DE69921603D1 - Antireflexionsbeschichtungszusammensetzung - Google Patents

Antireflexionsbeschichtungszusammensetzung

Info

Publication number
DE69921603D1
DE69921603D1 DE69921603T DE69921603T DE69921603D1 DE 69921603 D1 DE69921603 D1 DE 69921603D1 DE 69921603 T DE69921603 T DE 69921603T DE 69921603 T DE69921603 T DE 69921603T DE 69921603 D1 DE69921603 D1 DE 69921603D1
Authority
DE
Germany
Prior art keywords
coating composition
reflection coating
anti reflection
composition
reflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69921603T
Other languages
English (en)
Other versions
DE69921603T2 (de
Inventor
Yusuke Takano
Hatsuyuki Tanaka
Kiyofumi Takano
Yutaka Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DIC Corp
AZ Electronic Materials Japan Co Ltd
Original Assignee
Clariant Finance BVI Ltd
Dainippon Ink and Chemicals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Clariant Finance BVI Ltd, Dainippon Ink and Chemicals Co Ltd filed Critical Clariant Finance BVI Ltd
Publication of DE69921603D1 publication Critical patent/DE69921603D1/de
Application granted granted Critical
Publication of DE69921603T2 publication Critical patent/DE69921603T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
    • C09D5/006—Anti-reflective coatings
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
    • C09D7/40—Additives
    • C09D7/60—Additives non-macromolecular
    • C09D7/63—Additives non-macromolecular organic
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
    • C09D7/40—Additives
    • C09D7/65—Additives macromolecular
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Materials Engineering (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Materials For Photolithography (AREA)
  • Paints Or Removers (AREA)
DE69921603T 1998-06-03 1999-05-27 Antireflexionsbeschichtungszusammensetzung Expired - Lifetime DE69921603T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP15434498A JP3673399B2 (ja) 1998-06-03 1998-06-03 反射防止コーティング用組成物
JP15434498 1998-06-03
PCT/JP1999/002803 WO1999063010A1 (fr) 1998-06-03 1999-05-27 Composition pour revetement reduisant la reflexion

Publications (2)

Publication Number Publication Date
DE69921603D1 true DE69921603D1 (de) 2004-12-09
DE69921603T2 DE69921603T2 (de) 2005-11-03

Family

ID=15582114

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69921603T Expired - Lifetime DE69921603T2 (de) 1998-06-03 1999-05-27 Antireflexionsbeschichtungszusammensetzung

Country Status (9)

Country Link
US (1) US6309789B1 (de)
EP (1) EP1026208B1 (de)
JP (1) JP3673399B2 (de)
KR (1) KR100594708B1 (de)
CN (1) CN1169884C (de)
DE (1) DE69921603T2 (de)
MY (1) MY117818A (de)
TW (1) TW556048B (de)
WO (1) WO1999063010A1 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4556251B2 (ja) * 1998-04-17 2010-10-06 Ｄｉｃ株式会社 被覆用組成物
US6984482B2 (en) * 1999-06-03 2006-01-10 Hynix Semiconductor Inc. Top-coating composition for photoresist and process for forming fine pattern using the same
JP2001142221A (ja) * 1999-11-10 2001-05-25 Clariant (Japan) Kk 反射防止コーティング用組成物
KR100400331B1 (ko) * 1999-12-02 2003-10-01 주식회사 하이닉스반도체 포토레지스트 오버코팅용 조성물 및 이를 이용한포토레지스트 패턴 형성방법
JP3320402B2 (ja) * 2000-06-26 2002-09-03 クラリアント ジャパン 株式会社 現像欠陥防止プロセス及び材料
JP2002148820A (ja) * 2000-11-15 2002-05-22 Clariant (Japan) Kk パターン形成方法及びこの方法に使用される処理剤
JP3509760B2 (ja) * 2001-02-08 2004-03-22 株式会社半導体先端テクノロジーズ 半導体装置の製造方法
US7265431B2 (en) * 2002-05-17 2007-09-04 Intel Corporation Imageable bottom anti-reflective coating for high resolution lithography
JP2003345026A (ja) 2002-05-24 2003-12-03 Tokyo Ohka Kogyo Co Ltd 反射防止膜形成用塗布液組成物およびこれを用いたホトレジスト積層体、並びにホトレジストパターンの形成方法
US6740469B2 (en) * 2002-06-25 2004-05-25 Brewer Science Inc. Developer-soluble metal alkoxide coatings for microelectronic applications
US6872506B2 (en) * 2002-06-25 2005-03-29 Brewer Science Inc. Wet-developable anti-reflective compositions
JP3851594B2 (ja) * 2002-07-04 2006-11-29 Ａｚエレクトロニックマテリアルズ株式会社 反射防止コーティング用組成物およびパターン形成方法
TWI442694B (zh) 2003-05-30 2014-06-21 Asml Netherlands Bv 微影裝置及元件製造方法
DE10343351B4 (de) * 2003-09-12 2017-01-05 Samsung Display Co., Ltd. Substrat zum Tintenstrahldrucken und Verfahren zu dessen Herstellung
US7833612B2 (en) * 2003-09-12 2010-11-16 Samsung Mobile Display Co., Ltd. Substrate for inkjet printing and method of manufacturing the same
KR101189397B1 (ko) * 2003-10-15 2012-10-11 브레우어 사이언스 인코포레이션 비아-퍼스트 듀얼 다마신 적용예에서 사용되는 현상제에 용해성인 물질 및 상기 물질 사용 방법
US20050255410A1 (en) 2004-04-29 2005-11-17 Guerrero Douglas J Anti-reflective coatings using vinyl ether crosslinkers
TWI362566B (en) 2004-06-30 2012-04-21 Dainippon Ink & Chemicals Composition for antireflection coating and pattern forming method
CN101080674B (zh) * 2004-12-03 2013-09-18 捷时雅株式会社 形成抗反射薄膜的组合物，层状产品，和抗蚀剂图案的形成方法
US7205093B2 (en) * 2005-06-03 2007-04-17 International Business Machines Corporation Topcoats for use in immersion lithography
US7544750B2 (en) * 2005-10-13 2009-06-09 International Business Machines Corporation Top antireflective coating composition with low refractive index at 193nm radiation wavelength
US7759047B2 (en) * 2006-05-26 2010-07-20 Shin-Etsu Chemical Co., Ltd. Resist protective film composition and patterning process
US7635552B2 (en) * 2006-07-25 2009-12-22 Endicott Interconnect Technologies, Inc. Photoresist composition with antibacterial agent
US7914974B2 (en) 2006-08-18 2011-03-29 Brewer Science Inc. Anti-reflective imaging layer for multiple patterning process
KR101647158B1 (ko) 2008-01-29 2016-08-09 브레우어 사이언스 인코포레이션 다중 다크 필드 노출에 의한, 하드마스크 패턴화를 위한 온-트랙 공정
US9640396B2 (en) 2009-01-07 2017-05-02 Brewer Science Inc. Spin-on spacer materials for double- and triple-patterning lithography
US8273997B2 (en) 2009-01-16 2012-09-25 The Boeing Company Antireflective apparatus with anisotropic capacitive circuit analog sheets
JP5697523B2 (ja) 2011-04-12 2015-04-08 メルクパフォーマンスマテリアルズＩｐ合同会社 上面反射防止膜形成用組成物およびそれを用いたパターン形成方法
CN114806394A (zh) * 2022-04-28 2022-07-29 武汉工程大学 一种抗反射层涂料、抗反射层及其制备方法和应用
CN116875159B (zh) * 2023-09-05 2023-11-21 甘肃华隆芯材料科技有限公司 顶部抗反射涂层材料及其制备方法和应用

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG43691A1 (en) 1991-06-28 1997-11-14 Ibm Top antireflective coating films
KR100258494B1 (ko) * 1992-06-02 2000-06-15 미우라 아끼라 레지스트 표면 반사 방지막 형성 조성물 및 패턴 형성방법
JP3767714B2 (ja) * 1996-04-19 2006-04-19 大日本インキ化学工業株式会社 反射防止膜用組成物
JP3694703B2 (ja) * 1996-04-25 2005-09-14 Ａｚエレクトロニックマテリアルズ株式会社 反射防止コーティング用組成物

Also Published As

Publication number Publication date
KR20010022557A (ko) 2001-03-26
CN1272864A (zh) 2000-11-08
KR100594708B1 (ko) 2006-07-03
JPH11349857A (ja) 1999-12-21
EP1026208B1 (de) 2004-11-03
WO1999063010A1 (fr) 1999-12-09
US6309789B1 (en) 2001-10-30
DE69921603T2 (de) 2005-11-03
MY117818A (en) 2004-08-30
JP3673399B2 (ja) 2005-07-20
EP1026208A4 (de) 2003-04-16
EP1026208A1 (de) 2000-08-09
CN1169884C (zh) 2004-10-06
TW556048B (en) 2003-10-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: AZ ELECTRONIC MATERIALS (JAPAN) K.K., TOKIO/TOKYO,

Owner name: DAINIPPON INK AND CHEMICALS, INC., TOKIO/TOKYO, JP

8328 Change in the person/name/address of the agent

Representative=s name: PATENTANWAELTE ISENBRUCK BOESL HOERSCHLER WICHMANN HU