DE69729905D1 - Thyristor mit reduzierter Minoritätsträger-Lebensdauer und Verfahren zur Herstellung desselben - Google Patents
Thyristor mit reduzierter Minoritätsträger-Lebensdauer und Verfahren zur Herstellung desselbenInfo
- Publication number
- DE69729905D1 DE69729905D1 DE69729905T DE69729905T DE69729905D1 DE 69729905 D1 DE69729905 D1 DE 69729905D1 DE 69729905 T DE69729905 T DE 69729905T DE 69729905 T DE69729905 T DE 69729905T DE 69729905 D1 DE69729905 D1 DE 69729905D1
- Authority
- DE
- Germany
- Prior art keywords
- thyristor
- producing
- same
- minority carrier
- carrier life
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1012—Base regions of thyristors
- H01L29/1016—Anode base regions of thyristors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/30—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by physical imperfections; having polished or roughened surface
- H01L29/32—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by physical imperfections; having polished or roughened surface the imperfections being within the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/74—Thyristor-type devices, e.g. having four-zone regenerative action
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6136496 | 1996-03-18 | ||
JP06136496A JP3394383B2 (ja) | 1996-03-18 | 1996-03-18 | サイリスタの製造方法およびサイリスタ |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69729905D1 true DE69729905D1 (de) | 2004-08-26 |
DE69729905T2 DE69729905T2 (de) | 2005-08-25 |
Family
ID=13169046
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69729905T Expired - Lifetime DE69729905T2 (de) | 1996-03-18 | 1997-03-17 | Thyristor mit reduzierter Minoritätsträger-Lebensdauer und Verfahren zur Herstellung desselben |
Country Status (4)
Country | Link |
---|---|
US (1) | US6163040A (de) |
EP (1) | EP0797257B1 (de) |
JP (1) | JP3394383B2 (de) |
DE (1) | DE69729905T2 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4267083B2 (ja) | 1998-06-01 | 2009-05-27 | 三菱電機株式会社 | ダイオード |
WO2000016406A1 (fr) * | 1998-09-10 | 2000-03-23 | Mitsubishi Denki Kabushiki Kaisha | Dispositif semi-conducteur |
DE10048437A1 (de) * | 2000-09-29 | 2002-04-18 | Eupec Gmbh & Co Kg | Verfahren zum Herstellen eines Körpers aus Halbleitermaterial mit reduzierter mittlerer freier Weglänge und mit dem Verfahren hergestellter Körper |
DE10048345A1 (de) * | 2000-09-29 | 2002-05-16 | Eupec Gmbh & Co Kg | Körper aus Halbleitermaterial mit reduzierter mittlerer freier Weglänge |
JP4539011B2 (ja) * | 2002-02-20 | 2010-09-08 | 富士電機システムズ株式会社 | 半導体装置 |
JP2004288680A (ja) | 2003-03-19 | 2004-10-14 | Mitsubishi Electric Corp | 圧接型半導体装置 |
DE102004004045B4 (de) * | 2004-01-27 | 2009-04-02 | Infineon Technologies Ag | Halbleiterbauelement mit temporärem Feldstoppbereich und Verfahren zu dessen Herstellung |
JP5358189B2 (ja) * | 2006-01-20 | 2013-12-04 | インフィネオン テクノロジーズ オーストリア アクチエンゲゼルシャフト | 酸素含有半導体ウェハの処理方法 |
DE102006046844B4 (de) * | 2006-10-02 | 2013-08-01 | Infineon Technologies Austria Ag | Leistungshalbleiterbauelement mit Feldstoppzone und Verfahren zur Herstellung eines solchen Leistungshalbleiterbauelements |
US7687891B2 (en) * | 2007-05-14 | 2010-03-30 | Infineon Technologies Ag | Diode having one or more zones of a first conductivity type and one or more zones of a second conductivity type each located within a layer of the second conductivity type |
CN102779840B (zh) * | 2012-07-18 | 2014-10-15 | 电子科技大学 | 一种具有终端深能级杂质层的igbt |
CN102779848A (zh) * | 2012-07-18 | 2012-11-14 | 电子科技大学 | 一种具有深能级掺杂元素漂移区的晶闸管 |
JP2017183403A (ja) * | 2016-03-29 | 2017-10-05 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4056408A (en) * | 1976-03-17 | 1977-11-01 | Westinghouse Electric Corporation | Reducing the switching time of semiconductor devices by nuclear irradiation |
DE3117202A1 (de) * | 1981-04-30 | 1982-11-18 | Brown, Boveri & Cie Ag, 6800 Mannheim | Verfahren zum einstellen der lebensdauer der minoritaetsladungstraeger in halbleiterschaltern mit protonenstrahlen |
US4752818A (en) * | 1985-09-28 | 1988-06-21 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Semiconductor device with multiple recombination center layers |
JPS649658A (en) * | 1987-07-01 | 1989-01-12 | Mitsubishi Electric Corp | Gto thyristor |
US5510274A (en) * | 1987-08-19 | 1996-04-23 | Mitsubishi Denki Kabushiki Kaisha | Method of controlling a carrier lifetime in a semiconductor switching device |
JPH07107935B2 (ja) * | 1988-02-04 | 1995-11-15 | 株式会社東芝 | 半導体装置 |
US5182626A (en) * | 1989-09-20 | 1993-01-26 | Mitsubishi Denki Kabushiki Kaisha | Insulated gate bipolar transistor and method of manufacturing the same |
JPH03245569A (ja) * | 1990-02-23 | 1991-11-01 | Toshiba Corp | 半導体装置の製造方法 |
US5160958A (en) * | 1990-03-14 | 1992-11-03 | Minolta Camera Co., Ltd. | Image projecting apparatus |
JP3210013B2 (ja) * | 1991-03-27 | 2001-09-17 | シーメンス アクチエンゲゼルシヤフト | 調整可能なブレークオーバ電圧を有するサイリスタおよびその製造方法 |
DE4223914C2 (de) * | 1992-06-30 | 1996-01-25 | Fraunhofer Ges Forschung | Verfahren zum Herstellen eines vertikalen Leistungsbauelementes mit reduzierter Minoritätsträgerlebensdauer in dessen Driftstrecke |
US5981981A (en) * | 1993-10-13 | 1999-11-09 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device including a bipolar structure |
JP2883017B2 (ja) * | 1995-02-20 | 1999-04-19 | ローム株式会社 | 半導体装置およびその製法 |
-
1996
- 1996-03-18 JP JP06136496A patent/JP3394383B2/ja not_active Expired - Fee Related
-
1997
- 1997-03-17 EP EP97104524A patent/EP0797257B1/de not_active Expired - Lifetime
- 1997-03-17 US US08/818,886 patent/US6163040A/en not_active Expired - Lifetime
- 1997-03-17 DE DE69729905T patent/DE69729905T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP3394383B2 (ja) | 2003-04-07 |
DE69729905T2 (de) | 2005-08-25 |
EP0797257A3 (de) | 1999-08-18 |
EP0797257A2 (de) | 1997-09-24 |
JPH09260640A (ja) | 1997-10-03 |
US6163040A (en) | 2000-12-19 |
EP0797257B1 (de) | 2004-07-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |