DE69804933T2 - Herstellung von optischen Schaltern mit innerer Totalreflektion mit flüssigkeitsgefüllten vertikalen Löchern - Google Patents
Herstellung von optischen Schaltern mit innerer Totalreflektion mit flüssigkeitsgefüllten vertikalen LöchernInfo
- Publication number
- DE69804933T2 DE69804933T2 DE69804933T DE69804933T DE69804933T2 DE 69804933 T2 DE69804933 T2 DE 69804933T2 DE 69804933 T DE69804933 T DE 69804933T DE 69804933 T DE69804933 T DE 69804933T DE 69804933 T2 DE69804933 T2 DE 69804933T2
- Authority
- DE
- Germany
- Prior art keywords
- heater
- substrate
- waveguide
- waveguides
- heater substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title claims description 34
- 239000007788 liquid Substances 0.000 title claims description 25
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 239000000758 substrate Substances 0.000 claims description 143
- 238000000034 method Methods 0.000 claims description 47
- 238000005530 etching Methods 0.000 claims description 21
- 238000009616 inductively coupled plasma Methods 0.000 claims description 21
- 230000008878 coupling Effects 0.000 claims description 10
- 238000010168 coupling process Methods 0.000 claims description 10
- 238000005859 coupling reaction Methods 0.000 claims description 10
- 238000000059 patterning Methods 0.000 claims description 8
- 238000004891 communication Methods 0.000 claims description 7
- 239000012528 membrane Substances 0.000 claims description 7
- 238000003825 pressing Methods 0.000 claims 1
- 239000012530 fluid Substances 0.000 description 89
- 239000010410 layer Substances 0.000 description 78
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 34
- 235000012431 wafers Nutrition 0.000 description 31
- 239000000463 material Substances 0.000 description 26
- 239000012790 adhesive layer Substances 0.000 description 23
- 230000003647 oxidation Effects 0.000 description 23
- 238000007254 oxidation reaction Methods 0.000 description 23
- 239000000835 fiber Substances 0.000 description 17
- 238000010438 heat treatment Methods 0.000 description 17
- 238000001020 plasma etching Methods 0.000 description 17
- 239000011159 matrix material Substances 0.000 description 14
- 235000012239 silicon dioxide Nutrition 0.000 description 14
- 239000000377 silicon dioxide Substances 0.000 description 14
- 238000005553 drilling Methods 0.000 description 13
- 230000008569 process Effects 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 239000011162 core material Substances 0.000 description 12
- 239000013307 optical fiber Substances 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 239000000853 adhesive Substances 0.000 description 10
- 230000001070 adhesive effect Effects 0.000 description 10
- 238000005253 cladding Methods 0.000 description 10
- 238000002161 passivation Methods 0.000 description 10
- 229920002120 photoresistant polymer Polymers 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000007789 gas Substances 0.000 description 9
- 238000011049 filling Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 5
- 239000004576 sand Substances 0.000 description 5
- 229910004012 SiCx Inorganic materials 0.000 description 4
- 229910020776 SixNy Inorganic materials 0.000 description 4
- 230000003213 activating effect Effects 0.000 description 4
- 238000013459 approach Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000011295 pitch Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- UAEPNZWRGJTJPN-UHFFFAOYSA-N methylcyclohexane Chemical compound CC1CCCCC1 UAEPNZWRGJTJPN-UHFFFAOYSA-N 0.000 description 2
- 238000011165 process development Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- 229910004479 Ta2N Inorganic materials 0.000 description 1
- 229910004490 TaAl Inorganic materials 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- GYNNXHKOJHMOHS-UHFFFAOYSA-N methyl-cycloheptane Natural products CC1CCCCCC1 GYNNXHKOJHMOHS-UHFFFAOYSA-N 0.000 description 1
- ORQBXQOJMQIAOY-UHFFFAOYSA-N nobelium Chemical compound [No] ORQBXQOJMQIAOY-UHFFFAOYSA-N 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005382 thermal cycling Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3538—Optical coupling means having switching means based on displacement or deformation of a liquid
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3576—Temperature or heat actuation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49016—Antenna or wave energy "plumbing" making
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/025,892 US6055344A (en) | 1998-02-18 | 1998-02-18 | Fabrication of a total internal reflection optical switch with vertical fluid fill-holes |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69804933D1 DE69804933D1 (de) | 2002-05-23 |
| DE69804933T2 true DE69804933T2 (de) | 2002-11-14 |
Family
ID=21828626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69804933T Expired - Lifetime DE69804933T2 (de) | 1998-02-18 | 1998-09-11 | Herstellung von optischen Schaltern mit innerer Totalreflektion mit flüssigkeitsgefüllten vertikalen Löchern |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US6055344A (https=) |
| EP (1) | EP0938013B1 (https=) |
| JP (1) | JP4330197B2 (https=) |
| DE (1) | DE69804933T2 (https=) |
Families Citing this family (75)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6768572B2 (en) | 1997-10-29 | 2004-07-27 | Teloptics Corporation | Solid state free space switch array on a substrate |
| US6816296B2 (en) | 1997-10-29 | 2004-11-09 | Teloptics Corporation | Optical switching network and network node and method of optical switching |
| US6055344A (en) * | 1998-02-18 | 2000-04-25 | Hewlett-Packard Company | Fabrication of a total internal reflection optical switch with vertical fluid fill-holes |
| US6198856B1 (en) * | 1999-04-16 | 2001-03-06 | Agilent Technologies, Inc. | Optical switch having test ports |
| US6188815B1 (en) * | 1999-07-07 | 2001-02-13 | Agilent Technologies, Inc. | Optical switching device and method utilizing fluid pressure control to improve switching characteristics |
| EP1218930A1 (en) * | 1999-09-29 | 2002-07-03 | Nanovation Technologies, Inc. | Method of forming smooth morphologies in inp-based semiconductors |
| AU2114001A (en) * | 1999-10-15 | 2001-04-23 | California Institute Of Technology | Formation of smooth vertical surface on an optical component |
| US6535311B1 (en) * | 1999-12-09 | 2003-03-18 | Corning Incorporated | Wavelength selective cross-connect switch using a MEMS shutter array |
| US6487333B2 (en) | 1999-12-22 | 2002-11-26 | Agilent Technologies, Inc. | Total internal reflection optical switch |
| US6320994B1 (en) | 1999-12-22 | 2001-11-20 | Agilent Technolgies, Inc. | Total internal reflection optical switch |
| US6396972B1 (en) * | 2000-02-09 | 2002-05-28 | Agilent Technologies, Inc. | Thermally actuated optical add/drop switch |
| US6327397B1 (en) * | 2000-02-22 | 2001-12-04 | Agilent Technologies, Inc. | System and method for providing temperature control for a thermally activated optical switch using constant total power |
| US6441349B1 (en) * | 2000-04-26 | 2002-08-27 | Advanced Micro Devices | System for facilitating uniform heating temperature of photoresist |
| US6470109B1 (en) | 2000-06-08 | 2002-10-22 | Agilent Technologies, Inc. | Determining waveguide positions and angles for efficient reflective coupling |
| US6768830B1 (en) | 2000-06-09 | 2004-07-27 | Agilent Technologies, Inc. | Optical add/drop switch utilizing a minimal number of switching crosspoints |
| US20020037130A1 (en) * | 2000-08-02 | 2002-03-28 | Sarnoff Corporation | Microfluidic optical switch |
| AU2001286511A1 (en) | 2000-08-15 | 2002-02-25 | Nanostream, Inc. | Optical devices with fluidic systems |
| EP1191373A1 (en) * | 2000-09-20 | 2002-03-27 | Corning Incorporated | Method of simultaneously etching waveguides and intersecting trenches for a switching matrix application |
| US6532319B2 (en) * | 2000-12-18 | 2003-03-11 | Agilent Technologies, Inc. | Ceramic substrate for photonic switching system |
| JP2002207181A (ja) * | 2001-01-09 | 2002-07-26 | Minolta Co Ltd | 光スイッチ |
| US6711317B2 (en) * | 2001-01-25 | 2004-03-23 | Lucent Technologies Inc. | Resiliently packaged MEMs device and method for making same |
| US6449401B1 (en) * | 2001-01-31 | 2002-09-10 | Agilent Technologies, Inc | Optical cross-switch gas intrusion detector and detection method |
| US7016560B2 (en) * | 2001-02-28 | 2006-03-21 | Lightwave Microsystems Corporation | Microfluidic control for waveguide optical switches, variable attenuators, and other optical devices |
| WO2002069016A2 (en) * | 2001-02-28 | 2002-09-06 | Lightwave Microsystems Corporation | Microfluid control for waveguide optical switches, variable attenuators, and other optical devices |
| US6470107B2 (en) | 2001-03-13 | 2002-10-22 | President And Fellows Of Harvard College | Fluidic all-optical switch |
| US6760503B1 (en) | 2001-04-12 | 2004-07-06 | Eric F. Hermann | Scalable optical router/switch and method of constructing thereof |
| US6560383B1 (en) * | 2001-04-30 | 2003-05-06 | Agilent Technologies, Inc. | High efficiency insulation for improving thermal efficiency of bubble optical switch |
| US6678435B2 (en) * | 2001-05-18 | 2004-01-13 | Agilent Technologies, Inc. | Efficient thermal activation optical switch and method of making the same |
| US6647165B2 (en) | 2001-05-31 | 2003-11-11 | Agilent Technologies, Inc. | Total internal reflection optical switch utilizing a moving droplet |
| US7831151B2 (en) | 2001-06-29 | 2010-11-09 | John Trezza | Redundant optical device array |
| US20030002802A1 (en) * | 2001-06-29 | 2003-01-02 | John Trezza | Multi-piece fiber optic component and manufacturing technique |
| US20030002805A1 (en) | 2001-06-29 | 2003-01-02 | John Trezza | Multi-piece fiber optic component and manufacturing technique |
| EP1399769A4 (en) * | 2001-06-29 | 2005-08-17 | Xanoptix Inc | HIGH-PRECISION FEMALE MULTI-FIBER CONNECTOR |
| US6722788B2 (en) * | 2001-06-29 | 2004-04-20 | Xanoptix Inc. | Integration of fused glass collimated coupler for use in opto-electronic modules |
| US6773166B2 (en) | 2001-06-29 | 2004-08-10 | Xanoptix, Inc. | Multi-piece fiber optic component and manufacturing technique |
| US6619855B2 (en) * | 2001-06-29 | 2003-09-16 | Xanoptix, Inc. | Post-formation feature optimization |
| US20030002804A1 (en) * | 2001-06-29 | 2003-01-02 | John Trezza | Multi-piece fiber optic component and manufacturing technique |
| US20030072525A1 (en) * | 2001-06-29 | 2003-04-17 | Theodore Sjodin | Multi-mode fiber bandwidth enhancement using an optical fiber coupler |
| US6738541B2 (en) * | 2001-09-18 | 2004-05-18 | Agilent Technologies, Inc. | Optical switch comprising two non-coplanar arrays of optical waveguides |
| US6706203B2 (en) * | 2001-10-30 | 2004-03-16 | Agilent Technologies, Inc. | Adjustable nanopore, nanotome, and nanotweezer |
| US6890619B2 (en) * | 2001-11-13 | 2005-05-10 | Agilent Technologies, Inc. | Optical systems and refractive index-matching compositions |
| US6785439B2 (en) * | 2002-01-29 | 2004-08-31 | Agilent Technologies, Inc. | Switching using three-dimensional rewriteable waveguide in photosensitive media |
| US20030155328A1 (en) * | 2002-02-15 | 2003-08-21 | Huth Mark C. | Laser micromachining and methods and systems of same |
| US6732905B2 (en) | 2002-04-16 | 2004-05-11 | Agilent Technologies, Inc. | Vented cavity, hermetic solder seal |
| US6958446B2 (en) * | 2002-04-17 | 2005-10-25 | Agilent Technologies, Inc. | Compliant and hermetic solder seal |
| US6869273B2 (en) * | 2002-05-15 | 2005-03-22 | Hewlett-Packard Development Company, L.P. | Microelectromechanical device for controlled movement of a fluid |
| EP1382984A1 (en) * | 2002-07-19 | 2004-01-21 | Avanex Corporation | Planar Optical Switch and Switch Array |
| US7221819B2 (en) | 2002-08-01 | 2007-05-22 | Avago Technologies Fiber Ip (Singapore) Pte. Ltd. | Operating an optical switch at a negative pressure differential |
| US6823098B2 (en) * | 2002-08-26 | 2004-11-23 | International Business Machines Corporation | Evanescent wave tunneling optical switch and network |
| US6876788B2 (en) * | 2002-09-11 | 2005-04-05 | Agilent Technologies, Inc. | Preventing hydrodynamic crosstalk in an optical switch |
| US6921175B2 (en) | 2002-09-19 | 2005-07-26 | Hewlett-Packard Development Company, L.P. | Color-generating device and display system |
| US6920000B2 (en) * | 2002-09-19 | 2005-07-19 | Hewlett-Packard Development Company, L.P. | Filter for a display system |
| US6817717B2 (en) * | 2002-09-19 | 2004-11-16 | Hewlett-Packard Development Company, L.P. | Display system with low and high resolution modulators |
| US7152958B2 (en) * | 2002-11-23 | 2006-12-26 | Silverbrook Research Pty Ltd | Thermal ink jet with chemical vapor deposited nozzle plate |
| US7085444B2 (en) * | 2003-02-25 | 2006-08-01 | Eastman Kodak Company | Porous optical switch films |
| US7359523B2 (en) * | 2003-06-17 | 2008-04-15 | Avago Technologies Fiber Ip Pte Ltd | Fluidic acoustic transducer |
| US7274840B2 (en) * | 2003-07-23 | 2007-09-25 | Avago Technologies Fiber Ip (Singapore) Pte. Ltd. | Clean and test for fluid within a reflection optical switch system |
| US7039273B2 (en) * | 2003-08-12 | 2006-05-02 | Tyler Sims | Solder seals within a switching system |
| US7031564B2 (en) * | 2003-11-05 | 2006-04-18 | Tyler Sims | Heat transfer structures |
| US7465903B2 (en) * | 2003-11-05 | 2008-12-16 | Avago Technologies Fiber Ip (Singapore) Pte. Ltd. | Use of mesa structures for supporting heaters on an integrated circuit |
| US7172269B2 (en) * | 2003-11-13 | 2007-02-06 | Avago Technologies Fiber Ip (Singapore) Pte. Ltd. | Resistor shapes for heating devices on an integrated circuit |
| US7026189B2 (en) * | 2004-02-11 | 2006-04-11 | Hewlett-Packard Development Company, L.P. | Wafer packaging and singulation method |
| US7024062B2 (en) * | 2004-02-25 | 2006-04-04 | John Julian Uebbing | Optical switch with low pressure bubble |
| ITMI20041186A1 (it) * | 2004-06-14 | 2004-09-14 | St Microelectronics Srl | Dispositivo di ritardo ottico e sistema di trasmissione comprendente detto dispositivo di ritardo |
| US7348786B2 (en) * | 2004-08-31 | 2008-03-25 | Georgia Tech Research Corporation | Probe module for testing chips with electrical and optical input/output interconnects, methods of use, and methods of fabrication |
| US7422962B2 (en) * | 2004-10-27 | 2008-09-09 | Hewlett-Packard Development Company, L.P. | Method of singulating electronic devices |
| KR100571848B1 (ko) * | 2005-01-05 | 2006-04-17 | 삼성전자주식회사 | 실리콘 직접 접합 방법 |
| US7862056B2 (en) | 2007-02-02 | 2011-01-04 | Ford Global Technologies, Llc | Steering gear inertia damper |
| US8064493B2 (en) * | 2009-06-12 | 2011-11-22 | Binoptics Corporation | Surface emitting photonic device |
| KR101320592B1 (ko) * | 2009-11-19 | 2013-10-23 | (주)켐옵틱스 | 광 스위치들을 포함하는 광통신 소자 |
| US10677995B2 (en) | 2014-10-23 | 2020-06-09 | Hewlett Packard Enterprise Development Lp | Optical fiber interface for optical device package |
| US10088634B2 (en) * | 2014-10-23 | 2018-10-02 | Hewlett Packard Enterprise Development Lp | Optical port-shuffling module |
| WO2016064426A1 (en) | 2014-10-24 | 2016-04-28 | Hewlett Packard Enterprise Development Lp | Optical interconnect device |
| WO2016122490A1 (en) | 2015-01-28 | 2016-08-04 | Hewlett Packard Enterprise Development Lp | Laser-written optical routing systems and method |
| DE102018209368B4 (de) | 2018-06-12 | 2020-01-02 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Optik für Sende- und/oder Empfangs-Element, Kommunikationsmodul, Arrays aus Kommunikationsmodulen, System aus mehreren Kommunikationsmodulen und Verfahren zur Herstellung einer Optik |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3138968A1 (de) * | 1981-09-30 | 1983-04-14 | Siemens AG, 1000 Berlin und 8000 München | Optische steuervorrichtung zum steuern der in einem optischen wellenleiter gefuehrten strahlung, insbesondere optischer schalter |
| US4988157A (en) * | 1990-03-08 | 1991-01-29 | Bell Communications Research, Inc. | Optical switch using bubbles |
| US5280012A (en) * | 1990-07-06 | 1994-01-18 | Advanced Technology Materials Inc. | Method of forming a superconducting oxide layer by MOCVD |
| US5453494A (en) * | 1990-07-06 | 1995-09-26 | Advanced Technology Materials, Inc. | Metal complex source reagents for MOCVD |
| CA2058794C (en) * | 1991-01-08 | 1996-06-18 | Tsuneo Kanai | Automated optical mdf system |
| JP2994807B2 (ja) * | 1991-08-29 | 1999-12-27 | 日立電線株式会社 | 導波路型光スイッチ |
| JP2871911B2 (ja) * | 1991-09-30 | 1999-03-17 | 日立電線株式会社 | 導波路型光スイッチ |
| JPH0894866A (ja) * | 1994-09-26 | 1996-04-12 | Hitachi Cable Ltd | 導波路型光スイッチ及びその製造方法 |
| KR0163738B1 (ko) * | 1994-12-19 | 1999-04-15 | 양승택 | 히터 매립된 평면 도파로형 광스위치의 제조방법 |
| JP3319248B2 (ja) * | 1995-11-08 | 2002-08-26 | 日本電信電話株式会社 | 光スイッチ |
| US5699462A (en) * | 1996-06-14 | 1997-12-16 | Hewlett-Packard Company | Total internal reflection optical switches employing thermal activation |
| US6055344A (en) * | 1998-02-18 | 2000-04-25 | Hewlett-Packard Company | Fabrication of a total internal reflection optical switch with vertical fluid fill-holes |
| US6229640B1 (en) * | 1999-08-11 | 2001-05-08 | Adc Telecommunications, Inc. | Microelectromechanical optical switch and method of manufacture thereof |
-
1998
- 1998-02-18 US US09/025,892 patent/US6055344A/en not_active Expired - Lifetime
- 1998-09-11 EP EP98117267A patent/EP0938013B1/en not_active Expired - Lifetime
- 1998-09-11 DE DE69804933T patent/DE69804933T2/de not_active Expired - Lifetime
-
1999
- 1999-02-16 JP JP03692699A patent/JP4330197B2/ja not_active Expired - Fee Related
-
2000
- 2000-04-14 US US09/549,741 patent/US6324316B1/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP0938013A2 (en) | 1999-08-25 |
| EP0938013B1 (en) | 2002-04-17 |
| EP0938013A3 (en) | 1999-09-22 |
| DE69804933D1 (de) | 2002-05-23 |
| JPH11271651A (ja) | 1999-10-08 |
| US6324316B1 (en) | 2001-11-27 |
| US6055344A (en) | 2000-04-25 |
| JP4330197B2 (ja) | 2009-09-16 |
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