DE69717188T2 - Mit Magnetfeldveränderungen arbeitender Bewegungs- und Positionsdetektor - Google Patents

Mit Magnetfeldveränderungen arbeitender Bewegungs- und Positionsdetektor

Info

Publication number
DE69717188T2
DE69717188T2 DE1997617188 DE69717188T DE69717188T2 DE 69717188 T2 DE69717188 T2 DE 69717188T2 DE 1997617188 DE1997617188 DE 1997617188 DE 69717188 T DE69717188 T DE 69717188T DE 69717188 T2 DE69717188 T2 DE 69717188T2
Authority
DE
Germany
Prior art keywords
motion
magnetic field
position detector
field changes
detector working
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1997617188
Other languages
English (en)
Other versions
DE69717188D1 (de
Inventor
Yves De Coulon
Johan Wilhelm Bergqvist
Herve De Lambilly
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
POSIC SA, NEUCHATEL, CH
Original Assignee
Centre Suisse dElectronique et Microtechnique SA CSEM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre Suisse dElectronique et Microtechnique SA CSEM filed Critical Centre Suisse dElectronique et Microtechnique SA CSEM
Publication of DE69717188D1 publication Critical patent/DE69717188D1/de
Application granted granted Critical
Publication of DE69717188T2 publication Critical patent/DE69717188T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/22—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
    • G01D5/2208—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the self-induction of the coils
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
    • G01P3/48—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage
    • G01P3/481—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals
    • G01P3/488—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals delivered by variable reluctance detectors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)
DE1997617188 1996-04-29 1997-04-25 Mit Magnetfeldveränderungen arbeitender Bewegungs- und Positionsdetektor Expired - Lifetime DE69717188T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH01071/96A CH690934A5 (fr) 1996-04-29 1996-04-29 Dispositif de détection de position et de mouvement à variation de champ magnétique.

Publications (2)

Publication Number Publication Date
DE69717188D1 DE69717188D1 (de) 2003-01-02
DE69717188T2 true DE69717188T2 (de) 2003-10-09

Family

ID=4201775

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1997617188 Expired - Lifetime DE69717188T2 (de) 1996-04-29 1997-04-25 Mit Magnetfeldveränderungen arbeitender Bewegungs- und Positionsdetektor

Country Status (5)

Country Link
US (1) US6043644A (de)
EP (1) EP0805339B1 (de)
JP (1) JPH1062109A (de)
CH (1) CH690934A5 (de)
DE (1) DE69717188T2 (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10318350C5 (de) * 2003-04-23 2010-08-19 Werner Turck Gmbh & Co. Kg Induktiver Näherungsschalter
DE102013204494A1 (de) * 2013-03-14 2014-10-02 Carl Zeiss Smt Gmbh Positionssensor, sensoranordnung und lithographieanlage mit positionssensor
DE102015119530A1 (de) * 2015-11-12 2017-05-18 Hella Kgaa Hueck & Co. Vorrichtung zur Erfassung einer Drehbewegung
WO2019038397A1 (de) * 2017-08-25 2019-02-28 Innova Patent Gmbh Induktiver sensor
RU2769278C1 (ru) * 2021-09-20 2022-03-30 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" Устройство для дискретного определения уровня жидкометаллического теплоносителя ядерного реактора

Families Citing this family (107)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7768371B2 (en) * 1998-02-05 2010-08-03 City University Of Hong Kong Coreless printed-circuit-board (PCB) transformers and operating techniques therefor
US6356255B1 (en) * 1998-04-07 2002-03-12 Interval Research Corporation Methods and systems for providing programmable computerized interactors
FR2779519B1 (fr) * 1998-06-09 2000-07-21 Suisse Electronique Microtech Capteur magnetique inductif avec index de reference
JP4699544B2 (ja) * 1999-03-15 2011-06-15 株式会社アミテック 回転型位置検出装置
WO2001036904A1 (fr) * 1999-11-18 2001-05-25 Fujitsu Limited Pachymetre
JP4398052B2 (ja) * 2000-03-22 2010-01-13 日本信号株式会社 車輪検知装置
DE50011024D1 (de) 2000-06-16 2005-09-29 Amo Automatisierung Mestechnik Induktives Längenmesssystem
DE10057773B4 (de) * 2000-11-22 2021-05-27 Werner Turck Gmbh & Co. Kg Näherungsschalter
US6838872B1 (en) * 2001-04-18 2005-01-04 Interval Research Corporation Position detecting system and method
US6769280B2 (en) 2001-05-07 2004-08-03 Northwestern University Real-time draw-in sensors and methods of fabrication
SE525078C2 (sv) 2001-06-29 2004-11-23 Abb Ab Metod samt induktiv mätanordning för detektering av mittpunkten hos ett elektriskt ledande material
ES2195737B1 (es) * 2001-08-01 2005-03-01 Ecler Laboratorio De Electroacustica, S.A. Mecanismo analogico de control.
US20030112158A1 (en) * 2001-11-05 2003-06-19 Babin Brian George Miniature magnetic device package
US7191754B2 (en) * 2002-03-06 2007-03-20 Borgwarner Inc. Position sensor apparatus and method
DE60309361T2 (de) * 2002-03-06 2007-02-08 Borgwarner Inc., Auburn Hills Elektronische Drosselklappensteuerung mit berührlosem Positionsgeber
DE10242385B4 (de) * 2002-09-12 2005-09-01 Cherry Gmbh Induktive Sensoreinheit
US7582359B2 (en) * 2002-09-23 2009-09-01 Siemens Energy, Inc. Apparatus and method of monitoring operating parameters of a gas turbine
US7618712B2 (en) * 2002-09-23 2009-11-17 Siemens Energy, Inc. Apparatus and method of detecting wear in an abradable coating system
US8151623B2 (en) 2002-09-23 2012-04-10 Siemens Energy, Inc. Sensor for quantifying widening reduction wear on a surface
US7045996B2 (en) * 2003-01-30 2006-05-16 Hewlett-Packard Development Company, L.P. Position determination based on phase difference
US20040224815A1 (en) * 2003-05-06 2004-11-11 Lang Ken-Jen Gear with integrated angular position mechanism
US20040224816A1 (en) * 2003-05-06 2004-11-11 Lang Ken-Jen Gear with integrated angular position mechanism
US7701201B2 (en) * 2003-09-11 2010-04-20 Cherry Gmbh Inductive switch
US9523231B2 (en) 2003-11-10 2016-12-20 Strattec Power Access Llc Attachment assembly and drive unit having same
JP2005156348A (ja) * 2003-11-26 2005-06-16 Okuma Corp 位置検出装置
GB2408802A (en) * 2003-12-03 2005-06-08 Weston Aerospace Eddy current sensors
DE102004018821A1 (de) * 2004-04-19 2005-11-03 Rexroth Star Gmbh Führungsschiene mit Abdeckband und integriertem Sensor sowie Abdeckband mit Sensorkabel
US8742944B2 (en) * 2004-06-21 2014-06-03 Siemens Energy, Inc. Apparatus and method of monitoring operating parameters of a gas turbine
EP1713160B1 (de) 2005-04-11 2020-06-17 Delphi Technologies, Inc. Antriebsvorrichtung für eine motorisch verstellbare Kraftfahrzeugtür mit einem Bewegungsdetektor
FI117658B (fi) * 2005-06-06 2006-12-29 Savox Comm Oy Ab Ltd Pistoolintunnistin
FR2891362B1 (fr) * 2005-09-23 2007-11-30 Billanco Capteur et procede de mesure de position et de vitesse
US7719263B2 (en) * 2006-11-22 2010-05-18 Zf Friedrichshafen Ag Inductive position measuring device or goniometer
US7791506B2 (en) * 2007-03-30 2010-09-07 Zf Friedrichshafen Ag Configurable networked user interface and switch pack
DE102007033745B4 (de) * 2007-07-19 2014-07-24 Zf Friedrichshafen Ag Induktive Drehzahlerkennung
US7911354B2 (en) * 2007-12-12 2011-03-22 Ksr Technologies Co. Inductive position sensor
JP2009144858A (ja) * 2007-12-17 2009-07-02 Jtekt Corp センサ付き転がり軸受装置
US9823090B2 (en) 2014-10-31 2017-11-21 Allegro Microsystems, Llc Magnetic field sensor for sensing a movement of a target object
US8203335B2 (en) * 2008-03-28 2012-06-19 Infineon Technologies Austria Ag System and method for an inductive proximity switch on a common substrate
DE102008018099A1 (de) 2008-04-09 2009-11-05 Prof. Dr. Horst Ziegler und Partner GbR (vertretungsberechtigter Gesellschafter: Prof. Dr. Horst Ziegler 33100 Paderborn) Anordnung zum Erfassen einer Drehung eines Drehelements
US8378660B2 (en) * 2008-10-09 2013-02-19 Microchip Technology Incorporated Programmable integrated circuit device to support inductive sensing
DE102008056700B4 (de) * 2008-11-11 2013-02-28 Zf Friedrichshafen Ag Drehzahlsensor zum Ermitteln von "langsamen (Nulldrehzahl) und schnellen" Drehzahlen sowie zur gleichzeitigen Ermittlung der Drehrichtung
KR101086622B1 (ko) * 2008-12-04 2011-11-23 현대자동차주식회사 액셀러레이터 포지션 센서
CH702340A2 (fr) 2009-12-15 2011-06-15 Posic Sa Arrangement comportant un capteur de proximité inductif, et procédé mettant en oeuvre un tel capteur.
US8571813B2 (en) * 2010-03-16 2013-10-29 Siemens Energy, Inc. Fiber optic sensor system for detecting surface wear
US9932852B2 (en) * 2011-08-08 2018-04-03 General Electric Company Sensor assembly for rotating devices and methods for fabricating
FR2979712B1 (fr) * 2011-09-02 2013-09-13 Schneider Electric Ind Sas Ensemble multicouche a double bobinage blinde pour detecteur inductif
JP6039686B2 (ja) * 2011-12-22 2016-12-07 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 歯ブラシなどのドロップイン式ターゲット装置用の充電コイルシステム
DE102012004308B4 (de) * 2012-03-01 2018-09-20 Atlas Elektronik Gmbh Annäherungssensor und Verfahren zum Bestimmen der Annäherung an einen elektrisch leitfähigen Körper
JP2013192391A (ja) * 2012-03-14 2013-09-26 Sony Corp 検知装置、受電装置、送電装置及び非接触給電システム
DE102012102855A1 (de) * 2012-04-02 2013-10-02 Asg Luftfahrttechnik Und Sensorik Gmbh Verfahren und Anordnung zur Positionsbestimmung eines Bauteils sowie Sensor
US9817078B2 (en) 2012-05-10 2017-11-14 Allegro Microsystems Llc Methods and apparatus for magnetic sensor having integrated coil
JP5820795B2 (ja) * 2012-10-15 2015-11-24 京セラドキュメントソリューションズ株式会社 画像形成装置
DE102012222202A1 (de) 2012-12-04 2014-06-05 Robert Bosch Gmbh Verfahren zur Überwachung einer Rotation eines Verdichterrades
RU2515039C1 (ru) * 2012-12-17 2014-05-10 Сергей Владимирович Карпенко Адаптивный датчик идентификации и контроля положения ненагретых металлических и ненагретых неметаллических изделий
