AU2001265986A1 - Capacitive pressure sensor - Google Patents
Capacitive pressure sensorInfo
- Publication number
- AU2001265986A1 AU2001265986A1 AU2001265986A AU6598601A AU2001265986A1 AU 2001265986 A1 AU2001265986 A1 AU 2001265986A1 AU 2001265986 A AU2001265986 A AU 2001265986A AU 6598601 A AU6598601 A AU 6598601A AU 2001265986 A1 AU2001265986 A1 AU 2001265986A1
- Authority
- AU
- Australia
- Prior art keywords
- pressure sensor
- capacitive pressure
- joint
- basic body
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
- G01L9/0048—Details about the mounting of the diaphragm to its support or about the diaphragm edges, e.g. notches, round shapes for stress relief
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
Abstract
A diaphragm 30 and basic body 20 of a pressure sensor 10 are interconnected via a joint F. A groove 26 is provided in the basic body 20 in order to reduce the stress concentration in the region of the joint F.
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2000136433 DE10036433A1 (en) | 2000-07-26 | 2000-07-26 | Capacitive pressure sensor has membrane connected to base body via joint and groove to measurement capacitor connects to end of joint in base body |
DE10036433 | 2000-07-26 | ||
US26403201P | 2001-01-26 | 2001-01-26 | |
US60264032 | 2001-01-26 | ||
PCT/EP2001/005695 WO2002008712A1 (en) | 2000-07-26 | 2001-05-18 | Capacitive pressure sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2001265986A1 true AU2001265986A1 (en) | 2002-02-05 |
Family
ID=26006519
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2001265986A Abandoned AU2001265986A1 (en) | 2000-07-26 | 2001-05-18 | Capacitive pressure sensor |
Country Status (6)
Country | Link |
---|---|
US (1) | US6595064B2 (en) |
EP (1) | EP1305585B1 (en) |
AT (1) | ATE431548T1 (en) |
AU (1) | AU2001265986A1 (en) |
DE (1) | DE50114896D1 (en) |
WO (1) | WO2002008712A1 (en) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6912018B2 (en) * | 1991-11-27 | 2005-06-28 | Inventqjaya Sdn. Bhd. | Electro-optical glazing structures having total-reflection and transparent modes of operation for use in dynamical control of electromagnetic radiation |
AU2003288242A1 (en) * | 2002-12-19 | 2004-07-14 | Endress + Hauser Gmbh + Co. Kg | Differential pressure sensor |
DE10302349B3 (en) * | 2003-01-16 | 2004-09-30 | EBM Brosa Messgeräte GmbH & Co. KG | Force transducers for measuring axial forces |
JP4638659B2 (en) * | 2003-05-21 | 2011-02-23 | 株式会社豊田中央研究所 | Pressure sensor |
WO2005054804A1 (en) * | 2003-12-04 | 2005-06-16 | National University Of Singapore | Capacitive pressure sensor with a cantilever member |
JP2006170893A (en) * | 2004-12-17 | 2006-06-29 | Alps Electric Co Ltd | Electrostatic capacitive pressure sensor |
US8118748B2 (en) * | 2005-04-28 | 2012-02-21 | Medtronic, Inc. | Implantable capacitive pressure sensor system and method |
CN100392808C (en) * | 2006-06-23 | 2008-06-04 | 河北工业大学 | Method for removing integrated circuit wafer surface contaminant by electromechanical process |
DE102009046844A1 (en) * | 2009-11-18 | 2011-05-19 | Endress + Hauser Gmbh + Co. Kg | Capacitive ceramic pressure cell |
US8704538B2 (en) * | 2010-07-01 | 2014-04-22 | Mks Instruments, Inc. | Capacitance sensors |
CH705261A1 (en) | 2011-07-07 | 2013-01-15 | Kistler Holding Ag | A method for joining a membrane to a sensor housing. |
CH705675A1 (en) | 2011-10-20 | 2013-04-30 | Kistler Holding Ag | Hollow-profile pickup. |
CH705762A1 (en) | 2011-11-04 | 2013-05-15 | Kistler Holding Ag | Method for weighing a vehicle, as well as measuring device and measuring chain for this purpose. |
CH705783A1 (en) | 2011-11-18 | 2013-05-31 | Kistler Holding Ag | WIM hollow profile. |
CH706013A1 (en) | 2012-01-11 | 2013-07-15 | Kistler Holding Ag | Sensor package for WIM sensor and WIM sensor. |
US8943895B2 (en) | 2012-09-07 | 2015-02-03 | Dynisco Instruments Llc | Capacitive pressure sensor |
US9103738B2 (en) | 2012-09-07 | 2015-08-11 | Dynisco Instruments Llc | Capacitive pressure sensor with intrinsic temperature compensation |
US8984952B2 (en) | 2012-09-07 | 2015-03-24 | Dynisco Instruments Llc | Capacitive pressure sensor |
JP2014102169A (en) * | 2012-11-20 | 2014-06-05 | Azbil Corp | Pressure sensor chip |
JP5997594B2 (en) * | 2012-11-30 | 2016-09-28 | アズビル株式会社 | Pressure sensor chip |
