DE69840530D1 - Verfahren zur herstellung von ferroelektrischen dünnschichtkondensatoren mit verbesserter speicherung durch die verwendung von glatten unteren elektrodenstrukturen - Google Patents

Verfahren zur herstellung von ferroelektrischen dünnschichtkondensatoren mit verbesserter speicherung durch die verwendung von glatten unteren elektrodenstrukturen

Info

Publication number
DE69840530D1
DE69840530D1 DE69840530T DE69840530T DE69840530D1 DE 69840530 D1 DE69840530 D1 DE 69840530D1 DE 69840530 T DE69840530 T DE 69840530T DE 69840530 T DE69840530 T DE 69840530T DE 69840530 D1 DE69840530 D1 DE 69840530D1
Authority
DE
Germany
Prior art keywords
production
lower electrode
thin layer
electrode structures
ferroelectric thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69840530T
Other languages
English (en)
Inventor
Shinichiro Hayashi
Tatsuo Otsuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE69840530D1 publication Critical patent/DE69840530D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/55—Capacitors with a dielectric comprising a perovskite structure material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B53/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
DE69840530T 1997-03-03 1998-03-03 Verfahren zur herstellung von ferroelektrischen dünnschichtkondensatoren mit verbesserter speicherung durch die verwendung von glatten unteren elektrodenstrukturen Expired - Lifetime DE69840530D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/810,538 US6265738B1 (en) 1997-03-03 1997-03-03 Thin film ferroelectric capacitors having improved memory retention through the use of essentially smooth bottom electrode structures
PCT/IB1998/000515 WO1998039801A1 (en) 1997-03-03 1998-03-03 Thin film ferroelectric capacitors having improved memory retention through the use of essentially smooth bottom electrode structures

Publications (1)

Publication Number Publication Date
DE69840530D1 true DE69840530D1 (de) 2009-03-19

Family

ID=25204078

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69840530T Expired - Lifetime DE69840530D1 (de) 1997-03-03 1998-03-03 Verfahren zur herstellung von ferroelektrischen dünnschichtkondensatoren mit verbesserter speicherung durch die verwendung von glatten unteren elektrodenstrukturen

Country Status (9)

Country Link
US (2) US6265738B1 (de)
EP (1) EP0916157B1 (de)
JP (3) JP2000509918A (de)
CN (1) CN1132234C (de)
AU (1) AU723569B2 (de)
CA (1) CA2251219A1 (de)
DE (1) DE69840530D1 (de)
TW (1) TW416137B (de)
WO (1) WO1998039801A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6750110B1 (en) * 1998-07-23 2004-06-15 Micron Technology, Inc. Continuous good step coverage CVD platinum metal deposition
DE10041699A1 (de) 2000-08-24 2002-03-21 Infineon Technologies Ag Niedertemperatur-Prozessierung ferroelektrischer Strontium-Wismuth-Tantalat-Schichten und Herstellung ferroelektrischer Bauelemente daraus
US6489645B1 (en) * 2001-07-03 2002-12-03 Matsushita Electric Industrial Co., Ltd. Integrated circuit device including a layered superlattice material with an interface buffer layer
ITTO20020118A1 (it) * 2002-02-08 2003-08-08 St Microelectronics Srl Dispositivo integrante una matrice di memoria non volatile e una matrice di memoria volatile.
WO2003100824A2 (en) * 2002-05-28 2003-12-04 Kabushiki Kaisha Toshiba Ferroelectric capacitor and method of manufacturing the same
KR100470166B1 (ko) 2002-07-19 2005-02-07 주식회사 하이닉스반도체 강유전체 메모리 소자의 제조 방법
FR2849267B1 (fr) * 2002-12-20 2005-03-25 St Microelectronics Sa Fabrication d'un condensateur a capacite elevee
KR100533974B1 (ko) * 2003-06-30 2005-12-07 주식회사 하이닉스반도체 하부전극과 강유전체막의 접착력을 향상시킬 수 있는강유전체캐패시터 형성 방법
US7239194B2 (en) * 2004-03-25 2007-07-03 Integral Wave Technologies, Inc. Trench capacitor power supply system and method
US7190210B2 (en) * 2004-03-25 2007-03-13 Integral Wave Technologies, Inc. Switched-capacitor power supply system and method
US20110081137A1 (en) * 2009-10-06 2011-04-07 Advantest Corporation Manufacturing equipment and manufacturing method
ITBO20110676A1 (it) 2011-11-28 2013-05-29 Valter Lolli Piastrina di chiusura per elementi tubolari e metodo per realizzarla
US20190245056A1 (en) * 2018-02-02 2019-08-08 International Business Machines Corporation Ferroelectric devices free of extended grain boundaries
CN113834856B (zh) * 2020-06-24 2023-07-21 中国科学院福建物质结构研究所 一种大尺寸超晶格薄膜及其制备方法和用途

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3939292A (en) 1970-09-28 1976-02-17 Technovation, Inc. Process for stable phase III potassium nitrate and articles prepared therefrom
US5519234A (en) 1991-02-25 1996-05-21 Symetrix Corporation Ferroelectric dielectric memory cell can switch at least giga cycles and has low fatigue - has high dielectric constant and low leakage current
US5005102A (en) * 1989-06-20 1991-04-02 Ramtron Corporation Multilayer electrodes for integrated circuit capacitors
US4931897A (en) 1989-08-07 1990-06-05 Mitsubishi Denki Kabushiki Kaisha Method of manufacturing semiconductor capacitive element
NL9000602A (nl) 1990-03-16 1991-10-16 Philips Nv Werkwijze voor het vervaardigen van een halfgeleiderinrichting met geheugenelementen vormende condensatoren met een ferroelectrisch dielectricum.
US5423285A (en) * 1991-02-25 1995-06-13 Olympus Optical Co., Ltd. Process for fabricating materials for ferroelectric, high dielectric constant, and integrated circuit applications
JP3125425B2 (ja) 1992-03-05 2001-01-15 日本電気株式会社 薄膜コンデンサとその製造方法
US5955754A (en) 1992-10-23 1999-09-21 Symetrix Corporation Integrated circuits having mixed layered superlattice materials and precursor solutions for use in a process of making the same
JPH07122661A (ja) 1993-10-27 1995-05-12 Olympus Optical Co Ltd 強誘電体メモリ装置
US5539279A (en) 1993-06-23 1996-07-23 Hitachi, Ltd. Ferroelectric memory
JP3570692B2 (ja) 1994-01-18 2004-09-29 ローム株式会社 不揮発性メモリ
JPH08203266A (ja) 1995-01-27 1996-08-09 Nec Corp 強誘電体メモリ装置
US5592410A (en) 1995-04-10 1997-01-07 Ramtron International Corporation Circuit and method for reducing a compensation of a ferroelectric capacitor by multiple pulsing of the plate line following a write operation
US5612560A (en) * 1995-10-31 1997-03-18 Northern Telecom Limited Electrode structure for ferroelectric capacitors for integrated circuits
JP3207206B2 (ja) * 1996-07-17 2001-09-10 シチズン時計株式会社 強誘電体素子及びその製造方法

Also Published As

Publication number Publication date
US6440754B2 (en) 2002-08-27
JP3974640B2 (ja) 2007-09-12
AU6513198A (en) 1998-09-22
JP2007067437A (ja) 2007-03-15
WO1998039801A1 (en) 1998-09-11
CN1132234C (zh) 2003-12-24
JP2005354108A (ja) 2005-12-22
CN1217818A (zh) 1999-05-26
EP0916157B1 (de) 2009-02-04
EP0916157A1 (de) 1999-05-19
TW416137B (en) 2000-12-21
JP2000509918A (ja) 2000-08-02
CA2251219A1 (en) 1998-09-11
JP3974626B2 (ja) 2007-09-12
US6265738B1 (en) 2001-07-24
US20010041373A1 (en) 2001-11-15
AU723569B2 (en) 2000-08-31

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP

8364 No opposition during term of opposition