DE102012223875A1 (de) * 2012-12-20 2014-06-26 Robert Bosch Gmbh Sensor zur Ortung metallischer oder magnetischer Objekte
US10856452B1 (en) * 2013-03-14 2020-12-01 David Fiori, Jr. Sensor apparatus
US9848775B2 (en) * 2013-05-22 2017-12-26 The Board Of Trustees Of The Leland Stanford Junior University Passive and wireless pressure sensor
US10145908B2 (en) * 2013-07-19 2018-12-04 Allegro Microsystems, Llc Method and apparatus for magnetic sensor producing a changing magnetic field
US10495699B2 (en) * 2013-07-19 2019-12-03 Allegro Microsystems, Llc Methods and apparatus for magnetic sensor having an integrated coil or magnet to detect a non-ferromagnetic target
US10018654B2 (en) 2013-11-13 2018-07-10 Semiconductor Components Industries, Llc Sensor circuit for detecting rotation of an object and method therefor
US9285386B2 (en) * 2013-12-06 2016-03-15 Rosemount Aerospace Inc. Inductive rotational speed sensors
US10337216B2 (en) 2014-01-02 2019-07-02 Strattec Power Access Llc Vehicle door
DE102014219011A1 (de) * 2014-09-22 2016-03-24 Continental Teves Ag & Co. Ohg Geschwindigkeitssensor
US9720054B2 (en) 2014-10-31 2017-08-01 Allegro Microsystems, Llc Magnetic field sensor and electronic circuit that pass amplifier current through a magnetoresistance element
US10712403B2 (en) 2014-10-31 2020-07-14 Allegro Microsystems, Llc Magnetic field sensor and electronic circuit that pass amplifier current through a magnetoresistance element
US9823092B2 (en) 2014-10-31 2017-11-21 Allegro Microsystems, Llc Magnetic field sensor providing a movement detector
WO2016138546A2 (en) 2015-02-27 2016-09-01 Azoteq (Pty) Ltd Inductance sensing
US10275055B2 (en) 2016-03-31 2019-04-30 Azoteq (Pty) Ltd Rotational sensing
KR102529747B1 (ko) * 2016-05-23 2023-05-08 삼성에스디아이 주식회사 무선 충전 장치 및 방법
US10914566B2 (en) * 2016-07-22 2021-02-09 Regents Of The University Of Minnesota Position sensing system with an electromagnet
US10837802B2 (en) * 2016-07-22 2020-11-17 Regents Of The University Of Minnesota Position sensing system with an electromagnet
US11366431B2 (en) 2016-09-29 2022-06-21 Intel Corporation Multi-function antenna and input interface
AU2017378061B2 (en) 2016-12-15 2020-04-09 Eli Lilly And Company Medication delivery device with sensing system
JP6843430B2 (ja) * 2017-02-15 2021-03-17 国立研究開発法人物質・材料研究機構 鉄筋コンクリートの鉄筋径とかぶりの測定装置
US10310028B2 (en) 2017-05-26 2019-06-04 Allegro Microsystems, Llc Coil actuated pressure sensor
US10641842B2 (en) 2017-05-26 2020-05-05 Allegro Microsystems, Llc Targets for coil actuated position sensors
US11428755B2 (en) 2017-05-26 2022-08-30 Allegro Microsystems, Llc Coil actuated sensor with sensitivity detection
US10837943B2 (en) 2017-05-26 2020-11-17 Allegro Microsystems, Llc Magnetic field sensor with error calculation
US10996289B2 (en) 2017-05-26 2021-05-04 Allegro Microsystems, Llc Coil actuated position sensor with reflected magnetic field
US10324141B2 (en) 2017-05-26 2019-06-18 Allegro Microsystems, Llc Packages for coil actuated position sensors
US10866080B2 (en) 2018-11-01 2020-12-15 Mitutoyo Corporation Inductive position detection configuration for indicating a measurement device stylus position
EP3514501B1 (de) * 2018-01-22 2022-03-02 Melexis Technologies SA Flusskopplungssensor
DE102018213402A1 (de) * 2018-08-09 2020-02-13 Robert Bosch Gmbh Induktiver Positionssensor, insbesondere zur Erfassung mindestens einer Rotationseigenschaft eines rotierenden Elements
US10914570B2 (en) 2018-11-01 2021-02-09 Mitutoyo Corporation Inductive position detection configuration for indicating a measurement device stylus position
US11644298B2 (en) 2018-11-01 2023-05-09 Mitutoyo Corporation Inductive position detection configuration for indicating a measurement device stylus position
US11740064B2 (en) 2018-11-01 2023-08-29 Mitutoyo Corporation Inductive position detection configuration for indicating a measurement device stylus position
US11543899B2 (en) 2018-11-01 2023-01-03 Mitutoyo Corporation Inductive position detection configuration for indicating a measurement device stylus position and including coil misalignment compensation
JP7061558B2 (ja) * 2018-12-25 2022-04-28 日立Astemo株式会社 ディスクブレーキ
US10823586B2 (en) 2018-12-26 2020-11-03 Allegro Microsystems, Llc Magnetic field sensor having unequally spaced magnetic field sensing elements
CN109488862A (zh) * 2019-01-02 2019-03-19 福建杰嘉科技有限公司 一种基于无线供电的图像采集装置
EP3686563B1 (de) 2019-01-28 2022-10-26 Ratier-Figeac SAS Redundantes vdt mit gleichstromschnittstelle
US11061084B2 (en) 2019-03-07 2021-07-13 Allegro Microsystems, Llc Coil actuated pressure sensor and deflectable substrate
US10955306B2 (en) 2019-04-22 2021-03-23 Allegro Microsystems, Llc Coil actuated pressure sensor and deformable substrate
CN110319898A (zh) * 2019-06-12 2019-10-11 宁波水表股份有限公司 一种电涡流机电转换装置及方法
EP3750797A1 (de) 2019-06-14 2020-12-16 Goodrich Actuation Systems SAS Spoiler-droop-funktion mit mechanischer rückführung zur ansteuerung eines hydraulikventils
US11280637B2 (en) 2019-11-14 2022-03-22 Allegro Microsystems, Llc High performance magnetic angle sensor
US11237020B2 (en) 2019-11-14 2022-02-01 Allegro Microsystems, Llc Magnetic field sensor having two rows of magnetic field sensing elements for measuring an angle of rotation of a magnet
EP4065935A1 (de) * 2019-11-29 2022-10-05 HELLA GmbH & Co. KGaA Linearer bewegungssensor
DE102019220492A1 (de) * 2019-12-20 2021-06-24 Infineon Technologies Ag Induktiver winkel- und/oder positionssensor
US11262422B2 (en) 2020-05-08 2022-03-01 Allegro Microsystems, Llc Stray-field-immune coil-activated position sensor
US11644299B2 (en) 2020-12-31 2023-05-09 Mitutoyo Corporation Inductive position sensor signal gain control for coordinate measuring machine probe
US11555872B2 (en) 2021-01-04 2023-01-17 Allegro Microsystems, Llc Reducing stray magnetic-field effects using a magnetic-field closed-loop system
US11927650B2 (en) 2021-01-04 2024-03-12 Allegro Microsystems, Llc Magnetic-field closed-loop sensors with diagnostics
US11493361B2 (en) 2021-02-26 2022-11-08 Allegro Microsystems, Llc Stray field immune coil-activated sensor
US11578997B1 (en) 2021-08-24 2023-02-14 Allegro Microsystems, Llc Angle sensor using eddy currents
US11733021B2 (en) 2021-12-22 2023-08-22 Mitutoyo Corporation Modular configuration for coordinate measuring machine probe
US11713956B2 (en) 2021-12-22 2023-08-01 Mitutoyo Corporation Shielding for sensor configuration and alignment of coordinate measuring machine probe

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2754678A (en) * 1952-04-22 1956-07-17 Gen Mills Inc Vibration tester
US3281825A (en) * 1963-01-25 1966-10-25 United Aircraft Corp Non-contacting encoder
US3440532A (en) * 1965-05-07 1969-04-22 Skinner Precision Ind Inc Speed sensor for linear induction motors
JPS5570744A (en) * 1978-11-23 1980-05-28 Nippon Soken Inc Detector for revolution
DE3014137A1 (de) * 1980-04-12 1981-10-22 Robert Bosch Gmbh, 7000 Stuttgart Vorrichtung zur beruehrungslosen weg- und/oder geschwindigkeitsmessung
US4507638A (en) * 1981-12-10 1985-03-26 Amnon Brosh Rotary position sensors employing planar coils
JPS59116552A (ja) * 1982-12-24 1984-07-05 Aisin Seiki Co Ltd 回転センサ
ATE39869T1 (de) * 1983-07-05 1989-01-15 Elektroniktechnologie Get Induktive sensoranordnung und messanordnung zur verwendung derselben.
IE55855B1 (en) * 1984-10-19 1991-01-30 Kollmorgen Ireland Ltd Position and speed sensors
SU1315792A2 (ru) * 1986-01-27 1987-06-07 Северо-Западный Заочный Политехнический Институт Индукционный датчик
IE871118L (en) * 1987-05-01 1988-11-01 Univ Manchester Improvements in or relating to linear motion screened¹inductance sensors.
CH683639A5 (fr) * 1990-06-27 1994-04-15 Baumer Electric Ag Capteur de position pour déterminer la position angulaire d'un arbre rotatif.
JP2988597B2 (ja) * 1991-08-27 1999-12-13 株式会社エスジー 回転位置検出装置
US5434504A (en) * 1993-10-01 1995-07-18 International Business Machines Corporation Position sensors for linear motors including plural symmetrical fluxes generated by a planar drive coil and received by planar sense coils being colinear along an axis of motion

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10318350C5 (de) * 2003-04-23 2010-08-19 Werner Turck Gmbh & Co. Kg Induktiver Näherungsschalter
DE102013204494A1 (de) * 2013-03-14 2014-10-02 Carl Zeiss Smt Gmbh Positionssensor, sensoranordnung und lithographieanlage mit positionssensor
DE102015119530A1 (de) * 2015-11-12 2017-05-18 Hella Kgaa Hueck & Co. Vorrichtung zur Erfassung einer Drehbewegung
CN108351223A (zh) * 2015-11-12 2018-07-31 黑拉有限责任两合公司 用于检测转动运动的装置
CN108351223B (zh) * 2015-11-12 2021-06-01 黑拉有限责任两合公司 用于检测转动运动的装置
WO2019038397A1 (de) * 2017-08-25 2019-02-28 Innova Patent Gmbh Induktiver sensor
AU2018321148B2 (en) * 2017-08-25 2020-09-24 Innova Patent Gmbh Inductive sensor
RU2735380C1 (ru) * 2017-08-25 2020-10-30 Иннова Патент Гмбх Индуктивный сенсор
RU2769278C1 (ru) * 2021-09-20 2022-03-30 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" Устройство для дискретного определения уровня жидкометаллического теплоносителя ядерного реактора

Also Published As

Publication number Publication date
EP0805339A1 (de) 1997-11-05
CH690934A5 (fr) 2001-02-28
US6043644A (en) 2000-03-28
JPH1062109A (ja) 1998-03-06
DE69717188D1 (de) 2003-01-02
EP0805339B1 (de) 2002-11-20

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