DE102014109491A1 (en) * | 2014-07-08 | 2016-02-11 | Endress + Hauser Gmbh + Co. Kg | Differential pressure measuring cell |
DE102015103485A1 (en) * | 2015-03-10 | 2016-09-15 | Endress + Hauser Gmbh + Co. Kg | MEMS sensor, esp. Pressure sensor |
JP6293236B1 (en) * | 2016-11-01 | 2018-03-14 | 三菱電機株式会社 | Semiconductor differential pressure sensor and manufacturing method thereof |
EP3839447B1 (en) * | 2019-12-16 | 2023-06-07 | Kistler Holding AG | Wim force transducer and housing profile for such a wim force transducer |
US11692895B2 (en) | 2021-03-30 | 2023-07-04 | Rosemount Aerospace Inc. | Differential pressure sensor |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE206218C (en) | 1908-04-15 | |||
DE1193271B (en) | 1959-11-28 | 1965-05-20 | Continental Elektro Ind Ag | Differential pressure measuring device |
DE2242288A1 (en) | 1972-08-28 | 1974-03-28 | Siemens Ag | OVERLOAD PROTECTION FOR DIFFERENTIAL PRESSURE MEASURING CELLS |
DE2749907A1 (en) | 1976-11-09 | 1978-05-18 | Milton Heath Engineering Ltd | PRESSURE DISPLAY DEVICE |
US4135407A (en) | 1978-04-03 | 1979-01-23 | The Foxboro Company | Method and apparatus for overrange protection of the transducer in a differential pressure transmitter |
DD200441A1 (en) | 1981-07-27 | 1983-05-04 | Gerhard Teichmann | Self-acting, double-sided overprinting for plate spring differential micro-meters |
US4405970A (en) * | 1981-10-13 | 1983-09-20 | United Technologies Corporation | Silicon-glass-silicon capacitive pressure transducer |
DE3222620A1 (en) | 1982-02-15 | 1983-08-25 | Siemens AG, 1000 Berlin und 8000 München | PRESSURE OR PRESSURE DIFFERENCE MEASURING DEVICE WITH A PRESSURE SENSOR DEVICE PROTECTED FROM OVERLOAD |
US4424713A (en) * | 1982-06-11 | 1984-01-10 | General Signal Corporation | Silicon diaphragm capacitive pressure transducer |
GB2124770B (en) * | 1982-08-05 | 1985-12-11 | Airflow Dev Ltd | Differential capacitance pressure transducer |
DE3341735A1 (en) * | 1982-11-25 | 1984-05-30 | Schoppe & Faeser Gmbh, 4950 Minden | Measuring capsule for a differential-pressure measuring transducer |
JPS59148843A (en) * | 1983-02-15 | 1984-08-25 | Matsushita Electric Ind Co Ltd | Electrostatic capacity-type pressure sensor |
US4490773A (en) * | 1983-12-19 | 1984-12-25 | United Technologies Corporation | Capacitive pressure transducer |
JPH061228B2 (en) * | 1987-08-13 | 1994-01-05 | 富士電機株式会社 | Capacitive pressure detector |
US4998179A (en) | 1989-02-28 | 1991-03-05 | United Technologies Corporation | Capacitive semiconductive sensor with hinged diaphragm for planar movement |
JP2639159B2 (en) * | 1989-04-14 | 1997-08-06 | 富士電機株式会社 | Capacitive differential pressure detector |
DE3940709A1 (en) | 1989-12-09 | 1991-06-13 | Degussa | Pressure transducer with separation sensing - has distance piece between relatively displaceable elements |
DE59108247D1 (en) * | 1991-11-30 | 1996-11-07 | Endress Hauser Gmbh Co | Process for stabilizing the surface properties of objects to be heat-treated in vacuum |
DE4206677C1 (en) | 1992-02-28 | 1993-09-02 | Siemens Ag, 80333 Muenchen, De | |
FR2701564B1 (en) | 1993-02-12 | 1995-05-19 | Suisse Electronique Microtech | Capacitive type absolute pressure sensor and method of manufacturing a plurality of such sensors. |
US5381299A (en) * | 1994-01-28 | 1995-01-10 | United Technologies Corporation | Capacitive pressure sensor having a substrate with a curved mesa |
DE19608321C2 (en) | 1996-02-22 | 2002-01-24 | Abb Patent Gmbh | Differential pressure transmitter unit with an overload protection system |
-
2001
- 2001-05-18 DE DE50114896T patent/DE50114896D1/en not_active Expired - Lifetime
- 2001-05-18 AT AT01943401T patent/ATE431548T1/en not_active IP Right Cessation
- 2001-05-18 WO PCT/EP2001/005695 patent/WO2002008712A1/en active Application Filing
- 2001-05-18 EP EP01943401A patent/EP1305585B1/en not_active Expired - Lifetime
- 2001-05-18 AU AU2001265986A patent/AU2001265986A1/en not_active Abandoned
- 2001-05-24 US US09/863,271 patent/US6595064B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US6595064B2 (en) | 2003-07-22 |
ATE431548T1 (en) | 2009-05-15 |
WO2002008712A1 (en) | 2002-01-31 |
EP1305585A1 (en) | 2003-05-02 |
DE50114896D1 (en) | 2009-06-25 |
US20020014124A1 (en) | 2002-02-07 |
EP1305585B1 (en) | 2009-05-13 |
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