DE69905734D1 - Oberflächenwellenanordnung - Google Patents
OberflächenwellenanordnungInfo
- Publication number
- DE69905734D1 DE69905734D1 DE69905734T DE69905734T DE69905734D1 DE 69905734 D1 DE69905734 D1 DE 69905734D1 DE 69905734 T DE69905734 T DE 69905734T DE 69905734 T DE69905734 T DE 69905734T DE 69905734 D1 DE69905734 D1 DE 69905734D1
- Authority
- DE
- Germany
- Prior art keywords
- surface wave
- wave arrangement
- arrangement
- wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15279599 | 1999-05-31 | ||
PCT/JP1999/005608 WO2000074235A1 (fr) | 1999-05-31 | 1999-10-12 | Dispositif a ondes acoustiques de surface |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69905734D1 true DE69905734D1 (de) | 2003-04-10 |
DE69905734T2 DE69905734T2 (de) | 2003-07-10 |
Family
ID=15548324
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69905734T Expired - Fee Related DE69905734T2 (de) | 1999-05-31 | 1999-10-12 | Oberflächenwellenanordnung |
Country Status (7)
Country | Link |
---|---|
US (1) | US6407486B1 (de) |
EP (1) | EP1111779B1 (de) |
JP (1) | JP3387060B2 (de) |
CN (1) | CN1109402C (de) |
DE (1) | DE69905734T2 (de) |
HK (1) | HK1038837A1 (de) |
WO (1) | WO2000074235A1 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3735550B2 (ja) | 2001-09-21 | 2006-01-18 | Tdk株式会社 | 弾性表面波装置およびその製造方法 |
TWI282660B (en) | 2001-12-27 | 2007-06-11 | Murata Manufacturing Co | Surface acoustic wave device and manufacturing method therefor |
JP2004165879A (ja) * | 2002-11-12 | 2004-06-10 | Alps Electric Co Ltd | 弾性表面波素子 |
TWI232991B (en) * | 2002-11-15 | 2005-05-21 | Nec Lcd Technologies Ltd | Method for manufacturing an LCD device |
JP3646116B2 (ja) | 2003-07-17 | 2005-05-11 | Tdk株式会社 | 表面弾性波素子、表面弾性波装置、表面弾性波デュプレクサ、及び表面弾性波素子の製造方法 |
JP3764450B2 (ja) | 2003-07-28 | 2006-04-05 | Tdk株式会社 | 表面弾性波素子、表面弾性波装置、表面弾性波デュプレクサ、及び表面弾性波素子の製造方法 |
US7795788B2 (en) | 2004-10-26 | 2010-09-14 | Kyocera Corporation | Surface acoustic wave element and communication device |
JP4809042B2 (ja) | 2005-11-10 | 2011-11-02 | 日本電波工業株式会社 | 弾性表面波素子及びその製造方法 |
JP3961012B1 (ja) * | 2006-03-22 | 2007-08-15 | Tdk株式会社 | 弾性表面波装置 |
US8143681B2 (en) * | 2006-04-20 | 2012-03-27 | The George Washington University | Saw devices, processes for making them, and methods of use |
US20100007444A1 (en) * | 2006-04-20 | 2010-01-14 | Anis Nurashikin Nordin | GHz Surface Acoustic Resonators in RF-CMOS |
US7728697B2 (en) * | 2006-09-26 | 2010-06-01 | Mg Materials Corporation | Systems and methods for electrically reducing ferroelectric materials to increase bulk conductivity |
US20090124513A1 (en) * | 2007-04-20 | 2009-05-14 | Patricia Berg | Multiplex Biosensor |
CA2694569C (en) | 2009-02-27 | 2017-07-25 | Gotohti.Com Inc. | Manual fluid dispenser with electrical generator |
DE102009056663B4 (de) | 2009-12-02 | 2022-08-11 | Tdk Electronics Ag | Metallisierung mit hoher Leistungsverträglichkeit und hoher elektrischer Leitfähigkeit und Verfahren zur Herstellung |
JP5341006B2 (ja) * | 2010-03-30 | 2013-11-13 | 新科實業有限公司 | 弾性表面波装置 |
US8960004B2 (en) | 2010-09-29 | 2015-02-24 | The George Washington University | Synchronous one-pole surface acoustic wave resonator |
CA2776684C (en) | 2012-05-11 | 2019-07-23 | Gotohti.Com Inc. | Ozone foam dispenser |
US9050775B2 (en) * | 2012-10-12 | 2015-06-09 | Nano And Advanced Materials Institute Limited | Methods of fabricating transparent and nanomaterial-based conductive film |
CN106596604B (zh) * | 2016-11-29 | 2019-05-21 | 国网辽宁省电力有限公司沈阳供电公司 | 一种反射电子衍射技术对高压电缆的无损检测装置 |
CN106603035A (zh) * | 2016-12-23 | 2017-04-26 | 北京中科飞鸿科技有限公司 | 一种提高声表面波滤波器耐受功率的方法 |
JP6986376B2 (ja) * | 2017-06-27 | 2021-12-22 | NDK SAW devices株式会社 | 弾性表面波素子およびその製造方法 |
JP2020092321A (ja) * | 2018-12-05 | 2020-06-11 | 太陽誘電株式会社 | 弾性波デバイスおよびその製造方法、フィルタ並びにマルチプレクサ |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57159113A (en) * | 1981-03-27 | 1982-10-01 | Toshiba Corp | Surface acoustic wave resonator |
JPS5955615A (ja) * | 1982-09-24 | 1984-03-30 | Hitachi Ltd | 弾性表面波装置およびその製造方法 |
JPS62168411A (ja) * | 1986-01-20 | 1987-07-24 | Victor Co Of Japan Ltd | 弾性表面波共振子 |
US5162690A (en) | 1989-04-14 | 1992-11-10 | Murata Manufacturing Co., Ltd. | Surface acoustic wave device |
JP2545983B2 (ja) * | 1989-04-14 | 1996-10-23 | 株式会社村田製作所 | 弾性表面波装置 |
JPH0314305A (ja) | 1989-06-13 | 1991-01-23 | Murata Mfg Co Ltd | 弾性表面波装置の製造方法 |
JP2937613B2 (ja) | 1991-07-16 | 1999-08-23 | 日本電気株式会社 | 薄膜配線およびその製造方法 |
JPH05199062A (ja) * | 1991-09-24 | 1993-08-06 | Seiko Epson Corp | 弾性表面波素子とその製造方法および弾性表面波素子用基板 |
JPH05183373A (ja) * | 1991-12-30 | 1993-07-23 | Murata Mfg Co Ltd | 弾性表面波素子の電極材料 |
JP3033331B2 (ja) | 1992-02-10 | 2000-04-17 | 日本電気株式会社 | 薄膜配線の製造方法 |
JP2818535B2 (ja) * | 1993-11-11 | 1998-10-30 | 日本電気株式会社 | 弾性表面波装置 |
JP3208977B2 (ja) | 1993-12-02 | 2001-09-17 | 株式会社村田製作所 | 弾性表面波素子の電極形成方法 |
JP3438360B2 (ja) | 1994-11-14 | 2003-08-18 | 株式会社村田製作所 | 弾性表面波素子の電極形成方法 |
JPH08154030A (ja) * | 1994-11-25 | 1996-06-11 | Murata Mfg Co Ltd | 弾性表面波素子 |
JP2888158B2 (ja) * | 1995-01-18 | 1999-05-10 | 日本電気株式会社 | 弾性表面波装置の製造方法 |
JPH08340233A (ja) | 1995-06-13 | 1996-12-24 | Nec Corp | 弾性表面波装置 |
US5929723A (en) | 1995-09-21 | 1999-07-27 | Tdk Corporation | Surface acoustic wave apparatus having an electrode that is a doped alloy film |
DE19641662B4 (de) * | 1995-10-13 | 2004-07-01 | Fujitsu Ltd., Kawasaki | Oberflächenakustikwellenvorrichtung mit einem optimierten Schnittwinkel eines piezoelektrischen Substrats |
JPH09167936A (ja) * | 1995-10-13 | 1997-06-24 | Fujitsu Ltd | 弾性表面波装置 |
JPH09199969A (ja) * | 1996-01-19 | 1997-07-31 | Murata Mfg Co Ltd | 薄膜体 |
WO1999016168A1 (fr) * | 1997-09-22 | 1999-04-01 | Tdk Corporation | Appareil a ondes acoustiques de surface et procede de fabrication de cet appareil |
US6259185B1 (en) * | 1998-12-02 | 2001-07-10 | Cts Corporation | Metallization for high power handling in a surface acoustic wave device and method for providing same |
-
1999
- 1999-10-12 JP JP2000601280A patent/JP3387060B2/ja not_active Expired - Fee Related
- 1999-10-12 DE DE69905734T patent/DE69905734T2/de not_active Expired - Fee Related
- 1999-10-12 WO PCT/JP1999/005608 patent/WO2000074235A1/ja active IP Right Grant
- 1999-10-12 CN CN99806810A patent/CN1109402C/zh not_active Expired - Fee Related
- 1999-10-12 EP EP99973837A patent/EP1111779B1/de not_active Expired - Lifetime
-
2000
- 2000-10-26 US US09/696,281 patent/US6407486B1/en not_active Expired - Lifetime
-
2001
- 2001-12-28 HK HK01109169A patent/HK1038837A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US6407486B1 (en) | 2002-06-18 |
EP1111779A1 (de) | 2001-06-27 |
WO2000074235A1 (fr) | 2000-12-07 |
EP1111779B1 (de) | 2003-03-05 |
CN1303538A (zh) | 2001-07-11 |
HK1038837A1 (en) | 2002-03-28 |
JP3387060B2 (ja) | 2003-03-17 |
EP1111779A4 (de) | 2002-01-02 |
DE69905734T2 (de) | 2003-07-10 |
CN1109402C (zh) | 2003-05-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |