DE69926126D1 - Verfahren zur ruhestrombestimmung - Google Patents

Verfahren zur ruhestrombestimmung

Info

Publication number
DE69926126D1
DE69926126D1 DE69926126T DE69926126T DE69926126D1 DE 69926126 D1 DE69926126 D1 DE 69926126D1 DE 69926126 T DE69926126 T DE 69926126T DE 69926126 T DE69926126 T DE 69926126T DE 69926126 D1 DE69926126 D1 DE 69926126D1
Authority
DE
Germany
Prior art keywords
current
iddq
ith
integrated circuit
potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69926126T
Other languages
English (en)
Other versions
DE69926126T2 (de
Inventor
Carlo Dallavalle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SRL
Original Assignee
STMicroelectronics SRL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SRL filed Critical STMicroelectronics SRL
Publication of DE69926126D1 publication Critical patent/DE69926126D1/de
Application granted granted Critical
Publication of DE69926126T2 publication Critical patent/DE69926126T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/30—Marginal testing, e.g. by varying supply voltage
    • G01R31/3004—Current or voltage test
    • G01R31/3008—Quiescent current [IDDQ] test or leakage current test
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/30—Marginal testing, e.g. by varying supply voltage
    • G01R31/3004—Current or voltage test

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
DE69926126T 1999-09-14 1999-09-14 Verfahren zur ruhestrombestimmung Expired - Lifetime DE69926126T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP99830581A EP1085333B1 (de) 1999-09-14 1999-09-14 Verfahren zur ruhestrombestimmung

Publications (2)

Publication Number Publication Date
DE69926126D1 true DE69926126D1 (de) 2005-08-18
DE69926126T2 DE69926126T2 (de) 2006-05-11

Family

ID=8243588

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69926126T Expired - Lifetime DE69926126T2 (de) 1999-09-14 1999-09-14 Verfahren zur ruhestrombestimmung

Country Status (4)

Country Link
US (1) US6489800B1 (de)
EP (1) EP1085333B1 (de)
JP (1) JP2001133510A (de)
DE (1) DE69926126T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2003217688A1 (en) * 2002-02-22 2003-09-09 Rutgers, The State University Of New Jersey Method and system for graphical evaluation of iddq measurements
WO2004077081A1 (en) * 2003-02-20 2004-09-10 International Business Machines Corporation Integrated circuit testing methods using well bias modification
US7501651B2 (en) * 2004-11-30 2009-03-10 Samsung Electronics Co., Ltd. Test structure of semiconductor device
US7486098B2 (en) * 2005-06-16 2009-02-03 International Business Machines Corporation Integrated circuit testing method using well bias modification
US20070263472A1 (en) * 2006-05-11 2007-11-15 Anderson Brent A Process environment variation evaluation
RU2474918C1 (ru) * 2011-08-16 2013-02-10 Федеральное государственное унитарное предприятие "НПО "ОРИОН" Способ обнаружения скрытых электрических дефектов матричных или линейных кремниевых моп мультиплексоров
CN106960802B (zh) * 2016-01-11 2019-10-15 北大方正集团有限公司 一种半导体静态电流的测试器件及测试方法
EP3933419B1 (de) 2020-07-01 2024-04-03 NXP USA, Inc. Screeningverfahren und vorrichtung zur detektion von tiefen grabenisolations- und soi-defekten
CN116631485A (zh) * 2022-02-14 2023-08-22 长鑫存储技术有限公司 半导体测试结构及其制备方法、测试晶圆及其测试方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6049690A (ja) * 1983-08-29 1985-03-18 Nippon Telegr & Teleph Corp <Ntt> 半導体レ−ザダイオ−ドのスクリ−ニング方法
US5025344A (en) * 1988-11-30 1991-06-18 Carnegie Mellon University Built-in current testing of integrated circuits
KR0132756B1 (ko) * 1993-03-15 1998-04-16 원본미기재 이씨엘(ecl) 회로의 번인 방법 및 장치
JP3157649B2 (ja) * 1993-05-25 2001-04-16 日本電信電話株式会社 論理回路
EP0685073A1 (de) * 1993-12-16 1995-12-06 Koninklijke Philips Electronics N.V. Separate ruhestromprüfung am signalanschluss und vorspannungsanschluss eines ic s
US5519333A (en) * 1994-09-09 1996-05-21 Sandia Corporation Elevated voltage level IDDQ failure testing of integrated circuits
DE69517693T2 (de) * 1995-12-29 2001-03-01 St Microelectronics Srl Standardzellenbibliothek für den Entwurf von integrierten Schaltungen
JP2921476B2 (ja) * 1996-03-28 1999-07-19 日本電気株式会社 Ｌｓｉの電源電流テスト方法
JPH11126813A (ja) * 1997-10-23 1999-05-11 Toshiba Corp Ｃｍｏｓ集積回路装置及びその検査方法
US5889408A (en) * 1996-06-27 1999-03-30 Intel Corporation Delta IDDQ testing
US5789933A (en) * 1996-10-30 1998-08-04 Hewlett-Packard Co. Method and apparatus for determining IDDQ
US6175244B1 (en) * 1997-04-25 2001-01-16 Carnegie Mellon University Current signatures for IDDQ testing
US5914615A (en) * 1997-04-29 1999-06-22 Hewlett-Packard Company Method of improving the quality and efficiency of Iddq testing
JP2000206174A (ja) * 1999-01-14 2000-07-28 Matsushita Electric Ind Co Ltd 半導体装置の検査方法

Also Published As

Publication number Publication date
EP1085333A1 (de) 2001-03-21
JP2001133510A (ja) 2001-05-18
EP1085333B1 (de) 2005-07-13
DE69926126T2 (de) 2006-05-11
US6489800B1 (en) 2002-12-03

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Legal Events

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