DE69807536D1 - Belichtungsapparat und -verfahren - Google Patents

Belichtungsapparat und -verfahren

Info

Publication number
DE69807536D1
DE69807536D1 DE69807536T DE69807536T DE69807536D1 DE 69807536 D1 DE69807536 D1 DE 69807536D1 DE 69807536 T DE69807536 T DE 69807536T DE 69807536 T DE69807536 T DE 69807536T DE 69807536 D1 DE69807536 D1 DE 69807536D1
Authority
DE
Germany
Prior art keywords
exposure apparatus
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69807536T
Other languages
English (en)
Inventor
Naoyuki Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=12135238&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69807536(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Nikon Corp filed Critical Nikon Corp
Application granted granted Critical
Publication of DE69807536D1 publication Critical patent/DE69807536D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
DE69807536T 1997-01-23 1998-01-14 Belichtungsapparat und -verfahren Expired - Lifetime DE69807536D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9024332A JPH10209035A (ja) 1997-01-23 1997-01-23 露光装置

Publications (1)

Publication Number Publication Date
DE69807536D1 true DE69807536D1 (de) 2002-10-10

Family

ID=12135238

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69807536T Expired - Lifetime DE69807536D1 (de) 1997-01-23 1998-01-14 Belichtungsapparat und -verfahren

Country Status (4)

Country Link
US (1) US6008883A (de)
EP (2) EP1069476A1 (de)
JP (1) JPH10209035A (de)
DE (1) DE69807536D1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6621556B2 (en) * 2000-02-28 2003-09-16 Nikon Corporation Projection exposure apparatus and manufacturing and adjusting methods thereof
US6646719B2 (en) * 2001-01-31 2003-11-11 Nikon Corporation Support assembly for an exposure apparatus

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE148911C (de) *
FR2388372A1 (fr) * 1977-04-20 1978-11-17 Thomson Csf Platine a rattrapage de niveau et positionneur a indexation mecanique utilisant une telle platine
JPS61160934A (ja) * 1985-01-10 1986-07-21 Canon Inc 投影光学装置
GB2249189B (en) * 1990-10-05 1994-07-27 Canon Kk Exposure apparatus
NL9100202A (nl) * 1991-02-05 1992-09-01 Asm Lithography Bv Lithografische inrichting met een hangende objecttafel.
NL9100421A (nl) * 1991-03-08 1992-10-01 Asm Lithography Bv Ondersteuningsinrichting met een kantelbare objecttafel alsmede optisch lithografische inrichting voorzien van een dergelijke ondersteuningsinrichting.
JP3506158B2 (ja) * 1995-04-14 2004-03-15 株式会社ニコン 露光装置及び走査型露光装置、並びに走査露光方法
DE69608204T2 (de) * 1995-05-30 2001-01-04 Asm Lithography Bv Lithographisches gerät mit einem sowie horizontal als auch vertikal justierbaren maskenhalter
TW316874B (de) * 1995-05-30 1997-10-01 Philips Electronics Nv
US5953105A (en) * 1995-05-30 1999-09-14 U.S. Philips Corporation Positioning device with a reference frame for a measuring system, and a lithographic device provided with such a positioning device
TW318255B (de) * 1995-05-30 1997-10-21 Philips Electronics Nv
JP3659529B2 (ja) * 1996-06-06 2005-06-15 キヤノン株式会社 露光装置およびデバイス製造方法

Also Published As

Publication number Publication date
EP0855624A3 (de) 1998-12-23
EP1069476A1 (de) 2001-01-17
JPH10209035A (ja) 1998-08-07
US6008883A (en) 1999-12-28
EP0855624A2 (de) 1998-07-29
EP0855624B1 (de) 2002-09-04

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Legal Events

Date Code Title Description
8332 No legal effect for de