DE69832956D1 - Düse eines durchflussreglers mit einer druckregelung und deren herstellungsverfahren - Google Patents

Düse eines durchflussreglers mit einer druckregelung und deren herstellungsverfahren

Info

Publication number
DE69832956D1
DE69832956D1 DE69832956T DE69832956T DE69832956D1 DE 69832956 D1 DE69832956 D1 DE 69832956D1 DE 69832956 T DE69832956 T DE 69832956T DE 69832956 T DE69832956 T DE 69832956T DE 69832956 D1 DE69832956 D1 DE 69832956D1
Authority
DE
Germany
Prior art keywords
orifice
pressure
flow rate
parallel part
continuing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69832956T
Other languages
English (en)
Other versions
DE69832956T2 (de
Inventor
Tadahiro Ohmi
Tetu Kagazume
Kazuhiko Sugiyama
Osamu Fukada
Susumu Ozawa
Yoshihiro Satou
Ryousuke Dohi
Tomio Uno
Kouji Nishino
Hiroyuki Fukuda
Nobukazu Ikeda
Michio Yamaji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Fujikin Inc
Original Assignee
Tokyo Electron Ltd
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Fujikin Inc filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of DE69832956D1 publication Critical patent/DE69832956D1/de
Publication of DE69832956T2 publication Critical patent/DE69832956T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15D—FLUID DYNAMICS, i.e. METHODS OR MEANS FOR INFLUENCING THE FLOW OF GASES OR LIQUIDS
    • F15D1/00—Influencing flow of fluids
    • F15D1/08—Influencing flow of fluids of jets leaving an orifice
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/01—Control of flow without auxiliary power
    • G05D7/0186—Control of flow without auxiliary power without moving parts

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Pipe Accessories (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
  • Looms (AREA)
  • Blow-Moulding Or Thermoforming Of Plastics Or The Like (AREA)
  • Extrusion Moulding Of Plastics Or The Like (AREA)
  • Nozzles (AREA)
DE69832956T 1997-08-15 1998-08-13 Düse eines durchflussreglers mit einer druckregelung und deren herstellungsverfahren Expired - Fee Related DE69832956T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP22036897 1997-08-15
JP22036897 1997-08-15
PCT/JP1998/003621 WO1999009324A1 (fr) 1997-08-15 1998-08-13 Orifice pour regulateur debitmetrique a pression et procede de fabrication de l'orifice

Publications (2)

Publication Number Publication Date
DE69832956D1 true DE69832956D1 (de) 2006-02-02
DE69832956T2 DE69832956T2 (de) 2006-08-17

Family

ID=16750040

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69832956T Expired - Fee Related DE69832956T2 (de) 1997-08-15 1998-08-13 Düse eines durchflussreglers mit einer druckregelung und deren herstellungsverfahren

Country Status (8)

Country Link
US (1) US6158679A (de)
EP (1) EP0931941B1 (de)
KR (1) KR100294983B1 (de)
CN (1) CN1149342C (de)
AT (1) ATE314580T1 (de)
DE (1) DE69832956T2 (de)
TW (1) TW410253B (de)
WO (1) WO1999009324A1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1384121A2 (de) * 2001-04-24 2004-01-28 Unit Instruments, Inc. System und verfahren zur konfiguration und anpassung eines massenflussreglers
WO2004010087A2 (en) * 2002-07-19 2004-01-29 Celerity Group, Inc Flow sensor
US7073392B2 (en) * 2002-07-19 2006-07-11 Celerity, Inc. Methods and apparatus for pressure compensation in a mass flow controller
JP2005307233A (ja) * 2004-04-19 2005-11-04 Tokyo Electron Ltd 成膜装置及び成膜方法及びプロセスガスの供給方法
US7216019B2 (en) * 2004-07-08 2007-05-08 Celerity, Inc. Method and system for a mass flow controller with reduced pressure sensitivity
DE502005006431D1 (de) * 2005-10-20 2009-02-26 Siemens Ag Ventilanordnung
JP4814706B2 (ja) * 2006-06-27 2011-11-16 株式会社フジキン 流量比可変型流体供給装置
JP5054500B2 (ja) * 2007-12-11 2012-10-24 株式会社フジキン 圧力制御式流量基準器
US7905139B2 (en) * 2008-08-25 2011-03-15 Brooks Instrument, Llc Mass flow controller with improved dynamic
JP5216632B2 (ja) * 2009-03-03 2013-06-19 東京エレクトロン株式会社 流体制御装置
JP5665794B2 (ja) * 2012-04-27 2015-02-04 株式会社フジキン 半導体製造装置のガス分流供給装置
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP6487747B2 (ja) * 2015-03-26 2019-03-20 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置と処理ガス供給ノズル
ES2874531T3 (es) * 2015-05-29 2021-11-05 Medaxis Ag Elemento de boquilla para proyectar un chorro de agua
JP6472139B2 (ja) * 2015-06-15 2019-02-20 富士フイルム株式会社 オリフィス、及びこれを用いた送液装置、塗布装置、並びに光学フィルムの製造方法
US9903678B2 (en) * 2015-08-26 2018-02-27 John SHERRILL Method of manufacturing a diffuser muzzle brake
JP6781758B2 (ja) * 2015-08-31 2020-11-04 エム ケー エス インストルメンツ インコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 圧力式流量測定のためのシステム、非一時的な機械読取り可能媒体及び圧力式流量制御の方法
CN109312765B (zh) * 2016-04-19 2021-06-01 Dlh鲍尔斯公司 流量控制系统、跨接软管元件和流体流量管理方法
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
US10737359B2 (en) 2018-04-09 2020-08-11 Lam Research Corporation Manufacture of an orifice plate for use in gas calibration
CN108547871B (zh) * 2018-06-25 2019-04-19 武汉科技大学 用于高压圆盘气体轴承稳流装置的轴对称收缩段及其设计方法
CN111805185B (zh) * 2020-07-23 2021-11-16 湖北三江航天红阳机电有限公司 一种含型腔的管状零件加工方法
US11913586B2 (en) * 2020-08-11 2024-02-27 The Boeing Company Multi-function orifice subassembly for flow limiters

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2175160A (en) * 1935-07-02 1939-10-03 Linde Air Prod Co Nozzle for cutting blowpipes
GB723000A (en) * 1951-08-21 1955-02-02 Electroflo Meters Co Ltd Improvements in or relating to pressure difference devices for fluid flow meters
US4391339A (en) * 1978-08-04 1983-07-05 Hydronautics, Incorporated Cavitating liquid jet assisted drill bit and method for deep-hole drilling
ATE17883T1 (de) * 1981-04-29 1986-02-15 Solex Uk Ltd Eine elektromagnetische f luessigkeitseinspritzvorrichtung und ein einzelpunktkraftstoffeinspritzsystem fuer eine verbrennungskraftmaschine.
JPS59102532A (ja) * 1982-12-01 1984-06-13 Tanaka Kikinzoku Kogyo Kk 紡糸口金の製造方法
US4528847A (en) * 1983-10-04 1985-07-16 D. Halmi And Associates, Inc. Flow metering device with recessed pressure taps
GB8432338D0 (en) * 1984-12-21 1985-02-06 Sharp B L Nebulisation of liquids & liquid suspensions
JPS6256168U (de) * 1985-09-26 1987-04-07
US4830280A (en) * 1988-03-21 1989-05-16 Yankoff Gerald K Nozzle
JPH0318662A (ja) * 1989-05-29 1991-01-28 Aisan Ind Co Ltd 電磁式燃料噴射弁のノズル構造
JP2550137Y2 (ja) * 1991-05-15 1997-10-08 明治乳業株式会社 熱風乾燥用噴霧ノズル
JPH0577100U (ja) * 1992-03-26 1993-10-19 神鋼電機株式会社 潤滑油の供給システム
JP2781112B2 (ja) * 1992-11-18 1998-07-30 株式会社日立製作所 ノズルの製造方法及び燃料噴射弁
DE4303762A1 (de) * 1993-02-09 1994-08-11 Kaercher Gmbh & Co Alfred Flachstrahldüse für ein Hochdruckreinigungsgerät
JP3291161B2 (ja) 1995-06-12 2002-06-10 株式会社フジキン 圧力式流量制御装置
JP2704149B2 (ja) * 1995-10-03 1998-01-26 株式会社芝浦製作所 基板保持具
JP3478914B2 (ja) * 1995-10-20 2003-12-15 株式会社日立製作所 流体噴射ノズル及びそのノズルを用いた応力改善処理方法

Also Published As

Publication number Publication date
EP0931941B1 (de) 2005-12-28
WO1999009324A1 (fr) 1999-02-25
KR100294983B1 (ko) 2001-08-07
US6158679A (en) 2000-12-12
DE69832956T2 (de) 2006-08-17
CN1236418A (zh) 1999-11-24
EP0931941A4 (de) 2003-05-21
EP0931941A1 (de) 1999-07-28
KR20000068757A (ko) 2000-11-25
TW410253B (en) 2000-11-01
ATE314580T1 (de) 2006-01-15
CN1149342C (zh) 2004-05-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee