DE69734267D1 - Verfahren zur Herstellung eines optischen Ablenkers - Google Patents
Verfahren zur Herstellung eines optischen AblenkersInfo
- Publication number
- DE69734267D1 DE69734267D1 DE69734267T DE69734267T DE69734267D1 DE 69734267 D1 DE69734267 D1 DE 69734267D1 DE 69734267 T DE69734267 T DE 69734267T DE 69734267 T DE69734267 T DE 69734267T DE 69734267 D1 DE69734267 D1 DE 69734267D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- optical deflector
- deflector
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1221—Basic optical elements, e.g. light-guiding paths made from organic materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12104—Mirror; Reflectors or the like
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Engineering (AREA)
- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20227596 | 1996-07-31 | ||
JP4360697 | 1997-02-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69734267D1 true DE69734267D1 (de) | 2006-02-09 |
DE69734267T2 DE69734267T2 (de) | 2006-06-14 |
Family
ID=26383407
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69734267T Expired - Lifetime DE69734267T2 (de) | 1996-07-31 | 1997-07-29 | Verfahren zur Herstellung eines optischen Ablenkers |
Country Status (4)
Country | Link |
---|---|
US (1) | US5999670A (de) |
EP (1) | EP0822430B1 (de) |
KR (1) | KR100236432B1 (de) |
DE (1) | DE69734267T2 (de) |
Families Citing this family (72)
Publication number | Priority date | Publication date | Assignee | Title |
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TW373083B (en) * | 1996-12-20 | 1999-11-01 | Corning Inc | Reflective coupling array for optical waveguide |
US6432364B1 (en) * | 1998-07-06 | 2002-08-13 | Suzuki Motor Corporation | SPR sensor cell and immunoassay apparatus using the same |
JP2000227524A (ja) * | 1999-02-05 | 2000-08-15 | Sony Corp | 光導波装置および光送受信装置、ならびにそれらの製造方法 |
JP2000292656A (ja) * | 1999-04-01 | 2000-10-20 | Sony Corp | 光伝送装置および光伝送装置の製造方法 |
JP3426544B2 (ja) * | 1999-08-30 | 2003-07-14 | 理化学研究所 | 中性子レンズ部材の加工装置及び方法 |
US6351576B1 (en) * | 1999-12-23 | 2002-02-26 | Intel Corporation | Optical clocking distribution using diffractive metal mirrors and metal via waveguides |
GB0000415D0 (en) | 2000-01-11 | 2000-03-01 | British Aerospace | Improvements relating to interfacing embedded optical transmission structures |
DE10002329A1 (de) | 2000-01-20 | 2001-08-02 | Infineon Technologies Ag | Herstellungsverfahren für eine optische Sende-Baugruppe |
EP1150145A1 (de) * | 2000-04-27 | 2001-10-31 | British Aerospace Public Limited Company | Kopplungsanordnungen von optischen Übertragungssystemen |
EP1150150A1 (de) * | 2000-04-27 | 2001-10-31 | British Aerospace Public Limited Company | Kopplungsanordnungen von optischen Übertragungssystemen |
US6757467B1 (en) * | 2000-07-25 | 2004-06-29 | Optical Air Data Systems, Lp | Optical fiber system |
JP3902394B2 (ja) | 2000-10-23 | 2007-04-04 | 日本電気株式会社 | 光通信モジュール及び光通信装置 |
JP2002169042A (ja) * | 2000-11-30 | 2002-06-14 | Nec Corp | 光導波路結合構造、光導波路及びその製造方法、並びに光導波路付き光素子部品及びその製造方法 |
US20020172459A1 (en) * | 2001-03-16 | 2002-11-21 | Bailey Timothy J. | Method and apparatus for coupling light into an optical waveguide |
KR100439088B1 (ko) * | 2001-09-14 | 2004-07-05 | 한국과학기술원 | 상호 자기 정렬된 다수의 식각 홈을 가지는 광결합 모듈및 그 제작방법 |
US7006781B2 (en) * | 2001-11-14 | 2006-02-28 | Matsushita Electric Industrial Co., Ltd. | Heating roller, heating belt, image heating device, and image forming device |
GB0127689D0 (en) * | 2001-11-19 | 2002-01-09 | Denselight Semiconductors Pte | Wafer scale L-I-V probing |
GB2385146A (en) * | 2002-02-07 | 2003-08-13 | Qinetiq Ltd | Mask used in alignment of optical fibre and integral waveguide component |
KR100476685B1 (ko) * | 2002-02-28 | 2005-03-18 | (주) 파이오닉스 | 광결합 모듈 어셈블리 및 그의 패키징 방법 |
US7082238B2 (en) * | 2002-03-19 | 2006-07-25 | Avago Technologies | Self-aligning optical interconnect utilizing conformal materials |
GB0208497D0 (en) | 2002-04-12 | 2002-05-22 | Point Source Ltd | Optical fibres |
JP3883901B2 (ja) * | 2002-04-23 | 2007-02-21 | 三菱電機株式会社 | 光路変換デバイスおよびその製造方法 |
US7039263B2 (en) * | 2002-09-24 | 2006-05-02 | Intel Corporation | Electrooptic assembly |
CN100555670C (zh) * | 2002-10-10 | 2009-10-28 | Hoya美国公司 | 有内反射器的半导体光电检测器及其制作方法 |
US20040071385A1 (en) * | 2002-10-15 | 2004-04-15 | Lee Bruce W. | PCB incorporating integral optical layers |
US6934455B2 (en) * | 2002-12-24 | 2005-08-23 | Intel Corporation | Waveguides with optical monitoring |
JP2004233551A (ja) * | 2003-01-29 | 2004-08-19 | Sony Corp | 光通信モジュールおよびコネクタ |
US7099360B2 (en) | 2003-02-03 | 2006-08-29 | Intel Corporation | Method and apparatus to generate and monitor optical signals and control power levels thereof in a planar lightwave circuit |
US7095928B2 (en) * | 2003-04-29 | 2006-08-22 | Xponent Photonics Inc | Surface-mounted photodetector for an optical waveguide |
JP4175183B2 (ja) * | 2003-06-04 | 2008-11-05 | 富士ゼロックス株式会社 | 高分子光導波路の製造方法 |
JP2005062557A (ja) * | 2003-08-15 | 2005-03-10 | Canon Inc | 光素子装置、それを用いた二次元光導波路素子及び光電融合配線基板 |
US7058266B2 (en) * | 2003-08-28 | 2006-06-06 | Sony Corporation | Optical waveguide module |
US6952508B2 (en) * | 2003-09-03 | 2005-10-04 | Stratos International, Inc. | Low-profile back plane interconnection device |
US7356206B2 (en) * | 2003-09-15 | 2008-04-08 | Infinera Corporation | Integrated optics polarization beam splitter using form birefringence |
US7324723B2 (en) * | 2003-10-06 | 2008-01-29 | Mitsui Chemicals, Inc. | Optical waveguide having specular surface formed by laser beam machining |
WO2005045940A1 (ja) * | 2003-11-11 | 2005-05-19 | Ngk Insulators, Ltd. | 光素子及び光モジュール |
US20050129367A1 (en) * | 2003-12-12 | 2005-06-16 | The Boeing Company, A Delaware Corporation | Method and apparatus for angled fiber optical attenuation |
FR2863728B1 (fr) * | 2003-12-16 | 2006-06-09 | Commissariat Energie Atomique | Dispositif de commutation optique integre, accordable en longueur d'onde |
JP4225207B2 (ja) * | 2004-01-23 | 2009-02-18 | 富士ゼロックス株式会社 | 高分子光導波路の製造方法 |
JP2005321560A (ja) * | 2004-05-07 | 2005-11-17 | Fuji Xerox Co Ltd | 受発光素子付き高分子光導波路モジュール |
WO2006009845A2 (en) * | 2004-06-18 | 2006-01-26 | University Of Delaware | Method and apparatus for coupling spatial light modulators |
WO2006009846A2 (en) * | 2004-06-18 | 2006-01-26 | University Of Delaware | A method and apparatus for free-space optical interconnects between arbitrary locations in a field using lenses, steering elements and a curved reflecting surface |
JP2006011210A (ja) * | 2004-06-29 | 2006-01-12 | Fuji Xerox Co Ltd | 発光素子及びモニター用受光素子付き高分子光導波路モジュール |
JP2006017885A (ja) * | 2004-06-30 | 2006-01-19 | Fuji Xerox Co Ltd | 導波路フィルム型光モジュール、光導波路フィルム及びその製造方法 |
JP4447428B2 (ja) * | 2004-10-19 | 2010-04-07 | 新光電気工業株式会社 | 光導波路の製造方法 |
US20070189031A1 (en) * | 2006-02-14 | 2007-08-16 | Delmar Stephen A | Method for making an abraded optical fiber illumination means |
US7680378B2 (en) * | 2006-03-23 | 2010-03-16 | Medeikon Corporation | Low reflection lateral output fiber probe |
KR100999685B1 (ko) * | 2006-04-07 | 2010-12-08 | 오므론 가부시키가이샤 | 광케이블 모듈 |
US20090067799A1 (en) * | 2006-04-26 | 2009-03-12 | Mitsumi Electric Co. Ltd. | Optical Device and Optical Device Manufacturing Method |
JP4825729B2 (ja) * | 2007-05-24 | 2011-11-30 | 日東電工株式会社 | 光導波路デバイスおよびその製造方法 |
JP5018254B2 (ja) * | 2007-06-06 | 2012-09-05 | 日立電線株式会社 | ミラー付き光導波路及びその製造方法 |
CN101755403B (zh) * | 2007-07-12 | 2013-06-19 | 艾迪株式会社 | 具有集成光功率监控器的光纤阵列单元 |
US8761550B2 (en) | 2008-01-31 | 2014-06-24 | Hewlett-Packard Development Company, L.P. | Optical taps for circuit board-mounted optical waveguides |
JP5532929B2 (ja) * | 2008-02-08 | 2014-06-25 | 日立化成株式会社 | 光配線プリント基板の製造方法 |
JP2010078882A (ja) * | 2008-09-25 | 2010-04-08 | Fuji Xerox Co Ltd | 高分子光導波路およびその製造方法 |
JP5109982B2 (ja) * | 2008-10-09 | 2012-12-26 | 日立電線株式会社 | ミラー付き光伝送体の製造方法 |
JP2010102107A (ja) * | 2008-10-23 | 2010-05-06 | Nitto Denko Corp | 光導波路およびその製造方法 |
JP5147646B2 (ja) * | 2008-10-31 | 2013-02-20 | 新光電気工業株式会社 | 光導波路の製造方法 |
JP5498219B2 (ja) | 2009-03-26 | 2014-05-21 | パナソニック株式会社 | ミラー面を有する光導波路の製造方法及び光電複合配線板 |
CN102135649B (zh) * | 2010-08-04 | 2012-04-18 | 华为技术有限公司 | 光模块制造方法及光模块 |
JP2012208306A (ja) * | 2011-03-29 | 2012-10-25 | Nitto Denko Corp | 光電気混載基板およびその製法 |
TWI553366B (zh) * | 2012-05-22 | 2016-10-11 | 鴻海精密工業股份有限公司 | 光訊號傳輸裝置 |
JP2015530739A (ja) | 2012-08-03 | 2015-10-15 | ホーヤ コーポレイション ユーエスエイHoya Corporation Usa | 光電子コンポーネント、光学コンポーネント又はフォトニック・コンポーネント用のサブマウント |
US10284300B2 (en) | 2013-06-06 | 2019-05-07 | Acacia Communications, Inc. | Monolithic silicon coherent transceiver with integrated laser and gain elements |
JP6380973B2 (ja) * | 2014-06-16 | 2018-08-29 | 日東電工株式会社 | 光学式センサ |
CN106199854A (zh) * | 2015-05-25 | 2016-12-07 | 源杰科技股份有限公司 | 光学连接模块 |
CN105116499A (zh) * | 2015-08-26 | 2015-12-02 | 中国科学院微电子研究所 | 一种基于多模平面光波导耦合的并行光模块 |
JP7112838B2 (ja) * | 2016-09-30 | 2022-08-04 | 住友化学株式会社 | 光学フィルム及びそれを用いた積層フィルム、並びに光学フィルムの製造方法 |
US10782468B2 (en) * | 2016-10-13 | 2020-09-22 | Stmicroelectronics Sa | Method for manufacturing an optical device |
JP7070572B2 (ja) * | 2017-08-16 | 2022-05-18 | Agc株式会社 | ポリマー光導波路 |
IT201700105367A1 (it) * | 2017-09-20 | 2019-03-20 | St Microelectronics Srl | Procedimento per produrre guide d'onda ottiche, sistema e dispositivo corrispondenti |
JP7060798B2 (ja) | 2018-05-30 | 2022-04-27 | 日亜化学工業株式会社 | 光源装置 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH599558A5 (de) * | 1976-03-16 | 1978-05-31 | Patelhold Patentverwertung | |
JPS5598713A (en) * | 1979-01-24 | 1980-07-28 | Hitachi Ltd | Optical connector and production thereof |
US4346961A (en) * | 1979-04-02 | 1982-08-31 | The Boeing Company | Fiber optic T coupler |
JPS58205117A (ja) * | 1982-05-26 | 1983-11-30 | Hitachi Ltd | 光コネクタ |
JPS60138510A (ja) * | 1983-12-27 | 1985-07-23 | Takashi Mori | 光分岐装置 |
JPS60260904A (ja) * | 1984-06-08 | 1985-12-24 | Mitsubishi Rayon Co Ltd | プラスチツク系光フアイバ−の端面処理方法 |
JPH0669669B2 (ja) * | 1985-12-20 | 1994-09-07 | 日本精工株式会社 | 超砥粒超仕上砥石 |
FR2593293B1 (fr) * | 1986-01-21 | 1990-05-18 | France Etat | Coupleur optique en te perfectionne pour des applications a des reseaux optiques en bus et bus optique muni d'une pluralite de tels coupleurs |
JPS63191111A (ja) * | 1987-02-04 | 1988-08-08 | Nippon Telegr & Teleph Corp <Ntt> | 光結合器 |
JPH01274966A (ja) * | 1988-04-28 | 1989-11-02 | Tokyo Jiki Insatsu Kk | 研磨具 |
CA2026042C (en) * | 1989-09-27 | 1996-02-27 | Saburo Imamura | Plate plastics optical waveguide |
JPH0716887B2 (ja) * | 1990-07-23 | 1995-03-01 | 関東理化工業株式会社 | 切断刃およびその製造方法 |
CA2052110A1 (en) * | 1990-11-16 | 1992-05-17 | Eric C. Angel | Termination of optical fibers |
FR2670909B1 (fr) * | 1990-12-21 | 1994-02-11 | Thomson Csf | Dispositif de connexion optique et appareil de traitement de donnees muni de moyens de transmission optique. |
JPH04330406A (ja) * | 1991-05-02 | 1992-11-18 | Nec Corp | 光ジャンパー |
DE4402166B4 (de) * | 1993-05-04 | 2005-04-21 | Daimlerchrysler Ag | Endstellenmodul für bidirektionale optische Signalübertragung und Verfahren zu dessen Herstellung |
JP3312187B2 (ja) * | 1994-03-28 | 2002-08-05 | ▲禎▼二 内田 | 光部品加工方法 |
EP0678904A1 (de) * | 1994-04-12 | 1995-10-25 | Lsi Logic Corporation | Wafer-Schneidverfahren durch Mehrfachschnitte |
US5666448A (en) * | 1995-09-22 | 1997-09-09 | Rockwell International Corporation | Variable splitting optical coupler |
US5757994A (en) * | 1995-09-22 | 1998-05-26 | Boeing North American, Inc. | Three-part optical coupler |
-
1997
- 1997-07-19 KR KR1019970036050A patent/KR100236432B1/ko not_active IP Right Cessation
- 1997-07-29 DE DE69734267T patent/DE69734267T2/de not_active Expired - Lifetime
- 1997-07-29 EP EP97113008A patent/EP0822430B1/de not_active Expired - Lifetime
- 1997-07-30 US US08/903,067 patent/US5999670A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0822430A3 (de) | 1999-04-28 |
EP0822430A2 (de) | 1998-02-04 |
DE69734267T2 (de) | 2006-06-14 |
US5999670A (en) | 1999-12-07 |
EP0822430B1 (de) | 2005-09-28 |
KR980010580A (ko) | 1998-04-30 |
KR100236432B1 (ko) | 1999-12-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |