DE69734047D1 - Temperatur-unempfindliches kapazitives Element auf Basis von Tantaloxid und Aluminumoxid - Google Patents

Temperatur-unempfindliches kapazitives Element auf Basis von Tantaloxid und Aluminumoxid

Info

Publication number
DE69734047D1
DE69734047D1 DE69734047T DE69734047T DE69734047D1 DE 69734047 D1 DE69734047 D1 DE 69734047D1 DE 69734047 T DE69734047 T DE 69734047T DE 69734047 T DE69734047 T DE 69734047T DE 69734047 D1 DE69734047 D1 DE 69734047D1
Authority
DE
Germany
Prior art keywords
insensitive
temperature
capacitive element
element based
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69734047T
Other languages
English (en)
Other versions
DE69734047T2 (de
Inventor
Robert Joseph Cava
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nokia of America Corp
Original Assignee
Lucent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lucent Technologies Inc filed Critical Lucent Technologies Inc
Application granted granted Critical
Publication of DE69734047D1 publication Critical patent/DE69734047D1/de
Publication of DE69734047T2 publication Critical patent/DE69734047T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H01L29/92—Capacitors having potential barriers
    • H01L29/94—Metal-insulator-semiconductors, e.g. MOS

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Insulating Materials (AREA)
  • Ceramic Capacitors (AREA)
  • Semiconductor Integrated Circuits (AREA)
DE69734047T 1996-10-22 1997-10-14 Temperatur-unempfindliches kapazitives Element auf Basis von Tantaloxid und Aluminiumoxid Expired - Lifetime DE69734047T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/735,170 US5754392A (en) 1996-10-22 1996-10-22 Article comprising a relatively temperature-insensitive Ta-oxide based capacitive element
US735170 1996-10-22

Publications (2)

Publication Number Publication Date
DE69734047D1 true DE69734047D1 (de) 2005-09-29
DE69734047T2 DE69734047T2 (de) 2006-03-30

Family

ID=24954652

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69734047T Expired - Lifetime DE69734047T2 (de) 1996-10-22 1997-10-14 Temperatur-unempfindliches kapazitives Element auf Basis von Tantaloxid und Aluminiumoxid

Country Status (4)

Country Link
US (1) US5754392A (de)
EP (1) EP0838847B1 (de)
JP (1) JPH10182221A (de)
DE (1) DE69734047T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100451501B1 (ko) * 1998-12-30 2004-12-31 주식회사 하이닉스반도체 반도체메모리소자의캐패시터형성방법
KR100359860B1 (ko) * 1998-12-31 2003-02-20 주식회사 하이닉스반도체 반도체 소자의 캐패시터 형성방법
JP3624822B2 (ja) 2000-11-22 2005-03-02 株式会社日立製作所 半導体装置およびその製造方法
KR100444603B1 (ko) * 2001-12-22 2004-08-16 주식회사 하이닉스반도체 탄탈륨 펜타 옥사이드-알루미늄 옥사이드 유전체막 제조방법 및 이를 적용한 반도체 소자
KR100444299B1 (ko) * 2001-12-26 2004-08-16 주식회사 하이닉스반도체 반도체 소자의 캐패시터 제조 방법
KR101677101B1 (ko) 2009-03-23 2016-11-17 도요 알루미늄 가부시키가이샤 전극 구조체, 콘덴서, 전지 및 전극 구조체의 제조 방법
KR20130076793A (ko) 2010-04-07 2013-07-08 도요 알루미늄 가부시키가이샤 전극 구조체의 제조 방법, 전극 구조체 및 콘덴서
GB201223375D0 (en) 2012-12-24 2013-02-06 Metalysis Ltd Method and apparatus for producing metal by electrolytic reduction
GB201411433D0 (en) 2014-06-26 2014-08-13 Metalysis Ltd Method and apparatus for electrolytic reduction of a feedstock comprising oxygen and a first metal
GB201411430D0 (en) 2014-06-26 2014-08-13 Metalysis Ltd Method of producing metallic tanralum

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1521137A (en) * 1974-11-07 1978-08-16 Tdk Electronics Co Ltd Ceramic dielectric composition
US4223369A (en) * 1978-07-03 1980-09-16 Sprague Electric Company Monolithic capacitor with low firing zirconate and nickel electrodes
US4219866A (en) * 1979-01-12 1980-08-26 Sprague Electric Company Ceramic capacitor having a dielectric of (Pb,La) (Zr,Ti)O3 and BaTiO3
US4812426A (en) * 1984-08-21 1989-03-14 Denki Kagaku Kogyo Kabushiki Kaisha Lead-containing oxide powder

Also Published As

Publication number Publication date
DE69734047T2 (de) 2006-03-30
EP0838847A3 (de) 2004-08-18
JPH10182221A (ja) 1998-07-07
EP0838847A2 (de) 1998-04-29
EP0838847B1 (de) 2005-08-24
US5754392A (en) 1998-05-19

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Legal Events

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