DE69714204D1 - Druckmessgerät - Google Patents

Druckmessgerät

Info

Publication number
DE69714204D1
DE69714204D1 DE69714204T DE69714204T DE69714204D1 DE 69714204 D1 DE69714204 D1 DE 69714204D1 DE 69714204 T DE69714204 T DE 69714204T DE 69714204 T DE69714204 T DE 69714204T DE 69714204 D1 DE69714204 D1 DE 69714204D1
Authority
DE
Germany
Prior art keywords
pressure monitor
monitor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69714204T
Other languages
English (en)
Other versions
DE69714204T2 (de
Inventor
Bortoli Eros De
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CONSORZ ABB SVILUPPO TECNOL
ABB Instrumentation SpA
Original Assignee
CONSORZ ABB SVILUPPO TECNOL
ABB Kent Taylor SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CONSORZ ABB SVILUPPO TECNOL, ABB Kent Taylor SpA filed Critical CONSORZ ABB SVILUPPO TECNOL
Publication of DE69714204D1 publication Critical patent/DE69714204D1/de
Application granted granted Critical
Publication of DE69714204T2 publication Critical patent/DE69714204T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/008—Transmitting or indicating the displacement of flexible diaphragms using piezoelectric devices
DE69714204T 1996-10-31 1997-10-30 Druckmessgerät Expired - Lifetime DE69714204T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT96MI002268A IT1287123B1 (it) 1996-10-31 1996-10-31 Dispositivo per la misura di una pressione

Publications (2)

Publication Number Publication Date
DE69714204D1 true DE69714204D1 (de) 2002-08-29
DE69714204T2 DE69714204T2 (de) 2003-03-27

Family

ID=11375132

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69714204T Expired - Lifetime DE69714204T2 (de) 1996-10-31 1997-10-30 Druckmessgerät

Country Status (4)

Country Link
US (1) US5969257A (de)
EP (1) EP0855583B1 (de)
DE (1) DE69714204T2 (de)
IT (1) IT1287123B1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1295031B1 (it) * 1997-09-18 1999-04-27 Abb Kent Taylor Spa Procedimento per la fabbricazione di un dispositivo di misura di pressione dotato di elemento risonante
GB0116393D0 (en) * 2001-07-05 2001-08-29 Druck Ltd Improved sensor
DE10314578A1 (de) * 2003-03-31 2004-10-14 Bosch Rexroth Ag Hochfrequenzresonator
US7176048B1 (en) 2004-12-12 2007-02-13 Burns David W Optically coupled sealed-cavity resonator and process
US7379629B1 (en) 2004-12-12 2008-05-27 Burns David W Optically coupled resonant pressure sensor
US7605391B2 (en) * 2004-12-12 2009-10-20 Burns David W Optically coupled resonator
US7443509B1 (en) 2004-12-12 2008-10-28 Burns David W Optical and electronic interface for optically coupled resonators
US7499604B1 (en) 2004-12-12 2009-03-03 Burns David W Optically coupled resonant pressure sensor and process
US20070236213A1 (en) * 2006-03-30 2007-10-11 Paden Bradley E Telemetry method and apparatus using magnetically-driven mems resonant structure
JP4973718B2 (ja) * 2009-01-27 2012-07-11 セイコーエプソン株式会社 圧力検出ユニット、及び圧力センサー
GB2470398B (en) * 2009-05-21 2014-03-19 Ge Infrastructure Sensing Inc A resonant sensor for measuring the pressure of a fluid
JP5232305B2 (ja) * 2009-09-28 2013-07-10 株式会社東芝 共振器および発振器
US10197462B2 (en) * 2016-05-25 2019-02-05 Honeywell International Inc. Differential pressure sensor full overpressure protection device
US10352800B2 (en) * 2016-06-03 2019-07-16 Mks Instruments, Inc. Micromachined bulk acoustic wave resonator pressure sensor
JP6776143B2 (ja) * 2017-02-03 2020-10-28 横河電機株式会社 水位計測システム

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8418914D0 (en) * 1984-07-25 1984-08-30 Standard Telephones Cables Ltd Transducer
US5062302A (en) * 1988-04-29 1991-11-05 Schlumberger Industries, Inc. Laminated semiconductor sensor with overpressure protection
EP0456029B1 (de) * 1990-05-10 1994-12-14 Yokogawa Electric Corporation Druckaufnehmer mit schwingendem Element
US5178015A (en) * 1991-07-22 1993-01-12 Monolithic Sensors Inc. Silicon-on-silicon differential input sensors
US5275055A (en) * 1992-08-31 1994-01-04 Honeywell Inc. Resonant gauge with microbeam driven in constant electric field
US5367217A (en) * 1992-11-18 1994-11-22 Alliedsignal Inc. Four bar resonating force transducer
US5458000A (en) * 1993-07-20 1995-10-17 Honeywell Inc. Static pressure compensation of resonant integrated microbeam sensors
DE4333099A1 (de) * 1993-09-29 1995-03-30 Bosch Gmbh Robert Kraftsensor und Verfahren zur Herstellung eines Kraftsensors
US5528939A (en) * 1995-03-21 1996-06-25 Martin; Jacob H. Micromechanical pressure gauge having extended sensor range

Also Published As

Publication number Publication date
EP0855583A2 (de) 1998-07-29
IT1287123B1 (it) 1998-08-04
ITMI962268A1 (it) 1998-05-01
DE69714204T2 (de) 2003-03-27
US5969257A (en) 1999-10-19
EP0855583B1 (de) 2002-07-24
EP0855583A3 (de) 1999-03-24

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Legal Events

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8364 No opposition during term of opposition