DE69924595D1 - System für magnetorheologische Feinstbearbeitung von Substraten - Google Patents

System für magnetorheologische Feinstbearbeitung von Substraten

Info

Publication number
DE69924595D1
DE69924595D1 DE69924595T DE69924595T DE69924595D1 DE 69924595 D1 DE69924595 D1 DE 69924595D1 DE 69924595 T DE69924595 T DE 69924595T DE 69924595 T DE69924595 T DE 69924595T DE 69924595 D1 DE69924595 D1 DE 69924595D1
Authority
DE
Germany
Prior art keywords
magnetorheological
substrates
fine machining
machining
fine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69924595T
Other languages
English (en)
Other versions
DE69924595T2 (de
Inventor
I Kordonski Rochester William
Golini Rochester Donald
Hogan Rush Stephen
R Dumas Rochester Paul
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
QED Technologies International LLC
Original Assignee
QED Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by QED Technologies Inc filed Critical QED Technologies Inc
Application granted granted Critical
Publication of DE69924595D1 publication Critical patent/DE69924595D1/de
Publication of DE69924595T2 publication Critical patent/DE69924595T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
    • G01N11/02—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by measuring flow of the material
    • G01N11/04—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by measuring flow of the material through a restricted passage, e.g. tube, aperture
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/10—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work
    • B24B31/112—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work using magnetically consolidated grinding powder, moved relatively to the workpiece under the influence of pressure

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Control Of Non-Electrical Variables (AREA)
DE69924595T 1999-01-06 1999-12-31 System für magnetorheologische Feinstbearbeitung von Substraten Expired - Lifetime DE69924595T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/226,326 US5951369A (en) 1999-01-06 1999-01-06 System for magnetorheological finishing of substrates
US226326 1999-01-06

Publications (2)

Publication Number Publication Date
DE69924595D1 true DE69924595D1 (de) 2005-05-12
DE69924595T2 DE69924595T2 (de) 2006-02-09

Family

ID=22848486

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69924595T Expired - Lifetime DE69924595T2 (de) 1999-01-06 1999-12-31 System für magnetorheologische Feinstbearbeitung von Substraten

Country Status (4)

Country Link
US (1) US5951369A (de)
EP (1) EP1018398B1 (de)
JP (1) JP4412783B2 (de)
DE (1) DE69924595T2 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6267651B1 (en) 2000-01-10 2001-07-31 Qed Technologies, Inc. Magnetic wiper
US6555017B1 (en) 2000-10-13 2003-04-29 The Regents Of The University Of Caliofornia Surface contouring by controlled application of processing fluid using Marangoni effect
US6561874B1 (en) * 2000-11-22 2003-05-13 Qed Technologies, Inc Apparatus and method for abrasive jet finishing of deeply concave surfaces using magnetorheological fluid
WO2002046691A1 (en) * 2000-12-08 2002-06-13 Zygo Corporation Monolithic corrector plate
US6506102B2 (en) 2001-02-01 2003-01-14 William Kordonski System for magnetorheological finishing of substrates
JP2002307312A (ja) 2001-04-11 2002-10-23 Olympus Optical Co Ltd 研磨加工装置、研磨加工方法、研磨加工をコンピュータに実行させる制御プログラムおよび記録媒体
US6893322B2 (en) * 2001-05-22 2005-05-17 Qed Technologies, Inc. Method and apparatus for measuring and controlling solids composition of a magnetorheological fluid
US6955589B2 (en) * 2001-05-22 2005-10-18 Qed Technologies, Inc. Delivery system for magnetorheological fluid
DE10151461A1 (de) * 2001-10-18 2003-05-08 Sonplas Gmbh Verfahren, Abrasivmedium und Vorrichtung zur Bearbeitung der Oberflächen eines Werkstücks
US6746310B2 (en) * 2002-08-06 2004-06-08 Qed Technologies, Inc. Uniform thin films produced by magnetorheological finishing
US7156724B2 (en) * 2004-12-15 2007-01-02 Qed Technologies International, Inc. Method and apparatus for forming a dynamic magnetic seal using magnetorheological fluid
US7309953B2 (en) 2005-01-24 2007-12-18 Principia Lightworks, Inc. Electron beam pumped laser light source for projection television
US7959490B2 (en) * 2005-10-31 2011-06-14 Depuy Products, Inc. Orthopaedic component manufacturing method and equipment
JP2007222978A (ja) * 2006-02-22 2007-09-06 Natsume Optical Corp 研磨装置
US7749049B2 (en) 2006-05-25 2010-07-06 Lightmachinery Inc. Submerged fluid jet polishing
US20100238760A1 (en) * 2006-08-23 2010-09-23 BASF SE Patents, Trademark and Licenses Constant load shear cell for magnetorheological fluids
US7455573B2 (en) 2006-09-06 2008-11-25 Lightmachinery Inc. Fluid jet polishing with constant pressure pump
KR100793409B1 (ko) * 2006-09-26 2008-01-11 한국기계연구원 자기유변유체를 이용한 연마장치
NL2004153A (en) * 2009-02-24 2010-08-25 Asml Netherlands Bv Lithographic apparatus, a method for removing material of one or more protrusions on a support surface, and an article support system.
EP2403686B1 (de) * 2009-03-06 2014-01-22 QED Technologies International, Inc. System zur magnetorheologischen feinbearbeitung eines substrats
US9102030B2 (en) * 2010-07-09 2015-08-11 Corning Incorporated Edge finishing apparatus
CN101963567B (zh) * 2010-09-21 2012-02-29 中国兵器工业第五二研究所 一种磁性液体磁化粘度测试装置及方法
US9120193B2 (en) * 2010-11-15 2015-09-01 Agency For Science, Technology And Research Apparatus and method for polishing an edge of an article using magnetorheological (MR) fluid
US8613640B2 (en) * 2010-12-23 2013-12-24 Qed Technologies International, Inc. System for magnetorheological finishing of substrates
CN102632434B (zh) * 2012-05-10 2014-07-02 河南科技大学 柱体工件磁流变抛光系统
CN102765013B (zh) * 2012-07-04 2014-12-31 高要市东颖石艺有限公司 一种大理石异形面的抛光方法
CN103128602B (zh) * 2012-12-26 2015-01-28 哈尔滨工业大学 一种超精密加工用工件轴数控运动平台装置
CN103072047B (zh) * 2012-12-26 2014-12-10 哈尔滨工业大学 一种小口径非球面永磁式磁流变抛光加工机床
CN103042438B (zh) * 2012-12-31 2014-11-05 天津大学 一种恒压式超声波辅助磁流变抛光方法及装置
CN103252686B (zh) * 2013-06-06 2016-01-20 青岛理工大学 钛合金人工膝关节磁流变抛光加工装置
CN103447891B (zh) * 2013-08-26 2015-12-09 中国科学院光电技术研究所 一种磁流变高精度定位装置及磁流变去除函数转换方法
CN103801993B (zh) * 2014-02-21 2016-06-08 浙江师范大学 医用微型接骨螺钉磁刷式磁流变复合抛光机
CN103831723B (zh) * 2014-03-05 2016-03-23 四川睿光科技有限责任公司 一种磁流变液粘度稳定性控制方法
CN106736879B (zh) * 2016-12-12 2018-10-23 东北大学 一种滚轴式磁流变抛光装置与方法
TWI595964B (zh) * 2017-01-13 2017-08-21 昆山納諾新材料科技有限公司 磁流變三維拋光裝置及磁流變拋光液
CN107703881B (zh) * 2017-09-11 2023-08-04 中国工程物理研究院机械制造工艺研究所 一种自动标定磁流变抛光缎带厚度的装置
KR101994029B1 (ko) * 2018-01-02 2019-09-30 인하대학교 산학협력단 평면 연마 장치
CN109396969B (zh) * 2018-12-20 2019-11-15 中国人民解放军国防科技大学 一种全封闭扩展式磁流变抛光设备
CN110039380B (zh) * 2019-04-11 2020-12-01 上海理工大学 一种用于周期性微沟槽结构抛光的磁性复合流体抛光装置
JP2022546573A (ja) * 2019-09-04 2022-11-04 キューイーディー・テクノロジーズ・インターナショナル・インコーポレーテッド 高除去速度の磁気粘性仕上げ用ヘッド
CN114571293B (zh) * 2022-05-09 2022-07-29 江苏克莱德激光技术有限责任公司 一种用于金属表面处理的磁流变抛光装置及其使用方法
CN115302394B (zh) * 2022-06-27 2024-04-02 深圳市恒永达科技股份有限公司 一种磁流体抛光专用设备

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4423451A (en) * 1981-08-10 1983-12-27 Sperry Corporation Thin film magnetic head having disparate poles for pulse asymmetry compensation
US5449313A (en) * 1992-04-14 1995-09-12 Byelocorp Scientific, Inc. Magnetorheological polishing devices and methods
WO1993021644A1 (en) * 1992-04-14 1993-10-28 Byelocorp Scientific, Inc. Magnetorheological fluids and methods of making thereof
US5635689A (en) * 1995-02-17 1997-06-03 Otis Elevator Company Acceleration damping of elevator resonant modes and hydraulic elevator pump leakage compensation
US5569061A (en) * 1995-04-12 1996-10-29 Kremen; Genady Method and device for magneto-abrasive machining of parts
US5795212A (en) * 1995-10-16 1998-08-18 Byelocorp Scientific, Inc. Deterministic magnetorheological finishing
US5775976A (en) * 1997-03-27 1998-07-07 Scientific Manufacturing Technologies, Inc. Method and device for magnetic-abrasive machining of parts
US5813901A (en) * 1997-03-27 1998-09-29 Scientific Manufacturing Technologies Inc Method and device for magnetic-abrasive machining of parts

Also Published As

Publication number Publication date
EP1018398A2 (de) 2000-07-12
EP1018398B1 (de) 2005-04-06
JP2000233359A (ja) 2000-08-29
DE69924595T2 (de) 2006-02-09
JP4412783B2 (ja) 2010-02-10
EP1018398A3 (de) 2003-03-12
US5951369A (en) 1999-09-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: QED TECHNOLOGIES INTERNATIONAL, INC., AURORA, , US