DE69821814D1 - Verfahren und Vorrichtung zum Verdünnen ultrareiner chemischer Produkte zur Verwendung in der mikroelektronischen Industrie - Google Patents

Verfahren und Vorrichtung zum Verdünnen ultrareiner chemischer Produkte zur Verwendung in der mikroelektronischen Industrie

Info

Publication number
DE69821814D1
DE69821814D1 DE69821814T DE69821814T DE69821814D1 DE 69821814 D1 DE69821814 D1 DE 69821814D1 DE 69821814 T DE69821814 T DE 69821814T DE 69821814 T DE69821814 T DE 69821814T DE 69821814 D1 DE69821814 D1 DE 69821814D1
Authority
DE
Germany
Prior art keywords
diluting
ultra
pure chemical
chemical products
microelectronic industry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69821814T
Other languages
English (en)
Other versions
DE69821814T2 (de
Inventor
Thierry Laederich
Georges Guarneri
Herve Dulphy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide Electronics Systems SA
Original Assignee
Air Liquide Electronics Systems SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide Electronics Systems SA filed Critical Air Liquide Electronics Systems SA
Application granted granted Critical
Publication of DE69821814D1 publication Critical patent/DE69821814D1/de
Publication of DE69821814T2 publication Critical patent/DE69821814T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D21/00—Control of chemical or physico-chemical variables, e.g. pH value
    • G05D21/02—Control of chemical or physico-chemical variables, e.g. pH value characterised by the use of electric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0006—Controlling or regulating processes
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/135—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by sensing at least one property of the mixture
    • G05D11/138—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by sensing at least one property of the mixture by sensing the concentration of the mixture, e.g. measuring pH value
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00186—Controlling or regulating processes controlling the composition of the reactive mixture
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y10T137/0329—Mixing of plural fluids of diverse characteristics or conditions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Accessories For Mixers (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Control Of Non-Electrical Variables (AREA)
DE69821814T 1997-04-11 1998-03-27 Verfahren und Vorrichtung zum Verdünnen ultrareiner chemischer Produkte zur Verwendung in der mikroelektronischen Industrie Expired - Fee Related DE69821814T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9704500A FR2761902B1 (fr) 1997-04-11 1997-04-11 Systeme de dilution de produits chimiques ultra-purs destine a l'industrie micro-electronique
FR9704500 1997-04-11

Publications (2)

Publication Number Publication Date
DE69821814D1 true DE69821814D1 (de) 2004-04-01
DE69821814T2 DE69821814T2 (de) 2004-11-25

Family

ID=9505817

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69821814T Expired - Fee Related DE69821814T2 (de) 1997-04-11 1998-03-27 Verfahren und Vorrichtung zum Verdünnen ultrareiner chemischer Produkte zur Verwendung in der mikroelektronischen Industrie

Country Status (9)

Country Link
US (1) US6146008A (de)
EP (1) EP0870535B1 (de)
JP (1) JPH10335302A (de)
KR (1) KR19980081288A (de)
CN (1) CN1103626C (de)
DE (1) DE69821814T2 (de)
FR (1) FR2761902B1 (de)
SG (1) SG67490A1 (de)
TW (1) TW402736B (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7980753B2 (en) 1998-04-16 2011-07-19 Air Liquide Electronics U.S. Lp Systems and methods for managing fluids in a processing environment using a liquid ring pump and reclamation system
US7871249B2 (en) 1998-04-16 2011-01-18 Air Liquide Electronics U.S. Lp Systems and methods for managing fluids using a liquid ring pump
US20070119816A1 (en) * 1998-04-16 2007-05-31 Urquhart Karl J Systems and methods for reclaiming process fluids in a processing environment
US6799883B1 (en) 1999-12-20 2004-10-05 Air Liquide America L.P. Method for continuously blending chemical solutions
KR20020034420A (ko) * 2000-11-01 2002-05-09 이춘구 산업용수용 순수의 제조방법과 제조장치 및 그 순수
TWI298423B (en) * 2001-02-06 2008-07-01 Nagase & Co Ltd Developer producing equipment and method
JP2005508079A (ja) * 2001-10-08 2005-03-24 アドバンスド．テクノロジー．マテリアルス．インコーポレイテッド 多成分流体用のリアル・タイム成分モニタリングおよび補充システム
FR2833365B1 (fr) * 2001-12-10 2004-05-14 Air Liquide Procede de regulation du titre d'une solution, dispositif de commande de cette regulation et systeme comportant un tel dispositif
US8271139B2 (en) * 2003-10-17 2012-09-18 Asahi Kasei Bioprocess, Inc. Multi-stage accurate blending system and method
US7515994B2 (en) * 2003-10-17 2009-04-07 Technikrom, Inc. Accurate blending module and method
US7072742B1 (en) * 2003-10-17 2006-07-04 Technikrom, Inc. Accurate blending module and method
US7370822B2 (en) * 2004-07-28 2008-05-13 Takata Corporation Seatbelt retractor having multi-level load-limit setting devices
US7614410B2 (en) * 2005-03-01 2009-11-10 Hydrite Chemical Co. Chemical concentration controller and recorder
KR100639710B1 (ko) 2005-03-17 2006-10-30 세메스 주식회사 약액 혼합 공급 방법
JP4077845B2 (ja) 2005-03-18 2008-04-23 セメス株式会社 機能水供給システム、及び機能水供給方法
US20070109912A1 (en) * 2005-04-15 2007-05-17 Urquhart Karl J Liquid ring pumping and reclamation systems in a processing environment
CN101259394B (zh) * 2007-03-06 2011-06-01 中芯国际集成电路制造(上海)有限公司 一种可提高药液配制效率的药液配制装置以及配制方法
JP4958618B2 (ja) * 2007-04-20 2012-06-20 株式会社日立製作所 ロット区分管理システム
WO2009069090A2 (en) 2007-11-27 2009-06-04 L'air Liquide-Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Improved reclaim function for semiconductor processing systems
WO2010085750A2 (en) * 2009-01-26 2010-07-29 M-I L.L.C. Cation exchange capacity titration unit
TWI490031B (zh) * 2012-05-18 2015-07-01 Taiwan Semiconductor Mfg Co Ltd 溶劑混合系統及溶劑混合方法
CN102878429B (zh) * 2012-10-12 2015-02-11 北京七星华创电子股份有限公司 补液装置
JP7306608B2 (ja) 2016-03-11 2023-07-11 フジフイルム エレクトロニック マテリアルズ ユー．エス．エー．， インコーポレイテッド 高度な流体処理方法およびシステム
US20160296902A1 (en) 2016-06-17 2016-10-13 Air Liquide Electronics U.S. Lp Deterministic feedback blender
JP6845128B2 (ja) * 2017-12-25 2021-03-17 ファナック株式会社 オイルバス内のオイルを撹拌するオイル循環装置及びオイル循環システム
CN109696802B (zh) * 2019-01-16 2024-05-07 宁波南大光电材料有限公司 一种溶剂生产设备、溶剂制备及取用方法
JP6835126B2 (ja) * 2019-03-28 2021-02-24 栗田工業株式会社 希薄薬液製造装置
US20220080373A1 (en) * 2020-09-14 2022-03-17 Changxin Memory Technologies, Inc. Monitoring feedback system and monitoring feedback method

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2058596B (en) * 1979-09-17 1983-04-07 Hope H F Mixing materials in desired proportions
US4357110A (en) * 1979-09-17 1982-11-02 Hope Henry F Mixing apparatus
US4823987A (en) * 1986-04-28 1989-04-25 Ryco Graphic Manufacturing, Inc. Liquid mixing system and method
JPS63221348A (ja) * 1987-03-11 1988-09-14 Canon Inc 電子写真感光体の自動制御式製造装置
DE4210794C2 (de) * 1992-04-01 1995-04-06 Agfa Gevaert Ag Mischvorrichtung für fotografische Behandlungsflüssigkeiten
JP3183308B2 (ja) * 1992-08-05 2001-07-09 三菱瓦斯化学株式会社 現像液の連続自動希釈装置
US5476320A (en) * 1992-12-28 1995-12-19 Sumitomo Chemical Co., Ltd. Developer preparing apparatus and developer preparing method
US5522660A (en) * 1994-12-14 1996-06-04 Fsi International, Inc. Apparatus for blending and controlling the concentration of a liquid chemical in a diluent liquid
WO1996039651A1 (en) * 1995-06-05 1996-12-12 Startec Ventures, Inc. System and method for on-site mixing of ultra-high-purity chemicals for semiconductor processing
JPH0933538A (ja) * 1995-07-19 1997-02-07 Toa Medical Electronics Co Ltd 試薬調製装置およびその方法

Also Published As

Publication number Publication date
EP0870535B1 (de) 2004-02-25
JPH10335302A (ja) 1998-12-18
CN1211467A (zh) 1999-03-24
EP0870535A1 (de) 1998-10-14
DE69821814T2 (de) 2004-11-25
US6146008A (en) 2000-11-14
CN1103626C (zh) 2003-03-26
KR19980081288A (ko) 1998-11-25
FR2761902A1 (fr) 1998-10-16
TW402736B (en) 2000-08-21
SG67490A1 (en) 1999-09-21
FR2761902B1 (fr) 1999-05-14

Similar Documents

Publication Publication Date Title
DE69821814D1 (de) Verfahren und Vorrichtung zum Verdünnen ultrareiner chemischer Produkte zur Verwendung in der mikroelektronischen Industrie
DE69917433D1 (de) Verfahren und vorrichtung zum herstellen von flüssigdispersen systemen in flüssigkeiten
DE69935039D1 (de) Verfahren und vorrichtung zum transport von halbleiterplättchen
DE69532091D1 (de) Verfahren und Vorrichtung zur Durchführung von Messungen
DE69907878D1 (de) Verfahren und vorrichtung zur elektrokoagulation von flüssigkeiten
DE59912692D1 (de) Verfahren und Vorrichtung zum optischen Prüfen von Packungen
DE69927111D1 (de) Verfahren und Vorrichtung zum Polieren von Substraten
DE69938068D1 (de) Vorrichtung zur Zerstäubung von Flüssigkeiten und Verfahren zum Schneiden
DE60038292D1 (de) Vorrichtung und verfahren zum transportieren/halten von flächigen elementen
DE69736224D1 (de) Verfahren und vorrichtung zum transportieren von blattförmigen gegenstanden
DE60123254D1 (de) Verfahren und vorrichtung zum mischen von prozessmaterialien
DE69914554D1 (de) Verfahren und Vorrichtung zum Spenden flüssiger Chemikalien
DE60200880D1 (de) Verfahren und vorrichtung zum aufnehmen und abstellen von behältern
DE69922448D1 (de) Vorrichtung und Verfahren zum Verpacken
DE69924024D1 (de) Verfahren und vorrichtung zum entfernen von gussgraten
DE69921021D1 (de) Verfahren und Vorrichtung zur Unterscheidung von Produkteinheiten
DE59813939D1 (de) Vorrichtung und verfahren zum getrennten transportieren von substraten
DE59900963D1 (de) Verfahren und vorrichtung zum bearbeiten von substraten
DE69832225D1 (de) Vorrichtung und Verfahren für Oberflächeninspektionen
DE69925282D1 (de) Vorrichtung und verfahren zum polieren
DE69802269D1 (de) Vorrichtung und verfahren zum vergleichen von pixelblöcken
DE69712945D1 (de) Vorrichtung und Verfahren zum Umschlagen von Reifenbestandteilen
DE50010726D1 (de) Verfahren und Vorrichtung zum Vereinzeln flächiger Güter
DE69924565D1 (de) Verfahren und Vorrichtung zum Anschärfen von plattenförmigem Material
DE59906381D1 (de) Verfahren und vorrichtung zum dosieren und mischen unterschiedlicher komponenten

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee