DE69932219D1 - Abgeschlossene Vorrichtung - Google Patents

Abgeschlossene Vorrichtung

Info

Publication number
DE69932219D1
DE69932219D1 DE69932219T DE69932219T DE69932219D1 DE 69932219 D1 DE69932219 D1 DE 69932219D1 DE 69932219 T DE69932219 T DE 69932219T DE 69932219 T DE69932219 T DE 69932219T DE 69932219 D1 DE69932219 D1 DE 69932219D1
Authority
DE
Germany
Prior art keywords
completed device
completed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69932219T
Other languages
English (en)
Other versions
DE69932219T2 (de
Inventor
Eiichi Toya
Tomio Konn
Tomohiro Nagata
Norihiko Saito
Sunao Seko
Hideyuki Yokoyama
Ken Nakao
Takanori Saito
Hisaei Osanai
Toshiyuki Makiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Publication of DE69932219D1 publication Critical patent/DE69932219D1/de
Application granted granted Critical
Publication of DE69932219T2 publication Critical patent/DE69932219T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H05B3/42—Heating elements having the shape of rods or tubes non-flexible
    • H05B3/44—Heating elements having the shape of rods or tubes non-flexible heating conductor arranged within rods or tubes of insulating material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D99/00—Subject matter not provided for in other groups of this subclass
    • F27D99/0073—Seals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D99/00—Subject matter not provided for in other groups of this subclass
    • F27D99/0001—Heating elements or systems
    • F27D99/0006—Electric heating elements or system
    • F27D2099/0008—Resistor heating
DE69932219T 1998-11-30 1999-11-30 Abgeschlossene Vorrichtung Expired - Fee Related DE69932219T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP35691998 1998-11-30
JP35691998A JP3434721B2 (ja) 1998-11-30 1998-11-30 封止端子

Publications (2)

Publication Number Publication Date
DE69932219D1 true DE69932219D1 (de) 2006-08-17
DE69932219T2 DE69932219T2 (de) 2007-05-31

Family

ID=18451432

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69932219T Expired - Fee Related DE69932219T2 (de) 1998-11-30 1999-11-30 Abgeschlossene Vorrichtung

Country Status (6)

Country Link
US (1) US6204488B1 (de)
EP (1) EP1006563B1 (de)
JP (1) JP3434721B2 (de)
KR (1) KR100334992B1 (de)
DE (1) DE69932219T2 (de)
TW (1) TW437023B (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4697909B2 (ja) * 2000-05-25 2011-06-08 コバレントマテリアル株式会社 カーボンワイヤー発熱体封入ヒータ
EP1391919A1 (de) * 2001-04-11 2004-02-25 Ibiden Co., Ltd. Keramisches heizelement für eine halbleiterherstellungs-/-untersuchungsvorrichtung
EP1484787A1 (de) * 2002-03-13 2004-12-08 Sumitomo Electric Industries, Ltd. Halter für ein halbleiterproduktionssystem
US6573484B1 (en) * 2002-03-25 2003-06-03 Steven Yue Electrical heating wire assembly
EP1349429A3 (de) 2002-03-25 2007-10-24 Tokyo Electron Limited Heizer mit Abdichtung aus Drahtheizelementobjekt aus Kohlenstoff und Vorrichtung zum Heizen einer Flüssigkeit die denselben Heizer benützt
JP3832409B2 (ja) * 2002-09-18 2006-10-11 住友電気工業株式会社 ウエハー保持体及び半導体製造装置
KR100547189B1 (ko) * 2003-04-23 2006-01-31 스타전자(주) 그라파이트 펠트를 이용하는 탄소 발열 장치의 제조 방법
JP2005166354A (ja) * 2003-12-01 2005-06-23 Ngk Insulators Ltd セラミックヒーター
JP2007213918A (ja) * 2006-02-08 2007-08-23 Vertex Precision Electronics Inc 石英電熱管
JP2008108703A (ja) * 2006-09-28 2008-05-08 Covalent Materials Corp 面状ヒータ及びこのヒータを備えた半導体熱処理装置
JP5014080B2 (ja) * 2007-11-19 2012-08-29 コバレントマテリアル株式会社 面状ヒータ
US20100282458A1 (en) * 2009-05-08 2010-11-11 Yale Ann Carbon fiber heating source and heating system using the same
JP2015008042A (ja) * 2013-06-24 2015-01-15 ニッタ株式会社 線状部材の防水処理構造
US10674566B2 (en) * 2017-03-02 2020-06-02 Coorstek Kk Planar heater
JP6819656B2 (ja) * 2018-07-25 2021-01-27 カシオ計算機株式会社 回路基板、プログラム、及び、ボタン構造
JP7248607B2 (ja) * 2020-02-03 2023-03-29 日本碍子株式会社 セラミックヒータ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6345814A (ja) * 1986-08-13 1988-02-26 Hitachi Ltd 分子線エピタキシ装置の基板加熱装置
EP0447155B1 (de) * 1990-03-12 1995-07-26 Ngk Insulators, Ltd. Wafer-Heizgeräte für Apparate, zur Halbleiterherstellung Heizanlage mit diesen Heizgeräten und Herstellung von Heizgeräten
JPH0589947A (ja) * 1991-09-30 1993-04-09 Toshiba Lighting & Technol Corp 管形発熱体
KR100280772B1 (ko) * 1994-08-31 2001-02-01 히가시 데쓰로 처리장치
TW452826B (en) * 1997-07-31 2001-09-01 Toshiba Ceramics Co Carbon heater
JP4185194B2 (ja) * 1997-07-31 2008-11-26 コバレントマテリアル株式会社 カーボンヒータ

Also Published As

Publication number Publication date
EP1006563B1 (de) 2006-07-05
TW437023B (en) 2001-05-28
KR20000035780A (ko) 2000-06-26
US6204488B1 (en) 2001-03-20
KR100334992B1 (ko) 2002-05-02
JP2000164602A (ja) 2000-06-16
EP1006563A3 (de) 2004-10-13
JP3434721B2 (ja) 2003-08-11
DE69932219T2 (de) 2007-05-31
EP1006563A2 (de) 2000-06-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: COVALENT MATERIALS CORP., TOKYO, JP

8339 Ceased/non-payment of the annual fee