FR2831277B1 - Procede de fabrication d'un dispositif optique par echange d'ions dans un substrat - Google Patents

Procede de fabrication d'un dispositif optique par echange d'ions dans un substrat

Info

Publication number
FR2831277B1
FR2831277B1 FR0113659A FR0113659A FR2831277B1 FR 2831277 B1 FR2831277 B1 FR 2831277B1 FR 0113659 A FR0113659 A FR 0113659A FR 0113659 A FR0113659 A FR 0113659A FR 2831277 B1 FR2831277 B1 FR 2831277B1
Authority
FR
France
Prior art keywords
substrate
manufacturing
ion exchange
optical device
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0113659A
Other languages
English (en)
Other versions
FR2831277A1 (fr
Inventor
Jerome Hazart
Vincent Minier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teem Photonics SA
Original Assignee
Teem Photonics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teem Photonics SA filed Critical Teem Photonics SA
Priority to FR0113659A priority Critical patent/FR2831277B1/fr
Publication of FR2831277A1 publication Critical patent/FR2831277A1/fr
Application granted granted Critical
Publication of FR2831277B1 publication Critical patent/FR2831277B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
    • G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
FR0113659A 2001-10-23 2001-10-23 Procede de fabrication d'un dispositif optique par echange d'ions dans un substrat Expired - Fee Related FR2831277B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0113659A FR2831277B1 (fr) 2001-10-23 2001-10-23 Procede de fabrication d'un dispositif optique par echange d'ions dans un substrat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0113659A FR2831277B1 (fr) 2001-10-23 2001-10-23 Procede de fabrication d'un dispositif optique par echange d'ions dans un substrat

Publications (2)

Publication Number Publication Date
FR2831277A1 FR2831277A1 (fr) 2003-04-25
FR2831277B1 true FR2831277B1 (fr) 2004-02-20

Family

ID=8868597

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0113659A Expired - Fee Related FR2831277B1 (fr) 2001-10-23 2001-10-23 Procede de fabrication d'un dispositif optique par echange d'ions dans un substrat

Country Status (1)

Country Link
FR (1) FR2831277B1 (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4913717A (en) * 1989-01-23 1990-04-03 Polaroid Corporation Method for fabricating buried waveguides
JPH0791091B2 (ja) * 1989-11-06 1995-10-04 日本板硝子株式会社 低損失埋込み導波路の製造方法
DE19609289A1 (de) * 1996-03-09 1997-09-11 Iot Integrierte Optik Gmbh Verfahren zur Herstellung integriert optischer Bauteile durch Ionenaustausch mit Gittermaske für Schichtwellenleiter
JPH10123357A (ja) * 1996-10-24 1998-05-15 Nippon Sheet Glass Co Ltd 光導波路に対するレーザ加工方法

Also Published As

Publication number Publication date
FR2831277A1 (fr) 2003-04-25

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Legal Events

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GC Lien (pledge) constituted

Effective date: 20120117

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Year of fee payment: 15

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Effective date: 20200910