DE69714942T2 - Methode zur Laserbearbeitung von optischen Wellenleitern - Google Patents

Methode zur Laserbearbeitung von optischen Wellenleitern

Info

Publication number
DE69714942T2
DE69714942T2 DE69714942T DE69714942T DE69714942T2 DE 69714942 T2 DE69714942 T2 DE 69714942T2 DE 69714942 T DE69714942 T DE 69714942T DE 69714942 T DE69714942 T DE 69714942T DE 69714942 T2 DE69714942 T2 DE 69714942T2
Authority
DE
Germany
Prior art keywords
laser processing
optical waveguides
processing optical
waveguides
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69714942T
Other languages
English (en)
Other versions
DE69714942D1 (de
Inventor
Keiji Tsunetomo
Tadashi Koyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Publication of DE69714942D1 publication Critical patent/DE69714942D1/de
Application granted granted Critical
Publication of DE69714942T2 publication Critical patent/DE69714942T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
    • G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12183—Ion-exchange
    • G02B2006/12185—Ion-exchange field-assisted ion-exchange

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Laser Beam Processing (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Lasers (AREA)
DE69714942T 1996-10-24 1997-10-16 Methode zur Laserbearbeitung von optischen Wellenleitern Expired - Fee Related DE69714942T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8282363A JPH10123357A (ja) 1996-10-24 1996-10-24 光導波路に対するレーザ加工方法

Publications (2)

Publication Number Publication Date
DE69714942D1 DE69714942D1 (de) 2002-10-02
DE69714942T2 true DE69714942T2 (de) 2003-01-02

Family

ID=17651443

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69714942T Expired - Fee Related DE69714942T2 (de) 1996-10-24 1997-10-16 Methode zur Laserbearbeitung von optischen Wellenleitern

Country Status (4)

Country Link
US (1) US6008467A (de)
EP (1) EP0838701B1 (de)
JP (1) JPH10123357A (de)
DE (1) DE69714942T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998006676A1 (fr) * 1996-08-13 1998-02-19 Nippon Sheet Glass Co., Ltd. Procede d'usinage au laser pour substrat de verre, dispositif optique du type a diffraction fabrique par ce procede d'usinage, et procede de fabrication de ce dispositif optique
DE19855623C1 (de) * 1998-12-02 2000-02-24 Lpkf Laser & Electronics Ag Verfahren zur Erzeugung einer Markierung in einem Glaskörper
US7649153B2 (en) * 1998-12-11 2010-01-19 International Business Machines Corporation Method for minimizing sample damage during the ablation of material using a focused ultrashort pulsed laser beam
US6333485B1 (en) * 1998-12-11 2001-12-25 International Business Machines Corporation Method for minimizing sample damage during the ablation of material using a focused ultrashort pulsed beam
US6531679B2 (en) * 2000-09-29 2003-03-11 Siemens Aktiengesellschaft Method for the laser machining of organic materials
FR2831277B1 (fr) * 2001-10-23 2004-02-20 Teem Photonics Procede de fabrication d'un dispositif optique par echange d'ions dans un substrat
JP2005181958A (ja) * 2003-12-22 2005-07-07 Rohm & Haas Electronic Materials Llc レーザーアブレーションを用いる電子部品および光学部品の形成方法
GB0803492D0 (en) * 2008-02-26 2008-04-02 Glysure Ltd Fibre optic sensor
CN108515270A (zh) * 2018-03-13 2018-09-11 武汉吉事达科技股份有限公司 一种陶瓷材料激光划线的工艺方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4147402A (en) * 1977-06-30 1979-04-03 International Standard Electric Corporation Process for manufacturing an optical fiber termination
US4598039A (en) * 1984-07-02 1986-07-01 At&T Bell Laboratories Formation of features in optical material
JPH0233105A (ja) * 1988-07-22 1990-02-02 Hitachi Cable Ltd 光導波路および光導波路の製造方法
US5393371A (en) * 1989-12-18 1995-02-28 Litton Systems, Inc. Integrated optics chips and laser ablation methods for attachment of optical fibers thereto for LiNbO3 substrates
JPH0511134A (ja) * 1991-07-01 1993-01-19 Nippon Telegr & Teleph Corp <Ntt> 光導波路の結合穴の形成方法及びその装置
EP0527604A3 (en) * 1991-08-07 1993-06-16 Litton Systems, Inc. Method of coupling an end of optical fibre to a waveguide formed on a substrate
JP2615400B2 (ja) * 1992-05-28 1997-05-28 東京工業大学長 無調整光コネクタ
JP2871444B2 (ja) * 1994-03-04 1999-03-17 日本板硝子株式会社 光導波路の微小凹部加工方法およびその加工装置
JP2654755B2 (ja) * 1994-03-10 1997-09-17 日本板硝子株式会社 凹凸嵌合接続による低反射型光部品
JPH11217237A (ja) * 1996-03-25 1999-08-10 Nippon Sheet Glass Co Ltd レーザ加工用ガラス基材及びレーザ加工方法

Also Published As

Publication number Publication date
DE69714942D1 (de) 2002-10-02
JPH10123357A (ja) 1998-05-15
EP0838701A1 (de) 1998-04-29
EP0838701B1 (de) 2002-08-28
US6008467A (en) 1999-12-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee