DE69821560D1 - Epitaxieverfahren auf einem Siliciumsubstrat mit durch Arsen hochdotierten Gebieten - Google Patents
Epitaxieverfahren auf einem Siliciumsubstrat mit durch Arsen hochdotierten GebietenInfo
- Publication number
- DE69821560D1 DE69821560D1 DE69821560T DE69821560T DE69821560D1 DE 69821560 D1 DE69821560 D1 DE 69821560D1 DE 69821560 T DE69821560 T DE 69821560T DE 69821560 T DE69821560 T DE 69821560T DE 69821560 D1 DE69821560 D1 DE 69821560D1
- Authority
- DE
- Germany
- Prior art keywords
- arsenic
- silicon substrate
- heavily doped
- epitaxial process
- areas heavily
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/24—Deposition of silicon only
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/18—Epitaxial-layer growth characterised by the substrate
- C30B25/20—Epitaxial-layer growth characterised by the substrate the substrate being of the same materials as the epitaxial layer
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9710032 | 1997-07-31 | ||
FR9710032A FR2766845B1 (fr) | 1997-07-31 | 1997-07-31 | Procede d'epitaxie sur un substrat de silicium comprenant des zones fortement dopees a l'arsenic |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69821560D1 true DE69821560D1 (de) | 2004-03-18 |
DE69821560T2 DE69821560T2 (de) | 2005-01-05 |
Family
ID=9510054
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69821560T Expired - Lifetime DE69821560T2 (de) | 1997-07-31 | 1998-07-28 | Epitaxieverfahren auf einem Siliciumsubstrat mit durch Arsen hochdotierten Gebieten |
Country Status (5)
Country | Link |
---|---|
US (2) | US6162706A (de) |
EP (1) | EP0897024B1 (de) |
JP (1) | JPH11139900A (de) |
DE (1) | DE69821560T2 (de) |
FR (1) | FR2766845B1 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2766845B1 (fr) | 1997-07-31 | 1999-10-15 | Sgs Thomson Microelectronics | Procede d'epitaxie sur un substrat de silicium comprenant des zones fortement dopees a l'arsenic |
US20030138545A1 (en) * | 2002-01-22 | 2003-07-24 | Guanggu Sun | Glucomannan high fiber beverage |
US6911367B2 (en) * | 2003-04-18 | 2005-06-28 | Micron Technology, Inc. | Methods of forming semiconductive materials having flattened surfaces; methods of forming isolation regions; and methods of forming elevated source/drain regions |
JP4599816B2 (ja) * | 2003-08-01 | 2010-12-15 | 信越半導体株式会社 | シリコンエピタキシャルウェーハの製造方法 |
US7474114B2 (en) * | 2005-09-08 | 2009-01-06 | Sitronic Corporation | System and method for characterizing silicon wafers |
WO2007131343A1 (en) * | 2006-05-15 | 2007-11-22 | Arise Technologies Corporation | Low-temperature doping processes for silicon wafer devices |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3660180A (en) * | 1969-02-27 | 1972-05-02 | Ibm | Constrainment of autodoping in epitaxial deposition |
FR2041710B1 (de) * | 1969-05-08 | 1974-06-14 | Radiotechnique Compelec | |
US3716422A (en) * | 1970-03-30 | 1973-02-13 | Ibm | Method of growing an epitaxial layer by controlling autodoping |
US3669769A (en) * | 1970-09-29 | 1972-06-13 | Ibm | Method for minimizing autodoping in epitaxial deposition |
US3765960A (en) * | 1970-11-02 | 1973-10-16 | Ibm | Method for minimizing autodoping in epitaxial deposition |
US4153486A (en) * | 1978-06-05 | 1979-05-08 | International Business Machines Corporation | Silicon tetrachloride epitaxial process for producing very sharp autodoping profiles and very low defect densities on substrates with high concentration buried impurity layers utilizing a preheating in hydrogen |
JPS57115822A (en) * | 1981-01-08 | 1982-07-19 | Nec Corp | Manufacture of semiconductor device |
JPS57196800A (en) * | 1981-05-29 | 1982-12-02 | Nec Corp | Silicon epitaxial growth method |
US4504330A (en) * | 1983-10-19 | 1985-03-12 | International Business Machines Corporation | Optimum reduced pressure epitaxial growth process to prevent autodoping |
US5221412A (en) * | 1989-09-26 | 1993-06-22 | Toagosei Chemical Industry Co., Ltd. | Vapor-phase epitaxial growth process by a hydrogen pretreatment step followed by decomposition of disilane to form monocrystalline Si film |
EP0671770B1 (de) * | 1993-02-09 | 2000-08-02 | GENERAL SEMICONDUCTOR, Inc. | Mehrschichtige Epitaxie für eine Siliziumdiode |
US5356837A (en) * | 1993-10-29 | 1994-10-18 | International Business Machines Corporation | Method of making epitaxial cobalt silicide using a thin metal underlayer |
FR2766845B1 (fr) | 1997-07-31 | 1999-10-15 | Sgs Thomson Microelectronics | Procede d'epitaxie sur un substrat de silicium comprenant des zones fortement dopees a l'arsenic |
-
1997
- 1997-07-31 FR FR9710032A patent/FR2766845B1/fr not_active Expired - Fee Related
-
1998
- 1998-07-28 EP EP98410085A patent/EP0897024B1/de not_active Expired - Lifetime
- 1998-07-28 DE DE69821560T patent/DE69821560T2/de not_active Expired - Lifetime
- 1998-07-29 JP JP10227542A patent/JPH11139900A/ja not_active Withdrawn
- 1998-07-29 US US09/124,825 patent/US6162706A/en not_active Expired - Lifetime
-
2002
- 2002-01-15 US US09/902,497 patent/US6776842B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2766845B1 (fr) | 1999-10-15 |
JPH11139900A (ja) | 1999-05-25 |
DE69821560T2 (de) | 2005-01-05 |
EP0897024A1 (de) | 1999-02-17 |
US20020081374A1 (en) | 2002-06-27 |
US6162706A (en) | 2000-12-19 |
EP0897024B1 (de) | 2004-02-11 |
US6776842B2 (en) | 2004-08-17 |
FR2766845A1 (fr) | 1999-02-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |