DE69814619D1 - Siliziumkarbid feldgesteuerter zweipoliger schalter - Google Patents
Siliziumkarbid feldgesteuerter zweipoliger schalterInfo
- Publication number
- DE69814619D1 DE69814619D1 DE69814619T DE69814619T DE69814619D1 DE 69814619 D1 DE69814619 D1 DE 69814619D1 DE 69814619 T DE69814619 T DE 69814619T DE 69814619 T DE69814619 T DE 69814619T DE 69814619 D1 DE69814619 D1 DE 69814619D1
- Authority
- DE
- Germany
- Prior art keywords
- epitaxial layer
- silicon carbide
- conductivity type
- type silicon
- field controlled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title abstract 8
- 229910010271 silicon carbide Inorganic materials 0.000 title abstract 7
- 239000000758 substrate Substances 0.000 abstract 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1608—Silicon carbide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7391—Gated diode structures
- H01L29/7392—Gated diode structures with PN junction gate, e.g. field controlled thyristors (FCTh), static induction thyristors (SITh)
Landscapes
- Microelectronics & Electronic Packaging (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Computer Hardware Design (AREA)
- Thyristors (AREA)
- Bipolar Transistors (AREA)
- Junction Field-Effect Transistors (AREA)
- Push-Button Switches (AREA)
- Keying Circuit Devices (AREA)
- Contacts (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US846286 | 1992-03-03 | ||
US08/846,286 US6011279A (en) | 1997-04-30 | 1997-04-30 | Silicon carbide field controlled bipolar switch |
PCT/US1998/005487 WO1998049731A1 (en) | 1997-04-30 | 1998-03-20 | Silicon carbide field conrolled bipolar switch |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69814619D1 true DE69814619D1 (de) | 2003-06-18 |
DE69814619T2 DE69814619T2 (de) | 2004-03-18 |
Family
ID=25297449
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69814619T Expired - Lifetime DE69814619T2 (de) | 1997-04-30 | 1998-03-20 | Siliziumkarbid feldgesteuerter zweipoliger schalter |
Country Status (10)
Country | Link |
---|---|
US (1) | US6011279A (de) |
EP (1) | EP0979531B1 (de) |
JP (1) | JP4680330B2 (de) |
KR (1) | KR100514398B1 (de) |
CN (1) | CN1166001C (de) |
AT (1) | ATE240588T1 (de) |
AU (1) | AU6572898A (de) |
CA (1) | CA2285067C (de) |
DE (1) | DE69814619T2 (de) |
WO (1) | WO1998049731A1 (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999005728A1 (en) | 1997-07-25 | 1999-02-04 | Nichia Chemical Industries, Ltd. | Nitride semiconductor device |
DE19833214C1 (de) * | 1998-07-23 | 1999-08-12 | Siemens Ag | J-FET-Halbleiteranordnung |
US6884644B1 (en) | 1998-09-16 | 2005-04-26 | Cree, Inc. | Low temperature formation of backside ohmic contacts for vertical devices |
US6803243B2 (en) | 2001-03-15 | 2004-10-12 | Cree, Inc. | Low temperature formation of backside ohmic contacts for vertical devices |
JP3770014B2 (ja) | 1999-02-09 | 2006-04-26 | 日亜化学工業株式会社 | 窒化物半導体素子 |
EP1168539B1 (de) | 1999-03-04 | 2009-12-16 | Nichia Corporation | Nitridhalbleiterlaserelement |
SE9901410D0 (sv) * | 1999-04-21 | 1999-04-21 | Abb Research Ltd | Abipolar transistor |
US6909119B2 (en) * | 2001-03-15 | 2005-06-21 | Cree, Inc. | Low temperature formation of backside ohmic contacts for vertical devices |
US6514779B1 (en) * | 2001-10-17 | 2003-02-04 | Cree, Inc. | Large area silicon carbide devices and manufacturing methods therefor |
US6734462B1 (en) | 2001-12-07 | 2004-05-11 | The United States Of America As Represented By The Secretary Of The Army | Silicon carbide power devices having increased voltage blocking capabilities |
CA2381128A1 (en) * | 2002-04-09 | 2003-10-09 | Quantiscript Inc. | Plasma polymerized electron beam resist |
CN100433256C (zh) * | 2004-03-18 | 2008-11-12 | 克里公司 | 减少堆垛层错成核位置的顺序光刻方法和具有减少的堆垛层错成核位置的结构 |
US7173285B2 (en) * | 2004-03-18 | 2007-02-06 | Cree, Inc. | Lithographic methods to reduce stacking fault nucleation sites |
DE102004047313B3 (de) * | 2004-09-29 | 2006-03-30 | Siced Electronics Development Gmbh & Co. Kg | Halbleiteranordnung mit einem Tunnelkontakt und Verfahren zu deren Herstellung |
US20060267043A1 (en) * | 2005-05-27 | 2006-11-30 | Emerson David T | Deep ultraviolet light emitting devices and methods of fabricating deep ultraviolet light emitting devices |
TWI362769B (en) | 2008-05-09 | 2012-04-21 | Univ Nat Chiao Tung | Light emitting device and fabrication method therefor |
JP2011199306A (ja) * | 2011-06-03 | 2011-10-06 | Sumitomo Electric Ind Ltd | 半導体装置およびその製造方法 |
CN104201211B (zh) * | 2014-08-27 | 2016-03-30 | 温州大学 | 制备SiC超快恢复二极管及工艺 |
SE541290C2 (en) * | 2017-09-15 | 2019-06-11 | Ascatron Ab | A method for manufacturing a grid |
CN113097298B (zh) * | 2021-03-30 | 2024-09-17 | 全球能源互联网研究院有限公司 | 一种绝缘栅双极型晶体管及其制备方法 |
Family Cites Families (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4171995A (en) * | 1975-10-20 | 1979-10-23 | Semiconductor Research Foundation | Epitaxial deposition process for producing an electrostatic induction type thyristor |
US4037245A (en) * | 1975-11-28 | 1977-07-19 | General Electric Company | Electric field controlled diode with a current controlling surface grid |
US4060821A (en) * | 1976-06-21 | 1977-11-29 | General Electric Co. | Field controlled thyristor with buried grid |
US4132996A (en) * | 1976-11-08 | 1979-01-02 | General Electric Company | Electric field-controlled semiconductor device |
JPS542077A (en) * | 1977-06-08 | 1979-01-09 | Hitachi Ltd | Semiconductor switching element |
US4569118A (en) * | 1977-12-23 | 1986-02-11 | General Electric Company | Planar gate turn-off field controlled thyristors and planar junction gate field effect transistors, and method of making same |
US4364072A (en) * | 1978-03-17 | 1982-12-14 | Zaidan Hojin Handotai Kenkyu Shinkokai | Static induction type semiconductor device with multiple doped layers for potential modification |
US4937644A (en) * | 1979-11-16 | 1990-06-26 | General Electric Company | Asymmetrical field controlled thyristor |
US4466173A (en) * | 1981-11-23 | 1984-08-21 | General Electric Company | Methods for fabricating vertical channel buried grid field controlled devices including field effect transistors and field controlled thyristors utilizing etch and refill techniques |
US4571815A (en) * | 1981-11-23 | 1986-02-25 | General Electric Company | Method of making vertical channel field controlled device employing a recessed gate structure |
US4587712A (en) * | 1981-11-23 | 1986-05-13 | General Electric Company | Method for making vertical channel field controlled device employing a recessed gate structure |
US5087576A (en) * | 1987-10-26 | 1992-02-11 | North Carolina State University | Implantation and electrical activation of dopants into monocrystalline silicon carbide |
US4994883A (en) * | 1989-10-02 | 1991-02-19 | General Electric Company | Field controlled diode (FCD) having MOS trench gates |
US5202750A (en) * | 1990-04-09 | 1993-04-13 | U.S. Philips Corp. | MOS-gated thyristor |
CA2117341A1 (en) * | 1991-12-23 | 1993-07-08 | Jurgen Graber | Electronic component and process for making it |
US5369291A (en) * | 1993-03-29 | 1994-11-29 | Sunpower Corporation | Voltage controlled thyristor |
US5554561A (en) * | 1993-04-30 | 1996-09-10 | Texas Instruments Incorporated | Epitaxial overgrowth method |
GB9313843D0 (en) * | 1993-07-05 | 1993-08-18 | Philips Electronics Uk Ltd | A semiconductor device comprising an insulated gate field effect transistor |
US5539217A (en) * | 1993-08-09 | 1996-07-23 | Cree Research, Inc. | Silicon carbide thyristor |
DE9411601U1 (de) * | 1993-09-08 | 1994-10-13 | Siemens AG, 80333 München | Strombegrenzender Schalter |
EP0717880A1 (de) * | 1993-09-08 | 1996-06-26 | Siemens Aktiengesellschaft | Strombegrenzer |
US5612547A (en) * | 1993-10-18 | 1997-03-18 | Northrop Grumman Corporation | Silicon carbide static induction transistor |
US5387805A (en) * | 1994-01-05 | 1995-02-07 | Metzler; Richard A. | Field controlled thyristor |
US5449925A (en) * | 1994-05-04 | 1995-09-12 | North Carolina State University | Voltage breakdown resistant monocrystalline silicon carbide semiconductor devices |
US5471075A (en) * | 1994-05-26 | 1995-11-28 | North Carolina State University | Dual-channel emitter switched thyristor with trench gate |
WO1995034915A1 (en) * | 1994-06-13 | 1995-12-21 | Abb Research Ltd. | Semiconductor device in silicon carbide |
JP3277075B2 (ja) * | 1994-09-07 | 2002-04-22 | 日本碍子株式会社 | 半導体装置およびその製造方法 |
SE9601176D0 (sv) * | 1996-03-27 | 1996-03-27 | Abb Research Ltd | A method for producing a semiconductor device having semiconductor layers of SiC by the use of an implanting step and a device produced thereby |
DE19644821C1 (de) * | 1996-10-29 | 1998-02-12 | Daimler Benz Ag | Steuerbare Halbleiterstruktur mit verbesserten Schalteigenschaften |
-
1997
- 1997-04-30 US US08/846,286 patent/US6011279A/en not_active Expired - Lifetime
-
1998
- 1998-03-20 KR KR10-1999-7009649A patent/KR100514398B1/ko not_active IP Right Cessation
- 1998-03-20 AU AU65728/98A patent/AU6572898A/en not_active Abandoned
- 1998-03-20 CA CA002285067A patent/CA2285067C/en not_active Expired - Fee Related
- 1998-03-20 JP JP54697298A patent/JP4680330B2/ja not_active Expired - Lifetime
- 1998-03-20 WO PCT/US1998/005487 patent/WO1998049731A1/en active IP Right Grant
- 1998-03-20 EP EP98911876A patent/EP0979531B1/de not_active Expired - Lifetime
- 1998-03-20 DE DE69814619T patent/DE69814619T2/de not_active Expired - Lifetime
- 1998-03-20 AT AT98911876T patent/ATE240588T1/de not_active IP Right Cessation
- 1998-03-20 CN CNB98804658XA patent/CN1166001C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR100514398B1 (ko) | 2005-09-13 |
KR20010006559A (ko) | 2001-01-26 |
EP0979531B1 (de) | 2003-05-14 |
CN1166001C (zh) | 2004-09-08 |
AU6572898A (en) | 1998-11-24 |
CA2285067A1 (en) | 1998-11-05 |
DE69814619T2 (de) | 2004-03-18 |
JP2001522533A (ja) | 2001-11-13 |
CA2285067C (en) | 2006-05-02 |
EP0979531A1 (de) | 2000-02-16 |
US6011279A (en) | 2000-01-04 |
ATE240588T1 (de) | 2003-05-15 |
JP4680330B2 (ja) | 2011-05-11 |
WO1998049731A1 (en) | 1998-11-05 |
CN1254442A (zh) | 2000-05-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |