DE69819948D1 - Verfahren zur Herstellung von Monosilanen - Google Patents

Verfahren zur Herstellung von Monosilanen

Info

Publication number
DE69819948D1
DE69819948D1 DE69819948T DE69819948T DE69819948D1 DE 69819948 D1 DE69819948 D1 DE 69819948D1 DE 69819948 T DE69819948 T DE 69819948T DE 69819948 T DE69819948 T DE 69819948T DE 69819948 D1 DE69819948 D1 DE 69819948D1
Authority
DE
Germany
Prior art keywords
monosilanes
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69819948T
Other languages
English (en)
Other versions
DE69819948T2 (de
Inventor
Akihito Tsukuno
Yukinori Satoh
Masao Maruyama
Kesaji Harada
Shoichi Tanaka
Masaaki Furuya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Application granted granted Critical
Publication of DE69819948D1 publication Critical patent/DE69819948D1/de
Publication of DE69819948T2 publication Critical patent/DE69819948T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic System
    • C07F7/02—Silicon compounds
    • C07F7/08—Compounds having one or more C—Si linkages
    • C07F7/12—Organo silicon halides
    • C07F7/121—Preparation or treatment not provided for in C07F7/14, C07F7/16 or C07F7/20
    • C07F7/128—Preparation or treatment not provided for in C07F7/14, C07F7/16 or C07F7/20 by reactions covered by more than one of the groups C07F7/122 - C07F7/127 and of which the starting material is unknown or insufficiently determined
DE69819948T 1997-02-28 1998-02-26 Verfahren zur Herstellung von Monosilanen Expired - Lifetime DE69819948T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP06238397A JP3362630B2 (ja) 1997-02-28 1997-02-28 直接法メチルクロルシラン合成より副生する高沸点成分からのモノシラン類の製造方法
JP6238397 1997-02-28

Publications (2)

Publication Number Publication Date
DE69819948D1 true DE69819948D1 (de) 2004-01-08
DE69819948T2 DE69819948T2 (de) 2004-09-02

Family

ID=13198557

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69819948T Expired - Lifetime DE69819948T2 (de) 1997-02-28 1998-02-26 Verfahren zur Herstellung von Monosilanen

Country Status (4)

Country Link
US (1) US5922893A (de)
EP (1) EP0861844B1 (de)
JP (1) JP3362630B2 (de)
DE (1) DE69819948T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2777006B1 (fr) * 1998-04-07 2000-08-04 Rhodia Chimie Sa Procede de preparation d'hydrogenosilanes par hydrogenolyse catalytique de polysilanes
EP1055675B1 (de) * 1999-05-27 2003-05-21 General Electric Company Verfahren zur Herstellung von Alkylhalogensilanen
KR100855672B1 (ko) * 2001-12-18 2008-09-03 주식회사 케이씨씨 고비점 잔류물로부터 모노실란 제조 방법
DE10336545B3 (de) * 2003-08-05 2005-04-14 Ge Bayer Silicones Gmbh & Co. Kg Verfahren zur Herstellung von Chlorsilanen
CN1301258C (zh) * 2004-02-19 2007-02-21 吉林市凇泰化工有限责任公司 甲基氯硅烷生产方法的改进
CN100386333C (zh) * 2005-08-17 2008-05-07 中国石油天然气股份有限公司 一种裂解制备二甲基二氯硅烷的方法
DE102010043648A1 (de) * 2010-11-09 2012-05-10 Evonik Degussa Gmbh Verfahren zur selektiven Spaltung höherer Silane
RU2470697C2 (ru) * 2011-02-18 2012-12-27 Федеральное государственное унитарное предприятие "Государственный ордена Трудового Красного Знамени научно-исследовательский институт химии и технологии элементоорганических соединений" (ФГУП ГНИИХТЭОС) Способ очистки абгазов от хлористого метила
US8697901B2 (en) 2011-12-30 2014-04-15 Momentive Performance Materials Inc. Synthesis of organohalosilane monomers via enhanced cleavage of direct process residue
US8637695B2 (en) 2011-12-30 2014-01-28 Momentive Performance Materials Inc. Synthesis of organohalosilane monomers from conventionally uncleavable Direct Process Residue
CN104130279B (zh) * 2014-06-13 2016-08-24 王金明 一种固体碱催化裂解有机硅高沸物的方法
CN106604924B (zh) * 2014-07-22 2020-04-03 迈图高新材料有限责任公司 用于裂解单硅烷、聚硅烷和/或低聚硅烷中的硅-硅键和/或硅-氯键的方法
EP4017861B8 (de) 2019-08-22 2023-08-16 Dow Silicones Corporation Verfahren zur reinigung von siliziumverbindungen

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL90972C (de) * 1954-03-12
NL127615C (de) * 1965-06-14
US3878234A (en) * 1973-07-30 1975-04-15 Dow Corning Preparation of hydrocarbon silanes from polysilanes
US4059607A (en) * 1976-12-20 1977-11-22 Union Carbide Corporation Preparation of hydrocarbon chlorosilanes from polysilanes
DE4220151A1 (de) * 1992-06-19 1993-12-23 Wacker Chemie Gmbh Verfahren zur Gewinnung von Methylchlorsilanen aus hochsiedenden Rückständen der Methylchlorsilansynthese
US5321147A (en) * 1993-07-16 1994-06-14 Dow Corning Corporation Conversion of direct process high-boiling component to chlorosilane monomers in the presence of chlorine
DE4431995A1 (de) * 1994-09-08 1996-03-14 Wacker Chemie Gmbh Verfahren zur Herstellung von wasserstoffhaltigen Methylchlorsilanen
FR2732683B1 (fr) * 1995-04-10 1997-06-20 Rhone Poulenc Chimie Procede de scission des sous-produits de la synthese directe des alkylchlorosilanes
US5627298A (en) * 1996-06-13 1997-05-06 Dow Corning Corporation One step process for converting high-boiling residue from direct process to monosilanes
US5629438A (en) * 1996-09-11 1997-05-13 Dow Corning Corporation Hydrochlorination process for converting high-boiling residue from direct process to monosilanes

Also Published As

Publication number Publication date
EP0861844A3 (de) 1999-09-15
EP0861844A2 (de) 1998-09-02
EP0861844B1 (de) 2003-11-26
DE69819948T2 (de) 2004-09-02
US5922893A (en) 1999-07-13
JP3362630B2 (ja) 2003-01-07
JPH10245388A (ja) 1998-09-14

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