DE69935390D1 - Akustisches Oberflächenwellensubstrat mit hartem Kohlenstoff-Film - Google Patents
Akustisches Oberflächenwellensubstrat mit hartem Kohlenstoff-FilmInfo
- Publication number
- DE69935390D1 DE69935390D1 DE69935390T DE69935390T DE69935390D1 DE 69935390 D1 DE69935390 D1 DE 69935390D1 DE 69935390 T DE69935390 T DE 69935390T DE 69935390 T DE69935390 T DE 69935390T DE 69935390 D1 DE69935390 D1 DE 69935390D1
- Authority
- DE
- Germany
- Prior art keywords
- carbon film
- surface wave
- hard carbon
- acoustic surface
- wave substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02582—Characteristics of substrate, e.g. cutting angles of diamond substrates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32611098 | 1998-10-30 | ||
JP32611098 | 1998-10-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69935390D1 true DE69935390D1 (de) | 2007-04-19 |
DE69935390T2 DE69935390T2 (de) | 2007-07-05 |
Family
ID=18184209
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69935390T Expired - Lifetime DE69935390T2 (de) | 1998-10-30 | 1999-10-20 | Akustisches Oberflächenwellensubstrat mit hartem Kohlenstoff-Film |
Country Status (5)
Country | Link |
---|---|
US (2) | US6416865B1 (de) |
EP (1) | EP1001048B1 (de) |
KR (1) | KR100358314B1 (de) |
CA (1) | CA2285125C (de) |
DE (1) | DE69935390T2 (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7132309B2 (en) | 2003-04-22 | 2006-11-07 | Chien-Min Sung | Semiconductor-on-diamond devices and methods of forming |
US7011134B2 (en) * | 2000-10-13 | 2006-03-14 | Chien-Min Sung | Casting method for producing surface acoustic wave devices |
US6814130B2 (en) * | 2000-10-13 | 2004-11-09 | Chien-Min Sung | Methods of making diamond tools using reverse casting of chemical vapor deposition |
JP2002338388A (ja) * | 2001-02-15 | 2002-11-27 | Ngk Insulators Ltd | ダイヤモンドコート部材 |
KR100858600B1 (ko) * | 2001-10-05 | 2008-09-17 | 스미토모덴키고교가부시키가이샤 | 표면 탄성파 소자용 다이아몬드 기판 및 표면 탄성파 소자 |
US6903862B2 (en) * | 2002-11-05 | 2005-06-07 | Matsushita Electric Industrial Co., Ltd. | Ultraviolet acoustooptic device and optical imaging apparatus using the same |
DE10252828B4 (de) | 2002-11-13 | 2018-07-05 | Epcos Ag | Mit akustischen Wellen arbeitendes Bauelement und Verfahren zur Herstellung eines Bauelements |
DE10259174B4 (de) * | 2002-12-18 | 2006-10-12 | Robert Bosch Gmbh | Verwendung eines tribologisch beanspruchten Bauelements |
KR100513734B1 (ko) * | 2003-11-04 | 2005-09-08 | 삼성전자주식회사 | 박형 광픽업 |
WO2008059674A1 (fr) * | 2006-11-13 | 2008-05-22 | Murata Manufacturing Co., Ltd. | Elément d'onde interne acoustique, dispositif d'onde interne acoustique et leur procédé de fabrication |
US7846767B1 (en) | 2007-09-06 | 2010-12-07 | Chien-Min Sung | Semiconductor-on-diamond devices and associated methods |
US8115365B2 (en) * | 2008-04-15 | 2012-02-14 | Ngk Insulators, Ltd. | Surface acoustic wave devices |
US7911111B2 (en) * | 2008-04-15 | 2011-03-22 | Ngk Insulators, Ltd. | Surface acoustic wave devices |
CN101630947B (zh) * | 2008-07-15 | 2012-04-18 | 大同股份有限公司 | 高频表面声波元件 |
US8183086B2 (en) * | 2009-06-16 | 2012-05-22 | Chien-Min Sung | Diamond GaN devices and associated methods |
KR101347892B1 (ko) * | 2010-07-05 | 2014-01-08 | 울산대학교 산학협력단 | 다결정 3C-SiC 버퍼층을 포함하는 표면 탄성파 소자 |
JP2012065304A (ja) * | 2010-08-16 | 2012-03-29 | Seiko Epson Corp | 圧電振動デバイス及びその製造方法、共振周波数の調整方法 |
CN107108229B (zh) * | 2015-10-30 | 2021-11-19 | 住友电气工业株式会社 | 复合多晶体 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4725345A (en) * | 1985-04-22 | 1988-02-16 | Kabushiki Kaisha Kenwood | Method for forming a hard carbon thin film on article and applications thereof |
US5126206A (en) * | 1990-03-20 | 1992-06-30 | Diamonex, Incorporated | Diamond-on-a-substrate for electronic applications |
JP2813077B2 (ja) | 1991-05-30 | 1998-10-22 | 京セラ株式会社 | 摺動部材 |
JPH04358410A (ja) * | 1991-06-05 | 1992-12-11 | Sumitomo Electric Ind Ltd | 表面弾性波素子及びその製造方法 |
JPH0590874A (ja) | 1991-09-26 | 1993-04-09 | Sumitomo Electric Ind Ltd | 表面弾性波素子 |
JPH05320911A (ja) | 1992-05-20 | 1993-12-07 | Hitachi Metals Ltd | ダイヤモンド被覆超硬工具の製造方法 |
JP3163606B2 (ja) * | 1993-01-29 | 2001-05-08 | 住友電気工業株式会社 | 表面弾性波素子 |
EP0616047B1 (de) * | 1993-02-16 | 1997-07-23 | Sumitomo Electric Industries, Limited | Polykristallines Substrat aus Diamant sowie Verfahren zur dessen Herstellung |
JP3243878B2 (ja) | 1993-03-30 | 2002-01-07 | 三菱マテリアル株式会社 | 気相合成ダイヤモンド膜およびこの気相合成ダイヤモンド膜からなるx線露光用マスク |
JPH06316942A (ja) | 1993-05-07 | 1994-11-15 | Nippon Hume Pipe Co Ltd | 鉄塔基礎用プレキャスト製品及び鉄塔基礎の施工方法 |
KR0134942B1 (ko) * | 1993-06-11 | 1998-06-15 | 이다가끼 유끼오 | 비정질 경질 탄소막 및 그 제조 방법 |
JP3368624B2 (ja) | 1993-08-03 | 2003-01-20 | 住友電気工業株式会社 | 半導体装置用基板 |
JP3774904B2 (ja) | 1994-01-27 | 2006-05-17 | 住友電気工業株式会社 | 平坦なダイヤモンド膜の合成法とダイヤモンド自立膜及びダイヤモンド膜の研磨方法 |
JP3291105B2 (ja) | 1994-01-31 | 2002-06-10 | 京セラ株式会社 | 硬質炭素膜及び硬質炭素膜被覆部材 |
EP0674384B1 (de) * | 1994-03-25 | 1999-08-11 | Sumitomo Electric Industries, Ltd | Orientierbares Material und Oberflächenwellenanordnung |
JP3344441B2 (ja) * | 1994-03-25 | 2002-11-11 | 住友電気工業株式会社 | 表面弾性波素子 |
DE69503285T2 (de) | 1994-04-07 | 1998-11-05 | Sumitomo Electric Industries | Diamantwafer und Verfahren zur Herstellung eines Diamantwafers |
DE69526129T2 (de) | 1994-05-23 | 2002-08-22 | Sumitomo Electric Industries | Verfahren und Vorrichtung zum Herstellen eines mit hartem Material bedeckten Halbleiters durch Polieren |
EP0699776B1 (de) | 1994-06-09 | 1999-03-31 | Sumitomo Electric Industries, Limited | Wafer und Verfahren zur Herstellung eines Wafers |
JP3282645B2 (ja) * | 1994-06-16 | 2002-05-20 | 住友電気工業株式会社 | 表面弾性波素子 |
EP0752293B1 (de) | 1995-07-05 | 1999-10-20 | Ngk Spark Plug Co., Ltd | Diamantbeschichteter Gegenstand und Verfahren zu seiner Herstellung |
JP3826453B2 (ja) | 1996-09-10 | 2006-09-27 | 住友電気工業株式会社 | 硬質炭素膜 |
-
1999
- 1999-09-21 US US09/400,193 patent/US6416865B1/en not_active Expired - Fee Related
- 1999-10-06 CA CA002285125A patent/CA2285125C/en not_active Expired - Fee Related
- 1999-10-20 EP EP99308290A patent/EP1001048B1/de not_active Expired - Lifetime
- 1999-10-20 DE DE69935390T patent/DE69935390T2/de not_active Expired - Lifetime
- 1999-10-30 KR KR1019990047690A patent/KR100358314B1/ko not_active IP Right Cessation
-
2000
- 2000-12-19 US US09/739,210 patent/US6448688B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR20000029431A (ko) | 2000-05-25 |
EP1001048A3 (de) | 2003-09-17 |
US6416865B1 (en) | 2002-07-09 |
DE69935390T2 (de) | 2007-07-05 |
US20010030795A1 (en) | 2001-10-18 |
KR100358314B1 (ko) | 2002-10-25 |
US6448688B2 (en) | 2002-09-10 |
CA2285125A1 (en) | 2000-04-30 |
EP1001048B1 (de) | 2007-03-07 |
CA2285125C (en) | 2008-02-12 |
EP1001048A2 (de) | 2000-05-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |