DE69725020D1 - Druckwandler - Google Patents
DruckwandlerInfo
- Publication number
- DE69725020D1 DE69725020D1 DE69725020T DE69725020T DE69725020D1 DE 69725020 D1 DE69725020 D1 DE 69725020D1 DE 69725020 T DE69725020 T DE 69725020T DE 69725020 T DE69725020 T DE 69725020T DE 69725020 D1 DE69725020 D1 DE 69725020D1
- Authority
- DE
- Germany
- Prior art keywords
- measuring element
- pct
- measuring
- cavity
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0002—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using variations in ohmic resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Glass Compositions (AREA)
- Control Of Motors That Do Not Use Commutators (AREA)
- Eye Examination Apparatus (AREA)
- Threshing Machine Elements (AREA)
- Apparatus For Radiation Diagnosis (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NO960779 | 1996-02-27 | ||
NO960779A NO304328B1 (no) | 1996-02-27 | 1996-02-27 | TrykkmÕler |
PCT/NO1997/000053 WO1997032190A1 (en) | 1996-02-27 | 1997-02-20 | Pressure sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69725020D1 true DE69725020D1 (de) | 2003-10-23 |
DE69725020T2 DE69725020T2 (de) | 2004-08-12 |
Family
ID=19899085
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69725020T Expired - Lifetime DE69725020T2 (de) | 1996-02-27 | 1997-02-20 | Druckwandler |
Country Status (10)
Country | Link |
---|---|
US (1) | US6145383A (de) |
EP (1) | EP1012554B1 (de) |
JP (1) | JP2000506261A (de) |
KR (1) | KR100433969B1 (de) |
AT (1) | ATE250214T1 (de) |
AU (1) | AU2106497A (de) |
DE (1) | DE69725020T2 (de) |
DK (1) | DK1012554T3 (de) |
NO (1) | NO304328B1 (de) |
WO (1) | WO1997032190A1 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NO314963B1 (no) * | 2001-07-13 | 2003-06-16 | Presens As | Trykksensor |
WO2006048278A1 (en) * | 2004-11-03 | 2006-05-11 | Basell Polyolefine Gmbh | Pressure transducer |
US8429976B2 (en) | 2010-05-19 | 2013-04-30 | Schlumberger Technology Corporation | Low cost resonator-based pressure transducer |
US9038263B2 (en) | 2011-01-13 | 2015-05-26 | Delaware Capital Formation, Inc. | Thickness shear mode resonator sensors and methods of forming a plurality of resonator sensors |
US9493133B2 (en) | 2014-05-20 | 2016-11-15 | Ford Global Technologies, Llc | Fastening and sensing apparatus |
RU178898U1 (ru) * | 2017-12-12 | 2018-04-23 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Московский технологический университет" | Емкостной датчик давления с алмазной мембраной |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3645136A (en) * | 1970-04-15 | 1972-02-29 | Charles W Calhoun | Fluid pressure measuring device |
CH576132A5 (en) * | 1975-03-14 | 1976-05-31 | Kautzky Hans | Pressure sensor for pressure or vacuum of fluids - has improved sensitivity and resistance to stress |
JPS5814977B2 (ja) * | 1976-09-01 | 1983-03-23 | 松岡 信 | ペンシル型高温高圧用インジケ−タ |
US4295117A (en) * | 1980-09-11 | 1981-10-13 | General Motors Corporation | Pressure sensor assembly |
ATE17523T1 (de) * | 1982-04-06 | 1986-02-15 | Kistler Instrumente Ag | Hochdruckaufnehmer. |
IT1153144B (it) * | 1982-07-30 | 1987-01-14 | Cise Spa | Trasduttore perfezionato per la misura della pressione di un fluido in particolare un fluido aggressivo e ad elevata temperatura |
US4535631A (en) * | 1982-09-29 | 1985-08-20 | Schlumberger Technology Corporation | Surface acoustic wave sensors |
US4481497A (en) * | 1982-10-27 | 1984-11-06 | Kulite Semiconductor Products, Inc. | Transducer structures employing ceramic substrates and diaphragms |
US4542650A (en) * | 1983-08-26 | 1985-09-24 | Innovus | Thermal mass flow meter |
JPS62157543A (ja) * | 1985-12-27 | 1987-07-13 | シユラムバ−ガ− オ−バ−シ−ズ ソシエダ アノニマ | 圧力センサ |
JPS62131453U (de) * | 1986-02-10 | 1987-08-19 | ||
DE3702412A1 (de) * | 1987-01-28 | 1988-08-18 | Philips Patentverwaltung | Druckaufnehmer mit einem siliziumkoerper |
EP0333091B1 (de) * | 1988-03-15 | 1992-10-21 | Pfister GmbH | Elektrischer Druck-, Schwingungs- und/oder Beschleunigungswandler |
US4864463A (en) * | 1988-04-19 | 1989-09-05 | Allied-Signal Inc. | Capacitive pressure sensor |
FR2638524B1 (fr) * | 1988-10-27 | 1994-10-28 | Schlumberger Prospection | Capteur de pression utilisable dans les puits de petrole |
DD278407A1 (de) * | 1988-12-20 | 1990-05-02 | Teltov Geraete Regler | Hochdrucksensor |
JPH04141139A (ja) * | 1990-10-03 | 1992-05-14 | Aisin Seiki Co Ltd | カテーテル |
JPH0518837A (ja) * | 1991-07-12 | 1993-01-26 | Mitsubishi Electric Corp | 半導体圧力センサ |
JPH0777470A (ja) * | 1993-09-08 | 1995-03-20 | Toyoda Mach Works Ltd | 半導体圧力センサおよび製造方法 |
US5483834A (en) * | 1993-09-20 | 1996-01-16 | Rosemount Inc. | Suspended diaphragm pressure sensor |
NO179651C (no) * | 1994-03-07 | 1996-11-20 | Sinvent As | Trykkmåler |
JPH07335909A (ja) * | 1994-06-10 | 1995-12-22 | Fuji Electric Co Ltd | 静電容量型センサ及びその製造方法 |
US5637802A (en) * | 1995-02-28 | 1997-06-10 | Rosemount Inc. | Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates |
JPH08247873A (ja) * | 1995-03-13 | 1996-09-27 | Tokai Rika Co Ltd | 圧力センサ |
-
1996
- 1996-02-27 NO NO960779A patent/NO304328B1/no not_active IP Right Cessation
-
1997
- 1997-02-20 KR KR10-1998-0706684A patent/KR100433969B1/ko not_active IP Right Cessation
- 1997-02-20 DE DE69725020T patent/DE69725020T2/de not_active Expired - Lifetime
- 1997-02-20 AT AT97906344T patent/ATE250214T1/de not_active IP Right Cessation
- 1997-02-20 AU AU21064/97A patent/AU2106497A/en not_active Abandoned
- 1997-02-20 EP EP97906344A patent/EP1012554B1/de not_active Expired - Lifetime
- 1997-02-20 US US09/125,775 patent/US6145383A/en not_active Expired - Lifetime
- 1997-02-20 JP JP9530839A patent/JP2000506261A/ja active Pending
- 1997-02-20 DK DK97906344T patent/DK1012554T3/da active
- 1997-02-20 WO PCT/NO1997/000053 patent/WO1997032190A1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
US6145383A (en) | 2000-11-14 |
AU2106497A (en) | 1997-09-16 |
JP2000506261A (ja) | 2000-05-23 |
EP1012554A1 (de) | 2000-06-28 |
KR100433969B1 (ko) | 2004-07-16 |
ATE250214T1 (de) | 2003-10-15 |
KR19990087282A (ko) | 1999-12-27 |
DK1012554T3 (da) | 2003-11-03 |
EP1012554B1 (de) | 2003-09-17 |
NO960779L (no) | 1997-08-28 |
DE69725020T2 (de) | 2004-08-12 |
WO1997032190A1 (en) | 1997-09-04 |
NO960779D0 (no) | 1996-02-27 |
NO304328B1 (no) | 1998-11-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: PRESENS AS, OSLO/OSLO, NO |