-05-09 | Kac Holdings, Inc. | Encapsulant with fluxing properties and method of use in flip-chip surface mount reflow soldering |
US5821456A (en) * | 1996-05-01 | 1998-10-13 | Motorola, Inc. | Microelectronic assembly including a decomposable encapsulant, and method for forming and reworking same |
US5919329A (en) * | 1997-10-14 | 1999-07-06 | Gore Enterprise Holdings, Inc. | Method for assembling an integrated circuit chip package having at least one semiconductor device |
US6190940B1 (en) * | 1999-01-21 | 2001-02-20 | Lucent Technologies Inc. | Flip chip assembly of semiconductor IC chips |
-
1999
- 1999-04-09 KR KR1019990012614A patent/KR100643105B1/ko not_active IP Right Cessation
- 1999-04-26 TW TW088106587A patent/TW415048B/zh not_active IP Right Cessation
- 1999-04-28 JP JP11121398A patent/JPH11345836A/ja not_active Abandoned
- 1999-05-01 EP EP99201355A patent/EP0977253B1/de not_active Expired - Lifetime
- 1999-05-01 US US09/303,401 patent/US6228680B1/en not_active Expired - Lifetime
- 1999-05-01 DE DE69939298T patent/DE69939298D1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US6228680B1 (en) | 2001-05-08 |
TW415048B (en) | 2000-12-11 |
EP0977253A3 (de) | 2001-01-17 |
KR100643105B1 (ko) | 2006-11-13 |
EP0977253B1 (de) | 2008-08-13 |
KR19990087907A (ko) | 1999-12-27 |
JPH11345836A (ja) | 1999-12-14 |
EP0977253A2 (de) | 2000-02-02 |
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