DE69806336D1 - Tintenstrahlaufzeichnungskopf, Substrat für diesen Kopf, Herstellungsverfahren für dieses Substrat und Tintenstrahlaufzeichnungsgerät - Google Patents
Tintenstrahlaufzeichnungskopf, Substrat für diesen Kopf, Herstellungsverfahren für dieses Substrat und TintenstrahlaufzeichnungsgerätInfo
- Publication number
- DE69806336D1 DE69806336D1 DE69806336T DE69806336T DE69806336D1 DE 69806336 D1 DE69806336 D1 DE 69806336D1 DE 69806336 T DE69806336 T DE 69806336T DE 69806336 T DE69806336 T DE 69806336T DE 69806336 D1 DE69806336 D1 DE 69806336D1
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- ink jet
- jet recording
- head
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title 2
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1604—Production of bubble jet print heads of the edge shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14129—Layer structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/03—Specific materials used
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP34933597 | 1997-12-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69806336D1 true DE69806336D1 (de) | 2002-08-08 |
DE69806336T2 DE69806336T2 (de) | 2002-11-14 |
Family
ID=18403088
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69806336T Expired - Lifetime DE69806336T2 (de) | 1997-12-18 | 1998-12-17 | Tintenstrahlaufzeichnungskopf, Substrat für diesen Kopf, Herstellungsverfahren für dieses Substrat und Tintenstrahlaufzeichnungsgerät |
Country Status (3)
Country | Link |
---|---|
US (1) | US6532027B2 (de) |
EP (1) | EP0930167B1 (de) |
DE (1) | DE69806336T2 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3833189B2 (ja) * | 2003-05-27 | 2006-10-11 | 株式会社リコー | 半導体装置及びその製造方法 |
US7195343B2 (en) * | 2004-08-27 | 2007-03-27 | Lexmark International, Inc. | Low ejection energy micro-fluid ejection heads |
KR20080060003A (ko) * | 2006-12-26 | 2008-07-01 | 삼성전자주식회사 | 잉크젯 프린트 헤드의 제조방법 |
CN101873935A (zh) * | 2007-11-24 | 2010-10-27 | 惠普开发有限公司 | 具有加热电阻边缘保护层的喷墨打印装置打印头芯片 |
WO2016068958A1 (en) * | 2014-10-30 | 2016-05-06 | Hewlett-Packard Development Company, L.P. | Printing apparatus and methods of producing such a device |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5372473A (en) * | 1976-12-08 | 1978-06-27 | Nec Corp | Manufacture of mis type semicondctor device |
CA1127227A (en) | 1977-10-03 | 1982-07-06 | Ichiro Endo | Liquid jet recording process and apparatus therefor |
JPS5936879B2 (ja) | 1977-10-14 | 1984-09-06 | キヤノン株式会社 | 熱転写記録用媒体 |
US4330787A (en) | 1978-10-31 | 1982-05-18 | Canon Kabushiki Kaisha | Liquid jet recording device |
US4345262A (en) | 1979-02-19 | 1982-08-17 | Canon Kabushiki Kaisha | Ink jet recording method |
US4463359A (en) | 1979-04-02 | 1984-07-31 | Canon Kabushiki Kaisha | Droplet generating method and apparatus thereof |
US4313124A (en) | 1979-05-18 | 1982-01-26 | Canon Kabushiki Kaisha | Liquid jet recording process and liquid jet recording head |
US4429321A (en) | 1980-10-23 | 1984-01-31 | Canon Kabushiki Kaisha | Liquid jet recording device |
US4558333A (en) | 1981-07-09 | 1985-12-10 | Canon Kabushiki Kaisha | Liquid jet recording head |
JPS5833472A (ja) * | 1981-08-24 | 1983-02-26 | Canon Inc | 液体噴射記録ヘツド |
JPS59123670A (ja) | 1982-12-28 | 1984-07-17 | Canon Inc | インクジエツトヘツド |
JPS59138461A (ja) | 1983-01-28 | 1984-08-08 | Canon Inc | 液体噴射記録装置 |
JPH0613219B2 (ja) | 1983-04-30 | 1994-02-23 | キヤノン株式会社 | インクジェットヘッド |
JPS6071260A (ja) | 1983-09-28 | 1985-04-23 | Erumu:Kk | 記録装置 |
JPS60116451A (ja) * | 1983-11-30 | 1985-06-22 | Canon Inc | 液体噴射記録ヘツド |
DE3446968A1 (de) | 1983-12-26 | 1985-07-04 | Canon K.K., Tokio/Tokyo | Fluessigkeitsstrahlaufzeichnungskopf |
US4719477A (en) | 1986-01-17 | 1988-01-12 | Hewlett-Packard Company | Integrated thermal ink jet printhead and method of manufacture |
JPH03106663A (ja) * | 1989-09-20 | 1991-05-07 | Hitachi Ltd | サーマルヘッドの保護膜構造 |
US5010355A (en) | 1989-12-26 | 1991-04-23 | Xerox Corporation | Ink jet printhead having ionic passivation of electrical circuitry |
US5159353A (en) | 1991-07-02 | 1992-10-27 | Hewlett-Packard Company | Thermal inkjet printhead structure and method for making the same |
US5660739A (en) | 1994-08-26 | 1997-08-26 | Canon Kabushiki Kaisha | Method of producing substrate for ink jet recording head, ink jet recording head and ink jet recording apparatus |
JP3382424B2 (ja) | 1994-08-26 | 2003-03-04 | キヤノン株式会社 | インクジェットヘッド用基板、インクジェットヘッド及びインクジェット装置の製造方法並びにインクジェットヘッド用基板、インクジェットヘッド及びインクジェット装置 |
JP3308727B2 (ja) * | 1994-09-22 | 2002-07-29 | 株式会社東芝 | 半導体装置の製造方法 |
-
1998
- 1998-12-15 US US09/210,800 patent/US6532027B2/en not_active Expired - Lifetime
- 1998-12-17 DE DE69806336T patent/DE69806336T2/de not_active Expired - Lifetime
- 1998-12-17 EP EP98124046A patent/EP0930167B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US6532027B2 (en) | 2003-03-11 |
DE69806336T2 (de) | 2002-11-14 |
EP0930167A2 (de) | 1999-07-21 |
EP0930167A3 (de) | 1999-12-15 |
US20020135641A1 (en) | 2002-09-26 |
EP0930167B1 (de) | 2002-07-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |