DE69840356D1 - Piezoelektrischer Resonator mit eingefangener Energie in Dickenausdehnungsmodus - Google Patents

Piezoelektrischer Resonator mit eingefangener Energie in Dickenausdehnungsmodus

Info

Publication number
DE69840356D1
DE69840356D1 DE69840356T DE69840356T DE69840356D1 DE 69840356 D1 DE69840356 D1 DE 69840356D1 DE 69840356 T DE69840356 T DE 69840356T DE 69840356 T DE69840356 T DE 69840356T DE 69840356 D1 DE69840356 D1 DE 69840356D1
Authority
DE
Germany
Prior art keywords
piezoelectric resonator
expansion mode
thickness expansion
trapped energy
trapped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69840356T
Other languages
English (en)
Inventor
Hiroaki Kaida
Mitsuhiro Yamada
Jiro Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Application granted granted Critical
Publication of DE69840356D1 publication Critical patent/DE69840356D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/178—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of a laminated structure of multiple piezoelectric layers with inner electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02062—Details relating to the vibration mode
    • H03H9/0207—Details relating to the vibration mode the vibration mode being harmonic
DE69840356T 1997-06-12 1998-05-27 Piezoelektrischer Resonator mit eingefangener Energie in Dickenausdehnungsmodus Expired - Lifetime DE69840356D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15528297A JP3322169B2 (ja) 1997-06-12 1997-06-12 エネルギー閉じ込め型厚み縦圧電共振子

Publications (1)

Publication Number Publication Date
DE69840356D1 true DE69840356D1 (de) 2009-01-29

Family

ID=15602500

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69840356T Expired - Lifetime DE69840356D1 (de) 1997-06-12 1998-05-27 Piezoelektrischer Resonator mit eingefangener Energie in Dickenausdehnungsmodus

Country Status (5)

Country Link
US (1) US6232698B1 (de)
EP (1) EP0884841B1 (de)
JP (1) JP3322169B2 (de)
CN (1) CN1121755C (de)
DE (1) DE69840356D1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1077092A3 (de) 1999-08-16 2004-03-17 Murata Manufacturing Co., Ltd. Piezoelektrisches Element
JP2001068961A (ja) 1999-08-26 2001-03-16 Murata Mfg Co Ltd 厚み縦圧電共振子、ラダー型フィルタ及び圧電共振部品
JP2006013383A (ja) * 2004-06-29 2006-01-12 Tdk Corp 積層コンデンサ
DE102005028927B4 (de) * 2005-06-22 2007-02-15 Infineon Technologies Ag BAW-Vorrichtung
DE102006023165B4 (de) * 2006-05-17 2008-02-14 Infineon Technologies Ag Verfahren zur Herstellung eines akustischen Spiegels aus alternierend angeordneten Schichten hoher und niedriger akustischer Impedanz
TWI321264B (en) * 2007-12-31 2010-03-01 Ind Tech Res Inst Piezoelectricity-driving optical lens module
WO2013132747A1 (ja) * 2012-03-08 2013-09-12 コニカミノルタ株式会社 圧電デバイス、超音波探触子、液滴吐出装置および圧電デバイスの製造方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3614483A (en) * 1970-06-24 1971-10-19 Clevite Corp Width flexural resonator and coupled mode filter
US4384229A (en) * 1980-02-14 1983-05-17 Nippon Electric Co., Ltd. Temperature compensated piezoelectric ceramic resonator unit
JPS6194408A (ja) * 1984-10-15 1986-05-13 Nec Corp セラミツクフイルタ
JP2790178B2 (ja) * 1987-06-26 1998-08-27 株式会社村田製作所 電歪共振装置
JP2790177B2 (ja) * 1987-07-06 1998-08-27 株式会社村田製作所 電歪共振素子
JPS6412711A (en) * 1987-07-07 1989-01-17 Murata Manufacturing Co Chip type resonator
JP2790180B2 (ja) * 1987-12-29 1998-08-27 株式会社村田製作所 電歪共振装置
US5045744A (en) * 1988-12-23 1991-09-03 Murata Mfg. Co. Energy-trapping-by-frequency-lowering-type piezoelectric-resonance device
JPH02235422A (ja) * 1989-03-08 1990-09-18 Matsushita Electric Ind Co Ltd 厚み縦共振子
US5065066A (en) * 1989-07-19 1991-11-12 Murata Mfg. Co., Ltd. Piezoelectric resonator
US5345136A (en) * 1991-03-18 1994-09-06 Murata Manufacturing Co. Ltd. Composite type piezoelectric component
JPH0559955U (ja) * 1992-01-09 1993-08-06 株式会社村田製作所 圧電共振器
JPH08242026A (ja) * 1995-03-03 1996-09-17 Fujitsu Ltd 圧電振動子及びこれを具備する圧電振動子デバイス並びに該デバイスを具備する回路装置

Also Published As

Publication number Publication date
CN1121755C (zh) 2003-09-17
EP0884841B1 (de) 2008-12-17
EP0884841A2 (de) 1998-12-16
CN1204184A (zh) 1999-01-06
JPH114134A (ja) 1999-01-06
EP0884841A3 (de) 2000-03-22
US6232698B1 (en) 2001-05-15
JP3322169B2 (ja) 2002-09-09

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Legal Events

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8364 No opposition during term of opposition