DE69840327D1 - Verfahren zur herstellung einer gate-elektrode - Google Patents

Verfahren zur herstellung einer gate-elektrode

Info

Publication number
DE69840327D1
DE69840327D1 DE69840327T DE69840327T DE69840327D1 DE 69840327 D1 DE69840327 D1 DE 69840327D1 DE 69840327 T DE69840327 T DE 69840327T DE 69840327 T DE69840327 T DE 69840327T DE 69840327 D1 DE69840327 D1 DE 69840327D1
Authority
DE
Germany
Prior art keywords
producing
gate electrode
gate
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69840327T
Other languages
English (en)
Inventor
Kishore K Chakravorty
Philip J Elizondo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69840327D1 publication Critical patent/DE69840327D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels
DE69840327T 1997-07-07 1998-05-12 Verfahren zur herstellung einer gate-elektrode Expired - Lifetime DE69840327D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/889,622 US6039621A (en) 1997-07-07 1997-07-07 Gate electrode formation method
PCT/US1998/009699 WO1999003123A1 (en) 1997-07-07 1998-05-12 Gate electrode formation method

Publications (1)

Publication Number Publication Date
DE69840327D1 true DE69840327D1 (de) 2009-01-22

Family

ID=25395456

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69840327T Expired - Lifetime DE69840327D1 (de) 1997-07-07 1998-05-12 Verfahren zur herstellung einer gate-elektrode

Country Status (6)

Country Link
US (2) US6039621A (de)
EP (1) EP0995213B1 (de)
JP (1) JP3679420B2 (de)
KR (1) KR100509259B1 (de)
DE (1) DE69840327D1 (de)
WO (1) WO1999003123A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6095883A (en) * 1997-07-07 2000-08-01 Candlescent Technologies Corporation Spatially uniform deposition of polymer particles during gate electrode formation
US6039621A (en) * 1997-07-07 2000-03-21 Candescent Technologies Corporation Gate electrode formation method
JPH11233004A (ja) * 1998-02-17 1999-08-27 Sony Corp 電子放出装置の製造方法
JP2002517087A (ja) * 1998-05-22 2002-06-11 ザ ユニバーシティ オブ バーミンガム 表面構造体の製造方法
WO2003089990A2 (en) * 2002-04-19 2003-10-30 Applied Materials, Inc. Process for etching photomasks
US7485024B2 (en) * 2005-10-12 2009-02-03 Chunghwa Picture Tubes, Ltd. Fabricating method of field emission triodes
JP2007287403A (ja) * 2006-04-14 2007-11-01 Futaba Corp 電界電子放出素子の製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3116398B2 (ja) * 1991-03-13 2000-12-11 ソニー株式会社 平面型電子放出素子の製造方法及び平面型電子放出素子
US5199917A (en) * 1991-12-09 1993-04-06 Cornell Research Foundation, Inc. Silicon tip field emission cathode arrays and fabrication thereof
US5283500A (en) * 1992-05-28 1994-02-01 At&T Bell Laboratories Flat panel field emission display apparatus
JP2940360B2 (ja) * 1993-09-14 1999-08-25 双葉電子工業株式会社 電界放出素子アレイの製造方法
US5504385A (en) * 1994-08-31 1996-04-02 At&T Corp. Spaced-gate emission device and method for making same
US5601466A (en) * 1995-04-19 1997-02-11 Texas Instruments Incorporated Method for fabricating field emission device metallization
US5865659A (en) * 1996-06-07 1999-02-02 Candescent Technologies Corporation Fabrication of gated electron-emitting device utilizing distributed particles to define gate openings and utilizing spacer material to control spacing between gate layer and electron-emissive elements
US5865657A (en) * 1996-06-07 1999-02-02 Candescent Technologies Corporation Fabrication of gated electron-emitting device utilizing distributed particles to form gate openings typically beveled and/or combined with lift-off or electrochemical removal of excess emitter material
US6039621A (en) * 1997-07-07 2000-03-21 Candescent Technologies Corporation Gate electrode formation method

Also Published As

Publication number Publication date
EP0995213B1 (de) 2008-12-10
EP0995213A4 (de) 2001-04-04
JP2002509635A (ja) 2002-03-26
KR100509259B1 (ko) 2005-08-22
EP0995213A1 (de) 2000-04-26
WO1999003123A1 (en) 1999-01-21
JP3679420B2 (ja) 2005-08-03
KR20010021544A (ko) 2001-03-15
US6217403B1 (en) 2001-04-17
US6039621A (en) 2000-03-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition